CN100480802C - Alignment apparatus and method thereof - Google Patents

Alignment apparatus and method thereof Download PDF

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Publication number
CN100480802C
CN100480802C CNB2006101363332A CN200610136333A CN100480802C CN 100480802 C CN100480802 C CN 100480802C CN B2006101363332 A CNB2006101363332 A CN B2006101363332A CN 200610136333 A CN200610136333 A CN 200610136333A CN 100480802 C CN100480802 C CN 100480802C
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Prior art keywords
camera
print
substrate
print head
transparent
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CN1963617A (en
Inventor
金大中
李承皇
崔相轸
吴种汉
金重铉
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Samsung Electronics Co Ltd
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Samsung Electronics Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/01—Generalised techniques
    • H01J2209/012—Coating
    • H01J2209/015—Machines therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54426—Marks applied to semiconductor devices or parts for alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
    • H01L2223/5446—Located in scribe lines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
    • H01L2223/5448—Located on chip prior to dicing and remaining on chip after dicing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/975—Substrate or mask aligning feature

Abstract

The present invention relates to an alignment apparatus for aligning the printing head provided with a plurality of nozzles used for printing and method thereof. The alignment apparatus provided in the present invention includes: a printing head transfer part for supporting and transferring the printing head; a transparent sample print disposed in the lower position of the printing head with transparent form and having a predetermined sample print tag that can be screened; a first camera disposed in the lower position of the transparent sample print for screening the sample tag of the transparent sample print; a second camera combined with the printing head for screening the sample tag of the transparent sample print; a control part, controlling the printing head transfer part by comparing the images screened by the first and second camera, in order to make the second camera align to the first camera. Therefore, the alignment work of the base print and the printing head can be carried accurately and simply.

Description

Alignment device and method thereof
Technical field
The present invention relates to alignment device and method thereof, relate in particular to alignment substrate and the alignment device and the method thereof of on substrate, carrying out the print head of presswork.
Background technology
Usually, have TFT-LCD (Thin Film Transistor-Liquid Crystal Display: Thin Film Transistor-LCD) and organic ELD (Elector Luminescence Display: flat display apparatus electroluminescent display) is provided with the display board that is used to form image.
The manufacturing process of this display board is included in the typography that forms color filter (ColorFilter), predetermined pattern etc. on the display panel used substrate.This typography comprises: make medium such as ink by silk screen and with serigraphy (Screen Printing) mode of pattern transfer to the panel surface by extruding; The principle of utilizing some specific chemical (Photo Resist) to be subjected to cause chemical reaction after the light and changing characteristic uses the mask (Mask) with required pattern optionally to form lithography (Photolithography) mode of the pattern identical with mask to the photoresist irradiation light.But, in typography, adopt higher and lower-cost ink jet printing (Ink Jet) mode of device integrated level recently.The print head (Print Head) that the ink jet printing mode utilization has injection orifice (Orifice) hardens to it after being formed on display panel used on-chip a plurality of pixels (Pixel) injection ink.
This typography of ink jet printing mode of utilizing comprises: alignment device being used to make the print head alignment substrate, thereby correctly is ejected into ink on the pixel (Pixel) of substrate; Pick-up unit is to be used to detect the pixel (Pixel) whether ink correctly is ejected into substrate.Aiming at print head and substrate and detecting in the process of alignment, good in order whether to aim between the pixel of confirming print head and substrate, spray ink in predetermined test on substrate and carry out spraying operation (Jetting) and judge whether print head is good with aiming at of substrate.
Korea S's publication communique " 2003-0080380 (2003.10.17) number " discloses this ink jet printing alignment device that is used to make display board.The equipment that prior art provided comprises the print head that can carry out the alignment work of a plurality of injection orifices, adjust each injection orifice by described print head is located at a plurality of CCD (Character Coupled Device: charge coupled device) camera on the substrate grid (Grid) that will print that forms apart from (Pitch) according to the pixel center of pattern.
