CN100487516C - Structure for altering trap filter working wavelength and prolonging its service life - Google Patents

Structure for altering trap filter working wavelength and prolonging its service life Download PDF

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Publication number
CN100487516C
CN100487516C CNB2005100983827A CN200510098382A CN100487516C CN 100487516 C CN100487516 C CN 100487516C CN B2005100983827 A CNB2005100983827 A CN B2005100983827A CN 200510098382 A CN200510098382 A CN 200510098382A CN 100487516 C CN100487516 C CN 100487516C
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notch filter
optical crystal
crystal chip
chip group
filter
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CN1928619A (en
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谭平恒
朱汇
章昊
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Institute of Semiconductors of CAS
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Institute of Semiconductors of CAS
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Abstract

The related structure for changing notch filter working wavelength and prolonging service time comprises: a substrate fixed with a rotator, a notch filter, an optical wafer group, and a wafer fixer to fix the filter and wafer group and assemble together on the rotator. This invention adjusts the filter wavelength by changing the angle included by filter and wafer group, and can be used in laser Raman spectrum and other spectrum technologies.

Description

Change the structure of trap filter working wavelength and life-saving
Technical field
The present invention relates to field of spectral analysis technology, particularly a kind of change trap filter working wavelength
Structure with life-saving.
Background technology
Raman scattering is the inelastically scattered a kind of phenomenon of light and material, Raman spectrometer based on this phenomenon is modern important spectral analysis technique, the field such as jewel evaluation of having sought peace at solid state physics, semiconductor physics, catalysis, surface, biological chemistry, material list is widely used, and relies on it can obtain the important information of many related substance structures.Compare with other laboratory facilities such as neutron scatterings, Raman scattering has plurality of advantages, for example, to the sample not damaged, required sample is few, and can utilize micro-light path system that sample is carried out microcell and detect, experimental provision is easy etc., thereby is subjected to the attention of researcher day by day.Traditional large-scale Raman spectroscopy is mainly with being equivalent to two or three monochromator series connection, by repeatedly dividing light action, to reach maximum spectral resolution.But, this Raman spectroscopy bulky, operation is very inconvenient, and not only spectral transmittance is lower, and costs an arm and a leg.For this reason, a lot of R﹠D institutions also adopt the small-sized microcell Raman spectrometer of simply connected monochromator.This spectrometer filters strong Rayleigh signal with notch filter.This small-sized spectrometer compact conformation, simple to operate, price is relatively low, thereby obtains very big popularization in research work.For so small-sized spectrometer, notch filter is one of parts of most critical.Notch filter can filter near the Rayleigh scattering signal its operation wavelength, and all has very high transmitance at the signal of Stokes and anti-Stokes both sides.To each laser rays, the notch filter of corresponding operation wavelength is arranged all.If the laser instrument that is equipped with for small-sized microcell Raman spectrometer has several laser rays, utilize the Raman spectrum of these laser rays excitation materials, need the notch filter of respective number different operating wavelength in principle.As time goes on, the operation wavelength of notch filter can move to the long wave direction, makes that the notch filter of purchase can not be used to filter the Rayleigh signal of respective wavelength and must buy new notch filter behind the certain hour.Be generally the serviceable life of notch filter 3 to 4 years, and added that the price of notch filter was more expensive, make that the use cost of notch filter is very high.How to reduce the use cost of notch filter and the serviceable life of prolongation notch filter, and the operation wavelength that how to change notch filter, be to promote the small-sized microcell Raman spectrometer most critical issue to be solved at present.
Summary of the invention
The object of the present invention is to provide a kind of structure that changes trap filter working wavelength and prolong its serviceable life.Utilize this structure, the operation wavelength of notch filter can be expanded 40 to 70 nanometers to the shortwave direction, and can reach many decades basically the serviceable life of notch filter.
A kind of structure that changes trap filter working wavelength and prolong its serviceable life of the present invention, this structure comprises: base plate, notch filter, optical crystal chip group, wafer holder and wheelwork, it is characterized in that, wherein wheelwork is placed on the base plate, and notch filter and optical crystal chip group are fixed with wafer holder and be installed on the wheelwork.
Wherein the optical crystal chip group is designed according to the optical property of notch filter, and the refractive index of optical crystal chip group and thickness will be complementary with notch filter.
The wherein wafer set that combines by different optical materials of optical crystal chip group, or single optical crystal chip.
Wherein wheelwork is to make notch filter and optical crystal chip group by reverse direction rotation work angle.
After wherein utilizing wheelwork that notch filter and optical crystal chip group are rotated an angle by reverse direction, incident laser incides notch filter, after the notch filter refraction, pass the optical crystal chip group, the lateral translation that is caused by notch filter refraction obtains the compensation of optical crystal chip group refraction, makes the direction of emergent ray and incident ray on same straight line.
The present invention can be applicable in the technology such as laser Raman spectroscopy and fluorescence spectrum.
Description of drawings
Below in conjunction with drawings and Examples to technical scheme of the present invention be described in further detail as after, wherein:
Fig. 1 is the white light transmission spectrum (a) of notch filter and with the measured Raman spectrum (b) of 632.8nm laser excitation crystalline silicon figure.
Fig. 2 is the structural drawing that changes trap filter working wavelength and prolong its serviceable life.
Fig. 3 is the designing requirement figure of optical crystal chip group.
Fig. 4 is a simple wheelwork figure.
Fig. 5 is that operation wavelength is that the notch filter of 632.8nm is installed in white light transmission spectrum (a) measured on the structure of the present invention and with measured Raman spectrum (b) figure of 632.8nm laser excitation crystalline silicon.
