CN100425352C

CN100425352C - Coating tool and coating appts.

Info

Publication number: CN100425352C
Application number: CNB2004100350923A
Authority: CN
Inventors: 安竹睦美; 高桥和彦; 挂桥典之; 金山利彦; 福田努
Original assignee: Mitsubishi Materials Corp
Current assignee: Mitsubishi Materials Corp
Priority date: 2003-04-23
Filing date: 2004-04-23
Publication date: 2008-10-15
Anticipated expiration: 2024-04-23
Also published as: KR100583219B1; KR20040092385A; CN1539559A; TW200505586A; JP3501159B1; HK1069354A1; TWI289480B; JP2004321911A

Abstract

A coating tool and a coating apparatus using the coating tool are provided, to allow the width of a slot to be controlled easily without repeated control operations. The coating tool has a coating head(10) comprising a plurality of head members(11A, 11B), and a groove-type slot(16) which is open at the terminal of the coating heads and is divided between the sides(12) facing each other at the head members, wherein a coating solution passes through the slot so as to be discharged from the terminal of the coating heads. A concave part(20) of a pair of wall parts facing each other toward the direction along the elongation direction of the slot which is a circulation direction of the coating solution, is formed at the opposite side(17) of the side where the slot forms divisions at the head members. A control unit is installed in the concave part, and it enlarges the length at the direction along the elongation direction of the slot to modify the head member so as to increase the distance between the pair of walls, thereby controlling the width of the slot.

Description

Spreading implement and apparatus for coating

Technical field

The present invention relates to be used for applied relatively thing is coated with the apparatus for coating of coating fluid and is installed in spreading implement on this apparatus for coating.

Background technology

Under prior art, as spreading implement, have by known: for example have the dispense tip that is made of a pair of head member, and mark: mutual opposed side is supplied with the pocket of coating fluid each other in a pair of head member; Extend and at the slit of the groove shape of the front opening of dispense tip from this pocket forward end one side.

Such spreading implement disposes the front end and the applied thing of dispense tip opposed to each other, and length direction (length direction of the slit) mode consistent with the width of applied thing with dispense tip is installed on the apparatus for coating, supply to that coating fluid in the pocket circulates and discharge in slit from the coating fluid case by supply pump, thus coating fluid is coated on the surface of the applied thing that the front end with respect to this dispense tip relatively moves from the front end of dispense tip.

Yet, above-mentioned such apparatus for coating not only is used for the surface with flexible applied thing of sheet is coated with coating fluid, and be used for coming the coating fluid of coating chromatic resist etc. with respect to the surface of applied thing, described applied thing is the applied thing as the panel shape of glass substrate of for example panel body of LCD and so on, but any form no matter, all strong request is coated on the uniform film thickness of the lip-deep coating fluid of applied thing.

Promptly, in the apparatus for coating of prior art, particularly when the coating beginning, for example result from pocket the position of the supply port when supplying with coating fluid etc., and make in slit circulation and the flow of the coating fluid of discharging from the front end of dispense tip, on the roughly whole length of the direction of this slot length direction, not keeping roughly certain, so produced the problem of the membrane thickness unevenness of the lip-deep coating fluid that is coated on applied thing.

Relative with it, in patent documentation 1, disclose following spreading implement: the push rod and the adjustment bolt that are used to push the leading section of a head member that has constituted dispense tip are provided with in a plurality of mode of length direction configuration along slit, by being screwed into the adjustment bolt, utilize its front end with the push rod of the preceding end in contact of this adjustment bolt, towards peristome one side of slit partly the push head parts leading section and make it distortion, thereby can adjust the width of slit.

By adjusting the width of this slit, the flow of the coating fluid that makes in slit circulation and discharge from the front end of dispense tip, on the roughly whole length of the direction of slot length direction, keeping roughly certain, and trying hard to make the uniform film thickness of the lip-deep coating fluid that is coated on applied thing.

Patent documentation 1

Te Kaiping 6-23821 communique (Fig. 1)

; because the flow that is necessary to make the coating fluid of discharging from the front end of dispense tip is not producing the width that is adjusted at the slit along the regulation zone of the direction of slot length direction partly with changing on the direction of slot length direction; so as patent documentation 1 disclosed spreading implement; become when bringing in the formation of the leading section of push head parts partly before the push rod; must be screwed into respectively be located at the corresponding scope in above-mentioned regulation zone in a plurality of adjustment bolts, and with the leading section of bringing in the push head parts before each of a plurality of push rods.Therefore, the pushing state of the head member of a plurality of push rod gained is interfered mutually, is easy to produce the noncontact position between the leading section of the front end of push rod and head member, is necessary to adjust repeatedly repeatedly, arrive desirable value with width adjustment, produced elongated problem of activity duration slit.

