CN100464335C - Conversion Method of 3D Solid to Standard Process Layout in MEMS - Google Patents

Conversion Method of 3D Solid to Standard Process Layout in MEMS Download PDF

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CN100464335C
CN100464335C CNB2006100416544A CN200610041654A CN100464335C CN 100464335 C CN100464335 C CN 100464335C CN B2006100416544 A CNB2006100416544 A CN B2006100416544A CN 200610041654 A CN200610041654 A CN 200610041654A CN 100464335 C CN100464335 C CN 100464335C
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information
layer
file
tree
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CN1881221A (en
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常洪龙
苑伟政
徐景辉
谢建兵
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Northwestern Polytechnical University
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Abstract

The invention relates to a method for transforming the three-dimension solid into standard art work, in the micro mechanical electric system, wherein it comprises: 1, extracting and classifying the three-dimension solid document information; 2, classifying the solid record information; 3, rebuilding the solid record information and naming the rebuilt result as record tree; 4, extracting the top surface information from the rebuilt result used in transformation; 5, queuing the obtained surfaces according to the edge; 6, generating the standard art work. The inventive method can avoid other software, based on document o document technique, with high efficiency and wide application.

Description

3D solid is to the conversion method of standard technology domain in the MEMS (micro electro mechanical system)
(1) technical field under
The present invention relates to that 3D solid belongs to the MEMS (micro electro mechanical system) design field to the conversion method of standard technology domain in the MEMS (micro electro mechanical system).
(2) background technology
At present, the method for designing that MEMS (micro electro mechanical system) is general is at first to draw the domain of device, carries out carrying out the three-dimensional entity model that three-dimensionalreconstruction obtains device after the corresponding DRC, again this three-dimensional entity model is carried out performance simulation.If simulation result does not meet designing requirement, then revise domain, reconstruct 3D solid and emulation again, so iteration repeatedly till meeting design requirement, is used for processing plate-making with the domain through repeatedly revising at last.As seen, this is a kind of method for designing of poor efficiency, has the following disadvantages: the one, and the requirement deviser must be proficient in layout drawing; The 2nd, each iteration all needs domain is carried out three-dimensionalreconstruction, process complexity, inefficiency.And a kind of more satisfactory method for designing is the 3D solid of at first constructing device, and carries out performance simulation until meeting the demands, and at last 3D solid is converted to the output of standard technology domain, is used for further plate-making.Can avoid numerous and diverse element layout to draw and three-dimensionalreconstruction process consuming time like this.Therefore, 3D solid is the core technology of this method for designing to the conversion method of standard technology domain.
Darmstadt, Germany Polytechnics has proposed the conversion method of a kind of 3D solid to the standard technology domain.This method is at first constructed the three-dimensional entity model of device, and three-dimensional entity model is imported among the finite element analysis software ANSYS; Then under the ANSYS environment, this three-dimensional entity model is carried out finite element grid divide, use ANSYS to carry the geological informations such as point, line, surface that function extracts entity after the grid dividing, and classification is preserved; Again the geological information of preserving is imported in one " converter ", the DLL (dynamic link library) that " converter " utilizes ANSYS to provide is provided, use the C Plus Plus programming to realize, can be with the three-dimensional entity model geological information that extracts with the output of standard technology domain form, and be that the unit saves as the standard technology layout file with the polygon.
From the above mentioned, though this method can realize the conversion of 3D solid to the standard technology domain, also exist some significantly not enough: transfer process need rely on ANSYS and finish; Must carry out limited grid dividing to three-dimensional entity model, could extract the geological informations such as point, line, surface of solid model, to be accomplished to the conversion of standard technology domain.Use ANSYS to make whole transfer process very loaded down with trivial details, and require the user must buy ANSYS software; Three-dimensional entity model is carried out the time that grid dividing has prolonged transfer process again.
