Background technology
But conductive plastics low temperature process, large tracts of land making, advantage such as have draftability, pliability, cost of manufacture is low, component characteristic is good will have an immense impact on to following electronics and information industry.Plastics are insulator mostly.In recent years, people are devoted to prepare multi-functional conductive plastics by methods such as doping, surface treatments, make the plastics electrical conductivity be controlled at semiconductor or conductor scope, thereby be used to develop anti-static material, anti-electromagnetic shielding material, semi-conducting material and high conductive material, be widely used in fields such as chemical industry, electronics, electrical equipment.Conducting polymer composite generally is divided into two big classes, and a class is this body structure of macromolecular material or the material that has conducting function after overdoping, is called the structural conductive macromolecular material; Though another kind of is that macromolecular material itself is non-conductive, in the machine-shaping stage,, make goods have electric conductivity by adding conductive filling, be referred to as conductive polymeric composite.
Kynoar (PVDF) has high chemical stability, heat endurance and insulating properties highly, and (electrical conductivity is about 10
-13Ω
-1Cm
-1), be a kind of organic piezoelectric materials that is widely used.Make PVDF have insulation and conduction property simultaneously, can realize that multifunction device is integrated, further widen its application.People attempt also constantly to seek its application fields by the character that various methodologies makes PVDF have conduction in recent years, but only are confined to make PVDF have conduction property by traditional method for preparing conducting polymer composite at present.Make composite plastic as filled conductive carbon black in PVDF, make its electrical conductivity reach 5.6 * 10
-5Ω
-1Cm
-1About.This PVDF with conduction property is a kind of thermosensitive type conductive plastics, and the conductive plastics with sensitive characteristic successfully is applied to make from the temperature control accompanying-heat cable abroad, is widely used in the place that oil, chemical industry, generating etc. need pipeline tracing.And the PVDF with high conductivity matter also is expected to become the good alternative materials of preparation bipolar plate for fuel cell.
The development of large scale integrated circuit requires more and more higher to integrated level, utilize laser only on a kind of material, to make high-resolution insulation layer and conduction region with a procedure, and no longer need several procedures and multiple material, the direct wiring that can realize microelectric technique is as making circuit board, overcome traditional fabrication and cover copper circuit board and need the shortcoming that the preparation section of multiple working procedure and multiple material is complicated and waste raw material, this is significant in the microelectronics industry application.
In a word, operate comparatively complicated by the method that the tradition doping makes PVDF possess conductive characteristic, can not make the selectivity processing of the local conduction of material, and, easily cause other Effect on Performance of PVDF itself as heat, electrical stability, hot strength etc. owing in original PVDF material, introduce new material.
Summary of the invention:
The invention provides and a kind ofly prepare the method for PVDF conductive plastics by PRK irradiation, it is complicated and be difficult for carrying out the defective that the material local conductivity is selected processing that this method has overcome operated in accordance with conventional methods.Adopt wavelength be the ArF laser of the KrF laser of 248nm and 193nm as the high-energy irradiation source, the laser energy density of control irradiation on sample is 140mJ/cm
2~290mJ/cm
2, in the selected machining area of high ambroin PVDF, prepare PVDF plastics fast with electric conductivity.
The present invention realizes with the following step:
(1) getting thickness is that the piezoelectric plastics PVDF of 30~500 μ m makes sample;
(2) sample is fixed on the automatically controlled turntable, the velocity of rotation of setting automatically controlled turntable is 10 °/s~50 °/s; Perhaps sample is fixed on the electronic control translation stage, sets the operating scheme of electronic control translation stage;
(3) select the PRK wavelength, it is 4~10Hz that pulse frequency is set;
(4) adjust light path, making the laser energy density of irradiation on sample is 140mJ/cm
2~290mJ/cm
2
(5) when sample is fixed on automatically controlled turntable, the setting laser umber of pulse is 30~600, rotates sample rotary table, opens laser instrument and carries out laser irradiation, after pulse output stops, stopping turntable and rotates, and finishes irradiation;
When sample is fixed on electronic control translation stage, according to the operating scheme operation translation stage of the electronic control translation stage of setting, open laser instrument and carry out laser irradiation, behind the scheme end of run, stop laser pulse output, finish irradiation;
The operating scheme of described electronic control translation stage comprises the speed of service, operating path and the range ability of electronic control translation stage, wherein the speed of service is set at 0.02mm/s~0.1mm/s, operating path is exactly the running orbit of electronic control translation stage, this track can be straight line, broken line, triangle, square or other polygrams, and range ability refers to the whole distance of electronic control translation stage operation.
