CN100452568C - Laser coherence beam merging apparatus - Google Patents
Laser coherence beam merging apparatus Download PDFInfo
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- CN100452568C CN100452568C CNB2006100234175A CN200610023417A CN100452568C CN 100452568 C CN100452568 C CN 100452568C CN B2006100234175 A CNB2006100234175 A CN B2006100234175A CN 200610023417 A CN200610023417 A CN 200610023417A CN 100452568 C CN100452568 C CN 100452568C
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Abstract
The present invention relates to a laser light coherence beam merging device which comprises a plurality of solid lasers pumped by an LD, wherein each of the lasers is provided with an independent laser medium, a front cavity mirror and a back cavity mirror, two adjacent lasers achieve mutual injection through part transmission laser light of a common coupling mirror, so that the frequency and the phases of the lasers are locked. The optical path difference of the output laser light of the two adjacent lasers is adjusted to be zero through the movement of a rectangular prism, and finally, high-power high-beam quality coherent laser light can be output in parallel. The injection energy of each laser to the adjacent laser is larger than that of the laser to the rest lasers, and thus, when the lasers expand, the system can operate stably. The present invention has the advantages of simple structure, stable system and practicality. The device can carry out the extension of a plurality of lasers, and has the effect that the output beam can achieve an effect of an equal optical distance outside a cavity through the adjustment of the rectangular prism, and the lasers output a combined beam of a plurality of coherent laser light and can obtain the high-power high-beam quality coherent laser light.
Description
Technical field
The present invention relates to a kind of laser coherence beam merging apparatus, the laser coherence synthesizer of particularly a kind of many laser diodes (hereinafter to be referred as LD) light-pumped solid state laser output.
Background technology
High power solid-state laser all has important use in scientific research, commercial Application and military affairs, and present laser output power and beam quality level also far do not reach desired desirable level, and the high-power and high-lighting beam quality is one of target of solid state laser pursuit.Along with the maturation with the large-size crystals growing technology of improving constantly of laser diode power, the power of solid state laser has also obtained corresponding raising, but the output of separate unit laser still be subjected to crystal growth,
Heat management, factor such as saturation effect and damage threshold restriction, it is very difficult satisfying the high-power and high-lighting beam quality simultaneously.Laser coherence closes the bundle technology can improve beam quality when effectively improving power density, commercial Application and scientific research have active demand to this.Close in the various technology of bundle in that laser beam is relevant, relevant close that to restraint be a kind of very useful technology in the chamber in.Formerly in the technology, relevantly in the designed chamber close the bundle laser to need the reflectivity of coupling mirror and transmissivity ratio be 1: 1, referring to technology [A.A.Ishaaya formerly, N.Davidson, L.Shimshi, et al.Appl.Phys.Lett.Vol.85:2187-2189,2004].Though lock-in techniques can be concerned with the laser of two lasers output and close bundle in this chamber, but necessarily requiring the transmission of coupling mirror and reflection ratio is 1: 1, and owing to beam splitting chip causes high loss; Must to make that the optical cavity light beam interferes on coupling mirror long mutually in order to reduce loss, and it often adjusts very difficulty; Moreover this structure needs the transverse mode structure in two chambeies also to want identical and the position wants corresponding fully, otherwise can introduce very big loss, and the output of the high power solid state laser of side pumping multimode often, generally be difficult to satisfy this structure: utilize this structure to increase more laser and then can cause satisfying simultaneously quite difficulty of interference phase elongate member, therefore also have only the laser coherence beam merging apparatus of two lasers outputs so far.In a word, present technology exists all that loss is big, narrow application range, increases more that multi-laser amplifies defectives such as difficulty.
Summary of the invention
The objective of the invention is to overcome the deficiency of above-mentioned technology formerly, a kind of laser coherence beam merging apparatus is provided, the structure of this device should be simple, and running is stable, is easy to realize the synthetic output of multiple coherent laser, can obtain the high-power high light beam quality that keeps simultaneously.