(3) summary of the invention
In order to overcome the above-mentioned defective of prior art, the present invention proposes a kind of fully independently, do not rely on any third party software, based on the conversion method of file to the 3D solid of file to the standard technology domain, the 3D solid of device directly can be converted to the standard technology domain, and the technology domain be saved as the CIF file layout of standard.
The basic concepts that relates to 3D solid:
1, topology: topology is meant the hierarchical relationship between the different objects in the three-dimensional entity model.In three-dimensional entity model, be to be mutually related between the topology objects by the pointer mode.Generally comprise following topology objects in the topological structure of three-dimensional entity model:
Body: the highest level of entity object is the set of piece.
Piece: a part relatively independent, body in the space, not interrelated between piece and the piece, its surface is made of shell.
Shell: the set of the surface composition of piece is used to define the inside or the perimeter of piece.
Face: the connected component in the curved surface that defines by ring.
Ring: the border by face constitutes.
Directed edge: the quoting of presentation surface opposite side.
Limit: the line that defines by the summit.
Summit: the angle point of body, face, line.
2, how much: how much are meant geometric element pure in the 3D solid, as point, line, surface etc., geometric description be physical dimension, shape and the location parameter of entity.
The present invention realizes that a kind of 3D solid in the MEMS (micro electro mechanical system) design tool is to the technical scheme of the conversion method of standard technology domain: at first, read a kind of file of 3D solid form, carry out the 3D solid fileinfo and extract 1, the style of writing of going forward side by side part information classification 2, fileinfo comprises file header information, entity record information and document end message.Wherein file header information comprises the information such as version number, entity number, long measure, precision of file; Entity record information comprises topology information, geological information and the attribute information of entity, and they also can segment, i.e. entity record information classification 3; Document end message is an end mark.Secondly, sorted entity record information is carried out tree-shaped reconstruct by level, promptly the entity record signal reconstruct 4, set up the hierarchical chart between the information, and this hierarchical chart is called the record tree.Successively traversal record is set then, and the hierarchical relationship according between the record tree object extracts all the end face information in the 3D solid file, determines the coordinate of 3D solid respective vertices.At last, create the complete domain of device according to apex coordinate, and, promptly generate standard edition map file 5 with the output of standard C IF form.
The concrete steps that realize this method are as follows:
Step 1: carry out extraction 1 of 3D solid fileinfo and fileinfo classification 2, and carry out entity record information classification 3 on this basis.
At first, by going the file that reads a kind of 3D solid form, extract All Files information and also be stored in the relevant register.
Secondly, the fileinfo in the register is classified.Fileinfo can be decomposed into file header, entity record information and end of file identifier three parts.Wherein file header can be further divided into the information such as version number, entity number, long measure, precision of file again; Entity record information is the key components of file, comprises topology information, geological information and the attribute information of entity; End of file identifier is the sign that file reads end, needn't divide again.
Once more, entity record information is segmented.Wherein topology information has been pointed out the hierarchical relationship between the entity object, can be decomposed into body, piece, shell, face, ring, directed edge, limit and summit successively from high to low by level; Geological information has been pointed out geological informations such as the dimensional parameters of each geometric element and location parameter, comprises face, line, point; Some attribute of AIT levies in kind body can be decomposed into color, skew of entity etc., can be used for distinguishing different entities.Need to prove, although the topology information object that has is the same with the title of geological information object, their implication difference, for example: in topology information, the summit is an object in the topological level, is the apex coordinate value and the point of geological information is represented.Entity record information after the segmentation is stored in the relevant register respectively by record name.
Step 2: carry out entity record signal reconstruct 4, reconstruction result is called the record tree.Reconstructing method is as follows:
1): travel through all bodies, search the attribute of each body according to the pointer corresponding relation of body and respective attributes, comprise color, skew etc., all properties information is deposited in the corresponding body, and all bodies are placed the top layer of record tree, a 3D solid file may comprise a plurality of bodies, and these bodies are positioned at same level in topological structure.
2): travel through all bodies once more, search all pieces that belong to each body, and these pieces are stored in respectively in following one deck of corresponding body, place the second layer of record tree according to the pointer corresponding relation of body and piece.