In addition, because come the directly leading section of push head parts by being screwed into the adjustment bolt, adjust the width of slit, so the adjustment amount of the width of this slit (action of the wide variety of slit) depends on the pitch of the ridge that cuts out on the outer screw section of adjusting bolt, and is difficult to carry out for example fine adjustment of micron order.

Summary of the invention

The present invention proposes in view of the above problems, and its purpose is to provide a kind of spreading implement and apparatus for coating of width of the slit that can easily adjust coating fluid and circulated.

In order to solve above-mentioned problem, reach such purpose, spreading implement of the present invention, has the dispense tip that constitutes by a plurality of head members, mutual opposed side in aforementioned a plurality of head members is marked the groove shape slit in the front opening of aforementioned dispense tip each other, coating fluid circulates in aforementioned slit and discharges from the front end of aforementioned dispense tip, it is characterized in that: with aforementioned head member in the side of the side thereof opposite that marks aforementioned slit one side on form the recess that has a pair of wall, described wall is the direction of the bearing of trend of aforementioned slit towards the circulating direction along aforementioned coating fluid, and opposed mutually.In this recess, be provided with the adjustment assembly,, make aforementioned head member distortion increasing aforementioned a pair of wall distance to each other, thereby can adjust the width of aforementioned slit by increasing the length on the direction of the bearing of trend of aforementioned slit.And then, aforementioned recess is to form in the upwardly extending mode in side along the length direction of aforementioned slit, aforementioned adjustment assembly can move and fixing to the optional position on the direction of the length direction of aforementioned slit, this adjustment assembly can be moved and is fixed on the optional position on the direction of the length direction of slit, adjust the width of the slit in the zone corresponding with this optional position.In addition, apparatus for coating of the present invention, it is characterized in that: so that the front end of aforementioned dispense tip and the mode of applied thing arranged opposite are installed, discharge coating fluid by the front end from aforementioned dispense tip, coating fluid is coated on the aforementioned applied thing that the front end with respect to aforementioned dispense tip relatively moves.

In such the present invention, the adjustment assembly in the recess is located in use, this recess is formed at the side of head member, make the head member distortion, so that the distance each other of a pair of wall in this recess becomes big, can adjust the width of the mutual opposed side slit each other that marks in a plurality of head members thus.Again,, not only set for and spread all over along the roughly total length of the direction of the length direction of this slit and roughly certain, and can be set at and for example become big according to intention or diminish in a certain regulation zone for the width of the slit of adjusting.

When using such adjustment assembly, as required, suitably determine to adjust the length on the direction of the length direction of slit in the assembly, pushing part when making the head member distortion thus can not moved partly, even during the width of the slit in adjusting the regulation zone, carry out the adjustment of repeated multiple times when also there is no need, can easily adjust the width of slit as prior art use adjustment bolt.

Here, the aforementioned adjustment assembly that is used to adjust the width of aforementioned slit preferably constitutes: portion forms fluid pressure chamber within it, by compressing the fluid pressure that the indoor fluid of filling of this fluid pressure produces, increase the length on the direction of the bearing of trend of aforementioned slit; Perhaps portion has wedge-shaped member within it, utilizes the pushing force described wedge-shaped member is moved and produce, increases the length on the direction of the bearing of trend of aforementioned slit.

When such formation; because utilize the pushing force of fluid pressure or wedge-shaped member; increase the length of adjusting in the assembly on the direction of the bearing of trend of slit with variation tendency very slowly; the action of the variation of the width of controlled slit is very slowly so utilize this adjustment assembly, can carry out for example fine width adjustment of micron order.

According to the present invention, the adjustment assembly in the recess is located in use, this recess is formed on the side of head member, make the head member distortion, so that the distance each other of a pair of wall in this recess becomes big, can be adjusted at the width of the slit that the mutual opposed side of a plurality of head members is marked each other thus.