The technology of the present invention solution is as follows:
A kind of laser coherence beam merging apparatus is characterized in that comprising the identical laser arranged side by side of structure of N platform independent running, wherein N=2
nN is a positive integer, described i platform laser is successively by the i1 Effect of Back-Cavity Mirror on the light path, the i2 laser medium, i3 changes Shu Jing and (i+1) 3 changes Shu Jing, i4 output cavity mirror and pumping source constitute the laser in three folding chambeies, i=1 wherein, 2, or N, the i1 Effect of Back-Cavity Mirror of all N platform lasers and the light beam extensions of i2 laser medium have a public vertical line, in the light beam extensions of the i1 Effect of Back-Cavity Mirror of described N platform laser and i2 laser medium and the intersection of this public vertical line the i3 commentaries on classics Shu Jing that is parallel to each other with one of this public vertical line placement at 45 is arranged, on this public vertical line, change Shu Jinghou and also place (N+1) 3 commentaries on classics Shu Jing in N3, and the i3 parallel with top n commentaries on classics bundle mirror is parallel, by the i1 Effect of Back-Cavity Mirror, the i2 laser medium, i3 changes Shu Jing, the light path that (i+1) 3 changes between the Shu Jingzhi i4 outgoing mirror is the long Li in chamber of this laser, and being called to the light path the outgoing mirror by the first commentaries on classics bundle mirror or the second commentaries on classics Shu Jing is coupling light path li; The long Li in the chamber of each laser equates and coupling light path li also equates, be provided with two output beams in couples and change Shu Jing in that N/2 is at 45 on to adjacent output light path, between this two output beams commentaries on classics Shu Jing, have and carry out the synthetic right-angle prism of light beam, on the output light path of adjacent two right-angle prisms, synthesize once more by paired an output beam commentaries on classics Shu Jing and a right-angle prism again, until forming beam of laser output after close the bundle back for n time.
The described the 13rd changes the reflectivity of Shu Jing and (N+1) 3 commentaries on classics Shu Jing greater than 99.5%, be called speculum, and other commentaries on classics Shu Jing is the coupling mirror with high reflectance and low transmissivity, and the transmission of two adjacent lasers by public coupling mirror realizes the mutual injection locking between the adjacent laser.
The one side of described coupling mirror is coated with the transmission film of reflectivity between 98%~90% to these 45 ° of incident lasers, and another side is coated with the reflectivity of 45 ° of incident lasers greater than 99.5% reflectance coating.Described laser by pumping source from end-pumping or side pumping.
The cross section of described laser medium is circle, rectangle or rectangle.
Described pumping source is a laser diode.
Technique effect of the present invention:
Apparatus of the present invention structure is owing to be that adjacent two-laser locks mutually, it is less influenced by other laser in the sharp combiner structure of multi-station laser output, thereby system is stable, and can not introduce lossy to many transverse mode structures, superpower laser to the side pumping is also suitable fully, laser output polarization state of light does not have the requirement of linearly polarized photon as long as direction is identical just passable.This invention is suitable for multiple pump mode solid state laser output laser coherence and closes bundle.Experiment shows: the structure of this device is simple relatively, and running is stable, is easy to realize the synthetic output of multiple coherent laser, can obtain the high-power high light beam quality that keeps simultaneously.
The present invention is described further below in conjunction with accompanying drawing and embodiment.
Description of drawings
Fig. 1 is the embodiment of the invention 1: the laser coherence beam merging apparatus schematic diagram that is used for two LD light-pumped solid state laser outputs.
Fig. 2 is the plated film schematic diagram of coupling mirror among the present invention.
Fig. 3 is the embodiment of the invention 2: the laser coherence beam merging apparatus schematic diagram that is used for four LD light-pumped solid state laser outputs.
Fig. 4 is the laser coherence beam merging apparatus schematic diagram of many LD light-pumped solid state laser outputs of the present invention.
