CN100432723C - Optical element coupling structure and optical fiber structure - Google Patents

Optical element coupling structure and optical fiber structure Download PDF

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Publication number
CN100432723C
CN100432723C CNB2005800102697A CN200580010269A CN100432723C CN 100432723 C CN100432723 C CN 100432723C CN B2005800102697 A CNB2005800102697 A CN B2005800102697A CN 200580010269 A CN200580010269 A CN 200580010269A CN 100432723 C CN100432723 C CN 100432723C
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optical fiber
mentioned
sticker
mentioned optical
element coupling
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CN1938622A (en
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黑田敏裕
八木成行
铃木直也
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Showa Denko Materials Co ltd
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Hitachi Chemical Co Ltd
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Abstract

An optical element coupling structure for coupling an optical fiber to an optical waveguide with a reduced variation of the coupling loss due to the temperature variation of the surrounding environment. The optical element coupling structure (1) for coupling an optical fiber to an optical waveguide comprising an optical fiber (2) and a substrate (6) where an optical waveguide (4) is formed has a groove (8) of a V-shaped cross section formed so that the optical fiber (2) and the optical waveguide (4) are aligned and a recess (10) formed in the groove (8) on the optical waveguide (4) side. The optical fiber (2) is secured to the groove (8) with an adhesive (22). The end (18) of the optical fiber (2) projecting into the recess (10) is coupled to the optical waveguide (4) with a coupling agent (24) placed between them and in the recess (10).

Description

Optical element coupling structure and optical fiber structure
Technical field
The present invention relates to a kind of optical fiber structure, relate in particular to the optical element coupling structure that a kind of conduct makes the optical fiber structure of optical fiber and optical waveguide coupling.
In addition, the optical fiber that the present invention relates to a kind of groove location that will be by being arranged on the V shaped sections on the substrate is fixed on optical fiber structure between substrate and the pressing component with sticker.
Background technology
All the time, example as optical fiber structure, known have V shaped sections groove and optical waveguide to form and make to be configured in the optical fiber on the V shaped sections groove and an optical element coupling structure (optical module) (for example, with reference to patent documentation 1: the spy opens flat 1-126608 communique (Fig. 1), patent documentation 2: the spy opens 2001-281479 communique (the 0017th section and Fig. 1), patent documentation 3: the spy opens 2000-105324 communique (claim 1, the 0052nd section and Fig. 1 b)) of optical waveguide coupling.To this optical element coupling structure, be that example is carried out following explanation with patent documentation 1 and 3 disclosed optical element coupling structures.
Fig. 7 is a disclosed optical element coupling structure in the patent documentation 1.Optical element coupling structure 70 has optical fiber 72 forms optical waveguide 74 with aliging with optical fiber 72 substrate 76.Substrate 76 has V shaped sections groove 78 that optical fiber 72 is alignd with optical waveguide 74 and form and the recess 80 that is formed on optical waveguide 74 sides of this groove 78.
Optical fiber 72 is configured on the V shaped sections groove 78, makes its leading section protrude in recess 80, and, make the inlet of the front end butt optical waveguide 74 of optical fiber 72.Thus, optical fiber 72 aligns with optical waveguide 74, i.e. center levelling.Then, by sticker fixed fiber 72 and V shaped sections groove 78.Thus, can keep aligned condition between optical fiber 72 and the optical waveguide 74.
Fig. 8 is patent documentation 3 disclosed optical element coupling structures.Optical element coupling structure 90 has optical fiber 91, form the substrate 93 of the optical waveguide 92 that should align with optical fiber 91, be used for fixing the pickup groove 94 of optical fiber 91 and be arranged on sticker separating tank 95 in the pickup groove 94.Between optical fiber 91 and optical waveguide 92, the end face of a little UV cured type that drips connects with sticker 96, and coating is fixing with sticker 97 between the pickup groove 94 of optical fiber 91 and substrate 93.
Under the state of optical fiber 91 and the levelling of optical waveguide 92 centers, by make UV cured type sticker 96 sclerosis of dripping between them, optical fiber 91 and optical waveguide effectively just bond.Then, fixing by hardening with sticker 97, bonding optical fiber 91 and substrate 93.Because end face connects with sticker 96 and separates by sticker separating tank 95 with sticker 97 with fixing, even so when fixing, shrink with sticker 97 sclerosis, can prevent also that end face from connecting to be fixed with sticker 96 stretches with sticker, its result can prevent between optical fiber 91 and the optical waveguide 92 eccentric.The coupling loss of optical element coupling structure 90 when room temperature about 25 is spent is at 0.5dB or following.
In addition, all the time, as other example of optical fiber structure, known have will be by being arranged on the V shaped sections groove location on the substrate optical fiber be fixed on optical fiber structure between substrate and the pressing component with sticker.The optical fiber that this optical fiber structure is known to be had for example fiber array, V shaped sections groove and optical waveguide to form and make to be configured on the V shaped sections groove and the optical element coupling structure (optical module) of optical waveguide coupling, (for example, with reference to patent documentation 4: the spy opens 2003-322744 communique (Fig. 1～Fig. 5)) to make the optical element coupling structure (optical module) that fiber array and optical waveguide be coupled.
Figure 26 is the front view of an example of biopsy cavity marker devices V shaped sections groove and the optical waveguide optical element coupling structure (optical module) that forms and make the optical fiber that is configured in the V shaped sections groove and optical waveguide coupling.In addition, Figure 27 is the cut-open view along the XXV II-XXV II line of Figure 26.Optical element coupling structure 200 has: the upstream side optical fiber 202 that has end face 202a and extend at length direction; Have end face 204a that on the direction relative, disposes and the downstream optical fiber 204 that extends at the degree length direction with the end face 202a of this upstream side optical fiber 202; And be arranged on to optical fiber 204 propagates light optical waveguide 206 between them downstream from upstream side optical fiber 202.Optical element coupling structure 200 also has: the substrate 210 that is provided with the V shaped sections groove 208 that is used to take in and locate upstream side optical fiber 202 and downstream optical fiber 204; From the top briquetting 212,214 that covers upstream side optical fiber 202 and downstream optical fiber 204 respectively and these optical fiber 202,204 are pushed to substrate 210; And the sticker 216 of filling to the space between them for the substrate 210 that interfixes, optical fiber 202,204 and briquetting 212,214.Briquetting 212,214 has the surface of contact 218 that contacts with upstream side optical fiber 202 and downstream optical fiber 204.
In this optical element coupling structure 200, propagate the light that comes through upstream side optical fiber 202 and pass to downstream optical fiber 204 by optical waveguide 206.
Problems of the prior art for example are, with regard to regard to disclosed optical element coupling structure 200 in the documents 4, when light reached from optical waveguide 206 optical fiber 204 propagation downstream when optical waveguide 206 is propagated from upstream side optical fiber 202, the luminous power of propagation produced the loss that is called coupling loss.This coupling loss is with the luminous power (Po) in decibel unit representation downstream and the value (10log of the ratio of the luminous power (pi) of upstream side 10(Po/Pi)).
The coupling loss of Figure 26 and optical element coupling structure 200 shown in Figure 27, it is the coupling loss between upstream side optical fiber 202 and the optical waveguide 206, perhaps the coupling loss between optical waveguide 206 and the downstream optical fiber 204 changes with the viscosity of sticker and the variation of environment temperature sometimes.This variation describes with reference to Figure 28 and Figure 29.Figure 28 represents that environment temperature is+25 ℃, the figure of the relation of the measured value of the viscosity of the sticker 216 when promptly being fixed on the V shaped sections groove 208 of substrate 210 with optical fiber 202,204 during roughly the same temperature and coupling loss.In addition, Figure 29 is the figure of relation of the variation of the viscosity of expression environment temperature sticker 216 in-40 ℃～+ 85 ℃ scope and coupling loss measured value.
By Figure 28 and Figure 29 as can be known, when the viscosity ratio of sticker 216 is hanged down, the coupling loss of+25 ℃ optical element coupling structure 200 smaller (with reference to Figure 28), but temperature is when changing in-40 ℃～+ 85 ℃ scope, the change of coupling loss bigger (with reference to Figure 29).As a result, although+coupling loss of 25 ℃ optical element coupling structure 200 is very little ,-40 ℃ or+coupling loss of 85 ℃ optical element coupling structure 200 is still quite big.
In addition, when the viscosity ratio of sticker 216 is higher, the coupling loss of+25 ℃ optical element coupling structure 200 bigger (with reference to Figure 28), but the change smaller (with reference to Figure 29) of the coupling loss of temperature when in-40 ℃～+ 85 ℃ scopes, changing.As a result, temperature be+25 ℃ ,-40 ℃ or+coupling loss of 85 ℃ optical element coupling structure 200 is still bigger, does not have what variation.
Have, Figure 30 is the figure of the relation of expression elastic modulus of sticker and viscosity again.As shown in Figure 30, have proportionate relationship between the viscosity of sticker and elastic modulus, when the viscosity of sticker uprised, then elastic modulus also uprised.Thereby coupling loss is not only according to the variation of the viscosity of sticker and environment temperature and change, and changes according to the elastic modulus of sticker.
On the other hand, in recent years, optical fiber the Internet line road network is popularized in each family.Optical fiber the Internet line road network to each family provides provides the optical fiber of side to branch into multifiber by optical splitter at circuit, and the optical fiber of branch is introduced the method that each family carries out becomes main flow.On this optical splitter, use the above-mentioned coupled fiber and the optical element coupling structure of optical waveguide.Optical splitter is for example owing to be configured in the box that is installed near the electric pole of each family, so be subjected to the influence of ambient temperature.Especially, the temperature variation than atmosphere is bigger sometimes for the variation of temperature in this box.Its result, can take place by the loss that the optical splitter that utilizes above-mentioned optical element coupling structure is transferred to the light of each family is the situation that the coupling loss of optical element coupling structure changes, promptly increases because of the temperature variation of surrounding environment.
Thereby for example when changing for-40 ℃～+ 85 ℃, the coupling loss of optical element coupling structure 200 is preferably in the below horizontal of regulation to the temperature of environment temperature and optical fiber structure.The preferred 0.6dB of level of regulation, further preferred 0.5dB, further preferred again 0.4dB.In addition, the coupling loss when patent documentation 3 disclosed optical element coupling structures 90 have been realized 25 ℃ is 0.5dB or following, but wishes further to reduce coupling loss, and preferably coupling loss is 0.2dB or following.
Summary of the invention
Therefore, the 1st purpose of the present invention is to provide a kind of and reduces because the transmission loss change of the light that the temperature variation of surrounding environment causes is the optical element coupling structure coupling loss change, coupled fiber and optical waveguide.
In addition, the 2nd purpose of the present invention is to provide a kind of optical fiber structure that improves the coupling loss when using the higher sticker of viscosity ratio.
In addition, the 3rd purpose of the present invention is to provide a kind of coupling loss of temperature when changing for-40 ℃～+ 85 ℃ that make at prescribed level or following optical fiber structure.
When at length studying for the coupling loss change of above-mentioned optical element coupling structure, known following content: the sticker between optical fiber and the V shaped sections groove is because the temperature variation of surrounding environment expands or contraction, thereby optical fiber moves relative to V shaped sections groove, between the leading section of optical fiber and optical waveguide, produce thereupon and relatively move, its result, both stagger at the center, and the coupling loss of optical element coupling structure increases.
Therefore, in order to realize above-mentioned the 1st purpose, the optical element coupling structure of the present invention's the 1st scheme is the optical element coupling structure of coupled fiber and optical waveguide, it is characterized in that having: optical fiber; Be formed with should with the substrate of fiber alignment optical waveguide, substrate has that be formed centrally in the optical fiber alignment and optical waveguide and upwards open V shaped sections groove and will extend downwards and the space of upwards opening is formed on the recess of the optical waveguide side of V shaped sections groove than this groove when loading fiber, in V shaped sections groove, dispose optical fiber, make its leading section outstanding to recess, and at this it is fixed with sticker with optical fiber, the leading section of optical fiber and optical waveguide are coupled with couplant with the optical fiber that is filled between them and recess is interior.
