CN100475001C - Multilayer structure forming method, method of manufacturing wiring board, and method for manufacturing electronic apparatus - Google Patents
Multilayer structure forming method, method of manufacturing wiring board, and method for manufacturing electronic apparatus Download PDFInfo
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- CN100475001C CN100475001C CNB2005101063403A CN200510106340A CN100475001C CN 100475001 C CN100475001 C CN 100475001C CN B2005101063403 A CNB2005101063403 A CN B2005101063403A CN 200510106340 A CN200510106340 A CN 200510106340A CN 100475001 C CN100475001 C CN 100475001C
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Abstract
The invention provides a multilayer construction with through holes by means of a liquid-drop ejection device. The forming method of the multilayer construction comprises the following steps: ejecting electrical conductivity material liquid-drop to form an electrical conductivity material figure on the surface of an object; burning to form the electrical conductivity material figure to form a wiring figure; ejecting the first insulation material liquid-drop containing photo-solidification material to form the first insulation material liquid-drop figure which rims the through holes on the wiring figure; solidifying the first insulation material figure to form the first insulation figure which rims the through holes; the steps of lyophilic operation on the surface of the object; ejecting the second insulation material liquid-drop containing the photo-solidification material to form a second insulation material figure which surrounds the first insulation figure and covers the wiring figure and the surface of lyophilic object ; solidifying the second insulation material figure to form the second insulation figure which surrounds the first insulation figure.
Description
Technical field
The invention relates to the multi-ply construction formation method of utilizing droplet ejection apparatus, especially about optimum multi-ply construction formation method in wiring substrate manufacturing and electronic instrument manufacturing.
Background technology
The addition method that use is formed by print process (additive process) is made the method for wiring substrate and circuit substrate and is extensively gazed at.This is that the cost of addition method is low because (carrying out film coated method and photoetching process repeatedly) compared with the method for making wiring substrate and circuit substrate.
As one of technology of utilizing in this addition method, the known technology (for example patent documentation 1) that has the ink-jet method utilized to form conductive pattern.
(patent documentation 1) spy opens communique 2004-No. 6578
When forming Wiring pattern,, obtain Wiring pattern by the conductive material pattern by the droplet ejection apparatus configuration is burnt till with ink-jet method.By burning till the Wiring pattern surface that forms, has lyophobicity for aqueous insulating material such as allyl resins.Thus on this Wiring pattern, describe the insulating pattern of regulation via hole profile with ink-jet method, not difficult.
Yet, when forming Wiring pattern, owing to burn till, even the surface of part all presents lyophobicity beyond the distribution.Specifically, because above-mentioned burning till, do not have the part of Wiring pattern, and the surface that manifests insulating barrier is a lyophobyization.Thus, near the part beyond the through hole, use ink-jet method to be difficult to the uniform insulating barrier of stacked thickness.
In addition, when using ink-jet method formation to have the insulating barrier of through hole or contact hole, require the higher liquid material of working concentration sometimes.If this is that the opening portion that becomes through hole is easy to form desired profile because the higher liquid material of this concentration then after ejection, is accompanied by the gasification of solvent, and needed time ratio is shorter up to losing flowability.
Yet after this liquid material bullet dropped on the body surface, it was very little to expand wetting area.Liquid material like this, in insulating barrier, when forming the through hole insulated part, though suitable, when forming, all produced difficulty away from throughhole portions.
Summary of the invention
The present invention carries out in view of above-mentioned problem, uses droplet ejection apparatus, forms the multi-ply construction with through hole.
In the multi-ply construction formation method of the present invention, used droplet ejection apparatus.This multi-ply construction formation method comprises the steps:
Steps A, ejection the 1st conductive material drop forms the 1st conductive material pattern on body surface;
Step B burns till above-mentioned the 1st conductive material pattern, forms Wiring pattern;
Step C, ejection contains the 1st insulating material drop of the 1st photo-curable material, on above-mentioned Wiring pattern, forms the 1st insulating material pattern with the through hole fringing;
Step D makes above-mentioned the 1st insulating material pattern cured, forms the 1st insulating pattern with above-mentioned through hole fringing;
Step e makes above-mentioned body surface form lyophilyization;
Step F, ejection contains the 2nd insulating material drop of the 2nd photo-curable material, covers the above-mentioned body surface of above-mentioned Wiring pattern and lyophilyization, forms the 2nd insulating material pattern around above-mentioned the 1st insulating pattern; With
Step G makes above-mentioned the 2nd insulating material pattern cured, forms the 2nd insulating pattern around above-mentioned the 1st insulating pattern.
Above-mentioned the 1st conductive material contains silver (Ag) nano particle.
By one of above-mentioned effect that constitutes acquisition, use droplet ejection apparatus, can form multi-ply construction with through hole.
Above-mentioned multi-ply construction formation method preferably also comprises:
Step H sprays the 2nd conductive material drop to above-mentioned through hole, fills up above-mentioned through hole with above-mentioned the 2nd conductive material;
Step I to filling up above-mentioned the 2nd conductive material of above-mentioned through hole, forms conducting terminal.
According to above-mentioned formation, use droplet ejection apparatus, can form multi-ply construction with conducting terminal.
According to certain form of the present invention, the manufacture method of wiring substrate comprises above-mentioned multi-ply construction formation method.According to another kind of form, the manufacture method of electronic instrument comprises above-mentioned multi-ply construction formation method.According to these, use droplet ejection apparatus, can make wiring substrate and electronic instrument.
Multi-ply construction formation method of the present invention is used droplet ejection apparatus.This multi-ply construction formation method may further comprise the steps:
Steps A will be positioned at the Wiring pattern surface on the body surface, form lyophobyization;
Step B, to the Wiring pattern surface of above-mentioned lyophobyization, ejection contains the 1st insulating material drop of the 1st photo-curable material, on above-mentioned Wiring pattern, forms the 1st insulating material pattern with the through hole fringing;
Step C makes above-mentioned the 1st insulating material pattern cured, forms the 1st insulating pattern with above-mentioned through hole fringing;
Step D makes above-mentioned body surface form lyophilyization;
Step e, ejection contains the 2nd insulating material drop of the 2nd photo-curable material, covers the above-mentioned body surface of above-mentioned Wiring pattern and lyophilyization, forms the 2nd insulating material pattern around above-mentioned the 1st insulating pattern simultaneously; With
Step F makes above-mentioned the 2nd insulating material pattern cured.
One of effect that is obtained by above-mentioned feature is, even do not adjust the viscosity of liquid material (above-mentioned insulating material), owing to changed the wetting degree of expansion on body surface, so the use droplet ejection apparatus also can form the insulating barrier (the 1st insulating material pattern of curing and the 2nd insulating material pattern) with through hole.
Above-mentioned multi-ply construction formation method preferably also contains:
Step G sprays liquid conductive material drop, fills up above-mentioned through hole with above-mentioned conductive material; With
Step H burns till the above-mentioned conductive material that fills up above-mentioned through hole, forms conducting terminal.
According to above-mentioned feature, use droplet ejection apparatus, conducting terminal can be set in through hole.
Above-mentioned conductive material preferably contains silver (Ag).
According to above-mentioned feature, use droplet ejection apparatus, form conducting terminal easily.
Except multi-ply construction formation method, the present invention can also realize with various forms.For example, the manufacture method that the present invention can be used as wiring substrate realizes, can also realize as the manufacture method of electronic instrument.
Description of drawings
Fig. 1 is the ideograph of the droplet ejection apparatus of expression present embodiment 1～4.
Fig. 2 (a) and (b) be the figure of the shower nozzle pattern of expression in the droplet ejection apparatus.
Fig. 3 is the functional block diagram of the control part in the droplet ejection apparatus.
Fig. 4 (a)～(d) is the figure of the wiring substrate manufacture method of explanation execution mode 1.
Fig. 5 (a)～(c) is the figure of the wiring substrate manufacture method of explanation execution mode 1.
Fig. 6 (a)～(d) is the figure of the wiring substrate manufacture method of explanation execution mode 1.
Fig. 7 (a)～(d) is the figure of the wiring substrate manufacture method of explanation execution mode 1.
