CN100483179C - Resonance type micromirror grating scanning type laser projection display device - Google Patents
Resonance type micromirror grating scanning type laser projection display device Download PDFInfo
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- CN100483179C CN100483179C CNB2007101351185A CN200710135118A CN100483179C CN 100483179 C CN100483179 C CN 100483179C CN B2007101351185 A CNB2007101351185 A CN B2007101351185A CN 200710135118 A CN200710135118 A CN 200710135118A CN 100483179 C CN100483179 C CN 100483179C
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Abstract
This invention provides a kind of laser projection display packing, which uses resonance microscope to reach grating scan. It is made up of a video-processing module, a control module, a resonance scan microscope, a laser machine, the modulator and a fibre color mixer. The video signal gets the signal serial needed to display after passing the video-processing module, and then, this serial is added to the laser modulator to control gray. The three modulated lasers are introduced to the fibre to mix color. After that, the color display comes true. The emergent light shines on the micro mirror. The control module takes charge of controlling microscope to realize horizontal and column scanning.
Description
Technical field
The present invention relates to a kind of laser light projection display system, particularly a kind of laser projection display that uses resonance type micromirror to realize raster scanning.
Background technology
Giant-screen is one of great direction of display technique development always, and CRT is eliminated in the process of giant-screenization gradually, and following screen can be bigger, and the LCD technology will face the high bottleneck of production line cost so.But the trend of giant-screenization is irreversible, and what people will seek is a kind of new scheme.
Projection Display is realize giant-screen the most cheap, the most effective scheme.Shortcomings such as tradition shadow casting technique has the life-span short, and at the bottom of the brightness, thermal value is big, and volume is big.But be in a disadvantageous position in the competition in family expenses large screen display field at present.
The MEMS technology is the development along with integrated circuit technique, and the emerging cross discipline in occur the eighties in 20th century demonstrates powerful potentiality and obtains many great achievements in fields such as biology, electronics, medical treatment, sensings now.The advantage of MEMS technology is that volume is little, in light weight, good stability, energy consumption are little.With one of great achievement of MEMS technology introduction shadow casting technique is exactly the DLP technology.
Laser technology be along with the mankind to going deep into that the essence of light is probed into, the emerging technology that grows up the sixties in last century, its special nature be before any light source can not compare.Laser technology is applied to display technique, at first can greatly improve luminescence efficiency.Realize low power consumption, high brightness.Next is to reappear natural colour better, and according to statistics, the traditional use phosphor and the display of bulb can only give expression to 30% of human eye finding natural colour, and laser display can give expression to 83%.
Under such background, it obviously is from now on a trend that MEMS technology and laser technology are applied to the demonstration field.
Summary of the invention
The invention provides a kind of system reliability and can increase driving moment, the corresponding resonance type micromirror grating scanning type laser projection display device that reduces driving force of helping to improve.
The present invention adopts following technical scheme:
A kind of resonance type micromirror grating scanning type laser projection display device, by red, green, blue laser instrument, the optical fiber colo(u)r mixer, scanning micro-mirror, second catoptron, static mirror and screen are formed, red, green, the light that blue laser instrument sends is through the optical fiber colo(u)r mixer, scanning micro-mirror, second catoptron and static mirror, project on the screen, scanning micro-mirror adopts resonance scan microscope, this resonance scan microscope comprises: infrabasal plate reaches goes up light-passing board, be provided with between infrabasal plate and the last light-passing board minute surface and electrostatic actuator and on light-passing board be positioned at minute surface above, on infrabasal plate, be provided with support, minute surface is connected with support by the swivel arm that is located at two ends, the minute surface left and right sides, above-mentioned electrostatic actuator comprises movable plate electrode and fixed plate, movable plate electrode is faced mutually with fixed plate, and movable plate electrode is connected with the side of minute surface.