According to the optical element coupling structure of the present invention of such formation, make its leading section to recess highlightedly with fiber configuration in V shaped sections groove, and, make the front end butt optical waveguide of optical fiber.Thus, optical fiber aligns with optical waveguide, i.e. centering.In fact, very little gap is arranged between optical fiber and optical waveguide.Then, by optical fiber sticker fixed fiber and V shaped sections groove.And, fill the optical fiber couplant between the leading section of optical fiber and optical waveguide and in the recess, the leading section of optical fiber and optical waveguide are coupled.Thus, can keep aligned condition between optical fiber and the optical waveguide.
At length, change according to environment temperature, the optical fiber of filling between optical fiber and V shaped sections groove is with sticker or expansion or contraction.At this moment, in the optical element coupling structure of prior art, generation relatively moves between optical fiber leading section and the optical waveguide, and both stagger at the center, and making optical transmission loss is that coupling loss increases.In contrast, in optical element coupling structure of the present invention, because with optical fiber couplant coupled fiber leading section and optical waveguide, so relatively moving between limit fibre leading section and the optical waveguide.Thus, the coupling loss of optical element coupling structure is reduced.
In addition, form recess according to optical waveguide side at V shaped sections groove, make the optical fiber leading section dispose this structure highlightedly to recess, the explanation of embodiment as can be known as described later, even different optical fiber stickers contacts with couplant with optical fiber mutually, the coupling loss of optical element coupling structure is reduced.This recess can form simultaneously with the operation that the inclined-plane of the groove that will produce when forming V shaped sections groove by the anisotropy etching is removed by cutting processing etc., neither need specially to be provided with disclosed sticker separating tank 95 on the patent documentation 3, also do not need independent increase only to form the operation of recess.In addition, need only the sand grains condition when selecting cutting processing rightly, just can make waveguide end face mirror-polishing.Thus, the end face reflection damping capacity is reduced, the coupling loss of optical element coupling structure is reduced.
With regard to the embodiment of the optical element coupling structure of the present invention's the 1st scheme, substrate preferably also have formed V shaped sections groove above, optical element coupling structure also has with top grip optical fiber and the pressing component that disposes with top devices spaced apart, this pressing component has and covers on the above-mentioned optical fiber and the width wide cut groove also wideer than the external diameter of above-mentioned optical fiber of configuration, optical fiber also be filled between wide cut groove and the optical fiber with sticker and pressing component and top between.
In the optical element coupling structure that constitutes like this, optical fiber is fixed on the substrate with sticker by the optical fiber of filling between the wide cut groove of optical fiber with sticker and optical fiber and pressing component of filling between itself and the V shaped sections groove.That is, optical fiber is probably by 1 place of its below part, promptly add up to 3 places to support with 2 places of sticker and its upper section, the optical fiber of promptly filling between the both sides of optical fiber and wide cut groove with sticker at the optical fiber of filling between optical fiber and the V shaped sections groove.Thus, limited that optical fiber after the temperature variation around expands with sticker or when shrinking optical fiber with respect to the relatively moving of V shaped sections groove, thereupon, the also leading section of limit fibre relatively moving with respect to optical waveguide.Its result can further reduce the coupling loss of optical element coupling structure.
With regard to the optical element coupling structure of the embodiment of above-mentioned the 1st scheme, optical fiber both can be identical sticker with optical fiber with couplant with sticker, it also can be different constituents, above-mentioned optical fiber is 0.01～0.5GPa with sticker and above-mentioned optical fiber with the elastic modulus of couplant, its linear expansion coefficient be 40～300ppm/ ℃ best.In addition, their viscosity is preferably 100～1,000mPas.
With regard to the optical element coupling structure of the embodiment of above-mentioned the 1st scheme, optical fiber with sticker and optical fiber with the preferably identical sticker of couplant.When optical fiber is identical sticker with sticker and optical fiber couplant, owing to be used to adhere or the constituent that is coupled is a kind and gets final product, so can simplify manufacturing process.
In the embodiment of the present invention's the 1st scheme, optical element coupling structure preferably also has the leading section of covering optical fiber and the encapsulant that optical fiber applies with couplant ground, and the modular ratio optical fiber of encapsulant is also big with the elastic modulus of couplant with sticker and optical fiber.
In the optical element coupling structure that constitutes like this, the optical fiber of filling between optical fiber leading section and optical waveguide owing to expanding because of the variation of environment temperature or shrinking, produces strain with couplant., because seal has than optical fiber with the also big elastic modulus of couplant, so can be by the strain of seal limit fibre with couplant.Like this, relatively moving between limit fibre leading section and the optical waveguide, its result can reduce the coupling loss change of light.And seal is different with couplant with optical fiber, can use the lower resin of the transparency.In addition, the less this point such as resin of seal use moisture permeability are more favourable.
With regard to the optical element coupling structure of the embodiment of above-mentioned the 1st scheme, optical fiber with sticker and optical fiber with the preferably identical sticker of couplant.In addition, with regard to the optical element coupling structure of the embodiment of above-mentioned the 1st scheme, optical fiber both can be identical sticker with optical fiber with couplant with sticker, it also can be different constituents, but preferably their elastic modulus is 0.01～3.0GPa, and their linear expansion coefficient is 40～300ppm/ ℃, and the elastic modulus of encapsulant is 5～20GPa, and its linear expansion coefficient is 5～30ppm/ ℃.In addition, preferably optical fiber is 100～8 with couplant and optical fiber with the viscosity of sticker, 000mPas, and the viscosity of encapsulant is 10,000～200,000mPas.
With regard to the embodiment of the present invention's the 1st scheme, with the preferably different constituent of couplant, optical fiber is little with the elastic modulus of the modular ratio optical fiber usefulness sticker of couplant with sticker and optical fiber for optical fiber.
In the optical element coupling structure that constitutes like this, because optical fiber is different constituents with sticker with the optical fiber couplant, are occasions of identical sticker so compare both, but relatively moving between limit fibre leading section and the optical waveguide.At length, around during the temperature variation of environment, optical fiber with sticker, optical fiber with couplant contraction or expansion all.If both are identical stickers, then both expand with identical ratio or shrink.In contrast, if optical fiber is low with sticker with the modular ratio optical fiber of couplant, then for identical temperature variation, optical fiber expands with sticker with the ratio optical fiber of the expansion of couplant or contraction or the ratio of contraction reduces.Thus, relatively move even between optical fiber and V shaped sections groove, produce, also can limit fibre and optical waveguide between relatively move, its result can reduce the coupling loss change of optical element coupling structure.In addition, because optical fiber just is used to make optical fiber to be fixed in the V shaped sections groove with sticker, thus do not need the transparency or refractive index match, thus the sticker that can select not have this character.In addition, it is more favourable using the higher sticker this point of moisture-proof stickability.
With regard to the optical element coupling structure of the embodiment of above-mentioned the 1st scheme, the leading section and the hermetic fiber that cover optical fiber are best with couplant with the further coating optic fibre in optical waveguide ground.
In the optical element coupling structure that constitutes like this, compare the occasion that only is filled between optical fiber and the optical waveguide, optical fiber can limit the contraction or expansion of the caused optical fiber of temperature variation of surrounding environment with couplant with couplant.Thus, relatively moving between limit fibre and the optical waveguide, its result can further reduce the coupling loss change of optical element coupling structure.
With regard to the optical element coupling structure of the embodiment of above-mentioned the 1st scheme, optical fiber is 10 with the elastic modulus of couplant -6～10 -3Gpa and its linear expansion coefficient are 100～400ppm/ ℃, optical fiber with the elastic modulus of sticker be 0.01～3.0Gpa and its linear expansion coefficient be 20～100ppm/ ℃ best.In addition, optical fiber is preferably 1,000～5 with the viscosity of couplant, 000mPas, and optical fiber is 5,000～100 with the viscosity of sticker, 000mPas.
In addition, relevant patent documentation 4 disclosed optical fiber structures, the application's inventor uses the coupling loss of higher sticker 216 time+25 of viscosity ratio ℃ to become big reason in order to seek, and has used the section of the optical element coupling structure (optical fiber structure) 100 of the higher sticker of viscosity ratio 216 with the metal microstructure sem observation.Its result, confirming that gap between the V of substrate 210 shaped sections groove 208 and optical fiber 204,202 is residual has a sticker 216.The present invention make great efforts to reduce the residual sticker in gap between V shaped sections groove and the optical fiber and getable invention.
In order to realize above-mentioned the 2nd purpose, the optical fiber structure of the present invention's the 2nd scheme has: the optical fiber that has end face and extend at length direction; Be provided with and be used to take in the also substrate of the V shaped sections groove of positioning optical waveguides; With optical fiber from it face cover and push the pressing component of optical fiber to substrate; And the sticker of in the space between them, filling for the substrate that interfixes, optical fiber and pressing component, it is characterized in that, pressing component has from the end face side of optical fiber in the longitudinal direction in turn in abutting connection with the 1st contact portion, center section and the 2nd contact portion that are provided with, optical fiber with pressing component when substrate is pushed, the 1st contact portion of pressing component and the 2nd contact portion contact with optical fiber and push optical fiber to substrate, and the center section of pressing component is separated with at interval by sticker and optical fiber.
According to the optical fiber structure of the present invention of such formation, with pressing component when substrate is pushed optical fiber, the unnecessary sticker between the V shaped sections groove of optical fiber and substrate is open, sticker flows out from the gap between optical fiber and the groove.Distance between optical fiber and the groove near the time, the fiber section of the 1st contact portion of pressing component and the 2nd contact portion contact is pushed forcibly to substrate.In contrast, be separated with fiber section at interval with the center section of pressing component and do not pushed to substrate forcibly.Thereby, when particularly the viscosity ratio of sticker is higher, unnecessary sticker can be from the part of the optical fiber pushed forcibly to substrate, promptly flow out corresponding to the fiber section and the gap between the groove of the 1st contact portion and the 2nd contact portion, but from and center section be separated with fiber section at interval, promptly flow out corresponding to the fiber section and the gap between the groove of center section.Like this, corresponding to the fiber section of the 1st contact portion and the 2nd contact portion can be more near the groove of substrate.In fact the groove of contact substrate is best can to make this fiber section.This means that optical fiber is near the position in the minimum design of coupling loss.Even its result when using the higher sticker of viscosity ratio, also can improve the coupling loss of optical fiber structure.Certainly, use the optical fiber structure of the lower sticker of viscosity ratio to be also contained among the present invention.
In contrast, in the optical fiber structure of prior art, push optical fiber by pressing component, distance between optical fiber and the groove near the time, in the total length of the length direction of whole briquetting, the unnecessary sticker between the V shaped sections groove of optical fiber and substrate is difficult to from the gap between optical fiber and the groove flow out.When particularly the viscosity ratio of sticker is higher, residual sticker between optical fiber and groove.Thus, fiber orientation is on the position different with the position in the design, and it is big that coupling loss becomes.
With regard to the embodiment of the present invention's the 2nd scheme, optical fiber preferably is made of the multifiber that is arranged in parallel, and is arranged on the substrate corresponding to the V shaped sections groove of multifiber.
In the optical fiber structure of the present invention that constitutes like this, the unnecessary sticker that flows to the space between optical fiber and the optical fiber from the gap between optical fiber and the groove is further crossed optical fiber top by the center section and the space between the optical fiber of pressing component, and the relative length direction is in cross flow.Thus, unnecessary sticker flows, and makes fiber section corresponding to the part 1 of briquetting and part 2 more near groove.Its result can improve each coupling loss of multifiber.
This is particularly useful for the optical fiber structure that the V shaped sections groove and the optical waveguide tube core of mutual alignment form.In addition, owing to can make the spacing homogeneous more of the optical fiber of adjacency, so also useful to optical fiber structure with fiber array.
In contrast, in the optical fiber structure of prior art,, can not cross the top mobile of optical fiber on the total length of its length direction so flow to the unnecessary sticker in the space between optical fiber and the optical fiber because briquetting contacts with optical fiber.Thereby the gap between optical fiber and optical fiber is easy to residual sticker.
With regard to the embodiment of the present invention's the 2nd scheme, the 1st contact portion of pressing component preferably has with optical fiber contact and is used for pushing the surface of contact of optical fiber and being that the center is arranged on the both sides of surface of contact and the opposite face relative with substrate with the length direction to substrate, surface of contact constitutes the recess with respect to opposite face, and opposite face and the distance between the substrate in these recess both sides are 20～40 μ m.