Fig. 6 utilizes operation wavelength to scheme for the white light perspective spectrum (a) of the notch filter of 514.5nm with the measured Raman spectrum (b) of 514.5nm laser excitation crystalline silicon.
Fig. 7 is to be that the notch filter of 514.5nm is installed in the white light transmission spectrum (a) surveyed after its operating angle of structure adjusted of the present invention and with measured Raman spectrum (b) figure of 457.9nm laser excitation crystalline silicon with operation wavelength.
Embodiment
Notch filter is as one of parts of small-sized microcell Raman spectroscopy most critical, for promoting the use of of small-sized microcell Raman spectroscopy played decisive role.Generally, in order to obtain the Raman spectrum that multiwavelength laser more excites, the notch filter that is equipped with the relevant work wavelength for each bar laser rays is absolutely necessary.As time goes on, the operation wavelength of notch filter can move to the long wave direction.After having arrived certain hour, when notch filter can not filter the laser of former operation wavelength, must buy new notch filter and just can make the work of small-sized microcell Raman spectroscopy.Such as our operation wavelength of purchase was the notch filter of 632.8nm in 1998, and by 2005, its operation wavelength moved on to 642nm, and its white light transmission spectrum is shown in Fig. 1 (b).At this moment, notch filter can not filter the laser of 632.8nm, and laser induced background signal has been covered faint Raman signal (shown in Fig. 1 (a)), and makes Raman spectroscopy can not be used for measuring the Raman spectrum of 632.8nm laser excitation.If the laser instrument that is equipped with for small-sized microcell Raman spectrometer has several laser rays, utilize the Raman spectrum of these laser rays excitation materials, need the notch filter of respective number different operating wavelength in principle.At present the price of notch filter costliness makes researcher not have enough funds to buy the notch filter of various operation wavelengths again and has had a strong impact on their research work.
Fig. 2 is the change trap filter working wavelength and the prolongation structural drawing in its serviceable life that we design.This structure comprises base plate, notch filter, optical crystal chip group, wafer holder and wheelwork.Wheelwork R is placed on the base plate S, settles two wafer holder H on the wheelwork, wafer holder H is used for fixing notch filter N and optical crystal chip group C.
We suppose the effective refractive index n1 of notch filter N, and thickness is d1, and the refractive index of notch filter N outside medium is n0.After flashlight passes notch filter N, because the refractive index inside and outside the notch filter N is different, translation will take place in light behind the flashlight process notch filter N, and light departs from the confocal pinhole of small-sized microcell Raman spectroscopy, and makes detector not detect Raman signal.For fear of this situation, we have designed an optical crystal chip group C, and light was got back to original direction again after its thickness d 2 and effective refractive index n2 made flashlight pass optical crystal chip group C again.Optical crystal chip group C to flashlight through having played compensating action because of the translation that light refraction produced behind the notch filter N, as shown in Figure 3.
Above shown in the compensate function of optical crystal chip group C be optical crystal chip group C with respect to the yawing moment of flashlight will with yawing moment opposite realize of notch filter N with respect to flashlight.We have designed a kind of simple whirligig R for this reason, as shown in Figure 4.This whirligig is made of three gear R1, R2 and R3, and its middle gear R1 is a driving gear, and R2 is a driven gear, and R3 is a follower gear.When driving gear R1 rotates, the transmission between gear will make driven gear R2 and follower gear R3 rotate along opposite direction.
Below we specifically set forth the using method that changes trap filter working wavelength and prolong the structure in its serviceable life.
If because the operation wavelength that the variation of time causes notch filter moves and can not filter under the situation of laser of former operation wavelength to the long wave direction, the structure that changes trap filter working wavelength and prolong its serviceable life is placed on the signal light path, regulate the operating angle of notch filter and optical crystal chip group by wheelwork, operation wavelength in the time of can being adjusted to the purchase notch filter to the operation wavelength of notch filter, and the serviceable life of prolongation notch filter.
With situation shown in Figure 1 is example.With optical crystal chip group and former operation wavelength is on two fixator H in the notch filter of the 632.8nm structure that is placed on the change trap filter working wavelength of our design and prolongs its serviceable life, and this device is placed on the signal light path of Raman spectroscopy.Utilize the structural wheelwork that changes trap filter working wavelength and prolong its serviceable life to rotate about 14 degree when us after optical crystal chip group and notch filter with by reverse direction, the white light perspective spectrum of notch filter is shown in Fig. 5 (b), and its operation wavelength changes back to 632.8nm.The laser that utilizes He-Ne laser instrument 632.8nm is as exciting light, and we have measured the Stokes and the anti-Stokes Raman spectrum of zingy silicon, shown in Fig. 5 (a).
We have the operation wavelength of a notch filter at 514.5nm.The white light perspective spectrum of notch filter is shown in Fig. 6 (b).The laser that utilizes Argon ion laser 514.5nm is as exciting light, and the Raman spectrum of the silicon that we surveyed is shown in Fig. 6 (a).
With optical crystal chip group and this operation wavelength is on two fixator H in the notch filter of the 514.5nm structure that is placed on the change trap filter working wavelength of our design and prolongs its serviceable life, and this device is placed on the signal light path of Raman spectroscopy.After the structural wheelwork that utilize to change trap filter working wavelength and prolong its serviceable life rotates about 35 degree optical crystal chip group and notch filter with by reverse direction, the white light perspective spectrum of notch filter is shown in Fig. 7 (b), and its operation wavelength changes to 457.9nm from 514.5nm.The laser that utilizes Argon ion laser 457.9nm is as exciting light, and we have also measured the Stokes and the anti-Stokes Raman spectrum of zingy silicon, shown in Fig. 7 (a).
Therefore, utilize our change trap filter working wavelength that designs and the structure that prolongs its serviceable life, we make the present operation wavelength of notch filter that former work 1 wavelength is 514.5nm cover all laser rays of Argon ion laser basically, as 514.5nm, 501.7nm, 496.5nm, 488nm, 476.5nm, 472.7nm, 465.8nm and 457.9nm.This has just expanded the function of notch filter greatly, saves limited research funding, and very helps promoting the micro-Raman spectroscopy of small-sized microcell.