According to said structure, the CCD camera is positioned at and is used to support the bearing downside of transparent substrate and upwards takes in the prior art, thereby can see through transparent substrate and take the position of injection orifice.Therefore, can pass through the captured image of CCD camera, make injection orifice aim at pixel center according to pattern apart from the substrate grid that forms.
But this prior art may expend the expense and the time of more ink and glass etc. in the process of carrying out spraying operation (Jetting), thereby causes cost to increase.And, owing to use more CCD camera, make structure become complicated, and detecting and also expending the more time probably during work such as control.
And camera is installed in the bearing downside that is used for supporting substrate in this prior art, and by the hole that is formed on the bearing substrate and injection orifice is taken, and therefore is difficult to install camera and complex structure.And prior art only is applicable to transparent substrate, can not be applicable to nontransparent substrate.
And, this existing alignment device that is used to make display board is to see through transparent substrate to take injection orifice, may be in the process of taking because of reasons such as interference or refraction make image fault, if utilize the image of this distortion just to be difficult to control accurately seeing through substrate.
Summary of the invention
The object of the present invention is to provide a kind of alignment device and method thereof of accurately also carrying out the alignment work of substrate and print head easily.
To achieve these goals,, be used for aiming at operation with the print head of nozzle, it is characterized in that comprising: the print head handover portion that is used to support and transfer described print head having a plurality of pressworks according to alignment device provided by the present invention; Support and can transfer the bearing of substrate, this substrate has the substrate identification marking and with a plurality of pixels of equidistant formation; Be located at described print head below and have the transparent print of the predetermined print mark that can take with transparent form, this transparent print is arranged on a side of described bearing; Be located at the below of described transparent print and take the print mark of described transparent print and first camera of the benchmark nozzle of described print head; Second camera that combines with described print head, this second camera is used to take the print mark of described transparent print, and takes the substrate identification marking of described substrate when being shifted into described substrate top; Control part, control described print head handover portion by more described first camera and the captured image of described second camera, so that described second camera is aimed at described first camera, and utilize the distance between the benchmark nozzle of described second camera that calculates by described first camera and described print head, control at least one in the two of described print head handover portion and described bearing, so that the benchmark nozzle of described print head is corresponding to the benchmark pixel of described substrate.
At this, described control part also is included in second camera and aims under the state of first camera, the print marking image of the described transparent print that more described first camera and described second camera are captured, to judge that once more second camera aims at the function of the situation of first camera, can aim at first camera and second camera more exactly thus.
And, described control part based on described first camera captured with the benchmark nozzle image nearer described print head of described second camera, distance the benchmark nozzle of calculating from described second camera to described print head can calculate the position of benchmark nozzle thus simply.
And, described control part also comprises the substrate identification marking based on the captured described substrate of described second camera that moves to described substrate from described transparent print, seek the function of the benchmark pixel of described substrate, can seek the benchmark pixel of substrate thus simply.
And, according to alignment methods provided by the present invention, be used for aiming at operation with the print head of nozzle, it is characterized in that comprising step: the print mark of taking described transparent print by first camera that is located at transparent print below with predetermined print mark to having a plurality of pressworks; Be combined in second camera on the described print head that is positioned at described transparent print top and take the print mark of described transparent print; By more described first camera and the captured image of described second camera, control is used to support and can transfers the print head handover portion of described print head, so that described second camera is aimed at first camera; That take successively based on described first camera and the benchmark nozzle image nearer described print head of described second camera calculate the distance the benchmark nozzle from described second camera to described print head; Described second camera is transplanted on by bearing support and the substrate top that can be transferred by bearing, and this substrate has the substrate identification marking and with a plurality of pixels of equidistant formation; Based on the substrate identification marking of the captured described substrate of described second camera that is shifted into described substrate, seek the benchmark pixel of described substrate; Based on calculated from described second camera to the distance the described benchmark nozzle, control some in the two of described print head handover portion and described bearing, so that the benchmark pixel of the described substrate of benchmark nozzle alignment of described print head.