In the optical fiber structure of the present invention that constitutes like this, can be effectively fixedly briquetting and substrate, can further reduce the change of optical fiber structure simultaneously about the coupling loss of temperature variation.That is, when the distance between opposite face and the substrate was excessive, the clinging power between briquetting and the substrate reduced, and when the distance between opposite face and the substrate was too small, sticker involved the stress increase of optical fiber when temperature variation, made the combination damage variation of optical fiber structure.
In addition, be the both sides of the surface of contact at center, i.e. setting in the horizontal because opposite face is arranged on the length direction, so the configuration symmetrically substantially of the relative optical fiber of briquetting and substrate.Thus, during temperature variation, the stress that sticker involves optical fiber is cancelled out each other, and can reduce the coupling loss of optical fiber structure.
With regard to the embodiment of the present invention's the 2nd scheme, the viscosity of sticker is preferably 10,000～50,000mPas, and 20,000～40,000mPas is better.In addition, the elastic modulus of sticker is preferably 0.01～3.0GPa, and its linear expansion coefficient is preferably 20～100ppm/ ℃.
In the optical fiber structure that constitutes like this, optical fiber is smaller with respect to the change of the coupling loss of temperature variation.Thereby, for example, can make the coupling loss of temperature when changing for-40 ℃～+ 85 ℃ below prescribed level, thereby realize the 3rd purpose of the present invention.The level of regulation is preferably 0.5dB, and 0.4dB is better.
With regard to the embodiment of the present invention's the 2nd scheme, the 1st contact portion is at the length of length direction 0.5～3 times of fibre diameter preferably.
In the optical fiber structure that constitutes like this, the 1st contact portion optical fiber by pressing component can be effectively near the groove of substrate, thereby can improve the coupling loss of optical fiber.That is, when the 1st contact portion when length direction length is too short, the power that optical fiber is pushed to substrate is not enough easily, when the 1st contact portion when length direction length is long, then near the structure of the optical fiber structure of prior art.
With regard to the embodiment of the present invention's the 2nd scheme, substrate preferably have be provided with V shaped sections groove above, center section has below the top relative and cross-section optical fiber of substrate smooth.
In the optical fiber structure that constitutes like this,, just can improve the coupling loss of optical fiber structure by being relatively easy to processing.
In order to realize above-mentioned the 2nd purpose, optical fiber structure of the present invention has: the optical fiber that has end face and extend at length direction; Be provided with and be used to take in the also substrate of the V shaped sections groove of positioning optical waveguides; With optical fiber from it face cover and push the pressing component of optical fiber to substrate; And the sticker of in the space between them, filling for the substrate that interfixes, optical fiber and pressing component, it is characterized in that, substrate has from the end face side of optical fiber in the longitudinal direction in turn in abutting connection with the 1st trough of belt part, center section and the 2nd trough of belt part that are provided with, the 1st trough of belt part and the 2nd trough of belt of substrate partly are provided with V shaped sections groove, and the center section of substrate is separated with at interval by sticker and optical fiber.
According to the optical fiber structure of the present invention of such formation, with pressing component when substrate is pushed optical fiber, the unnecessary sticker between the V shaped sections groove of optical fiber and substrate is open, sticker flows out from the gap between optical fiber and the groove.Distance between optical fiber and the groove near the time, enter the 1st trough of belt part of substrate and the fiber section of the 2nd trough of belt part and be pressed forcibly to substrate.In contrast, be separated with fiber section at interval with the center section of substrate and do not pushed to substrate forcibly.Thereby, particularly when the viscosity ratio of sticker is higher, unnecessary sticker can be from the part of the optical fiber that is pressed forcibly to substrate, promptly flow out corresponding to the fiber section and the gap between the groove of the 1st trough of belt part and the 2nd trough of belt part, but from and center section be separated with fiber section at interval, promptly flow out corresponding to the fiber section and the space between the center section of center section.Like this, corresponding to the fiber section of the 1st trough of belt part and the 2nd trough of belt part can be more near the groove of substrate.Preferably can make the in fact groove of contact substrate of this fiber section.This means that optical fiber is near the position in the minimum design of coupling loss.Even its result when using the higher sticker of viscosity ratio, also can improve the coupling loss of optical fiber structure.Certainly, use the optical fiber structure of the lower sticker of viscosity ratio to be also contained among the present invention.
With regard to the embodiment of the present invention's the 2nd scheme, optical fiber structure both can be a fiber array, also can be the optical element coupling structure (optical module) that V shaped sections groove and optical waveguide were coupled and made the optical fiber that is configured on the V shaped sections groove and optical waveguide coupling integratedly, also can be the optical element coupling structure (optical module) that fiber array and optical waveguide are coupled.
Optical element coupling structure according to coupled fiber of the present invention and optical waveguide can reduce because the coupling loss change of the caused light of variation of ambient temperature.
Coupling loss when as mentioned above, optical fiber structure of the present invention can improve use than the sticker of higher viscosity.
In addition, optical fiber structure of the present invention can make the coupling loss of temperature when changing for-40 ℃～+ 85 ℃ at prescribed level or following.
Description of drawings
Fig. 1 is the front view of biopsy cavity marker devices of optical element coupling structure of the 1st embodiment of the present invention's the 1st scheme.
Fig. 2 is the cut-open view along the II-II line of Fig. 1.
Fig. 3 is the front view of biopsy cavity marker devices of optical element coupling structure of the 2nd embodiment of the present invention's the 1st scheme.
Fig. 4 is the cut-open view along the IV-IV line of Fig. 3.
Fig. 5 is the front view of biopsy cavity marker devices of optical element coupling structure of the 3rd embodiment of the present invention's the 1st scheme.
Fig. 6 is the front view of biopsy cavity marker devices of optical element coupling structure of the 4th embodiment of the present invention's the 1st scheme.
Fig. 7 is the front view of the optical element coupling structure of prior art.
Fig. 8 is the front section view of the optical element coupling structure of prior art.
Fig. 9 is the front view of biopsy cavity marker devices of optical element coupling structure of the 1st embodiment of the present invention's the 2nd scheme.
Figure 10 is the cut-open view along the X-X line of Fig. 9.
Figure 11 is the cut-open view along the XI-XI line of Fig. 9.
Figure 12 is the cut-open view along the XII-XII line of Fig. 9.
Figure 13 is the cut-open view along the XIII-XIII line of Fig. 9.
Figure 14 is the front view of biopsy cavity marker devices of optical element coupling structure of the 2nd embodiment of the present invention's the 2nd scheme.
Figure 15 is the front view of biopsy cavity marker devices of optical element coupling structure of the 3rd embodiment of the present invention's the 2nd scheme.
Figure 16 is the cut-open view along the XVI-XVI line of Figure 15.
Figure 17 is the cut-open view along the XVII-XVII line of Figure 15.
Figure 18 is the cut-open view along the XVII-XVIII line of Figure 15.
Figure 19 is the cut-open view along the XIX-XIX line of Figure 15.
Sketch when Figure 20 is the section of the embodiment that examines under a microscope at the optical element coupling structure of the 1st embodiment of the present invention's the 2nd scheme of the contact portion lateral dissection of briquetting.
Figure 21 is the sketch when examining under a microscope the section of the comparative example of the optical element coupling structure of the prior art of lateral dissection on briquetting.
Figure 22 is the figure of experimental example of the relation of expression sticker thickness and coupling loss.
Figure 23 is the figure of the experimental example of the relation that changes of expression sticker thickness and coupling loss.
The figure of the experimental example of Figure 24 relation that to be the expression sticker thickness that carries out pressure cooker when test change with coupling loss.
Figure 25 is the figure of the experimental example of the coupling loss change of expression when carrying out high temperature and humidity test.
Figure 26 is the front view of the optical element coupling structure of biopsy cavity marker devices prior art.
Figure 27 is the cut-open view along the XXVII-XXVII line of Figure 26.
Figure 28 is the figure of the relation of the viscosity of the sticker of expression environment temperature for+25 ℃ time the and coupling loss.
Figure 29 is the figure of relation of change of the measured value of the viscosity of the sticker of expression environment temperature when changing in-40 ℃～+ 85 ℃ scope and coupling loss.
Figure 30 is the figure of the relation of expression elastic modulus of sticker and viscosity.
Embodiment
Below, 4 embodiments of the optical element coupling structure of the 1st scheme that present invention will be described in detail with reference to the accompanying.At first, describe the 1st embodiment of the present invention's the 1st scheme with reference to Fig. 1 and Fig. 3.Fig. 1 is that the 1st embodiment of the present invention's the 1st scheme is the front view of biopsy cavity marker devices of the optical element coupling structure of optical fiber and optical waveguide, and Fig. 2 is the cut-open view along the II-II line of Fig. 1.
As shown in Figures 1 and 2, the optical element coupling structure 1 of coupled fiber and optical waveguide has optical fiber 2 and forms the substrate 6 of the optical waveguide 4 that should align with this optical fiber 2.Optical fiber 2 has entrance side optical fiber 2a and outlet side optical fiber 2b, the end face 2d of the core 2c of alignment entrance side optical fiber 2a and the entrance face 4a of optical waveguide 4, the light that makes transmission in entrance side optical fiber 2a and come is transferred to outlet side optical fiber 2b by optical waveguide 4, and the exit end face 4b of optical waveguide 4 aligns with the end face 2f of the core 2e of outlet side optical fiber 2b.Entrance side optical fiber 2a and outlet side optical fiber 2b both can be 1, also can horizontally set many, i.e. and array-like.For example, if entrance side optical fiber 2a is 1, outlet side optical fiber 2b is an array-like, and then optical element coupling structure 1 plays a role as optical splitter; If entrance side optical fiber 2a is an array-like, outlet side optical fiber 2b is 1, and then optical element coupling structure 1 just plays a role as photo-coupler.Because the structure of the entrance side of optical element coupling structure 1 is identical with the structure of outlet side,, omit the structure of explanation outlet side so following the structure about entrance side describes.
Substrate 6 has: optical fiber 2 is alignd with optical waveguide 4 form and open upward V shaped sections groove 8; Recess 10 with the space of extending downwards than this groove 8 in the optical waveguide 4 sides formation of V shaped sections groove 8 and upwards opening.At length, substrate 6 has: the optical fiber support sector 14 of extending upward from pedestal part 12, be used to support optical fiber 2; With the optical waveguide portion 16 that is separated with at interval with this optical fiber support sector 14 and extends upward from pedestal part 12, form optical waveguide 4 on top, formation recess 10 between optical fiber support sector 14 and optical waveguide 16.V shaped sections groove 8 is formed on the top 14a of optical fiber support sector 14.Form V shaped sections groove 8 and optical waveguide 4, optical fiber 2 and optical waveguide 4 alignment when making the optical fiber 2 that on V shaped sections groove 8, loads known external diameter (for example being 125 μ m).The top 14a almost parallel ground of the bottom surface 10a of recess 10 and optical fiber support sector 14 forms, and two the side 10b and the bottom surface 10a of recess 10 are formed generally perpendicularly.Recess 10 for example is 100～150 μ m in the length of fiber length.
Configuration optical fiber 2 makes its leading section 18 in recess 10 is configured in V shaped sections groove 8 highlightedly, thereby, optical fiber 2 and optical waveguide 4 alignment.The end face 2d of optical fiber 2 preferably is connected on the entrance face 4a of optical waveguide 4, in fact in order to make their automatic assemblings easily, between the entrance face 4a of the end face 2d of optical fiber 2a and optical waveguide 4, leaves the gap of about 10～20 μ m.In addition, optical fiber 2 is fixed on the V shaped sections groove 8 with sticker 22 by the optical fiber that is filled in the space 20 between itself and the V shaped sections groove 8.
And the leading section 18 of optical fiber 2 and optical waveguide 4 are by being filled between these and couplant 24 couplings of recess 10 interior optical fiber.Optical fiber owing to pass through wherein from the light of optical fiber 2 to optical waveguide 4 transmission, so need and have suitable refractive index (refractive index match) to optical transparency (transparency), is preferably adjusted the couplant that agent is used as refractive index with couplant 24.Optical fiber both can be photo-hardening type stickers such as ultraviolet hardening resin or visible light hardening resin with couplant 24, also can be also to use the constrictive type sticker to the photo-thermal that has wherein added the thermmohardening catalyzer in advance, both can be gluey constituent, also can be filling agent.Photo-hardening type sticker for example is Da Jin (ダ ィ キ Application) system UV cured type epoxy series plastics " UV2100 ".In addition, photo-thermal is UV cured type epoxy series plastics or UV cured type third rare series plastics etc., for example UV cured type epoxy of EMI system series plastics " 3553HM " with the constrictive type sticker also.
