CN100464335C - Transfer method from three-dimensional solid to standard technical layout in microelectromechanical system - Google Patents
Transfer method from three-dimensional solid to standard technical layout in microelectromechanical system Download PDFInfo
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Abstract
The invention relates to a method for transforming the three-dimension solid into standard art work, in the micro mechanical electric system, wherein it comprises: 1, extracting and classifying the three-dimension solid document information; 2, classifying the solid record information; 3, rebuilding the solid record information and naming the rebuilt result as record tree; 4, extracting the top surface information from the rebuilt result used in transformation; 5, queuing the obtained surfaces according to the edge; 6, generating the standard art work. The inventive method can avoid other software, based on document o document technique, with high efficiency and wide application.
Description
(1) technical field under
The present invention relates to that 3D solid belongs to the MEMS (micro electro mechanical system) design field to the conversion method of standard technology domain in the MEMS (micro electro mechanical system).
(2) background technology
At present, the method for designing that MEMS (micro electro mechanical system) is general is at first to draw the domain of device, carries out carrying out the three-dimensional entity model that three-dimensionalreconstruction obtains device after the corresponding DRC, again this three-dimensional entity model is carried out performance simulation.If simulation result does not meet designing requirement, then revise domain, reconstruct 3D solid and emulation again, so iteration repeatedly till meeting design requirement, is used for processing plate-making with the domain through repeatedly revising at last.As seen, this is a kind of method for designing of poor efficiency, has the following disadvantages: the one, and the requirement deviser must be proficient in layout drawing; The 2nd, each iteration all needs domain is carried out three-dimensionalreconstruction, process complexity, inefficiency.And a kind of more satisfactory method for designing is the 3D solid of at first constructing device, and carries out performance simulation until meeting the demands, and at last 3D solid is converted to the output of standard technology domain, is used for further plate-making.Can avoid numerous and diverse element layout to draw and three-dimensionalreconstruction process consuming time like this.Therefore, 3D solid is the core technology of this method for designing to the conversion method of standard technology domain.
Darmstadt, Germany Polytechnics has proposed the conversion method of a kind of 3D solid to the standard technology domain.This method is at first constructed the three-dimensional entity model of device, and three-dimensional entity model is imported among the finite element analysis software ANSYS; Then under the ANSYS environment, this three-dimensional entity model is carried out finite element grid divide, use ANSYS to carry the geological informations such as point, line, surface that function extracts entity after the grid dividing, and classification is preserved; Again the geological information of preserving is imported in one " converter ", the DLL (dynamic link library) that " converter " utilizes ANSYS to provide is provided, use the C Plus Plus programming to realize, can be with the three-dimensional entity model geological information that extracts with the output of standard technology domain form, and be that the unit saves as the standard technology layout file with the polygon.
From the above mentioned, though this method can realize the conversion of 3D solid to the standard technology domain, also exist some significantly not enough: transfer process need rely on ANSYS and finish; Must carry out limited grid dividing to three-dimensional entity model, could extract the geological informations such as point, line, surface of solid model, to be accomplished to the conversion of standard technology domain.Use ANSYS to make whole transfer process very loaded down with trivial details, and require the user must buy ANSYS software; Three-dimensional entity model is carried out the time that grid dividing has prolonged transfer process again.
(3) summary of the invention
In order to overcome the above-mentioned defective of prior art, the present invention proposes a kind of fully independently, do not rely on any third party software, based on the conversion method of file to the 3D solid of file to the standard technology domain, the 3D solid of device directly can be converted to the standard technology domain, and the technology domain be saved as the CIF file layout of standard.
The basic concepts that relates to 3D solid:
1, topology: topology is meant the hierarchical relationship between the different objects in the three-dimensional entity model.In three-dimensional entity model, be to be mutually related between the topology objects by the pointer mode.Generally comprise following topology objects in the topological structure of three-dimensional entity model:
Body: the highest level of entity object is the set of piece.
Piece: a part relatively independent, body in the space, not interrelated between piece and the piece, its surface is made of shell.
Shell: the set of the surface composition of piece is used to define the inside or the perimeter of piece.
Face: the connected component in the curved surface that defines by ring.
Ring: the border by face constitutes.
Directed edge: the quoting of presentation surface opposite side.
Limit: the line that defines by the summit.
Summit: the angle point of body, face, line.
2, how much: how much are meant geometric element pure in the 3D solid, as point, line, surface etc., geometric description be physical dimension, shape and the location parameter of entity.