Fig. 8 (a) and (b) be the figure of wiring substrate manufacture method of explanation execution mode 1.
Fig. 9 (a) and (b) be the figure of wiring substrate manufacture method of explanation execution mode 2.
Figure 10 (a)～(d) is the figure of the wiring substrate manufacture method of explanation execution mode 3.
Figure 11 (a)～(d) is the figure of the wiring substrate manufacture method of explanation execution mode 3.
Figure 12 (a)～(d) is the figure of the wiring substrate manufacture method of explanation execution mode 3.
Figure 13 (a)～(c) is the figure of the wiring substrate manufacture method of explanation execution mode 3.
Figure 14 (a)～(c) is the figure of the wiring substrate manufacture method of explanation execution mode 4.
Figure 15 is the ideograph of the liquid crystal indicator of execution mode 5.
Figure 16 is the ideograph of the mobile phone of expression execution mode 5.
Figure 17 is the ideograph of the personal computer of expression execution mode 5.Among the figure:
1,2,3,4,5,6 ... droplet ejection apparatus, 7,17 ... insulating barrier, 7A, 17A ... insulating material, 7B, 17B ... insulation material layer, 9,11 ... insulating pattern, 9A, 11A ... insulating material, 9B, 11B ... the insulating material pattern, 8 ... conductive layer, 8A, 15A ... conductive material, 8B ... conductive material layer, 10 ... wiring substrate, 10A ... substrate, 10B ... matrix, 15B ... the conductive material pattern, 15 ... Wiring pattern, 25 ... Wiring pattern, 26 ... semiconductor element, 32 ... liquid crystal panel, 34 ... liquid crystal indicator, 40A, 40B ... through hole, 41A, 41B ... conducting terminal, 104 ... the 1st position control, 106 ... table top, 108 ... the 2nd position control, 112 ... control part, 114 ... shower nozzle, 118 ... nozzle, 140 ... light irradiation device, 500 ... mobile phone, 520 ... electro-optical device, 600 ... personal computer, 620 ... electro-optical device.
Embodiment
(execution mode 1)
(integral body of A, droplet ejection apparatus constitutes)
The multi-ply construction formation method of present embodiment is utilized the droplet ejection apparatus 1～6 of Fig. 1.Droplet ejection apparatus 1～6th sprays the device of insulating material 7A (Fig. 1), conductive material 8A, insulating material 9A, insulating material 11A, conductive material 15A, insulating material 17A respectively.And as following, these insulating material 7A, conductive material 8A, insulating material 9A, insulating material 11A, conductive material 15A, insulating material 17A are a kind of of liquid material.
Droplet ejection apparatus 1 shown in Figure 1 is ink discharge device basically.Say that more specifically droplet ejection apparatus 1 has: the container 101, pipeline 110, base GS, showerhead 103, table top the 106, the 1st position control the 104, the 2nd position control 108, control part 112, light irradiation device 140, the support section 104a that keep liquid material 111.The structure and the function of the structure of other 5 droplet ejection apparatus 2～6 and function and droplet ejection apparatus 1 are basic identical, and therefore, the structure and the function of these 5 droplet ejection apparatus 2～6 are saved explanation.
The 1st position control 104 is fixed on the position of base GS certain altitude by support section 104a.The function that this 1st position control 104 has is according to from the signal of control part 112, makes showerhead 103 along X-direction, and becomes the Z-direction of orthogonal to move with X-direction.And then the 1st position control 104 also has with the axle rotation parallel with the Z axle, rotates the function of showerhead 103.In the present embodiment, Z-direction is and the parallel direction of vertical direction (being the acceleration of gravity direction).
The 2nd position control 108 makes table top 106 on base GS according to the signal from control part 112, moves along Y direction.Y direction is the direction that all becomes orthogonal with X-direction and Z-direction.
Have the formation of the 1st position control 104 of above-mentioned functions and the formation of the 2nd position control 108, use the known XY automatics of having utilized linear motor or having raised the clothes motor to realize.For this reason, save herein they are elaborated.In addition, in this specification, the 1st position control 104 and the 2nd position control 108 remember that all work " manipulator " (robot) or " scanner section ".
As mentioned above, by the 1st position control 104 showerhead 103 is moved along X-direction.Equally, by the 2nd position control 108 substrate 10A is moved along Y direction with table top 106.These results make shower nozzle 114 change relative position to substrate 10A.More specifically say,, make showerhead 103, shower nozzle 114 or nozzle 118 (Fig. 2) by these actions, relative substrate 10A, on one side with Z-direction keep fixed distance, an edge X-direction and Y direction relatively move, and promptly carry out relative scanning.So-called " relatively moving " or " relative scanning " is meant liquid material 111 sides of ejection and relatively moves with respect to the opposing party from fall at least one side of side (being ejected portion) of the bullet of this side ejecta.
Constituting from external information processing of control part 112 accepted the ejection data of relative position that expression should spray the drop of liquid material 111.The ejection storage that control part 112 will receive according to the ejection data of storage, is controlled the 1st position control the 104, the 2nd position control 108 and shower nozzle 114 simultaneously in internal storage device.And so-called ejection data are to be used at substrate 10A, and with the data that decided pattern is paid liquid material 111, in the present embodiment, the ejection data have the form of bit flag data.
Droplet ejection apparatus 1 with above-mentioned formation makes the nozzle 118 (Fig. 2) of shower nozzle 114 relatively move with respect to substrate 10A according to the ejection data, sprays liquid material 111 from nozzle 118 to the portion of being ejected simultaneously.Relatively moving and can remember work " coating scanning " or " ejection scanning " by the shower nozzle 114 of droplet ejection apparatus 1 by the ejection of the liquid material 111 of shower nozzle 114.
In this specification, the drop bullet of the liquid material 111 part note that falls is done " being ejected portion ".The part note of the wetting expansion of drop that bullet falls is done " applied portion "." be ejected portion " and " applied portion ", any one all is to handle by base object is implemented surfaction, and the part that forms, so that liquid material presents desired contact angle in this part.But, even not carrying out surfaction handles, the surface of base object also presents desired lyophobicity or lyophily (promptly to liquid material, the liquid material that bullet falls presents desired contact angle on the base object surface) time, the surface of base object also can be " being ejected portion " or " applied portion ".In this specification, note is made " target " or " accepting part " will " to be ejected portion ".
Return Fig. 1, light irradiation device 140 is devices of liquid material 111 irradiating ultraviolet light of paying on substrate 10A.The UV-irradiation switch of light irradiation device 140 is by control part 112 controls.
So-called ink-jet method cambium layer, film or the pattern of using is to use device as droplet ejection apparatus 1, cambium layer, film or pattern on the fixed object.
(B, shower nozzle)
As Fig. 2 (a) with (b), the shower nozzle 114 in the droplet ejection apparatus 1 is the ink guns with a plurality of nozzles 118.Specifically, shower nozzle 114 has: nozzle plate 128, supply port 130 and the hole 131 of the opening separately of oscillating plate 126, hopper 129, a plurality of next door 122, a plurality of inner chamber (cavity) 120, a plurality of ticker 124, a plurality of nozzles 118 of regulation.Hopper 129 is between oscillating plate 126 and nozzle plate 128, and in this hopper 129, often never illustrated external container is supplied with filling liquid shape material 111 by hole 131.
In addition, a plurality of next doors 122 are between oscillating plate 126 and nozzle plate 128.Like this, the part that is centered on by oscillating plate 126, nozzle plate 128 and a counter septum 122 is an inner chamber 120.Owing to corresponding with nozzle 118 inner chamber 120 is set, so the number of inner chamber 120 is identical with the number of nozzle 118, in inner chamber 120, by the supply port 130 between a counter septum 122, from hopper 129 feed fluid shape materials 111.In the present embodiment, the diameter of nozzle 118 is about 27 μ m.
Corresponding with each die head 120, each ticker 124 is positioned on the oscillating plate 126.Ticker 124 contains pair of electrodes 124A, the 124B of piezoelectric element 124C and clamping piezoelectric element 124C respectively.Control part 112 controls are paid driving voltage between this a pair of electrode 124A, 124B, from the drop D of the liquid material 111 of nozzle 118 ejections of correspondence.From the material volume of nozzle 118 ejections, between below the above 42P1 of 0P1 (picoliter), change.Adjust the shape of nozzle 118, the drop D of liquid material 111 is sprayed from nozzle 118 along Z-direction.