Optical fiber with sticker 22 preferably with optical fiber with the identical constituent of couplant 24.And, optical fiber sticker 22 and the optical fiber preferably identical sticker of couplant 24, but also can be different constituents.In Fig. 1, expression optical fiber is situations of identical sticker with couplant 24 with sticker 22 and optical fiber.
One of the manufacture method of the optical fiber of the 1st embodiment of the present invention's the 1st scheme and the optical element coupling structure 1 of optical waveguide is for example descended described.Prepare substrate 6, form V shaped sections groove 8 by implement the anisotropy etching according to the resist pattern made from photoetching with making such as silicon, macromolecular materials.Then on the substrate 6 that forms V shaped sections groove 8, form optical waveguide 4.If at length describe, it then is the occasion that forms by macromolecular material at optical waveguide 4, by spin coated or mold etc. form clad and on sandwich layer after, machinings such as the processing of enforcement photoetching, reactive ion etching etc. and former compacting form the core of square-section from sandwich layer, further, cover core ground by method same as described above and form clad, thereby form optical waveguide 4.In addition,, on substrate 6, form quartz layer by flame method of piling or CVD method with the quartzy occasion that forms optical waveguide 4, make the quartzy core of rectangle by the processing of dry corrosion processing etc. after, cover core ground and form clad, thus formation optical waveguide 4.Carry out the formation operation of V shaped sections groove 8 and the formation operation of optical waveguide, make when optical fiber 2 is loaded on the V shaped sections groove 8, can access the position relation of V shaped sections groove 8 that optical fiber 2 aligns with optical waveguide 4 and optical waveguide 4.Then, by dry corrosion or cutting processing etc., the entrance face 4a that makes the end face 2d that is loaded in the optical fiber 2a on the V shaped sections groove 8 be connected to optical waveguide 4 upward forms recess 10.Then, optical fiber is coated on the V shaped sections groove 8 with sticker 22.Optical fiber 2 is configured on the V shaped sections groove 8, makes the leading section 18 of optical fiber 2 outstanding to recess 10, thus, bonding optical fiber 2 is engaged with optical waveguide 4.Then, fill optical fiber between the entrance face 4a of the end face 2d of optical fiber 2a and optical waveguide 4 and in the recess 10, thus, the leading section 18 of optical fiber 2 and optical waveguide 4 are coupled with couplant 24.
Then, describe the 2nd embodiment of the optical element coupling structure of the present invention's the 1st scheme with reference to Fig. 3 and Fig. 4.Fig. 3 is the front view of biopsy cavity marker devices of optical element coupling structure of the present invention the 1st the 2nd embodiment, and Fig. 4 is the cut-open view along the IV-IV line of Fig. 3.
The optical fiber of the 2nd embodiment of the present invention's the 1st scheme and the optical element coupling structure of optical waveguide are except that having added pressing component described later, and be identical with the optical element coupling structure of the 1st embodiment of above-mentioned the 1st scheme.Thereby, be marked with identical reference marks in the part identical with the 1st embodiment of the 1st scheme, omit its explanation, below different parts only is described.
As shown in Figures 3 and 4, the optical element coupling structure 30 of the 2nd embodiment of the present invention's the 1st scheme has with the top 14a grip optical fiber 2 of optical fiber support sector 14 and is separated with the pressing component 32 of compartment of terrain configuration from top 14a.Pressing component 32 is preferably by making such as glass or macromolecular materials.Pressing component 32 has and covers on the optical fiber 2 and the width wide cut groove 34 also wideer than the external diameter of optical fiber 2 of configuration.The section shape of wide cut groove 34 both can be a rectangle, also can be U font etc.Between wide cut groove 34 and optical fiber 2, form the space 36 of filling optical fiber in the both sides of optical fiber 2 with sticker 22.Optical fiber is filled between the top 14a that reaches pressing component 32 and optical fiber support sector 14 between wide cut groove 34 and the optical fiber 2 with sticker 22.
The optical fiber of present embodiment is identical with couplant 24 with sticker 22 and optical fiber with the optical fiber of the 1st embodiment of the 1st scheme with couplant 24 with sticker 22 and optical fiber.And, optical fiber sticker 22 and the optical fiber preferably identical sticker of couplant 24, but also can be different constituents.In Fig. 3, identical with Fig. 1, expression optical fiber is occasions of identical sticker with couplant 24 with sticker 22 and optical fiber.
And; use elastic modulus, linear expansion coefficient and the vitrifying point of couplant 24 with sticker 22 and optical fiber by selecting optical fiber rightly; can reduce ambient temperature and change the optical fiber 2 cause and the rate of travel between the optical waveguide 4, just reducing light to optical waveguide 4, to insert the loss change be the coupling loss change.Optical fiber is 0.01～0.5GPa with sticker 22 and optical fiber with the elastic modulus of couplant 24, and its linear expansion coefficient is preferably 40～300ppm/ ℃, its vitrification point Tg be preferably 100 ℃ or above and than the temperature of surrounding environment high 15 ℃ or more than.In addition, optical fiber is preferably 100～1 with sticker 22 and optical fiber with the viscosity of couplant 24,000mPas, and 100～500mPas is better.Optical fiber for example is the UV cured type third rare series plastics " AT8224 " of NTT-AT system with sticker 22 and optical fiber with couplant 24.
With regard to an example of the manufacture method of the optical element coupling structure 30 of the 2nd embodiment of the present invention's the 1st scheme, by on the manufacture method of the optical element coupling structure 1 of the 1st embodiment of the 1st above-mentioned scheme, appending, an amount of optical fiber is coated on the optical fiber 2 with sticker 22, and the operation that the wide cut groove 36 of pressing component 32 is covered on the optical fiber 2 gets final product.
Then, describe the 3rd embodiment of the optical element coupling structure of the present invention's the 1st scheme with reference to Fig. 5.Fig. 5 is the front view of biopsy cavity marker devices of optical element coupling structure of the 3rd embodiment of the present invention's the 1st scheme.
The optical element coupling structure of the 3rd embodiment of the present invention's the 1st scheme is except that having added seal described later, identical with the optical element coupling structure of above-mentioned the 1st scheme the 2nd embodiment.Thereby, be marked with identical reference marks in the part identical with the 2nd embodiment of the 1st scheme, omit its explanation, below different parts only is described.Moreover the cut-open view of the optical element coupling structure of the 3rd embodiment of the 1st scheme is identical with Fig. 4 of the cut-open view of the optical element coupling structure of the 2nd embodiment of the 1st scheme, therefore with its omission.
As shown in Figure 5, the optical element coupling structure 40 of the 3rd embodiment of the present invention's the 1st scheme has the leading section 18 that covers optical fiber 2 and optical fiber with couplant 24 and the seal 42 of coating.And seal 42 and pressing component 32 couplings extend in the waveguide portion 16 of substrate 6, are connected with the seal of outlet side.
The optical fiber of the 3rd embodiment of the present invention's the 1st scheme is identical with couplant 24 with sticker 22 and optical fiber with the optical fiber of the 1st scheme the 1st embodiment with couplant 24 with sticker 22 and optical fiber.Optical fiber both can be identical sticker with optical fiber with couplant 24 with sticker 22, also can be different constituents, below described for identical sticker as both.In Fig. 5, expression optical fiber is occasions of identical sticker 44 with couplant 24 with sticker 22 and optical fiber.Sticker 44 for example is the UV cured type epoxy of an EMI system series plastics " 3553HM ".
Seal 42 is constituents different with sticker 44.And optical fiber uses the elastic modulus of couplant 24 to can be compared to the little of seal 42 most with sticker 22 and optical fiber.Seal 42 is different with couplant 24 with optical fiber, also can be opaque sticker.In addition, seal 42 both can be the resin of epoxy series, also can be no-solvent type liquid sealing material (for example, Hitachi changes into industry system no-solvent type liquid sealing material " CEL-C-1900 ").In the occasion of using the epoxy series plastics,, preferably use the moisture permeability materials with smaller in order to be implemented in the long lifetime under the high humidity environment.
In addition; by selecting elastic modulus, linear expansion coefficient and the vitrification point Tg of above-mentioned seal 42 and sticker 44 rightly; can reduce ambient temperature and change the optical fiber 2 cause and the rate of travel between the optical waveguide 4, just reduce coupling loss change to optical waveguide 4.Optical fiber is 0.01～3.0GPa with sticker 22 and optical fiber with the elastic modulus of couplant 24, and its linear expansion coefficient is preferably 40～300ppm/ ℃, its vitrification point Tg be preferably 100 ℃ or above and than the temperature of surrounding environment high 15 ℃ or more than.Optical fiber is preferably 100～8 with sticker 22 and optical fiber with the viscosity of couplant 24,000mPas, and 100～2,000mPas is better.In addition, the elastic modulus of seal 42 is 5～20GPa, and its linear expansion coefficient is preferably 5～30ppm/ ℃, its vitrification point Tg be preferably 100 ℃ or above and than the temperature of surrounding environment high 15 ℃ or more than.The viscosity of seal 42 is preferably 10,000～200,000mPas, and 10,000～100,000mPas is better.At this moment, sticker 44 for example is the UV cured type epoxy of a Da Jin system series plastics " UV2100 ", and seal for example is that Hitachi changes into industry system no-solvent type liquid sealing material " CEL-C-1900 ".
With regard to an example of the manufacture method of the optical element coupling structure of the 3rd embodiment of the present invention's the 1st scheme, by on the manufacture method of the optical element coupling structure of the 2nd embodiment of the 1st above-mentioned scheme, appending, apply seal 42 its leading section 18 that covers optical fiber 2 and optical fiber are got final product with the operation of couplant 24.
Then, describe the 4th embodiment of the optical element coupling structure of the present invention's the 1st scheme with reference to Fig. 6.Fig. 6 is the front view of biopsy cavity marker devices of optical element coupling structure of the 4th embodiment of the present invention's the 1st scheme.
The optical element coupling structure 50 of the 4th embodiment of the present invention's the 1st scheme coating scope different with the combination of couplant with sticker and optical fiber except that optical fiber and optical fiber usefulness couplant is different, similar with the optical element coupling structure 30 of the 2nd embodiment of above-mentioned the 1st scheme.Thereby, be marked with identical reference marks in the part identical with the 2nd embodiment of the 1st scheme, omit its explanation, below different parts only is described.Moreover the cut-open view of the optical element coupling structure of the 4th embodiment of the 1st scheme is identical with Fig. 4 of the cut-open view of the optical element coupling structure of the 2nd embodiment of the 1st scheme, therefore with its omission.
In the present embodiment, optical fiber is different constituents with sticker 22 and optical fiber with couplant 52.And optical fiber is the littlest with the elastic modulus of sticker 22 like optical fiber with the elastic modulus of couplant 52.
In addition, optical fiber not only is coated in the zone that the optical fiber of the 2nd embodiment of the 1st scheme is filled with couplant 24 with couplant 52, also covers the leading section of optical fiber and hermetic fiber and optical waveguide ground and applies.And optical fiber extends in the waveguide portion 16 of substrate 6 with couplant 52 and pressing component 32 couplings, is connected with couplant with the optical fiber of outlet side.Optical fiber is identical with couplant 24 with the optical fiber of couplant 52 and the 2nd embodiment of the 1st scheme, as long as between the leading section 18 of optical fiber 2 and the optical waveguide 4 and filling in recess 10 regional.
Optical fiber both can be the constituent identical with the 1st embodiment of the 1st scheme with sticker 22, also can be the sticker that does not have light transmission or refractive index match.In addition, optical fiber also can be the high sticker of moisture-proof stickability with sticker 22.Optical fiber for example is that the UV cured type epoxy of EMI system series plastics " 3553HM ", the upright chemistry UV cured type epoxy series plastics of system of association " WR8774 " reach " WR8775 " with sticker 22.Optical fiber both can be sticker with couplant 52, also can be gluey constituent, also can be filling agent.Optical fiber for example is association's upright chemistry system kation constrictive type silicones " WR8962H " with couplant 52.