3): travel through all pieces, search all shells that belong to each piece, and these shells are stored in following one deck of relevant block respectively, place the 3rd layer of record tree according to the pointer corresponding relation of piece and shell.
4): travel through all shells, search all faces that belong to each shell, and these faces are stored in following one deck of respective shell, place the 4th layer of record tree according to the pointer corresponding relation of shell and face.
5): face is divided into manifold and geometric surface, places the layer 5 of record tree, and form manifold subrecord tree 6 and geometric surface subrecord tree 7 according to this respectively, manifold and geometric surface place the top layer of corresponding subrecord tree respectively.
6): travel through all manifold, search all rings that belong to each manifold according to the pointer corresponding relation of manifold and ring, and these rings are stored in following one deck of corresponding manifold, place the layer 6 of record tree, the second layer of manifold subrecord tree 6.Simultaneously geometric surface is divided into plane and curved surface, places the layer 6 of record tree, the second layer of geometric surface subrecord tree 7.Because the 3D solid file only at the regular geometric body, so can be ignored further operation to curved surface to the conversion of standard technology layout file.
7): travel through all rings, search all directed edges that belong to each ring, and these directed edges are stored in following one deck of respective rings, place the layer 7 of record tree, the 3rd layer of manifold subrecord tree 6 according to the ring and the pointer corresponding relation of directed edge.Forward geometric surface subrecord tree 7 then to, travel through all planes, according to the pointer corresponding relation of plane and line search belong to each plane wired, it is stored in the following one deck on plane, place the layer 7 of record tree, line is divided into straight line and circle two classes again, the line of other type can be ignored; With straight line and round following one deck that is stored in homologous lines, place the 8th layer of record tree, the geometric surface subrecord is set 7 the 4th layer.
8): travel through all directed edges, search every pairing limit of directed edge according to the pointer corresponding relation on directed edge and limit, and with its following one deck that deposits corresponding directed edge in, place the 8th layer of record tree, the manifold subrecord is set 6 the 4th layer.In the topological structure of 3D solid, the implication on directed edge and limit is different, and what directed edge was represented is situation about occurring among the Bian Zaihuan, it is directive, the normal vector of the direction of directed edge and its place face is observed the right-hand screw rule, and the limit does not have direction, and it is defined by end points fully; Therefore, a directed edge can only be corresponding with a unique limit, otherwise then be false, and for example: a rectangular parallelepiped contains 12 limits, but 24 directed edges are arranged.Forward geometric surface subrecord tree 7 then to, travel through all straight lines and circle,, obtain its end points coordinate for straight line; For circle, obtain central coordinate of circle and radius, and be stored in following one deck of homologous lines, place the bottom of geometric surface subrecord tree 7.
9): travel through all limits, search two summits that belong to every limit, and with its following one deck that deposits corresponding edge in, place the 9th layer of record tree, the layer 5 of manifold subrecord tree 6 according to the pointer corresponding relation on limit and summit.
10): travel through all summits, search the coordinate on each summit, and, place the bottom of record tree, the bottom of manifold subrecord tree 6 with its following one deck that deposits respective vertices in according to the pointer corresponding relation of summit and coordinate.
So far, the whole reconstruct of entity record information finish.
Step 3: from entity record signal reconstruct 4 results of step 2, extract the end face information that is used to change.Z coordinate figure according to all summits of forming face can be divided into side, end face and bottom surface to face, because the 3D solid file is actually the projection of 3D solid end face from geometry to the conversion of standard technology layout file.Therefore, the purpose of carrying out face classification is exactly to find the end face information of each body.Concrete grammar is as follows: travel through all bodies, for each body, compare all summit Z coordinates of each face, if exist the Z coordinate of two points unequal, then this face must be the side, can ignore; If the Z coordinate that the composition face is had a few all equates, then this face or end face, or bottom surface.From all end faces that extract and bottom surface, respectively get a bit then, Z coordinate relatively, then the Z coordinate figure is big all is designated as end face, that is to say the required face of standard technology layout file that is converted to.All faces that obtain are deposited in the shell under it, delete other surface information simultaneously.