At this, also be included in the down print marking image of the captured described transparent print of more described first camera and described second camera of state that second camera aims at first camera, to judge that once more second camera aims at the step of the situation of first camera, can more correctly aim at first camera and second camera thus.
Description of drawings
Fig. 1 is the synoptic diagram of expression according to the alignment procedures of alignment device provided by the present invention;
Fig. 2 for expression first camera and second camera before aiming at and the comparison diagram of captured afterwards print marking image;
Fig. 3 obtains to the outboard profile of the process of the distance of benchmark nozzle for expression;
Fig. 4 is the control block diagram of alignment device;
The nozzle that Fig. 5 takes for camera and the image of substrate and with its constitutional diagram that makes up;
Fig. 6 is the process flow diagram of expression alignment procedures.
Embodiment
Below, present invention will be described in detail with reference to the accompanying alignment device 10 that embodiment provided.The present invention goes for the alignment device 10 of various manufacturing process.But present embodiment is described the situation that alignment device 10 is applicable to the typography of the display board in the display device for convenience of explanation for example.This typography adopts ink jet printing mode for form the process of color filter (Color Filter), pattern etc. on substrate 60.
Alignment device 10 comprises as shown in Figures 1 to 4: the print head 20 with a plurality of nozzles 21 that carry out presswork; Be used to support and transfer the print head handover portion 25 of print head 20; Transparent print 30 with predetermined print mark 31; Be located at the below of transparent print 30 and take first camera 40 of the print mark 31 of transparent print 30; Combine with the print head 20 that is located at transparent print 30 tops and take second camera 50 of the print mark 31 of transparent print 30; Control part 80 is controlled print head handover portion 25 by comparing first camera 40 and second camera, 50 captured images, so that second camera 50 is aimed at first camera 40.And alignment device 10 can also comprise: substrate identification marking 61; Be used to support and can transfer the bearing 70 of substrate 60, this substrate 60 has a plurality of pixels 63 according to equidistant formation; Control part 80 is sought the benchmark pixel 65 of substrate 60 according to the substrate identification marking 61 of the captured substrate 60 of described second camera 50 that is transplanted on substrate 60.
Print head 20 has a plurality of nozzles 21 that spray ink to the pixel 63 of substrate 60 as shown in Figure 1.And print head 20 supported by print head handover portion 25, thus can along diaxon (X, Y) direction move and at the plate face of substrate 60 according to horizontal turn.
Nozzle 21 as shown in Figure 1, and is outstanding and form a plurality of on print head 20.This nozzle 21 color filter ink that injection has R (red), G (green), B (indigo plant) color when making as TFT-LCD with display board.Nozzle 21 can adopt various quantity according to the size of substrate 60.And nozzle 21 has from the nearest benchmark nozzle 23 of second camera 50, and benchmark nozzle 23 is as aiming at the benchmark of print head 20 with substrate 60.And, can be based on waiting the information that provides to import by input part 81 by the fabricator from benchmark nozzle 23 to the distance a plurality of nozzles.
Print head handover portion 25 is used for supporting and can transferring print head 20 as shown in Figure 1.And print head handover portion 25 supports print heads 20 to make that it can (X, Y) direction moves and is that turn is carried out at the center with the vertical pivot (Z) perpendicular to substrate 60 plate faces along diaxon.Print head handover portion 25 can use linear guides (Linear Motion Guide) etc.In view of the above, print head handover portion 25 transfers print head 20 according to the orientation that is located at the pixel 63 on the substrate 60.That is, as shown in Figure 1, the ink that sprays from nozzle 21 can be filled thus towards directions X mobile printing head 20 by print head handover portion 25 in pixel 63.Then, after print head handover portion 25 is transplanted on print head 20 on another row pixel 63 of Y direction, in the time of towards the opposite direction mobile printing head 20 of directions X in pixel 63 filling ink.At this moment, print head handover portion 25 can be as required towards the horizontal turn print head 20 of substrate boards face, thereby can be in the pixel 63 of substrate 60 filling ink.