The present invention realizes that a kind of 3D solid in the MEMS (micro electro mechanical system) design tool is to the technical scheme of the conversion method of standard technology domain: at first, read a kind of file of 3D solid form, carry out the 3D solid fileinfo and extract 1, the style of writing of going forward side by side part information classification 2, fileinfo comprises file header information, entity record information and document end message.Wherein file header information comprises the information such as version number, entity number, long measure, precision of file; Entity record information comprises topology information, geological information and the attribute information of entity, and they also can segment, i.e. entity record information classification 3; Document end message is an end mark.Secondly, sorted entity record information is carried out tree-shaped reconstruct by level, promptly the entity record signal reconstruct 4, set up the hierarchical chart between the information, and this hierarchical chart is called the record tree.Successively traversal record is set then, and the hierarchical relationship according between the record tree object extracts all the end face information in the 3D solid file, determines the coordinate of 3D solid respective vertices.At last, create the complete domain of device according to apex coordinate, and, promptly generate standard edition map file 5 with the output of standard C IF form.
The concrete steps that realize this method are as follows:
Step 1: carry out extraction 1 of 3D solid fileinfo and fileinfo classification 2, and carry out entity record information classification 3 on this basis.
At first, by going the file that reads a kind of 3D solid form, extract All Files information and also be stored in the relevant register.
Secondly, the fileinfo in the register is classified.Fileinfo can be decomposed into file header, entity record information and end of file identifier three parts.Wherein file header can be further divided into the information such as version number, entity number, long measure, precision of file again; Entity record information is the key components of file, comprises topology information, geological information and the attribute information of entity; End of file identifier is the sign that file reads end, needn't divide again.
Once more, entity record information is segmented.Wherein topology information has been pointed out the hierarchical relationship between the entity object, can be decomposed into body, piece, shell, face, ring, directed edge, limit and summit successively from high to low by level; Geological information has been pointed out geological informations such as the dimensional parameters of each geometric element and location parameter, comprises face, line, point; Some attribute of AIT levies in kind body can be decomposed into color, skew of entity etc., can be used for distinguishing different entities.Need to prove, although the topology information object that has is the same with the title of geological information object, their implication difference, for example: in topology information, the summit is an object in the topological level, is the apex coordinate value and the point of geological information is represented.Entity record information after the segmentation is stored in the relevant register respectively by record name.
Step 2: carry out entity record signal reconstruct 4, reconstruction result is called the record tree.Reconstructing method is as follows:
1): travel through all bodies, search the attribute of each body according to the pointer corresponding relation of body and respective attributes, comprise color, skew etc., all properties information is deposited in the corresponding body, and all bodies are placed the top layer of record tree, a 3D solid file may comprise a plurality of bodies, and these bodies are positioned at same level in topological structure.
2): travel through all bodies once more, search all pieces that belong to each body, and these pieces are stored in respectively in following one deck of corresponding body, place the second layer of record tree according to the pointer corresponding relation of body and piece.
3): travel through all pieces, search all shells that belong to each piece, and these shells are stored in following one deck of relevant block respectively, place the 3rd layer of record tree according to the pointer corresponding relation of piece and shell.
4): travel through all shells, search all faces that belong to each shell, and these faces are stored in following one deck of respective shell, place the 4th layer of record tree according to the pointer corresponding relation of shell and face.
5): face is divided into manifold and geometric surface, places the layer 5 of record tree, and form manifold subrecord tree 6 and geometric surface subrecord tree 7 according to this respectively, manifold and geometric surface place the top layer of corresponding subrecord tree respectively.
6): travel through all manifold, search all rings that belong to each manifold according to the pointer corresponding relation of manifold and ring, and these rings are stored in following one deck of corresponding manifold, place the layer 6 of record tree, the second layer of manifold subrecord tree 6.Simultaneously geometric surface is divided into plane and curved surface, places the layer 6 of record tree, the second layer of geometric surface subrecord tree 7.Because the 3D solid file only at the regular geometric body, so can be ignored further operation to curved surface to the conversion of standard technology layout file.
7): travel through all rings, search all directed edges that belong to each ring, and these directed edges are stored in following one deck of respective rings, place the layer 7 of record tree, the 3rd layer of manifold subrecord tree 6 according to the ring and the pointer corresponding relation of directed edge.Forward geometric surface subrecord tree 7 then to, travel through all planes, according to the pointer corresponding relation of plane and line search belong to each plane wired, it is stored in the following one deck on plane, place the layer 7 of record tree, line is divided into straight line and circle two classes again, the line of other type can be ignored; With straight line and round following one deck that is stored in homologous lines, place the 8th layer of record tree, the geometric surface subrecord is set 7 the 4th layer.