Step 4: sort by interconnected relationship in all limits to each end face.Concrete sort method is as follows: travel through all faces, for any one face, at first the summit with every limit is made as initial point and terminal point respectively by the coordinate sequencing that extracts, appoint then and get a limit as first initial line, travel through all remaining sides, if the terminal point on the initial point on certain bar limit and article one limit overlaps fully, then with its second limit as this face, be to work as the front with the second limit again, travel through all remaining sides,, then it is saved as the 3rd limit if find the initial point on certain bar limit and the terminal point on second limit to overlap fully, so circulation finishes up to all limit orderings.If the border of face is made of circle, then need not ordering, because as long as determine central coordinate of circle and radius, the position of circle is just definite fully.Ranking results is deposited in the corresponding registers.
Step 5: generate standard edition map file 5.Take out in order one by one on the limit of all faces that above-mentioned ordering is finished, successively with the initial point on each bar limit summit as generates domain, if upper surface is to justify, then with central coordinate of circle and radius as the layout file parameter, and generate corresponding technology layout file.Generate layout file according to standard C IF layout file form.
1): travel through all bodies, determine domain layer title under the entity can be made as CPS as the structural sheet title according to the color attribute of body.
2): according to the shape attribute of the end face of body, the standard commands row format output drawing command that provides according to the CIF file, simple geometry figure of every order line output wherein is as circle, rectangle, polygon etc.
3): export geometric parameter information, for circle, output central coordinate of circle and radius information, for polygon, the order on the limit in five output vertex coordinate successively set by step.
4): determine to begin to export down one deck after current domain layer output finishes, repeat previous action then, finish until domain output.
5): output file end mark, expression standard edition map file end of output.
The present invention be a kind ofly fully independently, do not rely on any third party software, based on the conversion method of file to the 3D solid of file to the standard technology domain, the 3D solid of device directly can be converted to the standard technology domain, be not subjected to software constraint, transfer process is succinctly efficient, has than application prospects.
(4) description of drawings
Fig. 1 is the conversion method process flow diagram from the 3D solid file to the standard technology layout file that the present invention proposes
Fig. 2 is the exhaustive division figure of entity record information
Fig. 3 is the detail flowchart of entity record signal reconstruct
Fig. 4 is that the 3D solid file that proposes of Darmstadt, Germany Polytechnics is to standard technology layout file transformation flow figure
Fig. 5 is the three-dimensional entity model figure of a micromechanical gyro
Fig. 6 is the domain that utilizes the gyro structural sheet that 3D solid that the present invention proposes obtains to standard technology domain conversion method
1 for the 3D solid fileinfo extracts among the figure, and 2 are the fileinfo classification, and 3 is the entity record information classification, and 4 is the entity record signal reconstruct, and 5 for generating the standard edition map file, and 6 are manifold subrecord tree, and 7 are geometric surface subrecord tree.
(5) specific embodiments
A kind of 3D solid of micromechanical gyro is to the transfer process of standard technology domain:
Fig. 5 is a kind of 3D solid synoptic diagram of micromechanical gyro, and the topological structure of this gyro contains an individuality, a piece, a shell, gyro structure relative complex, and information such as the face that is comprised, ring, limit are more.Conversion method is as follows: at first, read the 3D solid fileinfo of this micromechanical gyro; And the 3D solid fileinfo classified; And then entity record information pressed level reconstruct, obtain entity record recording of information tree; From record tree, extract the end face information of 3D solid again, use corresponding command line parameter to draw domain respectively according to shape, the apex coordinate of face, and save as the standard technology layout file.