Transparent print 30 has the print mark 31 that can take as shown in Figure 1, and is fixed in an end of bearing 70.Therefore, transparent print 30 can be used as the benchmark of aiming at first camera 40 and second camera, 50 reference positions.And transparent print 30 can move to substrate 60 tops with first camera 40 that will be explained hereinafter.
First camera 40 as shown in Figure 1 to Figure 3, the below that is set at transparent print 30 is used to take the print mark 31 of transparent print 30.And first camera 40 is taken benchmark shower nozzle 23 for the benchmark shower nozzle 23 of seeking print head 20.At this moment, both can use transparent print 30 to take benchmark shower nozzle 23, also can use transparent print 30 as required and not.Therefore, can detect shift state between first cameras 40 and second camera 50 by control part 80 by the captured image of first camera 40 relatively and second camera 50, and can pass through control part 80 calculating from second camera 50 to the spacing distance the benchmark nozzle 23.
That is, as shown in Figure 2, relatively second camera 50 is taken the image (Fig. 2 (a)) of print mark 31 and the image (Fig. 2 (b)) that first camera 40 is taken print mark 31, and the distance between the print mark 31 of each transparent print 30 is " d ".Therefore, consistent with image (b) in order to make image (a), promptly in order to make second camera 50 aim at first camera 40, control part 80 control print head handover portions 25 move it " d " distance.Then, in order to confirm the alignment between first camera 40 and second camera 50, second camera 50 is taken the image (Fig. 2 (c)) of print mark 31 and image (Fig. 2 (d)) that first camera 40 is taken print mark 31 again compares again, and this moment, the distance of print mark 31 of each transparent print 30 was consistent.At this,, then repeat said process if image (c) is inconsistent with image (d).Therefore, can utilize transparent print 30 to carry out next operation after finishing the alignment procedures of first camera 40 and second camera 50, thereby can aim at operation more exactly.And, as shown in Figure 3, take second camera 50 and benchmark nozzle 23 by first camera 40, control part 80 calculates from second camera 50 to the spacing the benchmark nozzle 23 (" d1 " Fig. 3).At this, if first camera 40 is taken respectively from second camera 50 to the distance between other nozzles except that benchmark nozzle 23, then control part 80 also can calculate from second camera 50 to the distance other nozzles (" d2 " of Fig. 3, " d3 ", " d4 ") respectively.
Second camera 50 is as Fig. 1 and shown in Figure 5, combines with the print head 20 that is arranged on transparent print 30 tops and takes the print mark 31 of transparent print 30.And second camera 50 is taken the substrate identification marking 61 of substrate 60 for the benchmark pixel 65 of seeking substrate 60.Therefore, by comparing, calculate from shift state first camera, 40 to second cameras 50 and the displacement the benchmark pixel from benchmark nozzle 23 to correspondence 65 by control part 80 with shot image signals or the information imported.Be described in front owing to aim at the course of work of first camera 40 and second camera 50, therefore omit its explanation here.The process of seeking benchmark pixel 65 is described below with reference to Fig. 5.Relatively by first camera 40 take at first image (A) of second camera 50 and print head 20 benchmark nozzles 23 and second image (B) taken by second camera 50 at the substrate identification marking 61 and the benchmark pixel 65 of substrate 60.Thus, control part 80 is considered distance between second camera 50 and the benchmark nozzle 23 and the distance between substrate identification marking 61 and the benchmark pixel 65, can be to the some parts among precalculated position mobile printing head handover portion 25 and the bearing 70, so that benchmark nozzle 23 as the 3rd image (C) are positioned on the benchmark pixel 65.