In this specification, will contain a nozzle 118, the inner chamber 120 corresponding and do " ejection portion 127 " with the part note of the corresponding ticker 124 of inner chamber 120 with nozzle 118.Record and narrate according to this, a shower nozzle 114 has the ejection portion 127 of counting identical number with nozzle 118.Also can there be electrothermal conversioning element in ejection portion 127, to replace piezoelectric element.That is, ejection portion 127 also can have utilization makes material heat expansion by electrothermal conversioning element, sprays the structure of material.
(C, control part)
The formation of control part 112 below is described.As shown in Figure 3, control part 112 has: input buffer storage 200, storage device 202, handling part 204, light source drive part 205, scanning driving part 206 and shower nozzle drive division 208, but input buffer storage 200 and handling part 204 each other communication be connected.Handling part 204, storage device 202, light source drive part 205, scanning driving part 206 and shower nozzle drive division 208, can utilize not shown bus each other communication connecting.
But light source drive part 205 is being connected with light irradiation device 140 communications.But scanning driving part 206 and the 1st position control 104 and the 2nd position control 108 communication each other are being connected.Equally, but shower nozzle drive division 208 and shower nozzle 114 each other communication be connected.
Handling part 204 is according to the ejection data in the storage device 202, and the station-keeping data that 118 pairs at nozzle of expression is ejected portion sends scanning driving part 206 to.Scanning driving part 206 will send the 1st position control 104 and the 2nd position control 108 to according to these data and the table top drive signal in ejection cycle.This result can change 103 pairs of relative positions that are ejected portion of showerhead.And handling part 204 will spray liquid material 111 needed ejection signals and send shower nozzle 114 to according to the ejection data of storage in the storage device 202.The drop D of the corresponding liquid material 111 of nozzle 118 ejections from shower nozzle 114 consequently.
In addition, handling part 204 is according to the ejection data in the storage device 202, and the arbitrary state that light irradiation device 140 is in switch on and off specifically, is that each signal that handling part 204 will present the state of being switched on or switched off sends light source drive part 205 to.
(D, liquid material)
Above-mentioned what is called " liquid material 111 " is meant the nozzle 118 from shower nozzle 114, sprays the material with viscosity with drop D.At this, liquid material 111 no matter be water-based or oiliness, can just be enough to from the flowability (viscosity) of nozzle 118 ejections as long as have, even sneak into solid matter, be that liquid gets final product as a whole.The viscosity of liquid material 111 is preferably below the above 50mpa.s of 1mpa.s.Viscosity is when 1mpa.s is above, and when spraying the drop D of liquid material 111, the peripheral part of nozzle 118 is difficult to be polluted by liquid material 111.And viscosity is when 50mpa.s is following, and the obstruction frequency of nozzle 118 is very little, therefore can realize the ejection of satisfactory drop D.
Following conductive material 8A, 15A (Fig. 4 (d), Fig. 7 (c)) is a kind of of aforesaid liquid shape material 111. Conductive material 8A, 15A in the present embodiment contain silver particles and dispersant that average grain diameter is 10nm.Like this, in conductive material 8A, 15A, silver particles stably is dispersed in the dispersant.And, the most handy coating agent lining of silver particles.This coating agent be can coordination on silver atoms compound.
As dispersant (or solvent), as long as can disperse conductive particles such as silver particles, and do not produce the just passable of cohesion, there is not particular determination.For example, outside dewatering, example has hydrocarbon compounds such as alcohols such as methyl alcohol, ethanol, propyl alcohol, butanols, normal heptane, normal octane, decane, dodecane, the tetradecane, toluene, dimethylbenzene, propyltoluene, durene, indenes, cinene, naphthane, decahydronaphthalene, cyclohexylbenzene; Glycol dimethyl ether, ethylene glycol diethyl ether, Ethylene Glycol Methyl ether, diethylene glycol dimethyl ether, diethyl carbitol, diethylene glycol (DEG) MEE, 1, ether compounds such as 2-dimethoxy-ethane, two (2-methoxy ethyl) ether, P-diox and then propylene carbonate, gamma-butyrolacton, N-N-methyl-2-2-pyrrolidone N-, dimethyl formamide are arranged, dimethyl sulfoxide (DMSO), cyclohexanone isopolarity compound.In these, with regard to the dispersiveness of conductive particle and the stability of dispersion liquid, the difficulty that drop ejection method is suitable for, preferably water, alcohols, hydrocarbon compound, ether compound, better dispersant has water, hydrocarbon compound.
Average grain diameter is the particle of 1～100nm, and note is made " nano particle ".According to this record, conductive material 8A, 15A contain the nano particle of silver.
Following insulating material 7A, 9A, 11A, 17A also are liquid materials 111.Like this, insulating material 7A, 9A, 11A, 17A contain the photo-curable material.Specifically, the photo-curable material of present embodiment contains Photoepolymerizationinitiater initiater, acrylic monomers and/or oligomer.In the present embodiment, according to technological requirement, propylene class photoresist note is made " the 1st photo-curable material ", " the 2nd photo-curable material " and " the 3rd photo-curable material ".Like this, in the present embodiment, " the 1st photo-curable material ", " the 2nd photo-curable material " are identical with " the 3rd photo-curable material ".
Say that generally " photo-curable material " of the present invention contains solvent and the resin that is dissolved in the solvent.At this, " the photo-curable material " of this situation also can contain himself sensitization and improve the resin of the degree of polymerization, perhaps, also can contain resin and cause the Photoepolymerizationinitiater initiater of this resin solidification.
Certainly replace this form, " photo-curable material " of the present invention also can contain and carry out photopolymerization, can produce the monomer of insoluble insulating resin and cause the photopolymerisable Photoepolymerizationinitiater initiater of this monomer.But, " the photo-curable material " of this situation, if monomer whose self also can not contain Photoepolymerizationinitiater initiater when containing the light functional group.
Below the wiring substrate manufacture method of utilizing present embodiment multi-ply construction formation method is described.
(E, manufacture method)
At first, clean the surperficial S of substrate 10A with UV.Clean by UV, not only clean surperficial S, and can make surperficial S that following liquid insulating material 7A is presented suitable lyophily.Thus, in the present embodiment, the surperficial S after UV cleans becomes above-mentioned portion that is ejected and applied portion.
Below shown in Fig. 4 (a), use droplet ejection apparatus 1 on whole surperficial S, to form insulation material layer 7B.Specifically be at first, substrate 10A to be located on the table top 106 in droplet ejection apparatus 1.So, droplet ejection apparatus 1 changes the relative position of 118 couples of surperficial S of nozzle two-dimensionally and to change.(that is, X-direction and Y direction).Like this, droplet ejection apparatus 1 is according to the 1st ejection data, with fixed cycle, spray the drop D of liquid insulating material 7A to surperficial S from nozzle 118.So, striding on the whole surperficial S, a plurality of drop D with fixed spacing bullet fall and moistening expansion.During the moistening expansion of a plurality of drop D that bullet falls, obtain covering the insulation material layer 7B on S surface.Set volume and the quantity of the drop D of ejection insulating material 7A, make insulating barrier 7 (Fig. 4 (the c)) thickness that obtains behind the following curing process reach about 10 μ m.
In addition, Fig. 4 shows the XY cross section of substrate 10A.In the present embodiment, substrate 10A and the last more than one layer of substrate 10A are summarized to get up note work " substrate 10B ".
Then,, the insulation material layer 7B that obtains is solidified, form insulating barrier 7 as Fig. 4 (b) with (c).Specifically,, shine to insulation material layer 7B by light irradiation device 140 and to have the 1st wavelength light that belongs to the ultraviolet range about 60 seconds (sec), obtain insulating barrier 7 to insulation material layer 7B.In the present embodiment, the optical wavelength of shining to insulation material layer 7B is 365nm.