The 3D solid of this micromechanical gyro comprises six steps to the conversion method of standard technology domain:
Step 1: information extraction 1 of gyro three-dimensional entity file and fileinfo classification 2 and the entity record information classification of carrying out on this basis 3.By the row read gyro three-dimensional entity file information, and with all information stores in register.To the classification of the fileinfo in the register, can be divided into according to information characteristics: file header, entity record information and end of file identifier then.Wherein file header comprises the information such as version number, entity number, long measure, precision of file; Entity record information can be divided into topology information, geological information and attribute information again; Definition topology information, geological information and three structures of attribute information, with the information stores such as body, piece, shell, face, ring, directed edge, limit and summit of this gyro three-dimensional entity file in the topology information structure, information stores such as face, limit, apex coordinate in the geological information structure, are stored in attribute informations such as color, skew in the attribute information structure.
Step 2: the entity record information to the gyro three-dimensional entity file is reconstructed.The entity record information of storing in three structures in the extraction step two is reconstructed information by the topological level at recorded information object place, obtains one and arranges entity record recording of information tree by hierarchical structure.
Step 3: the end face that from step 2, extracts gyro in all faces of record tree.By the Z coordinate figure on all summits of each face relatively, extract the end face of 3D solid to the required micromechanical gyro three-dimensional entity model of two-dimentional domain conversion, this end face is deposited under it in shell, delete other surface information of gyro simultaneously.
Step 4: sort by interconnected relationship in all limits to each end face in the step 3.Concrete sort method is as follows: travel through all faces, for any one face, at first the summit with every limit is made as initial point and terminal point respectively by the coordinate sequencing that extracts, appoint then and get a limit as first initial line, travel through all remaining sides, if the terminal point on the initial point on certain bar limit and article one limit overlaps fully, then with its second limit as this face, be to work as the front with the second limit again, travel through all remaining sides,, then it is saved as the 3rd limit if find the initial point on certain bar limit and the terminal point on second limit to overlap fully, so circulation finishes up to all limit orderings.If the border of face is made of circle, then need not ordering, because as long as determine central coordinate of circle and radius, the position of circle is just definite fully.Ranking results is deposited in the corresponding registers.
Step 5: storage standards technology layout file.It is to be formed by some simple geometry graphics combine that all domains all can be regarded as, and these figures mainly contain three kinds: rectangle, polygon and circle, and in layout file, its drawing command difference of different geometric figures.Rectangle both can directly use the drawing command of rectangle as polygonal a kind of special circumstances, also can use polygonal drawing command, and was simple in order to draw, and at this rectangle handled as polygonal special circumstances, promptly used polygonal drawing command.The end face of micromechanical gyro is made up of rectangle and polygon, therefore, outputting standard technology layout file as follows: all rectangles and the polygon of end face information in the traversal step four, for each rectangle or polygon, at first call the polygon drawing command, in order rectangle or polygonal apex coordinate are successively placed on drawing command then after.
At last, the end identifier of trade edition map file, and layout file saved as standard C IF file, obtain micromechanical gyro structural sheet domain as shown in Figure 6.