Embodiment
See also Fig. 4 earlier, Fig. 4 is the laser coherence beam merging apparatus schematic diagram of many LD light-pumped solid state laser outputs of the present invention.As seen from the figure, laser coherence beam merging apparatus of the present invention comprises the identical laser arranged side by side of structure that the N platform can independent operation, wherein N=2
nN is a positive integer, described i platform laser is successively by the Effect of Back-Cavity Mirror i1 on the light path, laser medium i2, light beam first changes bundle mirror i3 and second and changes Shu Jing (i+1) 3, output cavity mirror i4 and pumping source constitute the laser in three folding chambeies, i=1 wherein, 2, or N, the Effect of Back-Cavity Mirror i1 of all N platform lasers and the light beam extensions of laser medium i2 have a public vertical line OO`, have in the intersection of the light beam extensions of the Effect of Back-Cavity Mirror i1 of described N platform laser and laser medium i2 and this public vertical line OO` and a commentaries on classics bundle mirror i3 who is parallel to each other of this public vertical line OO` placement at 45, behind N commentaries on classics bundle mirror N3, also placing N+1 commentaries on classics Shu Jing (N+1) 3 on this public vertical line OO`, and the commentaries on classics bundle mirror i3 parallel with top n is parallel, by Effect of Back-Cavity Mirror i1, laser medium i2, change bundle mirror i3, the light path that changes between the Shu Jing (i+1) 3 to outgoing mirror i4 is the long Li in chamber of i platform laser, by changeing bundle mirror i3 to outgoing mirror i4 with to be called by the light path the commentaries on classics Shu Jing (i+1) 3 to outgoing mirror i4 be the light path li that is coupled; The long Li in the chamber of each laser equates and coupling light path li also equates, be provided with in couples that output beam changes bundle mirror i5 and output beam changes Shu Jing (i+1) 5 in that N/2 is at 45 on to adjacent output light path, between described output beam commentaries on classics bundle mirror i5 and output beam commentaries on classics Shu Jing (i+1) 5, have and carry out the synthetic right-angle prism of light beam, on the output light path of adjacent two right-angle prisms, change Shu Jing by paired output beam again and a right-angle prism synthesizes once more, until after become beam of laser after closing bundle n time and export.
The described the 1st changes the reflectivity of bundle mirror 13 and N+1 commentaries on classics Shu Jing (N+1) 3 greater than 99.5%, be called speculum, and other commentaries on classics Shu Jing is the coupling mirror with high reflectance and low transmissivity, and adjacent i platform laser and i+1 platform laser are realized the mutual injection locking of this adjacent laser by the transmission of public coupling mirror (i+1) 3.
The one side of described coupling mirror (i+1) 31 is coated with the transmission film of reflectivity between 98%~90% to these 45 ° of incident lasers, and another side (i+1) 33 is coated with reflectivity to 45 ° of incident lasers greater than 99.5% reflectance coating, sees Fig. 2.
Described laser by pumping source from end-pumping or side pumping.
The cross section of described laser medium i2 is circle, rectangle or rectangle.
Described pumping source is a laser diode.
Embodiment 1:
See also Fig. 1, Fig. 1 is the embodiment of the invention 1, i.e. the situation of n=1: the laser coherence beam merging apparatus schematic diagram that is used for two LD light-pumped solid state laser outputs.It also is the simplest device of laser coherence beam merging apparatus structure of the present invention, the medium of two lasers is lath media such as Nd:YAG or Nd:GGG, its pumping source is a semiconductor laser diode, pumping is carried out in two sides at laser medium 12,22, the Effect of Back-Cavity Mirror 11 of two-laser and Effect of Back-Cavity Mirror 21 these optical maser wavelengths of plating are (such as 1064nm, below be example with this wavelength) 0 ° of incident total reflection film, output cavity mirror 14 and the low transmission film of 0 ° of incident of output cavity mirror 24 plating 1064nm wavelength, transmissivity is 30%~80% scope.The long L1 in two chambeies is identical with L2, can select in 100mm~1000mm.The reflectivity of the 1064nm wavelength laser of 231 pairs of 45 ° of incidents of one side of coupling mirror 23 is 95%, and another side 232 is coated with the anti-reflection film of 45 ° of incident 1064nm wavelength lasers, as shown in Figure 2.Coupling mirror 23 equates with the coupling light path 12 of outgoing mirror 24 with the coupling light path 11 and the coupling mirror 23 of outgoing mirror 14.The reflectivity of 13,15,23,33,25 pairs 45 ° incident 1064 wavelength lasers of commentaries on classics bundle mirror of change beam direction is greater than 99.5% in the light path.During operation, adjust earlier two output cavity mirrors 14 and output cavity mirror 24, make the equivalent optical path of they and coupling mirror 23.Adjust the Effect of Back-Cavity Mirror 11 and the Effect of Back-Cavity Mirror 21 of two-laser then, make L1=L2.Guarantee that by mobile right-angle prism 1C optical path difference also equates outside both chambeies.Just obtained the synthetic light beam output of two bundle laser coherences by right-angle prism 1C like this.