In addition; use elastic modulus, linear expansion coefficient and the vitrification point Tg of sticker 22 with couplant 52 and optical fiber by selecting above-mentioned optical fiber rightly; can reduce ambient temperature and change the optical fiber 2 cause and the rate of travel between the optical waveguide 4, just reduce coupling loss change to optical waveguide 4.Optical fiber is 10 with the elastic modulus of couplant 52 -6～10 -3GPa, its linear expansion coefficient are preferably 100～400ppm/ ℃, and its vitrification point Tg is any.Optical fiber is preferably 1,000～5 with the viscosity of couplant 52,000mPas, and 2,000～3,000mPas is better.In addition, optical fiber is 0.01～3.0GPa with the elastic modulus of sticker 22, and its linear expansion coefficient is preferably 20～100ppm/ ℃, its vitrification point Tg be preferably 100 ℃ or above and than the temperature of surrounding environment high 15 ℃ or more than.Optical fiber is preferably 5,000～100 with the viscosity of sticker 22,000mPas, and 5,000～50,000mPas is better.At this moment, optical fiber for example is that the upright chemistry UV cured type epoxy series plastics of system of association " WR8774 " reaches " WR8775 " with sticker 22.Optical fiber for example is association's upright chemistry system kation constrictive type silicones " WR8962H " with couplant 52.
With regard to an example of the manufacture method of the optical element coupling structure of the optical fiber of the 4th embodiment of the present invention's the 1st scheme and optical waveguide, by appending on the manufacture method of the optical element coupling structure of the 2nd embodiment of the 1st above-mentioned scheme, coating is fine to get final product the leading section of its covering optical fiber and hermetic fiber and optical waveguide with couplant 52.
Embodiment
Embodiment about each embodiment of above-mentioned the present invention the 1st scheme carries out following explanation.Condition general in each embodiment is as described below.It is the optical fiber of 125 μ m that optical fiber 2 uses external diameter.In addition, use the etching of single crystals anisotropy to be easy to silicon.In order to carry out optical fiber UV cured with sticker 22, pressing component 32 be transparent, and use has and pyrex (registered trademark) glass as the identical linear expansion coefficient (3.2ppm/ ℃) of the silicon of the material of substrate 6.
In the embodiment 1 of the 1st embodiment of the 1st scheme, as optical fiber with sticker 22 and optical fiber with couplant 24, use elastic modulus to be 2.4Gpa, linear expansion coefficient is 107ppm/ ℃, viscosity is 250mPas, vitrification point Tg is 129 ℃, with chemical formula is
Formula 1
Rf is
Figure C20058001026900242
Formula 2
Expression to fluoridize the UV cured type epoxy series plastics that epoxy compound is a principal ingredient (for example, Da Jin system " UV2100 " (the fluorinated epoxy resin compound of in the 90th page table 1, putting down in writing with reference to " exploitation of photoelectron material and application technology " (ォ プ ト ェ レ Network ト ロ ニ Network ス material material development と ying skill Intraoperative) (February 9 calendar year 2001 technical information association of Co., Ltd. distribution)).Optical fiber 2 and the rate of travel between the optical waveguide 4 during 65 ℃ of the temperature variation of surrounding environment are 0.8 μ m, and the coupling loss change of the light in optical waveguide 4 is 0.8dB.
In the embodiment 2A of the 2nd embodiment of the 1st scheme; identical with couplant 24 as optical fiber with embodiment 1 with sticker 22 and optical fiber; use elastic modulus to be 2.4Gpa; linear expansion coefficient is 107ppm/ ℃; viscosity is 250mPas; vitrification point Tg is 129 ℃, with above-mentioned Chemical formula 1, Rf be above-mentioned formula 2 represent to fluoridize the UV cured type epoxy series plastics that epoxy compound is a principal ingredient (for example, Da Jin system " UV2100 ").Optical fiber 2 and the rate of travel between the optical waveguide 4 during 65 ℃ of the temperature variation of surrounding environment are 0.4 μ m, and the coupling loss change of the light in optical waveguide 4 is 0.4dB.
In the embodiment 2B of the 2nd embodiment of the 1st scheme, as optical fiber with sticker 22 and optical fiber with couplant 24, use elastic modulus to be 0.05Gpa, linear expansion coefficient is 200ppm/ ℃, viscosity is 180mPas, vitrification point Tg is 111 ℃, with chemical formula is
Figure C20058001026900251
Formula 3
Expression with fluoridize the UV cured type propenyl series plastics that epoxy acrylic acid ester compounds is a principal ingredient (for example, NTT-AT system " AT8224 " (with reference to " exploitation of photoelectron material and application technology " (February 9 calendar year 2001 technical information association of Co., Ltd. distribution) in the 91st page table 2 record fluoridize epoxy acrylic acid ester compounds).Optical fiber 2 and the rate of travel between the optical waveguide 4 during 65 ℃ of the temperature variation of surrounding environment are 0.2 μ m, and the coupling loss change of the light in optical waveguide 4 is 0.2dB.
In the embodiment 3 of the 3rd embodiment of the 1st scheme; identical with couplant 24 as optical fiber with embodiment 1 and 2A with sticker 22 and optical fiber; use elastic modulus to be 2.4Gpa; linear expansion coefficient is 107ppm/ ℃; viscosity is 250mPas; vitrification point Tg is 129 ℃; use above-mentioned Chemical formula 1; Rf be 2 expressions of above-mentioned formula with fluoridize epoxy compound be principal ingredient UV cured type epoxy series plastics (for example; Da Jin system " UV2100 "); as encapsulant 42; use elastic modulus to be 15.3Gpa; linear expansion coefficient is 13.4ppm/ ℃; vitrification point Tg is 210 ℃ a no-solvent type liquid sealing material (for example, Hitachi changes into industry system " CEL-C-1900 ").Optical fiber 2 and the rate of travel between the optical waveguide 4 during 65 ℃ of the temperature variation of surrounding environment are 0.25 μ m, and the coupling loss change of the light in optical waveguide 4 is 0.2dB.
In the embodiment 4 of the 4th embodiment of the 1st scheme; as optical fiber sticker 22; use elastic modulus to be 2.5Gpa; linear expansion coefficient is 62ppm/ ℃, and viscosity is 30,000mPas; vitrification point Tg be 158 ℃ UV cured type epoxy series plastics (for example; the upright chemistry system of association " WR8774 "), as optical fiber couplant 52, using elastic modulus is 5 * 10 -6Gpa; linear expansion coefficient is 300ppm/ ℃; viscosity is 2800mPas, and vitrification point Tg is-123 ℃ a kation constrictive type silicones (for example, the upright chemistry system of association " WR8962H ") (with reference to the special kation constrictive type silicones of opening the record of 2004-196977 communique).Optical fiber 2 and the rate of travel between the optical waveguide 4 during 65 ℃ of the temperature variation of surrounding environment are 0.1 μ m, and the coupling loss change of the light in optical waveguide 4 is 0.2dB.
In addition; in the embodiment 4 of the 4th embodiment of the 1st above-mentioned scheme; as optical fiber sticker 22; replace above-mentioned UV cured type epoxy series plastics; use elastic modulus to be 2.5Gpa; linear expansion coefficient is 88ppm/ ℃; viscosity is 7; 000mPas; vitrification point Tg be 145 ℃ UV cured type epoxy series plastics (for example; the upright chemistry system of association " WR8775 ") time, optical fiber 2 and the rate of travel between the optical waveguide 4 during 65 ℃ of the temperature variation of surrounding environment are 0.1 μ m, and the coupling loss change of the light to optical waveguide 4 in is 0.2dB.
Moreover, do not use in an embodiment, but its elastic modulus of above-mentioned EMI system ultraviolet ray thermmohardening type epoxy series plastics " 3553HM " being 1.0Gpa that linear expansion coefficient is 55ppm/ ℃, viscosity is 1,000mPas, vitrification point Tg are 120 ℃.
The assay method of the above-mentioned sticker and the elastic modulus of encapsulant, linear expansion coefficient and vitrification point Tg is as follows.
Determination of Modulus is measured according to JIS-K7127 " stretching test method of plastic sheeting and thin slice ".
The mensuration of linear expansion coefficient uses TMA (thermo-mechanical analysis) method to measure.Condition determination is 5 ℃/minute a stretch mode.Temperature changes to 100 ℃, the measured value when putting down in writing 25 ℃ from 20 ℃.
The mensuration of vitrification point uses DMA (dynamic viscoelastic modulus measurements) method to measure.Particularly; use the dynamic viscoelastic modulus measurements device (fusion determination of viscoelasticity model ARES) of amperometric determination science (レ ォ メ ト リ ッ Network サ ィ ェ Application テ ィ Off ィ ッ Network) system; make the sample vibration with stretch mode; make temperature change to 300 ℃ from 20 ℃ simultaneously, adopt vitrification point by the device computing with 3 ℃/minute programming rate.
The mensuration of viscosity is measured according to the viscosity measurement of the circular cone-plate shaped rotational viscosimeter of JIS-Z8803 " viscosimetry ".Particularly, use the E shape viscosity meter (model VPU-3B) of Tokyo instrument system, under 25 ℃ environmental baseline, put down in writing measured value.
Below, with reference to accompanying drawing, describe 3 embodiments of the optical fiber structure of the present invention's the 2nd scheme in detail.
The 1st embodiment of the optical fiber structure of the present invention's the 2nd scheme at first, is described with reference to Fig. 9～Figure 13.Fig. 9 is the front view of the biopsy cavity marker devices of the integrally formed optical element coupling structure of the V shaped sections groove of the 1st embodiment of the present invention's the 2nd scheme and optical waveguide.In addition, Figure 10～Figure 13 is respectively the cut-open view of X-X line, XI-XI line, XII-XII line and XIII-XIII line along Fig. 1.
As Fig. 9～shown in Figure 13, the optical element coupling structure 101 of the 1st embodiment of the present invention's the 2nd scheme has: the upstream side optical fiber 102 that has end face 102a and extend along its length; Have end face 104a that on the direction relative, disposes and the downstream optical fiber 104 that extends at length direction with the end face 102a of this upstream side optical fiber 102; With from upstream side optical fiber 102 optical fiber 104 propagates light and be arranged on optical waveguide 106 between them downstream.Optical element coupling structure 101 also has: the substrate 110 that is provided with the V shaped sections groove 108 that is used to take in and locate upstream side optical fiber 102 and downstream optical fiber 104; With upstream side optical fiber from it face cover 102 and upstream side briquetting 112 that upstream side optical fiber 102 is pushed to substrate 110; With downstream optical fiber 104 from it face cover and with downstream optical fiber 104 to downstream briquetting 114 that substrate 110 is pushed; And the sticker 116 of filling to the space between them for the substrate 110 that interfixes, optical fiber 102,104 and briquetting 112,114.
Upstream side optical fiber 102 and downstream optical fiber 104 have fiber cores 102b, 104b respectively and are configured in its optical fiber clad 102c, 104c on every side.Optical waveguide 106 has and the fiber cores 102b of upstream side optical fiber 102 and downstream optical fiber 104, the optical waveguide tube core 106a that 104b aligns and the optical waveguide clad 106b that forms around it.Upstream side optical fiber 102 is made of at the multifiber that laterally is arranged in parallel the relative length direction.In the present embodiment, upstream side optical fiber 102 is provided with 2, and downstream optical fiber 104 is provided with 1, and optical element coupling structure 101 constitutes photo-coupler.Thereby, with 2 upstream side optical fiber 102 end, the upper reaches 106c of 2 one optical waveguide tube core 106a is set alignedly, this 2 one optical waveguide tube core 106a along with to it near dirty end 106d and be coupled as 1, at dirty end 106d, align with 1 downstream optical fiber 104.The diameter of optical fiber 102,104 for example is 125 μ m.In addition, fiber cores 102a, 104a for example form with quartzy.Optical waveguide tube core 106a is for example with macromolecular material or quartzy formation.