Claims (5)

1.微机电系统中三维实体到标准工艺版图的转换方法，其特征在于该方法的具体步骤如下：1. The conversion method of the three-dimensional entity to the standard process layout in the MEMS is characterized in that the specific steps of the method are as follows: 步骤一：进行三维实体文件信息提取(1)和文件信息分类(2)，并在此基础上进行实体记录信息分类(3)；Step 1: Extracting 3D entity file information (1) and file information classification (2), and performing entity record information classification (3) on this basis; 步骤二：将实体记录信息按其所处的拓扑层次进行重构，得到层次化的信息记录树，包括如下子步骤：Step 2: Reconstruct the entity record information according to its topological level to obtain a hierarchical information record tree, including the following sub-steps: 1)遍历所有体，将所有属性信息存入相应体中，并将所有体置于记录树的最顶层；1) Traverse all volumes, store all attribute information in corresponding volumes, and place all volumes at the top of the record tree; 2)再次遍历所有体，查找属于每个体的所有块，并将这些块分别存储在相应体的下一层中，置于记录树的第二层；2) Traverse all bodies again, find all blocks belonging to each body, and store these blocks in the next layer of the corresponding body respectively, and place them in the second layer of the record tree; 3)遍历所有块，查找属于每个块的所有壳，并将这些壳分别存储在相应块的下一层，置于记录树的第三层；3) traverse all blocks, find all shells belonging to each block, and store these shells in the next layer of the corresponding block respectively, and place them in the third layer of the record tree; 4)遍历所有壳，查找属于每个壳的所有面，并将这些面存储在相应壳的下一层，置于记录树的第四层；4) traverse all shells, find all faces belonging to each shell, and store these faces in the next layer of the corresponding shell, and place them in the fourth layer of the record tree; 5)将面分为拓扑面与几何面，置于记录树的第五层，并依此分别形成拓扑面子记录树(6)和几何面子记录树(7)，拓扑面和几何面分别置于相应子记录树的顶层；5) Divide the surface into topological surface and geometric surface, place them in the fifth layer of the record tree, and form topological surface sub-record tree (6) and geometric surface sub-record tree (7) respectively, topological surface and geometric surface respectively placed in the top level of the corresponding subrecord tree; 6)遍历所有拓扑面，查找属于每个拓扑面的所有环，并将这些环存储在相应拓扑面的下一层中，置于记录树的第六层，拓扑面子记录树(6)的第二层；同时将几何面分为平面与曲面，置于记录树的第六层，几何面子记录树(7)的第二层；6) Traverse all topological planes, find all rings belonging to each topological plane, and store these rings in the next layer of the corresponding topological plane, place them in the sixth layer of the record tree, and place them in the sixth layer of the topological plane sub-record tree (6). The second floor; the geometric surface is divided into plane and curved surface simultaneously, placed in the sixth floor of the record tree, the second floor of the geometric surface sub-record tree (7); 7)遍历所有环，查找属于每个环的所有有向边，并将这些有向边存储在相应环的下一层，置于记录树的第七层，拓扑面子记录树(6)的第三层；然后转到几何面子记录树(7)，遍历所有平面，根据平面与线的指针对应关系查找属于每个平面的所有线，将其存储在平面的下一层，置于记录树的第七层，再将线分为直线和圆两类，其它类型的线可以忽略；将直线和圆存储在相应线的下一层，置于记录树的第八层，几何面子记录树(7)的第四层；7) Traverse all rings, find all directed edges belonging to each ring, and store these directed edges in the next layer of the corresponding ring, and place them in the seventh layer of the record tree, the first layer of the topological surface sub-record tree (6) Three layers; then go to the geometric surface sub-record tree (7), traverse all planes, find all lines belonging to each plane according to the pointer correspondence between planes and lines, store it in the next layer of the plane, and place it in the record tree In the seventh layer, the lines are divided into straight lines and circles, and other types of lines can be ignored; the straight lines and circles are stored in the next layer of the corresponding lines, placed in the eighth layer of the record tree, and the geometric surface sub-record tree (7 ) of the fourth layer; 8)遍历所有有向边，查找每条有向边所对应的边，并将其存入相应有向边的下一层，置于记录树的第八层，拓扑面子记录树(6)的第四层；8) Traverse all directed edges, find the corresponding edge of each directed edge, and store it in the next layer of the corresponding directed edge, and place it in the eighth layer of the record tree. Topological surface sub-record tree (6) fourth floor; 9)遍历所有边，查找属于每条边的两个顶点，并将其存入相应边的下一层，置于记录树的第九层，拓扑面子记录树(6)的第五层；9) Traverse all edges, find two