8): travel through all directed edges, search every pairing limit of directed edge according to the pointer corresponding relation on directed edge and limit, and with its following one deck that deposits corresponding directed edge in, place the 8th layer of record tree, the manifold subrecord is set 6 the 4th layer.In the topological structure of 3D solid, the implication on directed edge and limit is different, and what directed edge was represented is situation about occurring among the Bian Zaihuan, it is directive, the normal vector of the direction of directed edge and its place face is observed the right-hand screw rule, and the limit does not have direction, and it is defined by end points fully; Therefore, a directed edge can only be corresponding with a unique limit, otherwise then be false, and for example: a rectangular parallelepiped contains 12 limits, but 24 directed edges are arranged.Forward geometric surface subrecord tree 7 then to, travel through all straight lines and circle,, obtain its end points coordinate for straight line; For circle, obtain central coordinate of circle and radius, and be stored in following one deck of homologous lines, place the bottom of geometric surface subrecord tree 7.
9): travel through all limits, search two summits that belong to every limit, and with its following one deck that deposits corresponding edge in, place the 9th layer of record tree, the layer 5 of manifold subrecord tree 6 according to the pointer corresponding relation on limit and summit.
10): travel through all summits, search the coordinate on each summit, and, place the bottom of record tree, the bottom of manifold subrecord tree 6 with its following one deck that deposits respective vertices in according to the pointer corresponding relation of summit and coordinate.
So far, the whole reconstruct of entity record information finish.
Step 3: from entity record signal reconstruct 4 results of step 2, extract the end face information that is used to change.Z coordinate figure according to all summits of forming face can be divided into side, end face and bottom surface to face, because the 3D solid file is actually the projection of 3D solid end face from geometry to the conversion of standard technology layout file.Therefore, the purpose of carrying out face classification is exactly to find the end face information of each body.Concrete grammar is as follows: travel through all bodies, for each body, compare all summit Z coordinates of each face, if exist the Z coordinate of two points unequal, then this face must be the side, can ignore; If the Z coordinate that the composition face is had a few all equates, then this face or end face, or bottom surface.From all end faces that extract and bottom surface, respectively get a bit then, Z coordinate relatively, then the Z coordinate figure is big all is designated as end face, that is to say the required face of standard technology layout file that is converted to.All faces that obtain are deposited in the shell under it, delete other surface information simultaneously.
Step 4: sort by interconnected relationship in all limits to each end face.Concrete sort method is as follows: travel through all faces, for any one face, at first the summit with every limit is made as initial point and terminal point respectively by the coordinate sequencing that extracts, appoint then and get a limit as first initial line, travel through all remaining sides, if the terminal point on the initial point on certain bar limit and article one limit overlaps fully, then with its second limit as this face, be to work as the front with the second limit again, travel through all remaining sides,, then it is saved as the 3rd limit if find the initial point on certain bar limit and the terminal point on second limit to overlap fully, so circulation finishes up to all limit orderings.If the border of face is made of circle, then need not ordering, because as long as determine central coordinate of circle and radius, the position of circle is just definite fully.Ranking results is deposited in the corresponding registers.
Step 5: generate standard edition map file 5.Take out in order one by one on the limit of all faces that above-mentioned ordering is finished, successively with the initial point on each bar limit summit as generates domain, if upper surface is to justify, then with central coordinate of circle and radius as the layout file parameter, and generate corresponding technology layout file.Generate layout file according to standard C IF layout file form.
1): travel through all bodies, determine domain layer title under the entity can be made as CPS as the structural sheet title according to the color attribute of body.
2): according to the shape attribute of the end face of body, the standard commands row format output drawing command that provides according to the CIF file, simple geometry figure of every order line output wherein is as circle, rectangle, polygon etc.
3): export geometric parameter information, for circle, output central coordinate of circle and radius information, for polygon, the order on the limit in five output vertex coordinate successively set by step.
4): determine to begin to export down one deck after current domain layer output finishes, repeat previous action then, finish until domain output.
5): output file end mark, expression standard edition map file end of output.
The present invention be a kind ofly fully independently, do not rely on any third party software, based on the conversion method of file to the 3D solid of file to the standard technology domain, the 3D solid of device directly can be converted to the standard technology domain, be not subjected to software constraint, transfer process is succinctly efficient, has than application prospects.