The invention has the beneficial effects as follows:
(1) need not original sample is mixed or adds conductive filling, promptly do not introduce just can realize insulating the phase transformation of other impurity to conductive material;
(2) can pass through the constituency, realize that with laser the electric conductivity irradiation processing is selectivity processing in the material regional area, and do not destroy the insulating properties of other positions of sample;
(3) preparation time is short, and a few times in second of minimum laser action just can make sample reach the favorable conductive effect;
(4) simple to operate, under normal temperature air, be prepared operation;
(5) preparation technology's controllability is strong, and repeatability is high.
The specific embodiment:
Describe in further detail below in conjunction with table 1 and table 2 pair the specific embodiment of the present invention.
Laser provided by the invention prepares the method for conductive polyvinylidene fluoride to carry out under normal temperature air atmosphere; The electrical conductivity of sample behind the employing four probe method testing laser irradiation.Results of conductivity measurement saw Table 1 after sample carried out irradiation with rotating manner, and results of conductivity measurement saw Table 2 after sample carried out irradiation in the translation mode.
The piezoelectric plastics PVDF that gets thickness and be 30~500 μ m makes sample; Sample is fixed on automatically controlled turntable, sets the velocity of rotation of turntable; Or sample fixedly on the electronic control translation stage, set the operating scheme of electronic control translation stage; Select the PRK wavelength, it is 4~10Hz that pulse frequency is set; Adjust light path, making energy density is 140mJ/cm
2~290mJ/cm
2When sample was fixed on automatically controlled turntable, the setting laser umber of pulse was 30~600, rotated sample rotary table, opened laser instrument and carried out laser irradiation, after pulse output stops, stopping turntable and rotated, and finished irradiation; When sample is fixed on electronic control translation stage, according to the operating scheme operation translation stage of setting, open laser instrument and carry out laser irradiation, behind the scheme end of run, stop laser pulse output, finish irradiation.
In the following examples, embodiment 1~embodiment 9 prepares polyvinylidene fluoride conductive plastics for laser irradiation under the one dimension rotating manner, and the velocity of rotation of turntable is set at 10 °/s~50 °/s; Embodiment 10~embodiment 13 is that laser irradiation prepares polyvinylidene fluoride conductive plastics under the peacekeeping two-dimensional translation mode, the outstanding method that has embodied by laser cloth conducting wire on insulation PVDF plastics, the translation operating scheme mainly comprises the speed of service, range ability and the operating path of setting translation stage, and wherein the speed of service is set at 0.02mm/s~0.1mm/s.
Embodiment 1
The piezoelectric plastics PVDF that gets thickness and be 500 μ m makes sample, sample is fixed on automatically controlled turntable center, setting automatically controlled turntable velocity of rotation is 10 °/s, select the KrF PRK of wavelength 248nm, it is 4Hz that pulse frequency is set, and adjusts light path, make irradiation laser facula size on sample be 18mm * 7mm, hot spot is positioned at the sample center, regulates laser output energy, and making the laser energy density of irradiation on sample is 140mJ/cm
2, setting umber of pulse is 500, rotates sample rotary table, laser irradiation, and pulse output stops the back and finishes irradiation.
Embodiment 2
The piezoelectric plastics PVDF that gets thickness and be 500 μ m makes sample, sample is fixed on automatically controlled turntable center, setting automatically controlled turntable velocity of rotation is 40 °/s, select the KrF PRK of wavelength 248nm, it is 4Hz that pulse frequency is set, and adjusts light path, make irradiation laser facula size on sample be 17mm * 6mm, hot spot is positioned at the sample center, regulates laser output energy, and making the laser energy density of irradiation on sample is 190mJ/cm
2, setting umber of pulse is 150, rotates sample rotary table, laser irradiation, and pulse output stops the back and finishes irradiation.
Embodiment 3
The piezoelectric plastics PVDF that gets thickness and be 500 μ m makes sample, sample is fixed on automatically controlled turntable center, setting automatically controlled turntable velocity of rotation is 45 °/s, select the KrF PRK of wavelength 248nm, it is 10Hz that pulse frequency is set, and adjusts light path, make irradiation laser facula size on sample be 17mm * 6mm, hot spot is positioned at the sample center, regulates laser output energy, and making the laser energy density of irradiation on sample is 190mJ/cm
2, setting umber of pulse is 600, rotates sample rotary table, laser irradiation, and pulse output stops the back and finishes irradiation.