As required, suitably determine to adjust the length on the direction of the length direction of slit in the assembly, pushing part when making the head member distortion thus can not moved partly, even when the width of the slit of adjusting the regulation zone, also there is no need to resemble and carry out the adjustment of repeated multiple times the adjustment bolt that has used prior art, and can easily adjust the width of slit.

Description of drawings

Fig. 1 is the side view of the spreading implement of expression first embodiment of the invention.

Fig. 2 is an A-A line cutaway view among Fig. 1.

Fig. 3 is the major part enlarged side view of the spreading implement of expression first embodiment of the invention.

Fig. 4 is the major part amplification view of the spreading implement of expression first embodiment of the invention.

Fig. 5 is a major part enlarged side view of representing spreading implement second embodiment of the invention.

Fig. 6 is a major part amplification view of representing spreading implement second embodiment of the invention.

The specific embodiment

Below, on one side with reference to accompanying drawing, embodiments of the present invention are described on one side.

As shown in Figures 1 and 2, the dispense tip 10 of the spreading implement of first embodiment of the invention is opposed each other by making a pair of

head member

11A, 11B be combined into their

side

12,12, is lengthwise shape ground thus and constitutes.

In addition, each other rear end side (below one side in Fig. 1 and Fig. 2) part of a pair of head member 11A, the 11B that constitutes dispense tip 10 by making them carried out bolting with predetermined distance by a plurality of bolts 13 on the direction of the length direction (left and right directions among Fig. 1) of dispense tip 10, and with respect to being positioned at along the both ends of the surface at the two ends of the direction of the length direction of dispense tip 10,

side plate

14,14 is installed respectively, thereby is interfixed.

To constitute a head member 11A of dispense tip 10 (among Fig. 2, be arranged in the head member 11A on right side) the roughly whole face of a side 12 make the general planar face, relative with it, another head member 11B that constitutes dispense tip 10 is (among Fig. 2, head member 11B on the left of being arranged in) a side 12 has groove 12A, this groove 12A is to form at the upwardly extending mode otch in side along the length direction of dispense tip 10, and make the front part of front end one side that more is positioned at dispense tip 10 than this groove 12A with respect to the rear end side part of rear end one side that more is positioned at dispense tip 10 than groove 12A, retreat predetermined distance.

Therefore, when a pair of

head member

11A, 11B make up in a

side

12,12 opposed each other modes, in a mutual

opposed side

12,12 each other, the side 12 of a head member 11A and be formed on space between the groove 12A on the side 12 of another head member 11B be pocket 15, and the side 12 of the side 12 of a head member 11A and another head member 11B on the front part between the space be the slit 16 of groove shape, the mode consistent with the length direction of dispense tip 10 with their length direction marks.

This slit 16 extends towards front end one side of dispense tip 10 from the part that is communicated with pocket 15, extend into front opening at dispense tip 10, in the time of in coating fluid supplies to pocket 15, this coating fluid with slit 16 that pocket 15 is communicated with in front end one effluent towards dispense tip 10 logical, and discharge from the front end of dispense tip 10.

In addition, in a pair of head member 11A, the 11B that constitute dispense tip 10, be arranged in and be positioned at part near dispense tip 10 front ends with another

side

17,17 of a

side

12,12 opposite sides that mark slit 16 and pocket 15 and make the inclined plane 17A, the 17A that tilt along with towards the front of dispense tip 10 and in mode, form the thin shape of front end by so a pair of head member 11A, dispense tip 10 that 11B constitutes towards slit 16 1 sides.

On another side 17 (another side 17 except above-mentioned inclined plane 17A) in a head member 11A who constitutes dispense tip 10, to be formed with recess 20 in the upwardly extending mode in side along the length direction (length direction of dispense tip 10) of slit 16, this recess 20 is in another side 17 upper sheds, towards one section of a side 12 (slit 16) side depression.

Recess 20 intersects with another side 17, and have: a pair of

wall

22,22, it is that the direction of bearing of trend (above-below direction among Fig. 2 is the bearing of trend of the slit 16 when observing in the section vertical with the length direction of dispense tip 16) of slit 16 is opposed mutually towards the circulating direction along coating fluid; Bottom surface 21, it connects this a pair of

wall

22,22 each other, and peristome one side to side 17 in the recess 20.

In addition, a pair of

wall

22,22 in the recess 20 tilts mutually, and (distance on the direction of the bearing of trend of slit 16) diminishes gradually along with one side of the peristome in recess 20 so that to each other distance of this a pair of

wall

22,22.