Forming following conductive material layer 8B pattern (Fig. 4 (d)) before, becoming the insulation material layer of its substrate 7B curing owing to make, so in the pattern of conductive material layer 8B, can not produce broken string.
Then, shown in Fig. 4 (d), use droplet ejection apparatus 2, on insulating barrier 7, form the pattern of conductive material layer 8B.Specifically, at first on the table top 106 of droplet ejection apparatus 2, substrate 10A is located.Like this, droplet ejection apparatus 2 changes the relative position on 118 pairs of insulating barrier 7 surfaces of nozzle two-dimensionally.Like this, droplet ejection apparatus 2 is according to the 2nd ejection data, and nozzle 118 is each when arriving with the corresponding position of conductive material layer 8B pattern, and 7 surface sprays the drop D of liquid conductive material 8A from nozzle 118 towards insulating barrier.So, a plurality of drop D of dropping on the insulating barrier 7 of bullet carry out moistening expansion.When a plurality of drop D that fall when bullet carry out moistening expansion, on insulating barrier 7, form the pattern of conductive material layer 8B.And volume and the quantity of the drop D of setting ejection conductive material 8A make the thickness of the conductive layer 8 (Fig. 5 (b)) that obtains after the following heating process reach about 4 μ m.
The droplet ejection apparatus 2 of present embodiment is corresponding with " the 1st droplet ejection apparatus " of the present invention.Therefore, the surface of insulating barrier 7 is examples of " body surface " of the present invention.
Then, shown in Fig. 5 (a), the pattern of conductive material layer 8B is activated, form the pattern of the conductive layer 8 shown in Fig. 5 (b).Specifically be to use the purification heater, under 150 ℃, the pattern of conductive material layer 8B burnt till (heating) 30 minutes (min).Like this, the silver particles among the conductive material layer 8B is sintered or is melting, and obtains the pattern of conductive layer 8.In the present embodiment, the pattern note of conductive layer 8 is made " Wiring pattern 25 (or conductive pattern) ".Fig. 5 (a) and (b) in the YZ cross section of matrix 10B has been shown.
So in the present embodiment, be provided with cover insulating barrier 7 and Wiring pattern 25 insulating pattern 11 (following) before, burn till conductive material layer 8B in advance and form conductive layer 8.Like this, conductive layer 8 is subjected to the stress influence because of the generation of insulating material pattern 9B cure shrinkage, and the possibility of distortion can be lower.This is because the power of connecting airtight between insulating barrier 7 and the conductive layer 8 is better than the power of connecting airtight between insulating barrier 7 and the conductive material layer 8B (conductive layer 8 before the activate).
In addition, Wiring pattern 25 is positioned on the insulating barrier 7 that is formed by allyl resin.The insulating barrier 7 that is formed by allyl resin has played substrate 10A that polyimides is formed and the function of being connected airtight by the Wiring pattern 25 that silver forms, so the Wiring pattern in the present embodiment 25 is difficult to peel off.
Shown in Fig. 5 (c), Wiring pattern 25 contains distribution 25A, distribution 25B and distribution 25C.Distribution 25A, 25B, any one shape of 25C all are strip.These distributions 25A, 25B, 25C width separately are about 50 μ m.Say that more specifically these distributions 25A, 25B, 25C lay respectively on the part of insulating barrier 7 of what is called " full film ".That is, these distributions 25A, 25B, 25C are positioned on the Surface L 1 of roughly the same level.But, among these distributions 25A, 25B, the 25C, any 2 distributions on Surface L 1 each other in physical separation.In addition, according to following operation, distribution 25A and distribution 25B should be the distributions that is electrically connected to each other.On the other hand, distribution 25C should be with distribution 25A and distribution 25B in any one becomes the distribution of insulation.The XY plane of matrix 10B has been shown among Fig. 5 (c).
In the present embodiment, terminal forms regional 18A and is set on the distribution 25A, and terminal forms regional 18B and is set on the distribution 25B.Terminal forms the position that conducting terminal is set after regional 18A, 18B are.And basal region 19A is positioned at so that form regional 18A round terminal, and basal region 19B is positioned at so that form regional 18B round terminal.
Then, shown in Fig. 6 (a), use droplet ejection apparatus 3, insulating material pattern 9B is set respectively on basal region 19A, 19B.
At first, substrate 10A is located on the table top 106 of droplet ejection apparatus 3.So, droplet ejection apparatus 3 makes the relative position on 118 couples of matrix 10B of nozzle surface become two dimension.Like this, droplet ejection apparatus 3 when nozzle 118 arrives with basal region 19A, the corresponding position of 19B at every turn, sprays the drop of liquid insulating material 9A according to the 3rd ejection data from nozzle 118 basad regional 19A, 19B.Like this, a plurality of drop D bullets drop on basal region 19A, the 19B, and wetting expansion.When the wetting expansion of a plurality of drop D that bullet falls, on basal region 19A, 19B, form insulating material pattern 9B respectively.
The droplet ejection apparatus 3 of present embodiment is corresponding with " the 2nd droplet ejection apparatus " of the present invention.
At this, basal region 19A, 19B are the surfaces on the silver-colored Wiring pattern 25 that forms, and basal region 19A, 19B are lyophobicity to insulating material 9A.For this reason, to drop on the fall degree of the moistening expansion of drop D of insulating material 9A of bullet on basal region 19A, the 19B very little for bullet.For this reason, the suitable shape that forms through hole with ink-jet method of basal region 19A, 19B.
Then,, 2 insulating material pattern 9B are solidified, form 2 insulating patterns 9 as Fig. 6 (b) with (c).Specifically, shine to insulating material pattern 9B by light irradiation device 140 and to have the 1st wavelength light that belongs to ultraviolet region about 60 seconds, obtain insulating pattern 9.In the present embodiment, the optical wavelength of shining to insulating material pattern 9B is 365nm.Like this, the inboard of 2 insulating patterns 9 forms through hole 40A, 40B respectively.That is, 2 insulating patterns 9 make through hole 40A, 40B fringing respectively.
After forming insulating pattern 9, shown in Fig. 6 (d), basal region 20 is formed lyophilyization.Locating, said basal region 20 is to be connected with basal region 19A, 19B, simultaneously again round the zone of basal region 19A, 19B.Perhaps, basal region 20 is not neither basal region 19A, 19B are again the surfaces that terminal forms regional 18A, 18B.In the present embodiment, basal region 20 is made of the surface of a part of Wiring pattern 25 and the surface of a part of insulating barrier 7.
When basal region 20 is formed lyophily, specifically be about 60 seconds 2nd wavelength light different of surperficial uniform irradiation of basad regional 20 with above-mentioned the 1st wavelength.So, the part of basal region 20, promptly the surface of insulating barrier 7 presents lyophily to following liquid insulating material 11A (Fig. 7 (a)).In the present embodiment, the 2nd wavelength is 172nm.
One of index of expression lyophily degree is " contact angle ".In the present embodiment, when the drop D of insulating material 11A contacted with the insulating barrier of lyophilyization 7 surfaces, the contact angle that the surface of drop D and insulating barrier 7 forms was below 20 degree.
The reasons are as follows of lyophilyization carried out on the surface of insulating barrier 7: when through for the curing process that obtains insulating barrier 7, for the curing process that obtains insulating pattern 9 or for obtain Wiring pattern 25 burn till (heating) operation the time, the surface of insulating barrier 7 presents lyophobicity to liquid insulating material 11A.At this, when body surface presents lyophobicity, be difficult in and form layer uniformly on the broad area.Opposite with it, in the present embodiment, behind the firing process, because the surperficial lyophilyization of insulating barrier 7, so the droplets wet degree of expansion of insulating material 11A (degree of lyophily) increases on the surface of whole insulating barrier 7 once more.Thus, on whole insulating barrier 7, can form the insulating pattern 11 that has an even surface.