Embodiment 4
The piezoelectric plastics PVDF that gets thickness and be 500 μ m makes sample, sample is fixed on automatically controlled turntable center, setting automatically controlled turntable velocity of rotation is 45 °/s, select the KrF PRK of wavelength 248nm, it is 4Hz that pulse frequency is set, and adjusts light path, regulating irradiation laser facula size on sample is 10mm * 2mm, hot spot is positioned at the sample center, regulates laser output energy, and making the laser energy density of irradiation on sample is 290mJ/cm
2, setting umber of pulse is 30, rotates sample rotary table, laser irradiation, and pulse output stops the back and finishes irradiation.
Embodiment 5
The piezoelectric plastics PVDF that gets thickness and be 500 μ m makes sample, sample is fixed on automatically controlled turntable center, setting automatically controlled turntable velocity of rotation is 40 °/s, select the ArF PRK of wavelength 193nm, it is 6Hz that pulse frequency is set, and adjusts light path, make irradiation laser facula size on sample be 17mm * 6mm, hot spot is positioned at the sample center, regulates laser output energy, and making the laser energy density of irradiation on sample is 180mJ/cm
2, setting umber of pulse is 100, rotates sample rotary table, laser irradiation, and pulse output stops the back and finishes irradiation.
Embodiment 6
The piezoelectric plastics PVDF that gets thickness and be 300 μ m makes sample, sample is fixed on automatically controlled turntable center, setting automatically controlled turntable velocity of rotation is 40 °/s, select the KrF PRK of wavelength 248nm, it is 4Hz that pulse frequency is set, and adjusts light path, make irradiation laser facula size on sample be 17mm * 6mm, hot spot is positioned at the sample center, regulates laser output energy, and making the laser energy density of irradiation on sample is 240mJ/cm
2, setting umber of pulse is 100, rotates sample rotary table, laser irradiation, and pulse output stops the back and finishes irradiation.
Embodiment 7
The piezoelectric plastics PVDF that gets thickness and be 300 μ m makes sample, sample is fixed on automatically controlled turntable center, setting automatically controlled turntable velocity of rotation is 40 °/s, select the ArF PRK of wavelength 193nm, it is 6Hz that pulse frequency is set, and adjusts light path, make irradiation laser facula size on sample be 16mm * 5mm, hot spot is positioned at the sample center, regulates laser output energy, and making the laser energy density of irradiation on sample is 220mJ/cm
2, setting umber of pulse is 200, rotates sample rotary table, laser irradiation, and pulse output stops the back and finishes irradiation.
Embodiment 8
The piezoelectric plastics PVDF that gets thickness and be 30 μ m makes sample, sample is fixed on automatically controlled turntable center, setting automatically controlled turntable velocity of rotation is 50 °/s, select the KrF PRK of wavelength 248nm, it is 8Hz that pulse frequency is set, and adjusts light path, make irradiation laser facula size on sample be 14mm * 5mm, hot spot is positioned at the sample center, regulates laser output energy, and making the laser energy density of irradiation on sample is 270mJ/cm
2, setting umber of pulse is 200, rotates sample rotary table, laser irradiation, and pulse output stops the back and finishes irradiation.
Embodiment 9
The piezoelectric plastics PVDF that gets thickness and be 30 μ m makes sample, sample is fixed on automatically controlled turntable center, setting automatically controlled turntable velocity of rotation is 40 °/s, select the ArF PRK of wavelength 193nm, it is 4Hz that pulse frequency is set, and adjusts light path, make irradiation laser facula size on sample be 14mm * 5mm, hot spot is positioned at the sample center, regulates laser output energy, and making the laser energy density of irradiation on sample is 250mJ/cm
2, setting umber of pulse is 150, rotates sample rotary table, laser irradiation, and pulse output stops the back and finishes irradiation.
Embodiment 10
The piezoelectric plastics PVDF that gets thickness and be 500 μ m makes sample, sample is fixed on the one dimension electronic control translation stage, the setting speed of service is 0.1mm/s, range ability is 10mm, select the KrF PRK of wavelength 248nm, it is 5Hz that pulse frequency is set, adjust light path, make irradiation laser facula size on sample be the circular light spot of diameter 1mm, regulate laser output energy, making the laser energy density of irradiation on sample is 190mJ/cm2, the operation translation stage is opened laser instrument laser irradiation, behind the translation stage end of run simultaneously, stop laser pulse output, finish irradiation.