(4) description of drawings
Fig. 1 is the conversion method process flow diagram from the 3D solid file to the standard technology layout file that the present invention proposes
Fig. 2 is the exhaustive division figure of entity record information
Fig. 3 is the detail flowchart of entity record signal reconstruct
Fig. 4 is that the 3D solid file that proposes of Darmstadt, Germany Polytechnics is to standard technology layout file transformation flow figure
Fig. 5 is the three-dimensional entity model figure of a micromechanical gyro
Fig. 6 is the domain that utilizes the gyro structural sheet that 3D solid that the present invention proposes obtains to standard technology domain conversion method
1 for the 3D solid fileinfo extracts among the figure, and 2 are the fileinfo classification, and 3 is the entity record information classification, and 4 is the entity record signal reconstruct, and 5 for generating the standard edition map file, and 6 are manifold subrecord tree, and 7 are geometric surface subrecord tree.
(5) specific embodiments
A kind of 3D solid of micromechanical gyro is to the transfer process of standard technology domain:
Fig. 5 is a kind of 3D solid synoptic diagram of micromechanical gyro, and the topological structure of this gyro contains an individuality, a piece, a shell, gyro structure relative complex, and information such as the face that is comprised, ring, limit are more.Conversion method is as follows: at first, read the 3D solid fileinfo of this micromechanical gyro; And the 3D solid fileinfo classified; And then entity record information pressed level reconstruct, obtain entity record recording of information tree; From record tree, extract the end face information of 3D solid again, use corresponding command line parameter to draw domain respectively according to shape, the apex coordinate of face, and save as the standard technology layout file.
The 3D solid of this micromechanical gyro comprises six steps to the conversion method of standard technology domain:
Step 1: information extraction 1 of gyro three-dimensional entity file and fileinfo classification 2 and the entity record information classification of carrying out on this basis 3.By the row read gyro three-dimensional entity file information, and with all information stores in register.To the classification of the fileinfo in the register, can be divided into according to information characteristics: file header, entity record information and end of file identifier then.Wherein file header comprises the information such as version number, entity number, long measure, precision of file; Entity record information can be divided into topology information, geological information and attribute information again; Definition topology information, geological information and three structures of attribute information, with the information stores such as body, piece, shell, face, ring, directed edge, limit and summit of this gyro three-dimensional entity file in the topology information structure, information stores such as face, limit, apex coordinate in the geological information structure, are stored in attribute informations such as color, skew in the attribute information structure.
Step 2: the entity record information to the gyro three-dimensional entity file is reconstructed.The entity record information of storing in three structures in the extraction step two is reconstructed information by the topological level at recorded information object place, obtains one and arranges entity record recording of information tree by hierarchical structure.
Step 3: the end face that from step 2, extracts gyro in all faces of record tree.By the Z coordinate figure on all summits of each face relatively, extract the end face of 3D solid to the required micromechanical gyro three-dimensional entity model of two-dimentional domain conversion, this end face is deposited under it in shell, delete other surface information of gyro simultaneously.
Step 4: sort by interconnected relationship in all limits to each end face in the step 3.Concrete sort method is as follows: travel through all faces, for any one face, at first the summit with every limit is made as initial point and terminal point respectively by the coordinate sequencing that extracts, appoint then and get a limit as first initial line, travel through all remaining sides, if the terminal point on the initial point on certain bar limit and article one limit overlaps fully, then with its second limit as this face, be to work as the front with the second limit again, travel through all remaining sides,, then it is saved as the 3rd limit if find the initial point on certain bar limit and the terminal point on second limit to overlap fully, so circulation finishes up to all limit orderings.If the border of face is made of circle, then need not ordering, because as long as determine central coordinate of circle and radius, the position of circle is just definite fully.Ranking results is deposited in the corresponding registers.
Step 5: storage standards technology layout file.It is to be formed by some simple geometry graphics combine that all domains all can be regarded as, and these figures mainly contain three kinds: rectangle, polygon and circle, and in layout file, its drawing command difference of different geometric figures.Rectangle both can directly use the drawing command of rectangle as polygonal a kind of special circumstances, also can use polygonal drawing command, and was simple in order to draw, and at this rectangle handled as polygonal special circumstances, promptly used polygonal drawing command.The end face of micromechanical gyro is made up of rectangle and polygon, therefore, outputting standard technology layout file as follows: all rectangles and the polygon of end face information in the traversal step four, for each rectangle or polygon, at first call the polygon drawing command, in order rectangle or polygonal apex coordinate are successively placed on drawing command then after.
At last, the end identifier of trade edition map file, and layout file saved as standard C IF file, obtain micromechanical gyro structural sheet domain as shown in Figure 6.