Substrate 110 is the general substrates of upstream side optical fiber 102, optical waveguide 106, downstream optical fiber 104.Substrate 110 has: the fixing upstream portion 110a of upstream side optical fiber 102; The pars intermedia 110b integrally formed with optical waveguide 106; Downstream portion 110c with fixed downstream optical fiber 104.Be formed with upstream side recess 118 and the downstream recess 120 that reaches transverse opening up respectively between upstream portion 110a and the pars intermedia 110b and between pars intermedia 110b and the downstream portion 110c.Upstream side recess 118 constitutes by the downstream end face 118a of upstream portion 110a and the upstream side end face 118b of pars intermedia 110b and optical waveguide 106.These downstreams end face 118a and upstream side end face 118b are parallel to each other, and be oblique with its inclination downwards and upstream.In addition, downstream recess 120 constitutes by the downstream end face 120a of pars intermedia 110b and optical waveguide 106 and the upstream side end face 120b of downstream portion 110c.These downstreams end face 120a and upstream side end face 120b are parallel to each other, and be oblique with its inclination downwards and downstream.Upstream side recess 118 and downstream recess 120 are about 100～200 μ m at the width of length direction, and the angle of inclination of above-below direction is about 4～8 degree relatively.
Upstream side recess 118 disposes upstream side optical fiber 102 highlightedly on upstream portion 110a, and side recess 120 disposes downstream optical fiber 104 highlightedly downstream on downstream portion 110b.The end face 102a of upstream side optical fiber 102 and the end face 104a of downstream optical fiber 104 are preferably as far as possible near optical waveguide 106, but in fact for optical fiber 102,104 is assembled easily automatically, between end face 102a, the 102d and optical waveguide 104 of optical fiber 102,104, the gap of about 10～20 μ m is set.
The upstream portion 110a of substrate 110 has smooth top 122 of the V shaped sections groove 108 that is provided with corresponding many upstream side optical fiber 102.In the present embodiment, in the above 122 be provided be used to take in and locate 2 upstream side optical fiber 102 extend in the longitudinal direction and at horizontal 2 V shaped sections grooves 108 of configuration in parallel to each other.V shaped sections groove 108 constitutes by 2 groove faces 124 separately.Form 2 groove faces 124, make at 2 groove faces 124 of upstream side optical fiber 102 butts of known external diameter and during configuration, upstream side optical fiber 102 and the precision contraposition of optical waveguide 106 with sub-micron.When upstream side optical fiber 102 is configured on the groove 108, form by the space 128 of upstream side optical fiber 102 with groove face 124 immediate 2 places 126 and upstream side optical fiber 102 and groove face 124 encirclements.
Upstream side briquetting 112 has from the end face 102a side of upstream side optical fiber 102 in the longitudinal direction in turn in abutting connection with contact portion 130a, the center section 132a and the contact portion 130b that are provided with.In the present embodiment, contact portion 130a, 130b are arranged on upstream side briquetting 112 at the length direction both ends, are provided with 1 center section 132a betwixt.Contact portion 130a, 130b be with upstream side pressing component 112 when substrate 110 is pushed upstream side optical fiber 102, the part that contacts and push upstream side optical fiber 102 with upstream side optical fiber 102 to substrate 110.Center section 132a be with upstream side pressing component 112 when substrate 110 is pushed upstream side optical fiber 102, be separated with part at interval by sticker 116 and upstream side optical fiber 102.
As shown in figure 10, contact portion 130a have in the longitudinal direction with 102 contacts of upstream side optical fiber and be used for to substrate 110 push upstream side optical fiber 102 surface of contact 134 and with upstream optical fiber 102 be the center be arranged on surface of contact 134 both sides and with opposite face 136 relative above the substrate 110.In the present embodiment, surface of contact 134 constitutes recess and surrounds upstream side optical fiber 102 and bending with respect to opposite face 136.At the opposite face 136 of recess both sides and above the substrate 110 between 122, be provided with the gap.Opposite face 136 and substrate 110 top 122 between distance be preferably 20～40 μ m, 20～30 μ m are then better.
Because contact portion 130b has the structure identical with contact portion 130a, so omit its explanation.
Center section 132a has and smooth following 138 of top 122 relative and cross-section upstream side optical fiber 102 of substrate 110.In the present embodiment, 138 are and top 122 of substrate 110 parallel substantially planes below.Thereby, following 138 and the substrate 110 of center section 132a top 122 between distance than the opposite face 136 of contact portion 130a, 130b and substrate 110 top 122 between distance big.
Contact portion 130a, 130b are preferably 0.5～5 times of upstream side optical fiber 102 diameters in the length of length direction, and 2～3 times then better.In addition, center section 132a is preferably 1～8 times of upstream side optical fiber 102 diameters in the length of length direction, and 5～7 times then better.Thereby when the diameter of upstream side optical fiber 102 was 125 μ m, contact portion 130a, 130b were preferably 60～625 μ m in the length of length direction, and 250～375 μ m are then better.In addition, center section 132a is preferably 125～1 in the length of length direction, 000 μ m, and 625～875 μ m are then better.
As Fig. 9, Figure 12 and shown in Figure 13, except that the structure that is altered to from radical corresponding to the radical of downstream optical fiber 104, be the upstream portion 110a of center and substrate 110 and downstream portion 110c and the downstream briquetting 114 that upstream side briquetting 112 constitutes substrate 110 symmetrically with optical waveguide 106 corresponding to upstream side optical fiber 102.Thereby, for the downstream portion 110c of the general substrate 110 of the upstream portion 110a of substrate 110 and upstream side briquetting 112 and the inscape of downstream briquetting 114, be marked with identical reference marks, omit its explanation.In addition, the section of the optical element coupling structure 101 of the contact portion 130a of downstream briquetting 114 and center section 132a is respectively Figure 12 and Figure 13.
The viscosity of sticker 116 is arbitrarily, but in order to reduce the change that ambient temperature changes the coupling loss of the optical element coupling structure 110 that causes, is preferably 10,000～50,000mPas, and 20,000～40,000mPas is then better.The elastic modulus of sticker 116 and linear expansion coefficient also are arbitrarily, but elastic modulus is preferably 0.01～3.0GPa, and linear expansion coefficient is preferably 20～100ppm/ ℃.Sticker 116 for example is association's upright chemistry system UV cured type epoxy series plastics " WR8774 " (viscosity is 30, and 000mPas, elastic modulus are 2.5GPa, and linear expansion coefficient is 62ppm/ ℃).
In addition, in upstream side recess 118 and downstream recess 120, fill and sticker 116 different types of couplants 144.Couplant 144 is owing to passing through wherein from the light of optical fiber to the optical waveguide transmission, so need be to optical transparency.In addition, couplant 144 preferably has the refractive index roughly the same with fiber cores 102a, 102b.Couplant 144 both can be a sticker, also can be gluey constituent, also can be filling agent.Couplant 144 for example is association's upright chemistry system kation constrictive type silicones " WR8962H ".
Then, the example to the manufacture method of the optical element coupling structure 101 of the 1st embodiment of the present invention's the 2nd scheme describes.Prepare substrate 110, implement the anisotropy etching by the resist pattern of making according to photoetching and form V shaped sections groove 108 with making such as silicon, macromolecular materials.Then, on the substrate 110 that has formed V shaped sections groove 108, form optical waveguide 106.If at length describe, it then is the occasion that forms by macromolecular material at optical waveguide 6, by spin coated or mold etc. form clad 106b and on sandwich layer after, machinings such as the processing of enforcement photoetching, reactive ion etching etc. or former compacting, form the optical waveguide tube core 106a of square-section from sandwich layer, and, cover optical waveguide tube core 106a ground by method same as described above and form clad 106b, thereby form optical waveguide 106.In addition, with the quartzy occasion that forms optical waveguide 106, on substrate 110, form quartz layer by flame method of piling or CVD method, make the quartzy core 106a of rectangle by the processing of dry corrosion processing etc. after, cover core 106a ground and form clad 106b, thereby form optical waveguide 106.Carry out the formation operation of V shaped sections groove 108 and the formation operation of optical waveguide 106, make when optical fiber 102,104 is loaded on the groove face 124 of groove 108, can obtain the position relation that makes groove face 124 with the optical waveguide 106 of optical fiber 102,104 and optical waveguide 106 contrapositions with the precision of sub-micron.Then, by cutting processing etc., form upstream side recess 118 and downstream recess 120.
Then, the groove 108 of substrate 110 and above apply an amount of sticker 116 on 122.Optical fiber 102,104 is configured on 124 of the grooves, and upstream side recess 118 and downstream recess 120 are outstanding separately to make end face 102a, the 104a of optical fiber 102,104.If desired, on optical fiber 102,104, append an amount of sticker 116 of coating.By pushing pressing component 112,114 official hours with the pressure of regulation from optical fiber 102,104, optical fiber 102,104 is near groove face 124.At this moment, note between pressing component 112,114 and substrate 110, not entering bubble.
At length, can not flow out (with reference to Figure 10 and Figure 12) at the optical fiber 102,104 of the section of contact portion 130a, 130b and the sticker 116 in the space 128 between the groove 108, in the optical fiber 102,104 of the section of center section 132a and the space 128 between the groove 108 mobile (with reference to Figure 11 and Figure 13) from the optical fiber 102,104 and the gap between the groove face 124 126 of the section of contact portion 130a, 130b.Then, flow out from the optical fiber 102,104 and the gap between the groove face 124 126 of the section of middle part 132a, below briquetting 112,114 138 and substrate 110 above spatial movement (with reference to Figure 11 and Figure 13) between 122.In addition, at the contact portion 130a of above-mentioned side briquetting 112, the section of 130b, sticker 116 (with reference to Figure 10) in the space between 2 optical fiber 102 moves in the space between 2 optical fiber 102 of the section of center section 132a (with reference to Figure 11).Then, sticker 116 is crossed the top and mobile of optical fiber 102.Thus, at contact portion 130a, 130b place, optical fiber 102,104 is firmly by on the groove face 124 that is pressed in V shaped sections groove 108.
Thereafter, sticker 11 for example hardens by the ultraviolet ray irradiation, and substrate 110, optical fiber 102,104 and pressing component 112,114 interfix.Then, couplant 144 is coated on upstream side recess 118 and the downstream recess 120, for example makes its sclerosis by the ultraviolet ray irradiation.
The 2nd embodiment of the optical fiber structure of the present invention's the 2nd scheme then, is described with reference to Figure 14.Figure 14 is the front view of the biopsy cavity marker devices of the V shaped sections groove of the 2nd embodiment of the present invention's the 2nd scheme and the optical element coupling structure that optical waveguide forms.
The upstream side briquetting 112 and the downstream briquetting 114 of optical element coupling structure 101 that replaces the 1st embodiment of the 2nd above-mentioned scheme, upstream side briquetting 152 and downstream briquetting 154 are set respectively, in addition, the optical element coupling structure 150 of the 2nd embodiment of the present invention's the 2nd scheme has the structure identical with optical element coupling structure 101.Thereby, below, the inscape for common with the 1st embodiment of the 2nd scheme is marked with identical symbol, omits its explanation, and different parts only is described.
Optical element coupling structure 150 have with upstream side optical fiber from it face cover 102 and push the upstream side briquetting 152 of upstream side optical fiber 102 and with downstream optical fiber 104 face downstream briquetting 154 from downstream optical fiber 104 to substrate 110 that cover and push from it to substrate 110.
Upstream side briquetting 152 have from the end face 102a side of upstream side optical fiber 102 in the longitudinal direction in abutting connection with and 5 contact portion 156a～156e and 4 center section 158a～158d of being provided with alternately.In the present embodiment, contact portion 156a and 156e are arranged on upstream side briquetting 152 on the length direction both ends.Contact portion 156a～156e be with upstream side pressing component 152 when substrate 110 is pushed upstream side optical fiber 102, contact the part of pushing upstream side optical fiber 102 to substrate 110 with upstream side optical fiber 102.Center section 158a be with upstream side pressing component 152 when substrate 110 is pushed upstream side optical fiber 102, be separated with part at interval by sticker 116 and upstream side optical fiber 102.
Each of contact portion 156a～156e has the identical inscape (with reference to Figure 10) of contact portion 130a with the optical element coupling structure 101 of the 1st embodiment of the 2nd scheme.Each of center section 158a～158d has the identical inscape (with reference to Figure 11) of center section 132a with the optical element coupling structure 1 of the 1st embodiment of the 2nd scheme.Thereby the composed component for identical with the 1st embodiment of the 2nd scheme is marked with identical reference marks, omits the explanation to the inscape of contact portion 156a～156e and center section 158a～158d.