The invention has the advantages that
1. this display system is owing to adopt laser as light source, laser has the most saturated color, can expand the zone of color triangle very effectively, compare with the micro-reflector optical projection system of using fluorescent powder or arc lamp to do light source, native system has broader chromatic threshold.
2. with respect to the linear matrix or the micro-reflector Color Laser Projection Technology of face matrix form, such as laser projection that utilizes the DLP chip etc., the laser raster scan mode is very easy to improve resolution under the situation that does not change the micro-mirror structure design, the system that makes can realize high resolution, and matrix form micro-reflector Color Laser Projection Technology requires to redesign chip, and, also be a kind of challenge to manufacturing process along with the matrix function purpose strengthens and the miniaturization of matrix unit structure.So the dilatancy of grating scanning type structure is better, has minimum shape coefficient.
3. with respect to the liquid crystals transmit structure of LCOS Color Laser Projection Technology, the optical efficiency of the reflection configuration of native system is higher.Reduced requirement, thereby reduced requirement of system design, reduced cost light-source brightness.
4. with respect to the two scanning projection devices of traditional off-resonance type, giving prominence to of native system is the mechanical efficiency height a little.Under resonant condition, very little driving voltage just can produce the very big amplitude of oscillation.
5. the advantage of the novel resonance type micro-reflector in the native system is, widen the distance between pectination electrostatic actuator part and the rotation axis, produce identical moment like this as long as use littler power, promptly only need littler electrostatic attraction, thereby reduced the requirement of driving voltage, and that part and the minute surface that connect pectination electrostatic actuator part are same materials, just mean the minute surface area that has strengthened perpendicular to rotating shaft direction, and this part area highly significant, can reduce the accuracy requirement that incoming laser beam is aimed at, originally need to aim at the center, even now more also in allowed band.This makes to be under the outside adverse condition such as vibration in system and still can keep reliability.
6. the advantage of the novel resonance type micro-reflector employing pectination electrostatic actuator in the native system is to increase the useful area between two electrodes, thereby increases electric capacity.Make under identical driving voltage condition, to produce more electric charge, thereby increase electrostatic attraction at the electrode two ends.
7. the production process of the novel resonance type micro-reflector in the native system is simple, and the finished size size is in several millimeter, and the minute surface size has only a millimeter, can make somely on former of a slice, cost can be reduced to extremely low.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is the structural representation of resonance type micro-reflector of the present invention.
Fig. 3 is preparation technology's process flow diagram of resonance type micro-reflector of the present invention.
Embodiment
A kind of resonance type micromirror grating scanning type laser projection display device, by red, green, blue laser instrument 1, optical fiber colo(u)r mixer 2, scanning micro-mirror 3, second catoptron 4, static mirror 5 and screen 6 are formed, red, green, the light that blue laser instrument 1 sends is through optical fiber colo(u)r mixer 2, scanning micro-mirror 3, second catoptron 4 and static mirror 5, project on the screen 6, scanning micro-mirror 3 adopts resonance scan microscope, this resonance scan microscope comprises: infrabasal plate 311 reaches goes up light-passing board 312, be provided with between infrabasal plate 311 and the last light-passing board 312 minute surface 32 and electrostatic actuator and on light-passing board 312 be positioned at minute surface 32 above, on infrabasal plate 311, be provided with support 33, minute surface 32 is connected with support 33 by the swivel arm 321 that is located at two ends, minute surface 32 left and right sides, above-mentioned electrostatic actuator comprises movable plate electrode 41 and fixed plate 42, movable plate electrode 41 is faced mutually with fixed plate 42, movable plate electrode 41 is connected with the side of minute surface 32, movable plate electrode 41 can adopt 1 and be connected with the single side of minute surface 32, and movable plate electrode 41 also can adopt 2 and be connected with two sides up and down of minute surface 32.Described resonance type micromirror grating scanning type laser projection display device, movable plate electrode 41 adopts the comb electrode plate.Described resonance type micromirror grating scanning type laser projection display device is characterized in that fixed plate 42 adopts the comb electrode plate.Described resonance type micromirror grating scanning type laser projection display device is provided with the electrode supporting arm 322 that is used to increase driving moment between the side of movable plate electrode 41 and minute surface 32.Described resonance type micromirror grating scanning type laser projection display device, electrode supporting arm 322 is extended to form by minute surface 32.