Therefore,, make the substrate 60 and the alignment procedures of print head 20 become simple and convenient, and also can install simply without restriction relatively and use for existing alignment device 10 by two first cameras 40 and second camera 50 are set.And, owing to can aim at exactly between substrate 60 and the print head 20, so do not need to carry out special tentative printing, thus can reduce expenses and time and reducing cost.The digital camera that the best usability of this camera is good-CCD camera.
Substrate 60 as shown in Figure 1, Thin Film Transistor-LCD) and organic ELD (Electro Luminescence Display: display board of flat display apparatus etc. such as electroluminescent display) constitute by plate glass, be used to make TFT-LCD (Thin FilmTransistor-Liquid Crystal Display:.This substrate 60 can have all size, and the nozzle 21 of print head 20 also can correspondingly change.Substrate 60 is provided with the pixel grid 67 with a plurality of pixels 63 of equidistant formation, the ink that the nozzle 21 of the print head 20 that filling will be described later in each pixel 63 is sprayed.And, forming a plurality of substrate identification markings 61 on the substrate 60, these substrate identification markings 61 are for aiming at print head 20 transfer directions and being formed on the reference point of pixel 63 orientations on the substrate 60 etc.That substrate 60 can be arranged to is transparent, also can be arranged to translucent or opaque substrate.Substrate 60 also can be the substrate that is sprayed other kinds of ink etc. by print head 20 ink discharge devices such as grade in the tram except display panel used substrate.And the user obtains Pixel Information such as the distance, width between the pixel 63 of substrate 60 in advance, imports by input part 81.
Bearing 70 forms writing board shape and is located at the downside of substrate 60 and support substrate 60 stably as shown in Figure 1.And bearing 70 support substrates 60 also can be transferred substrate 60, make it consistent with print head 20 thereby adjust substrate 60.Bearing 70 support substrates 60 also can be transferred substrate 60 according to the plate face direction of substrate 60, thereby the substrate identification marking 61 of adjusting substrate 60 makes its transfer direction with print head 20 consistent.That is, bearing 70 can according to the orthogonal diaxon of plate face direction of substrate 60 (X, Y) direction is transferred substrate, and can with the perpendicular axis (Z) of the plate face direction of substrate 60 be that the center is rotated.Therefore, bearing 70 support substrates 60, and can transfer substrate 60 and make the substrate identification marking 61 of substrate 60 consistent with the transfer direction of print head 20.And (X, Y) transfer direction can (X, Y) transfer direction difference also can be set to identical the diaxon of bearing 70 with the diaxon of above-mentioned print head 20.
Alignment device 10 can also comprise the display part 90 that is used to show the image of being taken by first camera 40 and second camera 50 as shown in Figure 4.Display part 90 links to each other with first camera 40 and second camera 50, shows the image of being taken by first camera 40 and second camera 50.For example, display part 90 shows three image (C) at first image (A) of second camera 50 and print head 20 benchmark nozzles 23 with by what second camera 50 was taken at the substrate identification marking 61 of substrate 60 and second image (B) of benchmark pixel 65 by what first camera 40 was taken by stack as shown in Figure 5.That is, display part 90 utilizes the 3rd image (C) that first image (A) and second image (B) is superposeed simultaneously and show to confirm whether the nozzle 21 of print head 20 correctly is positioned on the pixel 63 of substrate 60.Thus, the user can confirm alignment case more easily, thereby makes the substrate 60 and the alignment of print head 20 become more accurate.
Control part 80 as shown in Figure 4, by the print mark 31 of the captured transparent print 30 of first camera 40 relatively and second camera 50, control print head handover portion 25 makes second camera 50 aim at first camera 40.Therefore, can carry out the alignment work of first camera 40 and second camera 50 simply.And in order to confirm the alignment of first camera 40 and second camera 50, control part 80 can compare the image of taking transparent print 30 print marks 31 once more.And control part 80 can be carried out multiple function, because these functions repeat mutually with the content of the alignment procedures that will be described later, therefore omits its explanation at this.