In addition, except that the structure that changes to from radical corresponding to the radical of downstream optical fiber 104, be that center and upstream side briquetting 152 constitute downstream briquetting 154 symmetrically with optical waveguide 106 corresponding to upstream side optical fiber 102.Thereby, for the inscape of the general downstream briquetting 154 of upstream side briquetting 152, be marked with identical reference marks, omit explanation to these.In addition, the section (respectively with reference to Figure 12 and Figure 13) with the contact portion 130a of the downstream briquetting 114 of the optical element coupling structure 101 of the 1st embodiment of the 2nd scheme and center section 132a is identical respectively for the section of the optical element coupling structure 150 of the contact portion 156a of downstream briquetting 154～156e and center section 158a～158d.
Remove the upstream side briquetting 112 and the downstream briquetting 114 of the optical element coupling structure 101 that replaces the 2nd scheme the 1st embodiment, use respectively outside upstream side briquetting 152 and the downstream briquetting 154, one example of the manufacture method of the optical element coupling structure 150 of the 2nd embodiment of the present invention's the 2nd scheme is identical with the manufacture method of the optical element coupling structure 101 of the 1st embodiment of the 2nd scheme, omits its explanation.
The 3rd embodiment of the optical element coupling structure of the present invention's the 2nd scheme then, is described with reference to Figure 15～Figure 19.Figure 15 is the front view of the biopsy cavity marker devices of the integrally formed optical element coupling structure of the V shaped sections groove of the 3rd embodiment of the present invention's the 2nd scheme and optical waveguide.In addition, Figure 16～Figure 19 is respectively the cut-open view of XVI-XVI line, XVII-XVII, XVIII-XVIII line and XIX-XIX line along Fig. 7.
The upstream portion 110a and the downstream portion 110c of substrate 110 that removes the optical element coupling structure 101 of the 1st embodiment that replaces the 2nd scheme respectively is provided with upstream portion 110d and downstream portion 110e, replace briquetting 112,114 respectively and be provided with beyond the briquetting 172,174, the optical element coupling structure 170 of the 3rd embodiment of the present invention's the 2nd scheme has the structure identical with optical element coupling structure 101.Thereby, below, the explanation inscape different only with the 1st embodiment of the 2nd scheme, for the general inscape of the 1st embodiment of the 2nd scheme, be marked with the reference marks identical with the 1st embodiment of the 2nd scheme, omit its explanation.
As Figure 16 and shown in Figure 17, upstream side briquetting 172 has the identical structure of contact portion 130a with the upstream side briquetting 112 of the optical element coupling structure 101 of the 1st embodiment of the 2nd scheme.Thereby the inscape for the upstream side briquetting 172 identical with contact portion 130a is marked with identical reference marks, omits its explanation.
The upstream portion 110d of substrate 110 has from the end face 102a side of upstream side optical fiber 102 in the longitudinal direction in turn in abutting connection with trough of belt part 178a, the center section 180a and the trough of belt part 178b that are provided with.In the present embodiment, trough of belt part 178a and 178b are arranged on the length direction both ends of upstream portion 110d, and center section 180a is provided with therebetween.
As shown in figure 16, trough of belt part 178a has the identical structure of upstream portion 110d with the optical element coupling structure 101 of the 1st embodiment of the 2nd scheme.In addition, trough of belt part 178b has the identical structure with trough of belt part 178a.Thereby the inscape for identical with optical element coupling structure 101 is marked with identical reference marks, omits its explanation.
As shown in figure 17, center section 180a with upstream side briquetting 172 when substrate 110 is pushed upstream side optical fiber 102, be separated with at interval by sticker 116 and upstream side optical fiber 102.In addition, center section 180a has smooth top 182 of and cross-section upstream side optical fiber 102a relative with upstream side briquetting 172.In the present embodiment, 182 is planes with top 122 almost parallels of trough of belt part 178a above.On 182, be provided with the part of the groove 108 of trough of belt part 178a, 178b continuously, but also can these be set in the above.Distance between the opposite face 136 of top 182 and the upstream side briquetting 172 of center section 180a is bigger than the distance between the opposite face 136 of top 122 and the upstream side briquetting 172 of trough of belt part 178a, 178b.
Trough of belt part 178a, 178b are at the length of length direction 2～3 times of diameter of upstream side optical fiber 102 preferably.In addition, center section 180a in the length of length direction preferably than the 5 times also big of diameter of upstream side optical fiber 102.Thereby when the diameter of upstream side optical fiber 102 was 125 μ m, trough of belt part 178a, 178b were at preferably about 250～375 μ m of the length of length direction, and center section 180a is also the biggest like 625 μ m in the length of length direction.
As Figure 15, Figure 18 and shown in Figure 19, except that being the structure corresponding to the radical of downstream optical fiber 104 from structure modify corresponding to the radical of upstream side optical fiber 102, with optical waveguide 106 is the upstream portion 110d of center and substrate 110 and downstream portion 110e and the downstream briquetting 174 that upstream side briquetting 172 constitutes substrate 110 respectively symmetrically.Thereby, for the downstream portion 110e of the general substrate 110 of the upstream portion 110d of substrate 110 and upstream side briquetting 172 and the inscape of downstream briquetting 174, be marked with identical reference marks, omit its explanation.In addition, the cross section of the optical element coupling structure 170 of the 1st trough of belt part 178a of downstream briquetting 174 and center section 180a is respectively Figure 18 and Figure 19.
Remove the upstream side briquetting 112 and the downstream briquetting 114 of the optical element coupling structure 101 of the 1st embodiment that replaces the 2nd scheme, use upstream side briquetting 172 and downstream briquetting 174 respectively, and after forming V shaped sections groove 108, append by cutting processing etc., form outside top 182 the operation of substrate 110, one example of the manufacture method of the optical element coupling structure 170 of the 3rd embodiment of the present invention's the 2nd scheme is identical with the manufacture method of the optical element coupling structure 101 of the 1st embodiment of the 2nd scheme, omits its explanation.
Then, the comparative example about the optical element coupling structure 200 of the embodiment of the optical element coupling structure 150 of the 2nd embodiment of the optical element coupling structure 101 of the 1st embodiment of above-mentioned the present invention the 2nd scheme and the 2nd scheme and prior art describes.With regard to these 3 optical element coupling structures, the diameter of optical fiber 102,104,202,204 is 125 μ m, the opposite face 136 of briquetting 112,114,152,154,212,214 and substrate 110,210 top 122 between distance be 30 μ m, briquetting 112,114,152,154,212,214 is 1350 μ m in the length of length direction.Sticker 116 adopts association's upright chemistry system UV cured type epoxy series plastics " WR8774 " (viscosity is 30, and 000mPas, elastic modulus are 2.5GPa, and linear expansion coefficient is 62ppm/ ℃).
With regard to optical element coupling structure 101, the 1st contact portion 130a is 300 μ m (fibre diameters 2.4 times) in the length of length direction, and center section 132a is 750 μ m (fibre diameters 6 times) in the length of length direction.
With regard to optical element coupling structure 150, the 1st contact portion 130a is 110 μ m (fibre diameters 0.89 times) in the length of length direction, and center section 132a is 200 μ m (fibre diameters 1.6 times) in the length of length direction.
With regard to optical element coupling structure 200, total length 1350 μ m are equivalent to the 1st contact portion, and center section does not exist.
Briquetting 112,114,152,154,212,214 is pushed reasonable time with suitable pressure from optical fiber 102,104,202,204, the result, with regard to the coupling loss during with regard to+25 ℃, optical element coupling structure 101 is 0～0.04dB, optical element coupling structure 150 is 0.13～0.47dB, and optical element coupling structure 200 is 0.77～1.05dB (with reference to Figure 28).Coupling loss when like this, optical element coupling structure of the present invention has improved the sticker that uses than higher viscosity than the optical element coupling structure of prior art.
In addition, as shown in figure 29, (viscosity 30, in the time of 000mPas), the change of the coupling loss of temperature when changing for-40 ℃～+ 85 ℃ is 0.26dB using association's upright chemistry system UV cured type epoxy series plastics " WR8774 ".Thereby, the coupling loss of temperature when-40 ℃～+ 85 ℃ change is because the coupling loss during for+25 ℃ is the center change with temperature, so the coupling loss of optical element coupling structure 101 is 0.13～0.17dB, the coupling loss of optical element coupling structure 150 is 0.26～0.60dB, and the coupling loss of optical element coupling structure 200 is 0.90～1.18dB.Like this, optical element coupling structure of the present invention can make the coupling loss of temperature when changing for-40 ℃～+ 85 ℃ at 0.6dB or following, or 0.4dB or following.
Figure 20 observes under metallurgical microscopes at the sketch with respect to the section of the embodiment of the optical element coupling structure of the present invention 101 of the transversely cutting of length direction time the on the contact portion 130a of briquetting 112.In addition, Figure 21 observes under metallurgical microscopes at the sketch the during section at the comparative example of the optical element coupling structure 200 of the prior art of the transversely cutting of relative length direction on the briquetting 212.
By Figure 20 and Figure 21 as can be known, in optical element coupling structure 101 of the present invention, the gap between optical fiber 102 and the groove 108 is roughly 0 μ m, and optical fiber 102 and groove 108 are actually and contact, and do not have sticker 116 in the gap between them.In contrast, in the optical element coupling structure 200 of prior art, residual in the gap of 0.5～1.0 μ m between optical fiber 202 and groove 208 have a sticker 216.Moreover, under metallurgical microscopes, observe on the center section 132a of briquetting 112, when the cross section of the embodiment of the optical element coupling structure of the present invention 101 of the transversely cutting of relative length direction, residual in the gap of 0.5～1.0 μ m between optical fiber 102 and groove 108 have a sticker.
Figure 22 be expression the present invention the 2nd scheme the 1st embodiment optical element coupling structure 101 the above embodiments, at the thickness of+25 ℃ of following stickers 144, i.e. the figure of the distance between top 122 of opposite face 136 and substrate 110 and the relation of coupling loss.As shown in Figure 22, when sticker thickness is 20～40 μ m, can make coupling loss at 0.5dB or following.In addition, sticker thickness is than this value hour, and stress on optical fiber 102,104 increases, and correspondingly coupling loss also increases.In addition, sticker thickness is worth when big than this, and the clinging power of optical fiber 102,104 reduces, and correspondingly coupling loss also increases.In addition, when sticker thickness is 30 μ m, can make coupling loss at 0.2dB or following.
Figure 23 is illustrated among the embodiment identical with Figure 22, the figure of the relation that the sticker thickness of temperature when-40 ℃～+ 85 ℃ change and coupling loss change.As shown in Figure 23, when sticker thickness is 10～30 μ m, can make coupling loss at 0.3dB or following.Sticker thickness is worth when big than this, and the clinging power of optical fiber reduces, and correspondingly the coupling loss change also increases.
Figure 24 is illustrated among the embodiment identical with Figure 22, the figure of the relation that sticker thickness when carrying out pressure cooker test (test condition: 121 ℃, 100%RH, 2atm kept 100 hours) and coupling loss change.As shown in Figure 24, when sticker thickness was bigger than 30 μ m, the clinging power of optical fiber reduced, and correspondingly the coupling loss change also increases.Moreover, just among Figure 24 the longitudinal axis of figure is defined as when pressure cooker test back coupling loss increases.
Figure 25 is illustrated among the embodiment identical with Figure 22, and carrying out sticker thickness is 20 μ m, the figure of the coupling loss change the during high temperature and humidity test of 85 ℃/85%RH.As shown in Figure 25, in the scope of coupling loss change in whole 5,000 hours at ± 0.2dB.Moreover Figure 25 is defined as when pressure cooker test back coupling loss increases the longitudinal axis for negative.
More than; the embodiment of the optical fiber structure of the present invention's the 2nd scheme has been described; but the present invention is not limited to the embodiment of the 2nd above-mentioned scheme, can do various changes in the invention scope of being put down in writing in the scope that patented claim is asked for protection, and these are also included within the scope of the present invention certainly.
In the embodiment of above-mentioned the present invention the 2nd scheme, 101,150, the 170 pairs of optical fiber structures of the present invention of optical element coupling structure that form as V shaped sections groove and optical waveguide are illustrated, but optical fiber structure both can be a fiber array, optical element coupling structure that also can be fiber array be connected with sticker with optical waveguide etc.