Embodiment 11
The piezoelectric plastics PVDF that gets thickness and be 500 μ m makes sample, sample is fixed on the one dimension electronic control translation stage, the setting speed of service is 0.1mm/s, range ability is 10mm, selects the ArF PRK of wavelength 193nm, and it is 5Hz that pulse frequency is set, adjust light path, make irradiation laser facula size on sample be the circular light spot of diameter 1mm, regulate laser output energy, making the laser energy density of irradiation on sample is 180mJ/cm
2, the operation translation stage is opened laser instrument laser irradiation simultaneously, behind the translation stage end of run, stops laser pulse output, finishes irradiation.
Embodiment 12
The piezoelectric plastics PVDF that gets thickness and be 500 μ m makes sample, sample is fixed on the two-dimentional electronic control translation stage, the setting scheme is as follows: the directions X and the Y direction speed of service are 0.02mm/s, directions X forward operation 10mm, Y direction forward operation 5mm, directions X inverted running 10mm, Y direction inverted running 5mm, this scheme realizes the closed rectangular path.Select the KrF PRK of wavelength 248nm, it is 10Hz that pulse frequency is set, and adjusts light path, makes irradiation laser facula size on sample be the circular light spot of diameter 0.2mm, regulate laser output energy, making the laser energy density of irradiation on sample is 190mJ/cm
2, operating scheme is opened laser instrument laser irradiation simultaneously, behind the scheme end of run, stops laser pulse output, finishes irradiation.
Embodiment 13
The piezoelectric plastics PVDF that gets thickness and be 500 μ m makes sample, sample is fixed on the two-dimentional electronic control translation stage, the setting scheme is as follows: the directions X and the Y direction speed of service are 0.02mm/s, directions X forward operation 10mm, Y direction forward operation 5mm, directions X inverted running 10mm, Y direction inverted running 5mm, this scheme realizes the closed rectangular path.Select the ArF PRK of wavelength 193nm, it is 10Hz that pulse frequency is set, and adjusts light path, makes irradiation laser facula size on sample be the circular light spot of diameter 0.2mm, regulate laser output energy, making the laser energy density of irradiation on sample is 180mJ/cm
2, operating scheme is opened laser instrument laser irradiation simultaneously, behind the scheme end of run, stops laser pulse output, finishes irradiation.
The conductive polyvinylidene fluoride of above embodiment preparation, electrical conductivity is by being in 10 of high-insulation
-13Ω
-1Cm
- 1Rise to conduction state, preferably can reach 1.20 * 10
-4Ω
-1Cm
-1, having realized insulating to the phase transformation of conduction, measurement result sees Table 1 and table 2:
Table 1
Embodiment |
Thickness of sample (μ m) |
Optical maser wavelength (nm) |
Laser energy density (mJ/cm
2)
|
Umber of pulse |
Pulse frequency (Hz) |
The turntable rotating speed (°/s) |
Electrical conductivity (Ω
- 1cm
-1)
|
1 |
500 |
248 |
140 |
500 |
4 |
10 |
9.90×10
-5 |
2 |
500 |
248 |
190 |
150 |
4 |
40 |
1.20×10
-4 |
3 |
500 |
248 |
190 |
600 |
10 |
45 |
1.00×10
-4 |
4 |
500 |
248 |
290 |
30 |
4 |
45 |
9.45×10
-5 |
5 |
500 |
193 |
180 |
100 |
6 |
40 |
1.16×10
-4 |
6 |
300 |
248 |
240 |
100 |
4 |
40 |
1.10×10
-4 |
7 |
300 |
193 |
220 |
200 |
6 |
40 |
1.00×10
-4 |
8 |
30 |
248 |
270 |
200 |
8 |
50 |
1.05×10
-4 |
9 |
30 |
193 |
250 |
150 |
4 |
40 |
8.70×10
-5 |
Table 2
Embodiment |
Thickness of sample (μ m) |
Optical maser wavelength (nm) |
Laser energy density (mJ/cm
2)
|
Conduction live width (mm) |
Pulse frequency (Hz) |
The speed of service (mm/s) |
The method of operation |
Electrical conductivity (Ω
-1cm
-1)
|
10 |
500 |
248 |
190 |
1 |
5 |
0.1 |
One-dimensional translation |
1.16×10
-4 |
11 |
500 |
193 |
180 |
1 |
5 |
0.1 |
One-dimensional translation |
1.00×10
-4 |
12 |
500 |
248 |
190 |
0.2 |
10 |
0.02 |
Two-dimensional translation |
1.04×10
-4 |
13 |
500 |
193 |
180 |
0.2 |
10 |
0.02 |
Two-dimensional translation |
8.00×10
-5 |