vertices belonging to each edge, and store them in the next layer of the corresponding edge, place the ninth layer of the record tree, and the fifth layer of the topological sub-record tree (6); 10)遍历所有顶点，查找每个顶点的坐标，并将其存入相应顶点的下一层，置于记录树的最底层，拓扑面子记录树(6)的最底层；10) traverse all vertices, find the coordinates of each vertex, and store it in the next layer of the corresponding vertices, place it at the bottom of the record tree, the bottom of the topological sub-record tree (6); 步骤三：通过比较实体记录信息重构(4)结果中提取每个面的所有顶点的Z坐标值，提取出三维实体的所有顶面信息；Step 3: Extracting the Z coordinate values of all vertices of each face from the result of reconstructing (4) by comparing the entity record information, and extracting all the top surface information of the three-dimensional entity; 步骤四：对每个顶面的所有边按相互连接关系进行排序；Step 4: sort all the edges of each top surface according to the interconnection relationship; 步骤五：生成标准版图文件(5)。Step 5: Generate a standard layout file (5). 2.根据权利要求1的微机电系统中三维实体到标准工艺版图的转换方法，其特征在于：所述的步骤一包括读取一种三维实体文件，将文件信息分为文件头、实体记录信息和文件结束标识符三部分；其中文件头又可再分为文件的版本号、实体数、长度单位、精度信息；实体记录信息再分为实体的拓扑信息、几何信息和属性信息；文件结束标识符不必再分。2. according to the conversion method of three-dimensional entity in the MEMS of claim 1 to standard process layout, it is characterized in that: described step one comprises reading a kind of three-dimensional entity file, file information is divided into file header, entity record information and file end identifier; the file header can be further divided into file version number, entity number, length unit, and precision information; entity record information can be further divided into entity topology information, geometric information, and attribute information; file end identification Symbols do not need to be further divided. 3.根据权利要求1的微机电系统中三维实体到标准工艺版图的转换方法，其特征在于所述的步骤三具体方法如下：遍历所有体，对于每个体，比较每个面的所有顶点Z坐标，如果组成面所有点的Z坐标都相等，则此面或者是顶面，或者是底面，然后从提取的所有顶面和底面中各取一点，比较Z坐标，则Z坐标值大的都记为顶面，也即是转换为标准工艺版图文件所需的面；将得到的所有面存入其所属的壳中，同时删除其它面信息。3. according to the conversion method of three-dimensional entity in the MEMS of claim 1 to standard process layout, it is characterized in that described step 3 specific method is as follows: traverse all bodies, for each body, compare all vertex Z coordinates of each face , if the Z coordinates of all the points that make up the surface are equal, then this surface is either the top surface or the bottom surface, then take a point from all the extracted top and bottom surfaces, compare the Z coordinates, and record the one with the larger Z coordinate value It is the top surface, that is, the surface required to be converted into a standard process layout file; all the obtained surfaces are stored in the shell to which they belong, and other surface information is deleted at the same time. 4.根据权利要求1的微机电系统中三维实体到标准工艺版图的转换方法，其特征在于：所述步骤四的排序是将每个顶面的所有边的顶点按提取坐标的先后顺序分别设为始点和终点，然后对每条边进行排序，使每个面的所有边按顶点坐标首尾相接。4. according to the conversion method of three-dimensional entity in the MEMS of claim 1 to standard process layout, it is characterized in that: the sorting of described step 4 is to set the vertices of all sides of each top surface respectively according to the order of extraction coordinates is the start and end point, and then sort each edge so that all the edges of each face meet end-to-end by vertex coordinates. 5.根据权利要求1的微机电系统中三维实体到标准工艺版图的转换方法，其特征在于：所述的步骤五是将排序完毕的所有面的边按顺序逐条取出，依次将各条边的始点作为所生成版图的顶点，如果上表面为圆，则将圆心坐标和半径作为版图文件参数，然后按照CIF文件的语法规则存储为标准版图文件。5. according to the conversion method of three-dimensional entity in the microelectromechanical system of claim 1 to standard process layout, it is characterized in that: described step 5 is to take out the edges of all faces that have been sorted one by one in order, and sequentially extract the edges of each edge The starting point is used as the vertex of the generated layout. If the upper surface is a circle, the coordinates of the center of the circle and the radius are used as parameters of the layout file, and then stored as a standard layout file according to the syntax rules of the CIF file.
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