In addition, in the embodiment of above-mentioned the present invention the 2nd scheme, as photo-coupler optical element coupling structure 101,150,170 is illustrated, but the radical of the radical of upstream side optical fiber 102 and downstream optical fiber 104 is arbitrarily with 2 upstream side optical fiber 102 and 1 downstream optical fiber 104.For example, the radical that also can make upstream side optical fiber 102 is 1, and the radical of downstream optical fiber 104 is many, and the structure that optical waveguide 106 is corresponding with it forms as optical splitter with optical fiber structure.
In addition, in the 1st and the 2nd embodiment of above-mentioned the present invention the 2nd scheme, surface of contact 134 bendings of briquetting 112,114,152,154,172,174, be provided with in its both sides and 122 relative opposite faces 136 above the substrate 110, but as long as briquetting 112,114,152,154,172,174 contacts and these are pushed to substrate 110 with optical fiber 102,104, then the shape of surface of contact 134 and opposite face 136 can be arbitrarily.For example, surface of contact 134 and opposite face 136 both can constitute 1 plane or flexure plane, also can be for stepped between surface of contact 134 and the opposite face 136.
In addition, in the 1st and the 2nd embodiment of above-mentioned the present invention the 2nd scheme, following 138 of the center section 132a～132d of briquetting 112,114,152,154 is the plane, but as long as be separated with at interval with optical fiber 102,104, below 138 shape can be arbitrarily.For example, both can surround optical fiber 102,104 ground bendings, also can be that the opposite face 136 of contact portion 130a～130e of following 138 transverse ends portion and adjacency is continuous.
In addition, in the 3rd embodiment of above-mentioned the present invention the 2nd scheme, top 182 of the center section 180a of substrate 110 is the plane, but as long as be separated with at interval with optical fiber 102,104, above 182 shape can be arbitrarily.For example, both can surround optical fiber 102,104 ground bendings, also can be trough of belt part 180a, 180b top 122 continuous of top 182 transverse ends portion and adjacency.
In addition, with regard to the briquetting 112,114,152,154 of the 1st and the 2nd embodiment of the present invention's the 2nd scheme, the number of contact portion 130a～130e is any, but preferably at least 2 contact portions is set.By at least 2 contact portions are set, briquetting 112,114,152,154 can stably be fixed on the substrate 110, can reduce the stress that involves optical fiber 102,104 because of temperature variation sticker 116.In addition, contact portion 130a～130e need not to be arranged on briquetting 112,114,152,154 on the both ends of length direction, and center section 132a～132d also can be arranged on briquetting 112,114,152,154 on the both ends of length direction.In addition, contact portion 130a～130e in the length of length direction as long as satisfy the coupling loss of regulation, can be for arbitrarily.
In addition, be arranged on end face 102a, the 104a contact portion 130a the most nearby of optical fiber 102,104 of the 1st and the 2nd embodiment of the present invention's the 2nd scheme, preferably approach end face 102a, the 104a of optical fiber 102,104.But as the embodiment of the 2nd above-mentioned scheme, as long as satisfy the coupling loss of regulation, contact portion 130a also can be arranged on the end face 102a that leaves optical fiber 102,104, the position of 104a.
In addition, the variant of the contact portion 130a～130e of the 1st and the 2nd embodiment of the present invention's the 2nd scheme is fit to too for trough of belt part 180a, the 180b of the 3rd embodiment of the present invention's the 2nd scheme.

Claims (25)

1. optical element coupling structure, coupled fiber and optical waveguide is characterized in that,
Have: optical fiber; Be formed with should with the substrate of the optical waveguide of above-mentioned fiber alignment,
Aforesaid substrate has: that above-mentioned optical fiber and above-mentioned optical waveguide ground form and upwards open V shaped sections groove aligns when loading above-mentioned optical fiber; With the recess in the space of also extending downwards than this groove in the above-mentioned optical waveguide side formation of above-mentioned V shaped sections groove and upwards opening,
The above-mentioned optical fiber of configuration in above-mentioned V shaped sections groove makes its leading section outstanding to above-mentioned recess, and at this above-mentioned optical fiber is fixed with sticker with optical fiber,
The leading section of above-mentioned optical fiber and above-mentioned optical waveguide are coupled with couplant with the optical fiber that is filled between them and above-mentioned recess is interior,
Aforesaid substrate also has the upper surface that is formed with above-mentioned V shaped sections groove,
Above-mentioned optical element coupling structure also have with the above-mentioned optical fiber of above-mentioned upper surface clamping and with the pressing component of above-mentioned upper surface devices spaced apart ground configuration, this pressing component has and covers the width wide cut groove also wideer than the external diameter of above-mentioned optical fiber that disposes on the above-mentioned optical fiber
Above-mentioned optical fiber also is filled between above-mentioned wide cut groove and the above-mentioned optical fiber with sticker and reaches between above-mentioned pressing component and the above-mentioned upper surface.
2. optical element coupling structure according to claim 1 is characterized in that,
Above-mentioned optical fiber is identical sticker with sticker with above-mentioned optical fiber couplant.
3. optical element coupling structure according to claim 1 and 2 is characterized in that,
Above-mentioned optical fiber is 0.01～0.5GPa with sticker and above-mentioned optical fiber with the elastic modulus of couplant, and its linear expansion coefficient is 40～300ppm/ ℃.
4. optical element coupling structure according to claim 1 and 2 is characterized in that,
Above-mentioned optical fiber is 100～1 with sticker and above-mentioned optical fiber with the viscosity of couplant, 000mPas.
5. optical element coupling structure according to claim 1 is characterized in that,
Above-mentioned optical element coupling structure also has the leading section of the above-mentioned optical fiber of covering and the encapsulant that above-mentioned optical fiber applies with couplant ground,
The above-mentioned optical fiber of the modular ratio of above-mentioned encapsulant is big with the elastic modulus of couplant with sticker and above-mentioned optical fiber.
6. optical element coupling structure according to claim 5 is characterized in that,
Above-mentioned optical fiber is identical sticker with sticker with above-mentioned optical fiber couplant.
7. according to claim 5 or 6 described optical element coupling structures, it is characterized in that,
Above-mentioned optical fiber is 0.01～3.0GPa with sticker and above-mentioned optical fiber with the elastic modulus of couplant, and its linear expansion coefficient is 40～300ppm/ ℃, and the elastic modulus of above-mentioned encapsulant is 5～20GPa, and its linear expansion coefficient is 5～30ppm/ ℃.
8. according to claim 5 or 6 described optical element coupling structures, it is characterized in that,
Above-mentioned optical fiber is 100～8 with sticker and above-mentioned optical fiber with the viscosity of couplant, 000mPas, and the viscosity of above-mentioned encapsulant is 10,000～200,000mPas.
9. optical element coupling structure according to claim 1 is characterized in that,
Above-mentioned optical fiber is different constituents with sticker with above-mentioned optical fiber couplant, and above-mentioned optical fiber is little with the elastic modulus of sticker with the above-mentioned optical fiber of the modular ratio of couplant.
10. optical element coupling structure according to claim 9 is characterized in that,
Also cover the leading section of above-mentioned optical fiber and seal above-mentioned optical fiber and the above-mentioned optical fiber couplant of above-mentioned optical waveguide ground coating.
11. according to claim 9 or 10 described optical element coupling structures, it is characterized in that,
Above-mentioned optical fiber is 10 with the elastic modulus of couplant -6～10 -3GPa, its linear expansion coefficient are 100～400ppm/ ℃, and above-mentioned optical fiber is 0.01～3.0GPa with the elastic modulus of sticker, and its linear expansion coefficient is 20～100ppm/ ℃.
12. according to claim 9 or 10 described optical element coupling structures, it is characterized in that,
Above-mentioned optical fiber is 1,000～5 with the viscosity of couplant, 000mPas, and above-mentioned optical fiber is 5,000～100 with the viscosity of sticker, 000mPas.
13. an optical fiber structure has: the optical fiber that has end face and extend at length direction; Be provided with the substrate that is used to take in and locate the V shaped sections groove of above-mentioned optical fiber; With above-mentioned optical fiber from it face cover and push the pressing component of above-mentioned optical fiber to aforesaid substrate; And the sticker of filling to the space between them for the aforesaid substrate that interfixes, above-mentioned optical fiber and above-mentioned pressing component, it is characterized in that,
Above-mentioned pressing component has from the end face side of above-mentioned optical fiber in the longitudinal direction in turn in abutting connection with the 1st contact portion, center section and the 2nd contact portion that are provided with, with above-mentioned pressing component when aforesaid substrate is pushed above-mentioned optical fiber, the 1st contact portion of above-mentioned pressing component and the 2nd contact portion contact with above-mentioned optical fiber and push above-mentioned optical fiber to aforesaid substrate, the center section of above-mentioned pressing component is separated with at interval by above-mentioned sticker and above-mentioned optical fiber
The 1st contact portion of above-mentioned pressing component has and is used for pushing the surface of contact of above-mentioned optical fiber and being that the center is arranged on the both sides of above-mentioned surface of contact and the opposite face relative with aforesaid substrate with above-mentioned optical fiber with the contact of above-mentioned optical fiber and to substrate, and above-mentioned surface of contact constitutes the recess with respect to above-mentioned opposite face.
14. optical fiber structure according to claim 13 is characterized in that,
With respect to the recess of above-mentioned opposite face to surround the mode bending of optical fiber.
15. optical fiber structure according to claim 13 is characterized in that,
Above-mentioned optical fiber is made of the multifiber that is arranged in parallel, and is arranged on the aforesaid substrate corresponding to the above-mentioned V shaped sections groove of above-mentioned multifiber.
16. optical fiber structure according to claim 14 is characterized in that,
Above-mentioned opposite face and the distance between the aforesaid substrate in above-mentioned recess both sides are 20～40 μ m.
17. optical fiber structure according to claim 15 is characterized in that,
Above-mentioned opposite face and the distance between the aforesaid substrate in above-mentioned recess both sides are 20～40 μ m.
18. according to any described optical fiber structure in the claim 13～17, it is characterized in that,
The viscosity of above-mentioned sticker is 10,000～50,000mPas.
19. according to any described optical fiber structure in the claim 13～17, it is characterized in that,
The elastic modulus of above-mentioned sticker is 0.01～3.0GPa, and its linear expansion coefficient is 20～100ppm/ ℃.
20. according to any described optical fiber structure in the claim 13～17, it is characterized in that,
Above-mentioned the 1st contact portion is 0.5～3 times of above-mentioned fibre diameter in the length of length direction.
21. according to any described optical fiber structure in the claim 13～17, it is characterized in that,
Aforesaid substrate has the upper surface that is provided with above-mentioned V shaped sections groove, and above-mentioned center section has the smooth lower surface of the relative and above-mentioned optical fiber of crosscut of upper surface with aforesaid substrate.
22. an optical fiber structure has: the optical fiber that has end face and extend at length direction; Be provided with the substrate that is used to take in and locate the V shaped sections groove of above-mentioned optical fiber; With above-mentioned optical fiber from it face cover and push the pressing component of above-mentioned optical fiber to aforesaid substrate; And the sticker of filling to the space between them for the aforesaid substrate that interfixes, above-mentioned optical fiber and above-mentioned pressing component, it is characterized in that,
Aforesaid substrate has from the end face side of above-mentioned optical fiber in the longitudinal direction in turn in abutting connection with the 1st trough of belt part, center section and the 2nd trough of belt part that are provided with, the 1st trough of belt part and the 2nd trough of belt of aforesaid substrate partly are provided with above-mentioned V shaped sections groove, and the center section of aforesaid substrate is separated with at interval by above-mentioned sticker and above-mentioned optical fiber.
23. according to any described optical fiber structure in claim 13～17 and 22, it is characterized in that,
Above-mentioned optical fiber structure is a fiber array.
24. according to any described optical fiber structure in claim 13～17 and 22, it is characterized in that,
Above-mentioned optical fiber structure is that be coupled integratedly above-mentioned V shaped sections groove and optical waveguide and making is configured in the optical element coupling structure that optical fiber and optical waveguide in the V shaped sections groove are coupled.
25. according to any described optical fiber structure in claim 13～17 and 22, it is characterized in that,
Above-mentioned optical fiber structure is the optical element coupling structure that makes fiber array and optical waveguide coupling.
CNB2005800102697A 2004-03-31 2005-03-04 Optical element coupling structure and optical fiber structure Expired - Fee Related CN100432723C (en)

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CN102998751A (en) * 2012-11-27 2013-03-27 孙麦可 Planar optical waveguide and optical fiber coupling method and structure
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