Embodiment 2:
Fig. 3 is the embodiment of the invention 2, and promptly the situation of n=2 is used for the laser coherence beam merging apparatus schematic diagram that four LD light-pumped solid state lasers are exported.
Based on Fig. 1, the present invention can be used for even number platform laser.Device shown in Figure 3 is made up of four lasers.4 lasers are all by laser medium independently, pumping source, Effect of Back-Cavity Mirror and output cavity mirror constitute three folding cavity lasers, first laser be by on the light path successively by Effect of Back-Cavity Mirror 11, laser medium 12, light beam first changes bundle mirror 13 and second and changes bundle mirror 23, output cavity mirror 14 and pumping source are (not shown in the figures, as follows) form, second laser be by on the light path successively by Effect of Back-Cavity Mirror 21, laser medium 22, light beam first changes bundle mirror 23 and second and changes bundle mirror 33, output cavity mirror 24, form with pumping source, the 3rd laser is by successively Effect of Back-Cavity Mirror 31 on the light path, laser medium 32, light beam first changes bundle mirror 33 and second and changes bundle mirror 43, output cavity mirror 34 and pumping source are formed, the 4th laser 4 is successively by Effect of Back-Cavity Mirror 41 on the light path, laser medium 42, light beam first changes bundle mirror 43 and second and changes bundle mirror 53, output cavity mirror 44 and pumping source are formed, and it is long to be called the chamber of these four lasers through the light path of these devices successively.First laser and second laser are realized injecting mutually by coupling mirror 23, and second laser and the 3rd laser are realized injecting mutually by coupling mirror 33, and the 3rd laser and the 4th laser are realized injecting mutually by coupling mirror 43.The reflectivity that changes 13,23,33,43,53 pairs of 45 ° of incident lasers of bundle mirror all is 90%, the reflectivity of 14,24,34,44 pairs of 0 ° of incident lasers of outgoing mirror is 50% o'clock, the energy that first laser is injected into second laser accounts for 4.52% of first laser outbound course energy, the energy that first laser injects the 3rd laser only accounts for 0.118% of first laser output energy, and it is much bigger that this shows that first laser will be compared the energy that other laser injects to the injection energy of second (it adjacent laser) laser.Can analogizing of other, so system is when existing a plurality of laser, the adjacent laser that still has only that plays an important role interacts, so that system can turn round is stable.Be to guarantee the light path of light beam the chamber outside, refer to that the method for adjustment of the equivalent optical path of output cavity mirror 14,24,34,44 to right-angle prism 3E is: with first laser and second laser is one group, and adjusting right-angle prism 1C makes equivalent optical path outside the chamber; The 3rd laser and the 4th laser are another group, regulate right-angle prism 2C and make equivalent optical path outside the chamber of two lasers outputs; Front two is closed to adjust by right-angle prism 3E after the bundle light compositing again and is made both equivalent optical paths.The chamber appearance of four lasers etc. is to guarantee by the Effect of Back- Cavity Mirror 11,21,31,41 that moves them.So just from the relevant synthetic laser beam of right-angle prism 3E output four bundles.
The rest may be inferred, and this contrive equipment can be generalized to the system of N platform laser, and its structural representation as shown in Figure 4.Do not repeat them here.
In sum, structure of the present invention simple relatively, be easy to realize that system stability can obtain multiple coherent laser output, obtains the LASER Light Source of high-power and high-lighting beam quality, to satisfy the needs of commercial Application and scientific research.