Then, use droplet ejection apparatus 4, on basal region 20, form insulating material pattern 11B.Specifically, shown in Fig. 7 (a), at first, determine the position of substrate 10A on the table top 106 of droplet ejection apparatus 4.So, droplet ejection apparatus 4 changes the relative position of 118 pairs of basal regions 20 of nozzle two-dimensionally.Droplet ejection apparatus 4 is according to the 4th ejection data, in that nozzle 118 is each when arriving with the corresponding position of insulating material pattern 11B, sprayed the drop D of liquid insulating material 11A to the surface of the surface of insulating barrier 7 or Wiring pattern 25 by nozzle 118.So, a plurality of drop D bullets drop on the basal region 20, and carry out moistening expansion.When a plurality of droplets wet expansion that bullet falls, forming insulating material pattern 11B on the insulating barrier 7 and on the Wiring pattern 25.That is, obtain centering on the insulating material pattern 11B of insulating pattern 9.
The droplet ejection apparatus 4 of present embodiment is corresponding with " the 3rd droplet ejection apparatus " of the present invention.
As mentioned above, by lyophily chemical industry preface the preceding, the surface of insulating barrier 7 presents lyophily to liquid insulating material 11A.For this reason, bullet drop on the drop D of the lip-deep insulating material 11A of insulating barrier 7 can moistening equably expansion on these surfaces.In addition, spray in the data, set volume and the quantity of ejection drop D, so that insulating material pattern 11B can absorbent insulation layer 7 and the jump (highly about 4 μ m) that is positioned at Wiring pattern 25 formation on the insulating barrier 7 the 4th.Thus, the insulating pattern 11 that obtains behind the following curing process is flat condition on the whole insulating pattern 11 on its surface.
Then,, insulating material pattern 11B is solidified, form insulating pattern 11 as Fig. 7 (b) with (c).Specifically be to shine the light that have the 1st wavelength that belongs to ultraviolet region about 60 seconds to insulating material pattern 11B, obtain insulating pattern 11 by light irradiation device 140.In the present embodiment, the light wavelength of irradiation insulating material pattern 11B is 365nm.
Because basal region 19A, 19B and basal region 20 join, so insulating pattern 11 also joins with the insulating pattern 9 that forms.In addition, the thickness of insulating pattern 11 is about 10 μ m on insulating barrier 7, be about 6 μ m on Wiring pattern 25.And, set the ejection scanning of the drop D of droplet ejection apparatus 4 formation, so that the surface of the surface of insulating pattern 9 and insulating pattern 11 constitutes the Surface L 3 of peer-level.
After forming insulating pattern 11, shown in Fig. 7 (c), use droplet ejection apparatus 5, fill up through hole 40A, 40B by the insulation shape of insulating pattern 9 fringings with conductive material 15A.
Specifically be that at first, droplet ejection apparatus 5 changes the relative position of 118 couples of matrix 10B of nozzle two-dimensionally.Like this, when nozzle 118 arrived with through hole 40A, the corresponding position of 40B, droplet ejection apparatus 5 was by the drop D of nozzle 118 ejection conductive material 15A.The drop D bullet of the conductive material 15A of ejection drops on the pattern (Wiring pattern 25) of the conductive layer 8 that is exposed by through hole 40A, 40B.Like this, drop in through hole 40A, the 40B by the drop D bullet that fills up sufficient amount in through hole 40A, the 40B, shown in Fig. 7 (c), through hole 40A, 40B are filled up by conductive material 15A.
The droplet ejection apparatus 5 of present embodiment is corresponding with " the 4th droplet ejection apparatus " of the present invention.
Then, reuse the drop D of droplet ejection apparatus 5 ejection conductive material 15A, on insulating pattern 9,11, form the conductive material pattern 15B that 2 through hole 40A, 40B are connected.
Like this, conductive material 15A in through hole 40A, the 40B and conductive material pattern 15B are activated.In the present embodiment, shown in Fig. 7 (d), pay heat Q and heat, the particulate of the silver among the conductive material 15A is carried out sintering or melting.Specifically be to use the purification stove, 150 degree heat matrix 10B 30 minutes down.So the result of activate shown in Fig. 8 (a), obtains being positioned at conducting terminal 41A, the 41B of these 2 through hole 40A, 40B, with the Wiring pattern 15 that is connected with conducting terminal 41A, 41B.
By conducting terminal 41A, 41B and Wiring pattern 15, be electrically connected to each other as the distribution 25A and the distribution 25B of the part of Wiring pattern 25.And the distribution 25C of the part of Wiring pattern 25, for distribution 25A, or for distribution 25B maintenance electric insulation.
Then, lyophilyizations carry out in the surface of insulating pattern 9,11 and the surface of Wiring pattern 15.Specifically be light to the surperficial uniform irradiation of matrix 10B above-mentioned the 2nd wavelength in about 60 seconds.So, the surface of insulating pattern 9,11 and the surface of Wiring pattern 15 present lyophily to following liquid insulating material 17A.As above-mentioned, the 2nd wavelength is 172nm.
Subsequently, though not shown, by using the ejection operation of droplet ejection apparatus 6, form the insulation material layer that covers insulating pattern 9,11 and Wiring pattern 15.
So, the insulation material layer that obtains is solidified, form insulating barrier 17.Specifically be to shine the light that have the 1st wavelength that belongs to ultraviolet region about 60 seconds to above-mentioned insulation material layer, obtain insulating barrier 17 by light irradiation device 140.In the present embodiment, the 1st wavelength is 365nm, and insulating barrier 17 is so-called full films.
Subsequently, with purifying stove, carry out the polymerization reaction of the polymer in insulating barrier 7, insulating pattern 9,11, the insulating barrier 17 fully once more with matrix 10B heating.Through above operation, obtain the wiring substrate 10 shown in Fig. 8 (b) by matrix 10B.
(execution mode 2)
The multi-ply construction formation method of present embodiment, except the formation method of insulating pattern 11, the multi-ply construction formation method of other and execution mode 1 is identical.For this reason, for the part identical with formation, omit explanation for avoiding repetition with the operation of execution mode 1.
At first, as explanation in the enforcement mode 1, on basal region 19A, the 19B on the Wiring pattern 25, insulating pattern 9 (Fig. 6 (a)～(c)) is set respectively.Subsequently, basad regional 20 carry out rayed, make the surperficial lyophilyization (Fig. 6 (d)) of insulating barrier 7.Be used to form the ejection operation of insulating pattern,, carry out following operation as usually flat surfaces being carried out.
Shown in Fig. 9 (a),, in the part that does not have Wiring pattern 25 on partial insulative layer 7, insulating pattern 51 is set by ejection operation and curing process.The thickness of setting insulating pattern 51 is identical with the thickness of Wiring pattern 25, so can not produce jump by Wiring pattern 25.That is, Wiring pattern 25 and insulating pattern 51 roughly form the Surface L 2 of same level.
Then, though not shown, the light to Surface L 2 irradiation 172nm makes Surface L 2 lyophilyizations.
Same ejection operation and the curing process of utilizing in Surface L 2, do not have on the part of insulating pattern 9 and through hole 40A, 40B insulating pattern 52 to be set.Thus, obtain shown in Fig. 9 (b), centering on the insulating pattern 52 of insulating pattern 9.The thickness of setting insulating pattern 52 is identical with the thickness of insulating pattern 9, so insulating pattern 52 and insulating pattern 9 roughly form the Surface L 3 of same level.
Carry out the operation the same later on, can form wiring substrate 10 with embodiment 1.
The insulating pattern 51 of present embodiment is corresponding with the insulating pattern 11 of execution mode 1 with insulating pattern 52.As above-mentioned, in the present embodiment, " ejection forms " forms insulating pattern 11 parts that are equivalent to execution mode 1 through for several times.So-called " ejection forms " is meant that utilization ejection operation forms patterns of material and utilizes curing process that patterns of material is solidified.
As long as carry out such operation, just insulating pattern can be set on flat surfaces.Thus, even under the thicker situation of the thickness of Wiring pattern 25, also can cover the side of Wiring pattern 25 well by insulating pattern.
In the above-mentioned operation, the ejection operation that is used to form insulating pattern 52 also can utilize rayed to carry out lyophily chemical industry preface to the insulating pattern 51 of substrate before carrying out.
(execution mode 3)
Below to utilizing the multi-ply construction formation method of present embodiment, the method for making wiring substrate describes.