According to said structure, the alignment procedures of foundation alignment device 10 provided by the present invention is described below with reference to Fig. 1 and Fig. 6.
At first, in the step S110 that second camera is transplanted on the transparent print, as Fig. 1 (A) and shown in Figure 6, second camera 50 is moved to the top of the transparent print 30 that is arranged on bearing 70 1 sides or adjacent area by print head handover portion 25.At this moment, first camera 40 is arranged on the below of transparent print 30.
In the shooting step S115 of transparent print, as Fig. 1 (A) and shown in Figure 6, first camera 40 and second camera 50 are taken the print mark 31 of transparent print 30 respectively above reaching below the transparent print 30.
In the step S120 of the image that compares first camera 40 and second camera 50, as shown in Figure 6, by control part 80 relatively after the captured image of first cameras 40 and second camera 50, calculate the offset distance of the captured image of first camera 40 and second camera 50.This comparison procedure can be added their confirmation by image by display part 90.
In the alignment procedures S125 of second camera, as shown in Figure 6, print head handover portion 25 is moved a certain distance, and this distance and first camera and second camera offset distance between captured image in image comparison step S120 equates, so that second camera 50 is over against first camera 40.In view of the above, first camera 40 and second camera 50 can be aimed at the tram respectively.At this, can also move first camera 40 as required, make first camera 40 and second camera 50 aim at the tram respectively.
In the step S130 that takes once more, as shown in Figure 6, under the state of the alignment procedures S125 that finishes second camera, first camera 40 and second camera 50 repeat to take the above-mentioned steps S115 of transparent print, then by the more captured image of control part 80.In view of the above, control part 80 is confirmed the degrees of offset of print mark 31, carries out next procedure when degrees of offset is within predetermined error range, when degrees of offset surpasses error range, and the step S130 that repeats to take once more.Therefore, can correctly carry out the alignment work of first camera 40 and second camera 50.
In the step S135 that measures the benchmark nozzle distance, as shown in Figure 6, by the Image Acquisition of taking by first camera 40 from second camera 50 to nozzle near the distance the benchmark nozzle 23 of second camera 50.That is, control part 80 can calculate from second camera 50 to the distance the benchmark nozzle 23 according to the image of second captured camera 50 and benchmark nozzle 23.And, can also calculate successively as required from second camera 50 to the distance other nozzles.
In that second camera is transplanted among the on-chip step S140, as Fig. 1 and shown in Figure 6, second camera 50 is shifted into substrate 60 tops by bearing 70 supports of Fig. 1 (B) from transparent print 30 positions of Fig. 1 (A) by print head handover portion 25.
In the detection and handover step S145 of benchmark pixel, as shown in Figure 6, second camera 50 is taken benchmark pixel 65 after the substrate identification marking 61 of confirming substrate 60, some parts among control part 80 mobile printing head handover portions 25 and the bearing 70 make the position of the benchmark pixel 65 and second camera 50 consistent.And, control part 80 utilization measure among the step S135 of benchmark nozzles detected from second camera 50 to the distance the benchmark nozzle 23, at least one parts among mobile printing head handover portion 25 and the bearing 70 make benchmark nozzle 23 alignment fiducials pixels 65.The information of the spacing of being separated by between the pixel 63 is usually by input part 81 inputs.But, as required can be by the distance between second camera, 50 each pixels 63 of shooting, by the distance between control part 80 these each pixels 63 of calculating.Thus, can simply print head 20 and pixel 63 be registered to the tram.
In the step S150 that sprays ink, as shown in Figure 6, spray ink by nozzle 21 and fill predetermined pixel 63.