Claims (4)

1. one kind changes trap filter working wavelength and the structure that prolongs its serviceable life, this structure comprises: base plate, notch filter, optical crystal chip group, wafer holder and wheelwork, it is characterized in that, wherein wheelwork is placed on the base plate, notch filter and optical crystal chip group are fixed with wafer holder and are installed on the wheelwork, settle two wafer holder on the wheelwork, wafer holder is used for fixing notch filter and optical crystal chip group;
Wherein the optical crystal chip group is designed according to the optical property of notch filter, and the refractive index of optical crystal chip group and thickness will be complementary with notch filter.
2. change trap filter working wavelength according to claim 1 and the structure that prolongs its serviceable life is characterized in that, the wherein wafer set that combined by different optical materials of optical crystal chip group, or single optical crystal chip.
3. change trap filter working wavelength according to claim 1 and the structure that prolongs its serviceable life is characterized in that wherein wheelwork is to make notch filter and optical crystal chip group by reverse direction rotation work angle.
4. change trap filter working wavelength according to claim 3 and the structure that prolongs its serviceable life, it is characterized in that, after wherein utilizing wheelwork that notch filter and optical crystal chip group are rotated an angle by reverse direction, incident laser incides notch filter, after the notch filter refraction, pass the optical crystal chip group, the lateral translation that is caused by notch filter refraction obtains the compensation of optical crystal chip group refraction, makes the direction of emergent ray and incident ray on same straight line.
CNB2005100983827A 2005-09-09 2005-09-09 Structure for altering trap filter working wavelength and prolonging its service life Expired - Fee Related CN100487516C (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102354048A (en) * 2011-10-11 2012-02-15 中国科学院半导体研究所 Device for electrically changing work wavelength of optical filter

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5032776A (en) * 1988-11-10 1991-07-16 Unisys Corp. Attenuation filter
US5214494A (en) * 1990-09-04 1993-05-25 Minolta Camera Kabushiki Kaisha Light sensor with an adjustable spectral characteristic
CN1127731C (en) * 1998-06-26 2003-11-12 西加特技术有限责任公司 Improved notch filtering as used in disc drive servo

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5032776A (en) * 1988-11-10 1991-07-16 Unisys Corp. Attenuation filter
US5214494A (en) * 1990-09-04 1993-05-25 Minolta Camera Kabushiki Kaisha Light sensor with an adjustable spectral characteristic
CN1127731C (en) * 1998-06-26 2003-11-12 西加特技术有限责任公司 Improved notch filtering as used in disc drive servo

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