At first, prepare to be provided with as Figure 10 (a) and the substrate 10A of the Wiring pattern 25P (b).At this, this Wiring pattern 25P has the structure of gold-plated on the surface of copper wiring (Au).Certainly, also can form by gold (Au) by whole Wiring pattern 25P.In the present embodiment, this Wiring pattern 25P is positioned on the surface of substrate 10A.Like this, the surface of substrate 10A is an example of the present invention " body surface ".Below also make " matrix 10B " with the blanket note in upper strata with one on substrate 10A and the substrate 10A.
Shown in Figure 10 (b), Wiring pattern 25P contains distribution 25PA, distribution 25PB and distribution 25PC.Distribution 25PA, distribution 25PB, 25PC have strip (strip) shape.These distributions 25PA, 25PB, 25PC width separately are about 50 μ m.Say that more specifically these distributions 25PA, 25PB, 25PC are positioned on the part of substrate 10A separately.That is, these distributions 25PA, 25PB, 25PC are positioned on certain Surface L 1 with roughly the same level.But, any 2 distributions among these distributions 25PA, 25PB, the 25PC, also on Surface L 1 each other physical separation.According to following operation, distribution 25PA and distribution 25PB are the distribution that is electrically connected each other.On the other hand, distribution 25PC be with distribution 25PA and distribution 25PB in any one answers the distribution of electric insulation.And Figure 10 (b) shows the XY plane of matrix 10B.So-called XY plane is meant that the both sides of above-mentioned X-direction and Y direction are parallel plane.
Then, as Figure 10 (c) with (d), lyophobyizatioies carry out in the surface of substrate 10A and the surface of Wiring pattern 25P.Specifically be on substrate 10A, to form fluoroalkyl silane (following note is made FAS) film 16.More specifically say, the solution and the matrix 10B of starting compound (being FAS) put into same closed container, placed under the room temperature 2～3 days.On on the substrate 10A surface and Wiring pattern 25P surface, form self-organization film (being FAS film 16) like this by organic molecular film.
In the present embodiment, the record on described " the substrate 10A surface of lyophobyization ", or the record on " the Wiring pattern 25P surface of lyophobyization " are meant to be positioned on the substrate 10A or the surface of the FAS film 16 on the Wiring pattern 25P.Figure 10 (c) shows the YZ cross section of substrate 10A.So-called YZ cross section is a parallel face on above-mentioned Y direction and Z-direction.
Return Figure 10 (b), in the present embodiment, on the surface of the distribution 25PA of lyophobyization, be set with terminal and form regional 18A, on the distribution 25PB surface of lyophobyization, be set with terminal and form regional 18B.Terminal forms the position that conducting terminal is set after regional 18A, 18B are.In addition, in the mode that forms regional 18A round terminal, be positioned at basal region 19A, in the mode that forms regional 18B round terminal, be positioned at and form basal region 19B.
Then, shown in Figure 11 (a), use droplet ejection apparatus 3, insulating material pattern 9B is set on basal region 19A, 19B respectively.
Specifically be at first, substrate 10A to be positioned on the table top 106 of droplet ejection apparatus 3.So, droplet ejection apparatus 3 changes the relative position on 118 couples of matrix 10B of nozzle surface two-dimensionally.Droplet ejection apparatus 3 is sprayed the drop D of liquid insulating material 9A by nozzle 118 basad regional 19A, 19B on nozzle 118 each arrival and the corresponding position of basal region 19A, 19B.Like this, moistening expansion after bullet on basal region 19A, the 19B falls a plurality of drop D.When the moistening expansion of a plurality of drop D that bullet falls, on basal region 19A, 19B, form insulating material pattern 9B.
Therefore, basal region 19A, 19B are the surfaces of the Wiring pattern 25P of lyophobyization, and basal region 19A, 19B are lyophobicity to insulating material 9A.For this reason, bullet drops on the drop D of the insulating material 9A on basal region 19A, the 19B, and the degree of its moistening expansion is very little.Therefore, the suitable shape that forms through hole with ink-jet method of basal region 19A, 19B.
Then,, 2 insulating material pattern 9B are solidified, form 2 insulating patterns 9 as Figure 11 (b) with (c).Specifically be to shine the 1st wavelength light that belongs to the ultraviolet range about 60 seconds to insulating material pattern 9B, obtain insulating pattern 9 by light irradiation device 140.In the present embodiment, the 1st wavelength is 365nm.Like this, the inboard of 2 insulating patterns 9 forms through hole 40A, 40B respectively.That is, 2 insulating patterns 9 are respectively with through hole 40A, 40B fringing.
After forming insulating pattern 9, shown in Figure 11 (d), basal region 20 carry out lyophilyization.At this, so-called basal region 20 is to join with basal region 19A, 19B, centers on the zone of basal region 19A, 19B simultaneously.Perhaps, basal region 20 is neither basal region 19A, 19B neither terminal form the surface of regional 18A, 18B.In the present embodiment, basal region 20 is that the part surface by the part surface of Wiring pattern 25P and substrate 10A constitutes.
When basal region 20 is carried out lyophily, specifically be that the 2nd wavelength light that belongs to the ultraviolet light zone about 60 seconds is shone on basad regional 20 surface equably.So, the FAS film with basal region 20 counterparts decomposes.Its result, expose on the surface of basal region 20 (surface of the surface of substrate 10A and Wiring pattern 25P).The surface of the basal region 20 that exposes presents lyophily by this rayed to following insulating material 11A (Figure 12 (a)).In the present embodiment, above-mentioned the 2nd wavelength is 172nm.
In addition, one of index of expression lyophily degree is " contact angle ".In the present embodiment, when the drop D of insulating material 11A contacted with the substrate 10A of lyophilyization surface, the contact angle that drop D and substrate 10A surface form was below 20 degree.
Then, shown in Figure 12 (a), use droplet ejection apparatus 4, on basal region 20, form insulating material pattern 11B.
Specifically be, at first, location substrate 10A on the table top 106 of droplet ejection apparatus 4.Like this, droplet ejection apparatus 4 changes the relative position of 118 pairs of basal regions 20 of nozzle two-dimensionally.So, droplet ejection apparatus 4, when its nozzle 118 each arrival and basal region 20 corresponding positions, by the liquid insulating material 11A drop D of basad regional 20 (the Wiring pattern 25P surfaces of the substrate 10A surface of lyophilyization or the lyophilyization) ejection of nozzle.A plurality of drop D of dropping on the basal region 20 of bullet carry out moistening expansion like this.When the moistening expansion of a plurality of drop D that bullet falls, forming insulating material pattern 11B on the substrate 10A and on the Wiring pattern 25P.That is, obtain centering on the insulating material pattern 11B of insulating pattern 9.
As above-mentioned, the surface of substrate 10A, in advance by above-mentioned lyophily chemical industry preface, formation presents lyophily to liquid insulating material 11A.For this reason, bullet drops on the drop D of the lip-deep insulating material 11A of substrate 10A, can even wetting expansion on these surfaces.Spray volume and the quantity of setting ejection drop D in the data, so that insulating material pattern 11B can absorptive substrate 10A and the jump (highly about 4 μ m) that is positioned at the Wiring pattern 25P formation on the substrate 10A.For this reason, insulating pattern 11 surfaces that obtain behind the following curing process are flat condition on whole insulating pattern 11.
Then,, insulating material pattern 11B is solidified, form insulating pattern 11 as Figure 12 (b) with (c).Specifically be, shine the 1st wavelength light that belongs to the ultraviolet range about 60 seconds to insulating material pattern 11B, obtain insulating pattern 11 by light irradiation device 140.In the present embodiment, the 1st wavelength is 365nm.
Because basal region 19A, 19B and basal region 20 join, so insulating pattern 11 joins with the insulating pattern 9 that forms in advance.In addition, the thickness of insulating pattern 11 is about 10 μ m on substrate 10A, be about 6 μ m on Wiring pattern 25P.And, set the drop D ejection scanning that forms by droplet ejection apparatus 4, make the surface of the surface of insulating pattern 9 and insulating pattern 11 constitute the Surface L 3 of par.
After forming insulating pattern 11, shown in Figure 12 (d), use droplet ejection apparatus 5, fill up through hole 40A, the 40B that forms by insulating pattern 9 fringings with conductive material 15A.