With reference to the accompanying drawings, the present invention is made more specifically explanation:
Structure such as accompanying drawing 1 that the present invention adopts
This display system is by video processing module, control module 5, and resonance scan microscope, second catoptron, laser instrument and modulator, the optical fiber colo(u)r mixer is formed.
At first, vision signal is added to this sequence on the laser modulator through needing obtaining the burst of demonstration behind the video processing module, realizes gray-scale Control.
Three beams of laser after the modulation is introduced optical fiber realize colour mixture.To realize colored the demonstration.Emergent light impinges upon on the resonance type micro-reflector, realizes going sweeping.Light beam directive second catoptron is realized being listed as and is swept then.
Control module is responsible for controlling micro mirror and is realized that row is swept and row are swept.The micro mirror resonant frequency such as the following table of different systems:
| Display type | QVGA | VGA | SVGA | XGA | SXGA | UXGA | HDTV |
| Horizontal resolution | 320 | 640 | 800 | 1024 | 1280 | 1600 | 1920 |
| Vertical resolution | 240 | 480 | 600 | 768 | 1024 | 1200 | 1080 |
| Row frequency sweep rate (Hz) | 8000 | 16000 | 20000 | 25600 | 34133 | 40000 | 36000 |
The scanning mirror of traditional structure is under such frequency condition, and it is very big to drive difficulty, needs very high driving voltage, could realize the deflection angle of broad.Numerical simulation shows, externally under the condition that driving voltage is constant, changes driving frequency, identity unit under the condition of resonance with the condition that does not resonate under amplitude differ and reach thousands of times.Because traditional scanning mirror size is bigger, resonant frequency has only the hundreds of hertz, can not realize the purpose of design of native system.
Core component in the native system is the resonance type micro-reflector.Micro mirror is formed structure such as accompanying drawing 2 by cantilever, minute surface, pectination electrostatic actuator electrode supporting arm four parts
The principle of work of micro mirror is, after applying voltage on the electrostatic actuator, electrostatic force has a moment with respect to cantilevered axle, makes certain angle of micromirror rotation.If voltage cycle sexually revises, then can realize the periodicity twisting vibration of micro mirror.Thereby realize the effect of beam flying.
The design object of micro mirror is to do under the capable frequency sweep rate and row frequency sweep rate of requirement in display system, reaches the bigger amplitude of oscillation with less driving voltage, to realize wide visual angle.In other words be exactly to obtain bigger mechanical effect with less electromagnetic energy input.Studies show that to have only makes torsional resonance frequency and the desired capable frequency sweep rate of micro mirror, row frequency sweep rate consistent.Just can reach this purpose, we are referred to as the resonance type micro-reflector.
The resonant frequency of micro mirror satisfies following equation
K is meant elastic constant, and I is meant moment of inertia, ω
0It is free-running frequency
t
sBe the thickness of elastic beam, w
sBe the width of elastic beam, l
sLength for elastic beam.
According to this relation, mirror shape, mirror shape all can have influence on moment of inertia.And the length of cantilever, width, highly, material all can have influence on k.
The position of driver part and structure then have influence on the size of driving voltage, are to reduce one of key of driving voltage.
To sum up tell, the process of the real example that the design process of micro mirror is is similar to the process of seeking an equilibrium point.The variation of any parameter all can make this condition of resonance no longer set up.