As mentioned above, have transparent print and two cameras, therefore when the alignment work of carrying out between substrate and the print head, do not need to carry out special injection (Jetting) operation according to alignment device provided by the present invention.Therefore, can reduce expenses such as ink that spraying operation consumes, glass and time and reduce cost.And, for large-scale display board etc., by using two cameras structure is become simply, and can further improve correctness by the affirmation process, can also be easy in addition use at existing alignment device.And, compare with seeing through the process that substrate takes, can reduce and disturb or the distortion situation of the injection orifice image that refraction etc. causes.
In sum, can provide accurately and carry out easily the alignment device and the method thereof of the alignment work of substrate and print head.

Claims (6)

1, a kind of alignment device is used for aiming at operation to having a plurality of pressworks with the print head of nozzle, it is characterized in that comprising:
Be used to support and transfer the print head handover portion of described print head;
Support and can transfer the bearing of substrate, this substrate has the substrate identification marking and with a plurality of pixels of equidistant formation;
Be located at described print head below and have the transparent print of the predetermined print mark that can take with transparent form, this transparent print is arranged on a side of described bearing;
Be located at the below of described transparent print and take the print mark of described transparent print and first camera of the benchmark nozzle of described print head;
Second camera that combines with described print head, this second camera is used to take the print mark of described transparent print, and takes the substrate identification marking of described substrate when being shifted into described substrate top;
Control part, control described print head handover portion by more described first camera and the captured image of described second camera, so that described second camera is aimed at described first camera, and utilize the distance between the benchmark nozzle of described second camera that calculates by described first camera and described print head, control at least one in the two of described print head handover portion and described bearing, so that the benchmark nozzle of described print head is corresponding to the benchmark pixel of described substrate.
2, alignment device according to claim 1, it is characterized in that described control part also is included in second camera and aims under the state of first camera, the print marking image of the described transparent print that more described first camera and described second camera are captured is aimed at the function of the situation of first camera to judge second camera once more.
3, alignment device according to claim 1 and 2, it is characterized in that described control part based on described first camera captured with the benchmark nozzle image nearer described print head of described second camera, calculate the distance the benchmark nozzle from described second camera to described print head.
4, alignment device according to claim 3 is characterized in that:
Described control part also be included in described second camera be shifted on the described substrate after based on the substrate identification marking of the captured described substrate of described second camera, seek the function of the benchmark pixel of described substrate.
5, a kind of alignment methods is used for aiming at operation to having a plurality of pressworks with the print head of nozzle, it is characterized in that comprising step:
Take the print mark of described transparent print by first camera that is located at transparent print below with predetermined print mark;
Take the print mark of described transparent print by being combined in second camera on the described print head that is positioned at described transparent print top;
By more described first camera and the captured image of described second camera, control is used to support and can transfers the print head handover portion of described print head, so that described second camera is aimed at first camera;
That take successively based on described first camera and the benchmark nozzle image nearer described print head of described second camera calculate the distance the benchmark nozzle from described second camera to described print head;
Described second camera is transplanted on by bearing support and the substrate top that can be transferred by bearing, and this substrate has the substrate identification marking and with a plurality of pixels of equidistant formation;
Based on the substrate identification marking of the captured described substrate of described second camera that is shifted into described substrate, seek the benchmark pixel of described substrate;
Based on calculated from described second camera to the distance the described benchmark nozzle, control some in the two of described print head handover portion and described bearing, so that the benchmark pixel of the described substrate of benchmark nozzle alignment of described print head.
6, alignment methods according to claim 5, it is characterized in that also being included in second camera aims under the state of first camera, the print marking image of the described transparent print that more described first camera and described second camera are captured is aimed at the step of the situation of first camera to judge second camera once more.
CNB2006101363332A 2005-11-07 2006-10-16 Alignment apparatus and method thereof Active CN100480802C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020050105886A KR100717271B1 (en) 2005-11-07 2005-11-07 Aligning apparatus and method of the same
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KR102346777B1 (en) * 2020-04-06 2022-01-04 (주)에스티아이 Align apparatus and inkjet printing system having the same, align meothd using the same
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