Specifically be, at first, location substrate 10A on the table top 106 of droplet ejection apparatus 5.So, droplet ejection apparatus 5 changes the relative position of 118 couples of matrix 10B of nozzle two-dimensionally.Like this, when nozzle 118 arrived the position corresponding with through hole 40A, 40B, droplet ejection apparatus 5 was by the drop D of nozzle 118 ejection conductive material 15A.The drop D bullet of the conductive material 15A of ejection drops on the Wiring pattern 25P that is exposed by through hole 40A, 40B.Like this, the drop D bullet that fills up the sufficient amount in through hole 40A, the 40B drops in through hole 40A, the 40B, and as described in Figure 12 (d), through hole 40A, 40B are filled up by conductive material 15A.
Then, with the drop D of droplet ejection apparatus 5 ejection conductive material 15A, on insulating pattern 9,11, form the conductive material pattern 15B that 2 through hole 40A, 40B are connected once more.
Equally, conductive material 15A in through hole 40A, the 40B and conductive material pattern 15B are activated.In the present embodiment, shown in Figure 13 (a), pay heat Q and heat, the nano particle of the silver among the conductive material 15A is carried out sintering or melting.Specifically be to use the purification stove, under 150 degree, matrix 10B heated 30 minutes.Huo Hua result shown in Figure 13 (b), obtains being positioned at 2 through hole 40A, 40B conducting terminal 41A, 41B separately and the Wiring pattern 15 that is connected with conducting terminal 41A, 41B like this.
By conducting terminal 41A, 41B and Wiring pattern 15, a part of distribution 25PA and the distribution 25PB of Wiring pattern 25P is electrically connected to each other.And, not only kept electric insulation to distribution 25PA but also to distribution 25PB as the distribution 25PC of the part of Wiring pattern 25P.
Below, though not shown, lyophilyizations carry out in the surface of insulating pattern 9,11 and the surface of Wiring pattern 15.It specifically is the 2nd wavelength light that belongs to ultraviolet region to the surperficial uniform irradiation of matrix 10B about 60 seconds.Like this, the surface of insulating pattern 9,11 and the surface of Wiring pattern 15 present lyophily to following liquid insulating material 17A.Above-mentioned the 2nd wavelength is 172nm.
Subsequently, though not shown, carry out the ejection operation of liquid insulating material 17A by utilizing droplet ejection apparatus 6, form the insulation material layer that covers insulating pattern 9,11 and Wiring pattern 15.
Equally, the insulation material layer that obtains is solidified, form insulating barrier 17.Specifically be, shine the 1st wavelength light that about 60 seconds kinds belong to the ultraviolet range to above-mentioned insulation material layer, obtain insulating barrier by light irradiation device 140.In the present embodiment, the 1st wavelength is 365nm.Insulating barrier 17 is so-called full films.
Subsequently, reuse the purification stove and add hot basal body 10B, carry out the polymerization reaction of the polymer in insulating pattern 9,11, the insulating barrier 17 fully.Through above operation, obtain the wiring substrate 10 shown in Figure 13 (c) by matrix 10B.
(execution mode 4)
The multi-ply construction formation method of present embodiment, except the formation method of insulating pattern 11, the multi-ply construction formation method of other and execution mode 3 is basic identical.For this reason, for execution mode 3 in operation with constitute the same part, for avoiding repeating to save explanation.
At first, as explanation in the enforcement mode 3, insulating pattern 9 (Figure 11 (a)～(c)) is set being positioned on the lip-deep basal region 19A of lyophoby Wiring pattern 25P, the 19B respectively.Subsequently, basad regional 20 carry out rayed, make the surface of substrate 10A and the surface of Wiring pattern 25P carry out lyophilyization (Figure 11 (d)).For forming the ejection operation of insulating pattern,, carry out following operation as treating flat surfaces usually.
Shown in Figure 14 (a),, in the part substrate 10A surface of lyophilyization, do not have on the part of Wiring pattern 25P insulating pattern 51 to be set by ejection operation and curing process.Because it is identical with the thickness of Wiring pattern 25P to set the thickness of insulating pattern 51, so can not produce jump by Wiring pattern 25P.That is, Wiring pattern 25P and insulating pattern 51 roughly form the Surface L 2 of same level.
Then, shown in Figure 14 (b), to the surface irradiation of matrix 10B about 60 second 172nm light, make the surface of matrix 10B carry out lyophilyization.
Equally, by ejection operation and curing process, in lyophily Surface L 2, both there be not insulating pattern 9 not have on through hole 40A, the 40B part insulating pattern 52 to be set yet.Like this, shown in Figure 14 (c), obtain insulating pattern 52 around insulating pattern 9.Because the thickness setting of insulating pattern 52 is identical with the thickness of insulating pattern 9, so insulating pattern 52 and insulating pattern 9 roughly form the Surface L 3 of same level.
Later on, can form wiring substrate 10 by carrying out the operation the same with execution mode 3.
The insulating pattern 51 of present embodiment is corresponding with the insulating pattern 11 of execution mode 3 with insulating pattern 52.Like this, in the present embodiment,, form the part of the insulating pattern 11 that is equivalent to execution mode 3 through repeatedly " spraying and form ".So-called " ejection forms " is meant the combination that forms patterns of material and by curing process patterns of material is solidified by the ejection operation.
As long as carry out such operation, just can on smooth surface, insulating pattern be set.For this reason, even the thickness of Wiring pattern 25P is thicker, still can utilize the side of insulating pattern lining Wiring pattern 25P well.
(execution mode 5)
Then, as shown in figure 15, liquid crystal panel 32 and semiconductor element 26 are installed in the execution mode 1～4 on any wiring substrate 10.Specifically, on the part of wiring substrate 10, form the pattern part of conductive layer 8, neither cover insulating pattern 9,11 and also do not cover insulating barrier 17.Equally, the corresponding bonding pad (pad) of liquid crystal panel 32 or the corresponding bonding pad of semiconductor element 26 are suitably engaged with conductive layer 8 patterns that expose.So just obtain liquid crystal indicator 34.As mentioned above, the manufacture method of present embodiment is applicable to the manufacturing of liquid crystal indicator 34.In the present embodiment, semiconductor element 26 is liquid crystal display drive circuits.
And then the manufacture method of present embodiment is not only applicable to the manufacturing of liquid crystal indicator 34, is applicable to the manufacturing of various electro-optical devices yet.Said herein " electro-optical device ", the meaning is to have more than the device that is defined in changes in optical properties (so-called electro optic effect) such as utilizing birefringence variation, optical activity variation, light scattering variation, also comprise according to the voltage signal that applies, emission, luminous, see through or catoptrical all devices.
Specifically, so-called electro-optical device term comprises display floater (SED:Surface-Conduction Electron-Emitter Display), electric field transmitted display floater (FED:Field Emission Display) of liquid crystal indicator, el display device, plasm display device, use surface conductive type electronic emission element etc.
And then the multi-ply construction formation method of present embodiment is applicable to the manufacture method of various electronic instruments.For example, as shown in figure 16, have the manufacture method and as shown in figure 17 of the mobile phone 500 of electro-optical device 520, have the manufacture method of the personal computer 600 of electro-optical device 620, also be suitable for the manufacture method of present embodiment.
(variation 1)
According to above-mentioned execution mode, 6 different droplet ejection apparatus 1,2,3,4,5,6 spray insulating material 7A, conductive material 8A, insulating material 9A, insulating material 11A, conductive material 15A, insulating material 17A respectively.Also can replace such formation, spray all these liquid materials by 1 droplet ejection apparatus (for example droplet ejection apparatus 1).At this moment, these liquid materials can spray by each nozzle 118 from droplet ejection apparatus 1.When these 6 kinds of liquid materials spray from 1 nozzle 118, switch when the liquid material, preferably append the operation of washing container 101 to nozzle path.
At this, when 1 nozzle sprayed these 6 kinds of liquid materials, " the 1st droplet ejection apparatus " of the present invention, " the 2nd droplet ejection apparatus ", " the 3rd droplet ejection apparatus " were corresponding with 1 identical droplet ejection apparatus with " the 4th droplet ejection apparatus ".