Claims (5)
1. 3D solid is characterized in that to the conversion method of standard technology domain the concrete steps of this method are as follows in the MEMS (micro electro mechanical system):
Step 1: carry out the 3D solid fileinfo and extract (1) and fileinfo classification (2), and carry out entity record information classification (3) on this basis;
Step 2: entity record information is reconstructed by its residing topological level, obtains the information record tree of stratification, comprise following substep:
1) travels through all bodies, all properties information is deposited in the corresponding body, and all bodies are placed the top layer of record tree;
2) travel through all bodies once more, search all pieces that belong to each body, and these pieces are stored in respectively in following one deck of corresponding body, place the second layer of record tree;
3) travel through all pieces, search all shells that belong to each piece, and these shells are stored in following one deck of relevant block respectively, place the 3rd layer of record tree;
4) travel through all shells, search all faces that belong to each shell, and these faces are stored in following one deck of respective shell, place the 4th layer of record tree;
5) face is divided into manifold and geometric surface, places the layer 5 of record tree, and form manifold subrecord tree (6) and geometric surface subrecord tree (7) according to this respectively, manifold and geometric surface place the top layer of corresponding subrecord tree respectively;
6) travel through all manifold, search all rings that belong to each manifold, and these rings are stored in following one deck of corresponding manifold, place the layer 6 of record tree, the second layer of manifold subrecord tree (6); Simultaneously geometric surface is divided into plane and curved surface, places the layer 6 of record tree, the second layer of geometric surface subrecord tree (7);
7) travel through all rings, search all directed edges that belong to each ring, and these directed edges are stored in following one deck of respective rings, place the layer 7 of record tree, the 3rd layer of manifold subrecord tree (6); Forward geometric surface subrecord tree (7) then to, travel through all planes, according to the pointer corresponding relation of plane and line search belong to each plane wired, it is stored in the following one deck on plane, place the layer 7 of record tree, line is divided into straight line and circle two classes again, the line of other type can be ignored; With straight line and round following one deck that is stored in homologous lines, place the 8th layer of record tree, the geometric surface subrecord is set (7) the 4th layer;
8) travel through all directed edges, search every pairing limit of directed edge, and with its following one deck that deposits corresponding directed edge in, place the 8th layer of record tree, the manifold subrecord is set (6) the 4th layer;
9) travel through all limits, search two summits that belong to every limit, and, place the 9th layer of record tree, the layer 5 of manifold subrecord tree (6) its following one deck that deposits corresponding edge in;
10) travel through all summits, search the coordinate on each summit, and with its following one deck that deposits respective vertices in, place the bottom of record tree, the bottom of manifold subrecord tree (6);
Step 3:, extract all end face information of 3D solid by comparing the Z coordinate figure that extracts all summits of each face among entity record signal reconstruct (4) result;
Step 4: sort by interconnected relationship in all limits to each end face;
Step 5: generate standard edition map file (5).
According to 3D solid in the MEMS (micro electro mechanical system) of claim 1 to the conversion method of standard technology domain, it is characterized in that: described step 1 comprises and reads a kind of 3D solid file, and fileinfo is divided into file header, entity record information and end of file identifier three parts; Wherein file header can be further divided into version number, entity number, long measure, the precision information of file again; Entity record information is further divided into topology information, geological information and the attribute information of entity; End of file identifier needn't divide again.
According to 3D solid in the MEMS (micro electro mechanical system) of claim 1 to the conversion method of standard technology domain, it is characterized in that described step 3 concrete grammar is as follows: travel through all bodies, for each body, all summit Z coordinates that compare each face, if the Z coordinate that the composition face is had a few all equates, then this face or end face, or bottom surface, from all end faces that extract and bottom surface, respectively get a bit then, compare the Z coordinate, then the Z coordinate figure is big all is designated as end face, that is to say the required face of standard technology layout file that is converted to; All faces that obtain are deposited in the shell under it, delete other surface information simultaneously.
According to 3D solid in the MEMS (micro electro mechanical system) of claim 1 to the conversion method of standard technology domain, it is characterized in that: the ordering of described step 4 is that the summit on all limits of each end face is made as initial point and terminal point respectively by the sequencing that extracts coordinate, sorted in every limit then, make all limits of each face end to end by apex coordinate.
According to 3D solid in the MEMS (micro electro mechanical system) of claim 1 to the conversion method of standard technology domain, it is characterized in that: described step 5 is that take out in order one by one on the limit of all faces that ordering is finished, successively with the initial point on each bar limit summit as the generation domain, if upper surface is circle, then with central coordinate of circle and radius as the layout file parameter, the syntax rule according to the CIF file is stored as the standard edition map file then.
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