Claims (6)
1, a kind of laser coherence beam merging apparatus is characterized in that comprising the identical laser arranged side by side of structure of N platform independent running, wherein N=2
nN is a positive integer, wherein i platform laser is successively by the i1 Effect of Back-Cavity Mirror on the light path, the i2 laser medium, i3 changes Shu Jing and (i+1) 3 changes Shu Jing, i4 outgoing mirror and pumping source constitute one or three folding cavity lasers, wherein i is 1 to N positive integer, the i1 Effect of Back-Cavity Mirror of all N platform lasers and the light beam extensions of i2 laser medium have a public vertical line, the i3 that is parallel to each other commentaries on classics Shu Jing with the placement at 45 of this public vertical line is arranged in the intersection of the light beam extensions of the i1 Effect of Back-Cavity Mirror of described N platform laser and i2 laser medium and this public vertical line, on this public vertical line, change Shu Jinghou and also place (N+1) 3 commentaries on classics Shu Jing in N3, and the i3 parallel with top n commentaries on classics bundle mirror is parallel, by the i1 Effect of Back-Cavity Mirror, the i2 laser medium, i3 changes Shu Jing, the light path that (i+1) 3 changes between the Shu Jingzhi i4 outgoing mirror is the long Li in chamber of i platform laser, changes Shu Jingjing (i+1) 3 commentaries on classics Shu Jing by i3 and is called coupling light path li to the light path the i4 outgoing mirror; The long Li in the chamber of each laser equates and coupling light path li also equates, be provided with in couples that output beam i5 changes Shu Jing and output beam (i+1) 5 changes Shu Jing in that N/2 is at 45 on to adjacent output light path, between described output beam i5 commentaries on classics Shu Jing and output beam (i+1) 5 commentaries on classics Shu Jing, have and carry out the synthetic right-angle prism of light beam, on the output light path of adjacent two right-angle prisms, synthesize once more by paired an output beam commentaries on classics Shu Jing and a right-angle prism again, form beam of laser output until closing the bundle back at last.
2, laser coherence beam merging apparatus according to claim 1, it is characterized in that the 13rd changes the reflectivity of Shu Jing and (N+1) 3 commentaries on classics Shu Jing greater than 99.5%, be called speculum, and other commentaries on classics Shu Jing is the coupling mirror with high reflectance and low transmissivity, and the transmission by shared (i+1) 3 coupling mirrors of adjacent i platform laser and i+1 platform laser realizes the mutual injection locking between the adjacent laser.
3, laser coherence beam merging apparatus according to claim 2, the one side that it is characterized in that described coupling mirror is coated with the transmission film of reflectivity between 98%~90% to 45 ° of incident lasers, and another side is coated with the reflectivity of 45 ° of incident lasers greater than 99.5% reflectance coating.
4, laser coherence beam merging apparatus according to claim 1, it is characterized in that described laser by pumping source from end-pumping or side pumping.
5, laser coherence beam merging apparatus according to claim 1, the cross section that it is characterized in that described i2 laser medium is circle or rectangle.
6,, it is characterized in that described pumping source is a laser diode according to each described laser coherence beam merging apparatus of claim 1 to 5.
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Families Citing this family (7)
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CN100561296C (en) * | 2006-12-19 | 2009-11-18 | 中国科学院西安光学精密机械研究所 | Laser mutual injection beam combination coupler |
CN100576005C (en) * | 2008-10-22 | 2009-12-30 | 中国科学院上海光学精密机械研究所 | Device for adjusting two-dimensional four-way laser beam duty ratio |
CN103326230B (en) * | 2013-06-25 | 2015-08-26 | 江苏中科四象激光科技有限公司 | A kind of also association bundle method realizing all solid state laser high-power output |
CN105591278B (en) * | 2014-10-23 | 2019-03-08 | 中国科学院理化技术研究所 | High power all-solid state laser multi-wavelength spectrum synthesizer |
CN109830882B (en) * | 2019-01-30 | 2023-10-31 | 中国人民解放军国防科技大学 | Laser array piston phase control method and device |
CN110416875A (en) * | 2019-07-10 | 2019-11-05 | 苏州长光华芯光电技术有限公司 | A kind of coherence beam merging apparatus of laser |
CN114243452A (en) * | 2022-02-24 | 2022-03-25 | 深圳市星汉激光科技股份有限公司 | Interlocking light path of semiconductor laser |
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CN1649220A (en) * | 2005-01-20 | 2005-08-03 | 中国科学院上海光学精密机械研究所 | Optical fiber laser group beam laser |
CN2867663Y (en) * | 2006-01-18 | 2007-02-07 | 中国科学院上海光学精密机械研究所 | Laser coherent light beam synthetizing apparatus |
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US6519385B1 (en) * | 2000-09-27 | 2003-02-11 | The Boeing Company | Method and apparatus for controllably positioning an optical fiber to introduce a phase shift |
US20040165620A1 (en) * | 2003-01-17 | 2004-08-26 | Jeffrey Rogers | Method and apparatus for coherently combining multiple laser oscillators |
CN1649220A (en) * | 2005-01-20 | 2005-08-03 | 中国科学院上海光学精密机械研究所 | Optical fiber laser group beam laser |
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