The micro mirror that we are designed, long about 2600 microns of minute surface, wide 1000 microns, arm length is 1000 microns, wide is 100 microns.Thickness is 70 microns.The main feature of comparing with the catoptron of traditional structure by the micro-reflector of this parameter is exactly that size is little.Can not obtain by traditional manufacture.
Depositing technics is used in the manufacturing of micro mirror, manufacturing process such as accompanying drawing:
At first be the making of the first half: at first in making perforation on glass, bonding one deck polysilicon and polishing then, the parts of making signal wire afterwards and being used for being connected with Lower Half.Erode away the pectination driver part again.
Next is the making of the latter half: at first key and one deck separation layer on silicon substrate, select phosphosilicate glass usually for use.Separation layer is corroded into required shape, and deposit one deck polysilicon thereon erodes away the mirror shape that we do needs afterwards more again.Remove separation layer then selectively.
Two parts connect together up and down, just obtain core component of the present invention.Process such as accompanying drawing 3.
Claims (4)
1, a kind of resonance type micromirror grating scanning type laser projection display device, by red, green, blue laser instrument (1), optical fiber colo(u)r mixer (2), scanning micro-mirror (3), second catoptron (4), static mirror (5) and screen (6) are formed, red, green, the light that blue laser instrument (1) sends is through optical fiber colo(u)r mixer (2), scanning micro-mirror (3), second catoptron (4) and static mirror (5), project on the screen (6), it is characterized in that scanning micro-mirror (3) adopts resonance scan microscope, this resonance scan microscope comprises: infrabasal plate (311) reaches goes up light-passing board (312), between infrabasal plate (311) and last light-passing board (312), be provided with minute surface (32) and electrostatic actuator and go up the top that light-passing board (312) is positioned at minute surface (32), on infrabasal plate (311), be provided with support (33), minute surface (32) is connected with support (33) by the swivel arm (321) that is located at minute surface (32) two ends, the left and right sides, above-mentioned electrostatic actuator comprises movable plate electrode (41) and fixed plate (42), movable plate electrode (41) is faced mutually with fixed plate (42), movable plate electrode (41) is connected with the side of minute surface (32), is provided with the electrode supporting arm (322) that is used to increase driving moment between the side of movable plate electrode (41) and minute surface (32).
2, resonance type micromirror grating scanning type laser projection display device according to claim 1 is characterized in that movable plate electrode (41) adopts the comb electrode plate.
3, resonance type micromirror grating scanning type laser projection display device according to claim 1 and 2 is characterized in that fixed plate (42) adopts the comb electrode plate.
4, resonance type micromirror grating scanning type laser projection display device according to claim 1 is characterized in that electrode supporting arm (322) is extended to form by minute surface (32).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101351185A CN100483179C (en) | 2007-11-09 | 2007-11-09 | Resonance type micromirror grating scanning type laser projection display device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007101351185A CN100483179C (en) | 2007-11-09 | 2007-11-09 | Resonance type micromirror grating scanning type laser projection display device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101149476A CN101149476A (en) | 2008-03-26 |
| CN100483179C true CN100483179C (en) | 2009-04-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2007101351185A Expired - Fee Related CN100483179C (en) | 2007-11-09 | 2007-11-09 | Resonance type micromirror grating scanning type laser projection display device |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102269920B (en) * | 2011-07-21 | 2013-01-23 | 凝辉(天津)科技有限责任公司 | Separable micro laser projection device |
| JP5911238B2 (en) * | 2011-09-02 | 2016-04-27 | オリンパス株式会社 | Optical scanning device and endoscope, microscope, and projector provided with the same |
| DE102012201481A1 (en) * | 2012-02-02 | 2013-08-08 | Robert Bosch Gmbh | Apparatus for projecting an image, portable mobile device with a corresponding device and method for projecting an image |
| CN110892306B (en) * | 2017-06-13 | 2022-02-22 | 三菱电机株式会社 | Optical scanning device and method for adjusting optical scanning device |
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Granted publication date: 20090429 Termination date: 20121109 |