CN100507536C - 兼具纵向和横向压阻系数的悬臂传感器 - Google Patents
兼具纵向和横向压阻系数的悬臂传感器 Download PDFInfo
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- CN100507536C CN100507536C CNB2003801076243A CN200380107624A CN100507536C CN 100507536 C CN100507536 C CN 100507536C CN B2003801076243 A CNB2003801076243 A CN B2003801076243A CN 200380107624 A CN200380107624 A CN 200380107624A CN 100507536 C CN100507536 C CN 100507536C
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- piezoresistive element
- sensor
- cantilever
- sensor unit
- piezoresistive
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Description
悬臂尺寸 | 厚度[nm] | 杨氏模量[GPa] | 预应力[MPa] |
Au | 30 | 80 | 40 |
SiN | 45 | 200 | 85 |
Si | 150 | 180 | 20 |
Sio2 | 100 | 70 | -290 |
SiN | 145 | 200 | 75 |
Claims (17)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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DKPA200202016 | 2002-12-27 | ||
DKPA200202016 | 2002-12-27 | ||
DKPA200300068 | 2003-01-21 | ||
US60/444,676 | 2003-02-04 |
Publications (2)
Publication Number | Publication Date |
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CN1732380A CN1732380A (zh) | 2006-02-08 |
CN100507536C true CN100507536C (zh) | 2009-07-01 |
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CNB2003801076243A Expired - Fee Related CN100507536C (zh) | 2002-12-27 | 2003-12-20 | 兼具纵向和横向压阻系数的悬臂传感器 |
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CN (1) | CN100507536C (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN112744782B (zh) * | 2020-12-30 | 2024-01-30 | 江西德瑞光电技术有限责任公司 | 一种微悬臂梁的制备方法 |
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2003
- 2003-12-20 CN CNB2003801076243A patent/CN100507536C/zh not_active Expired - Fee Related
Non-Patent Citations (10)
Title |
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A Graphical Representation of the PiezoresistanceCoefficients in Silicon. Y Kanda.IEEE TRANSATIONS ON ELECTRON. DEVICES,Vol.29 No.1. 1982 |
A Graphical Representation of the PiezoresistanceCoefficients in Silicon. Y Kanda.IEEE TRANSATIONS ON ELECTRON.DEVICES,Vol.29 No.1. 1982 * |
Atomic force microscopy probe with piezoresistive read-outand a highly symmetrical Wheatstone bridge arrangement. J Thaysen et al.SENSORS AND ACTUATORS A,Vol.83 No.1-3. 2000 |
Atomic force microscopy probe with piezoresistive read-outand a highly symmetrical Wheatstone bridge arrangement. J Thaysen et al.SENSORS AND ACTUATORS A,Vol.83 No.1-3. 2000 * |
CANTILEVER-BASED BIO-CHEMICAL SENSORINTEGRATED IN A MICROLIQUID HANDALING SYSTEM. J Thaysen et al.TECHINICAL DIGEST,MEMS 2001. 2001 |
Fundamentals of microfabrication. Marc Madou,160-163,CRC press. 1997 |
Optimization of sensitivity and noise in piezoresistivecantilevers. Xiaomei Yu et al.JOURNAL OF APPLIED PHYSICS,Vol.92 No.10. 2002 |
多晶硅横向压阻灵敏度的统计分析. 赵甘鸣,鲍敏杭.传感技术学报,第2期. 1989 |
微机械生化传感器. 于晓梅,尚庆虎,江兴流.物理,第31卷第4期. 2002 |
硅压阻输出微传感器的1/f噪声. 于晓梅,江兴流,J.Thaysen,O.Hansen,A.Boisen.半导体学报,第22卷第9期. 2001 |
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Publication number | Publication date |
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CN1732380A (zh) | 2006-02-08 |
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PB01 | Publication | ||
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Owner name: NANONORD CO., LTD. Free format text: FORMER OWNER: DENMARK 2003 3/ 12 CO.,LTD. Effective date: 20060602 |
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Effective date of registration: 20060602 Address after: Aalborg Applicant after: Cantion AS Address before: Denmark Seleleke moon Applicant before: Denmark 2003 3/12 company |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090701 Termination date: 20111220 |