(variation 2)
In the above-mentioned execution mode, on the substrate 10A that constitutes by polyimides, multi-ply construction is set.Yet, also can utilize ceramic substrate, glass substrate, epoxy substrate, glass epoxy substrate or silicon substrate etc. to replace this substrate 10A, can obtain with above-mentioned execution mode in the identical effect of description effect.
(variation 3)
Among conductive material 8A, the 15A of above-mentioned execution mode, contain Nano silver grain.Yet, also can use other nano-sized metal particles to replace the nano particle of silver.As other metal, for example can utilize in gold, platinum, copper, palladium, rhodium, osmium, ruthenium, indium, iron, tin, zinc, cobalt, nickel, chromium, titanium, tantalum, tungsten, the indium any a kind, perhaps, any combined alloy more than 2 kinds.If silver owing to can reduce at a lower temperature, is handled easily, point when utilizing droplet ejection apparatus, preferably uses conductive material 8A, the 15A that contains Nano silver grain at this point.
In addition, conductive material 8A, 15A also can contain organo-metallic compound, the nano particle of substituted metal.Said herein organo-metallic compound is the compound by the heating and decomposition precipitating metal.In this organo-metallic compound, chlorine triethyl phosphine gold (I), chlorine trimethyl-phosphine gold (I), chlorine triphenylphosphine gold (I), silver (I) 2 are arranged, 4-diamyl thiosulfate complex (pentanedionatocomplex), trimethyl-phosphine (hexafluoro acetoacetic ester) silver (I) complex, copper (I) hexafluoro penta 2 thiosulfate cyclo-octadiene complexes (hexafluoropentanedionatocyclooctadiene complex) etc.
As above-mentioned, the form of institute's containing metal among liquid conductive material 8A, the 15A can be to be the particle shape of representative with the nano particle, also can be the compound form of organo-metallic compound one class.
And then conductive material 8A, 15A can be that soluble material replaces metal to contain macromolecules such as polyaniline, polythiophene, polyhenylene also.
(variation 4)
As implement described in the mode 1, the nano particle of the silver among conductive material 8A, the 15A can be covered with coating agents such as organic substances.As such coating agent, known have ammonia, alcohol, a mercaptan etc.More specifically say, as coating agent, amines such as 2-methylaminoethanol, diethanol amine, diethyl methylamine, 2-dimethylaminoethanol, methyl diethanolamine are arranged, alkyl amine, ethylene diamine, alkyl alcohols, ethylene glycol, propylene glycol, alkyl sulfide alcohols, ethane two mercaptan etc.Nano particle with the silver of coating agent lining can obtain stable dispersion in dispersant.
(variation 5)
In the execution mode 1, insulating barrier 7 and insulating pattern 9,11 all are made of same material.Insulating barrier 7, insulating pattern 9 and insulating pattern 11 also can be made of different materials.For example, insulating barrier 7 and insulating pattern 11 are allyl resins, and insulating pattern 9 is polyimide resins.In this case, insulating material 7A, 9A are the liquid materials that contains photonasty allyl resin monomer or oligomer, and insulating material 11A preferably contains the liquid material of photosensitive polyimide precursor.That is, in this case, " the 1st photo-curing material " of the present invention is different each other with " the 2nd photo-curable material ".
(variation 6)
According to above-mentioned execution mode, the wavelength light in irradiation ultraviolet radiation zone carry out lyophilyization with the surface of insulating barrier 7 and the surface of insulating pattern 9,11.Yet, also can replace this lyophilyization, in atmospheric environment, oxygen as handling gas, is implemented plasma O
2Handle, also can make the surface of insulating barrier 7 and the surface of insulating pattern 9,11 carry out lyophilyizations.Plasma O
2Processing is to substrate 10A (matrix 10B), by the processing of not shown plasma discharge electrode irradiation plasmoid oxygen.Plasma O
2Treatment conditions, plasma power is that 50～1000W, oxygen flow are that 50～100mL/ minute, the relative moving speed of matrix 10B article on plasma body sparking electrode are 0.5～10mm/ second, substrate temperature is preferably 70～90 ℃.
(variation 7)
According to above-mentioned execution mode, insulating barrier 7 can form with ink-jet method.Specifically be to utilize droplet ejection apparatus to form insulation material layer 7B.Yet also available other the layer formation method of insulating barrier 7 forms, and replaces ink-jet method.For example, can utilize print processes such as screen printing method and woodburytype to form.
Claims (10)
1. a multi-ply construction formation method of using droplet ejection apparatus is characterized in that, comprising:
Steps A sprays the 1st conductive material drop, forms the 1st conductive material pattern on body surface;
Step B burns till described the 1st conductive material pattern and forms Wiring pattern;
Step C, ejection contains the 1st insulating material drop of the 1st photo-curable material, forms the 1st insulating material pattern with the through hole fringing on described Wiring pattern;
Step D is cured described the 1st insulating material pattern, forms the 1st insulating pattern with described through hole fringing;
Step e carry out lyophilyization with described body surface;
Step F, ejection contains the 2nd insulating material drop of the 2nd photo-curable material, forms the described body surface that covers described Wiring pattern and lyophilyization, centers on the 2nd insulating material pattern of described the 1st insulating pattern simultaneously; With
Step G makes described the 2nd insulating material pattern cured, forms the 2nd insulating pattern around described the 1st insulating pattern.
2. multi-ply construction formation method according to claim 1 is characterized in that,
Described the 1st conductive material contains Nano silver grain.
3. multi-ply construction formation method according to claim 1 and 2 is characterized in that, also comprises:
Step H sprays the 2nd conductive material drop, fills up described through hole with described the 2nd conductive material; With
Step I burns till the 2nd conductive material that fills up described through hole, forms conducting terminal.
4. the manufacture method of a wiring substrate is characterized in that, comprising:
Multi-ply construction formation method described in each of claim 1～3.
5. the manufacture method of an electronic instrument is characterized in that, comprising:
Multi-ply construction formation method described in each of claim 1～3.
6. a multi-ply construction formation method of using droplet ejection apparatus is characterized in that, comprising:
Steps A, the Wiring pattern surface that will be positioned on the body surface forms lyophobyization;
Step B sprays the 1st insulating material drop that contains the 1st photo-curable material to the surface of described lyophoby Wiring pattern, forms the 1st insulating material pattern with the through hole fringing on described Wiring pattern;
Step C makes described the 1st insulating material pattern cured, forms the 1st insulating pattern with described through hole fringing;
Step D makes described body surface form lyophilyization;
Step e, ejection contains the 2nd insulating material drop of the 2nd photo-curable material, forms the described body surface that covers described Wiring pattern and lyophilyization, centers on the 2nd insulating material pattern of described the 1st insulating pattern simultaneously; With
Step F is cured described the 2nd insulating material pattern.
7. multi-ply construction formation method according to claim 6 is characterized in that, also comprises:
Step G sprays liquid conductive material drop, fills up described through hole with described conductive material; With
Step H burns till the described conductive material that fills up described through hole, forms conducting terminal.
8. multi-ply construction formation method according to claim 7 is characterized in that,
Described conductive material contains silver.
9. the manufacture method of a wiring substrate is characterized in that, comprising:
Multi-ply construction formation method described in each of claim 6～8.
10. the manufacture method of an electronic instrument is characterized in that, comprising:
Multi-ply construction formation method described in each of claim 6～8.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004278981 | 2004-09-27 | ||
| JP2004278981 | 2004-09-27 | ||
| JP2004297213 | 2004-10-12 | ||
| JP2005220146 | 2005-07-29 |
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| TW201228854A (en) * | 2011-01-13 | 2012-07-16 | Jiin Ming Industry Co Ltd | Decorative substrate and manufacturing method thereof |
| TWI418464B (en) * | 2011-07-27 | 2013-12-11 | Jiin Ming Industry Co Ltd | Multi-curable decorative board and its manufacturing method |
| CN109673111B (en) * | 2017-10-13 | 2021-08-20 | 宏启胜精密电子(秦皇岛)有限公司 | Method for manufacturing circuit board |
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