By forming such recess 20, though head member 11A is with the thin-walled portion of making between the bottom surface 21 of recess 20 and the side 12 with pocket 15 adjacency, but in this first embodiment, for forming thinner thin-walled portion, on the bottom surface 21 of recess 20, with recess 20 in the same manner, to be formed with the second recess 21A in the upwardly extending mode in side along the length direction of slit 16, this second recess 21A is in these bottom surface 21 upper sheds, and towards one section of side 12 1 a sides depression.

As Fig. 1～shown in Figure 4, in recess 20, being that the mode that can move on the direction of length direction of slit 16 is provided with and adjusts assembly 30 at the bearing of trend along recess 20, it is upwardly extending roughly rectangular-shaped in the side along the length direction (length direction of dispense tip 10) of slit 16 that this adjustment assembly 30 is.

Adjusting assembly 30 has: a pair of pushing

face

32,32, and it contacts with a pair of

wall

22,22 in the recess 20 respectively; The back side 31, it contacts with bottom surface 21 in the recess 20; Front surface 33, its on the peristome of side 17, exposing in recess 20.

In addition, adjust a pair of

wall

22,22 inclination mutually similarly in a pair of pushing

face

32,32 and the above-mentioned recess 20 in the assembly 30, (distance on the direction of the bearing of trend of slit 16) is along with diminishing gradually towards front surface 33 1 sides so that to each other distance of this a pair of pushing

face

32,32.

Therefore, although in recess 20, adjusting assembly 30 can peristome one side to side 17 from recess 20 not come off moving on the direction of the length direction of slit 16.

Adjust in the assembly 30 at this, towards in a pair of pushing

face

32,32 of the direction of the bearing of trend of slit 16, in the inside that comprises towards the part of a pushing face 32 of front end one side of dispense tip 10, be formed with the fluid pressure chamber 34 of having filled as the oil of fluid, by the existence of this fluid pressure chamber 34, the part that comprises a pushing face 32 is changed into the degree of elastically deformable by thin-walled.

And then, have the piston mechanism 35 that is connected with above-mentioned fluid pressure chamber 34 in the inside of this adjustment assembly 30, this piston mechanism 35 is by being screwed into the adjustment screw element 36 that exposes on the front surface 33 of adjusting assembly 30, the piston 37 that makes and adjust the preceding end in contact of screw element 36 advances, and the oil as fluid of filling in the fluid pressure chamber 34 that is connected with piston mechanism 35 of compression.In addition, in above-mentioned fluid pressure chamber 34,, fill oil as fluid via the hole portion that is opened on the front surface 33 of adjusting assembly 30, thereafter, sealed by grease nipple 38.

Make the front end and the applied thing arranged opposite of dispense tip 10, and will have above-mentioned such spreading implement that constitutes in the length direction (length direction of slit 16) of dispense tip 10 mode consistent with the width of applied thing is installed on the apparatus for coating, supply to that coating fluids in the pocket 15 circulate and from the front end discharge of dispense tip 10 by supply pump slit 16 in from the coating fluid case, thus coating fluid is coated on the surface of the applied thing that the front end with respect to this dispense tip 10 relatively moves.

In described first embodiment as described above, when adjusting the width of slit 16, at first can move at the adjustment assembly 30 that the bearing of trend of recess 20 promptly moves on the direction of the length direction of slit 16 and will reduce on the regional corresponding position of slit 16 width.

Then, by being screwed into the adjustment screw element 36 of the piston mechanism that inside had 35 of adjusting assembly 30, on the direction shown in the arrow X in Fig. 4 piston 36 is advanced, compression is formed at the oil as fluid of being filled in the fluid pressure chamber 34 that adjusts assembly 30 inside.

So, in fluid pressure chamber 34, oil as fluid is compressed, produce fluid pressure, thus, in this adjusted assembly 30, the part of the elastically deformable degree that changed into by thin-walled that contains a pushing face 32 was shown in the arrow Y among Fig. 4, with the mode strain that front end one side towards dispense tip 10 expands, this a pair of pushing

face

32,32 distance each other of adjusting in the assembly 30 becomes big.That is, adjust the length of assembly 30 on the bearing of trend of slit 16 and become big.

Thus, head member 11A is fulcrum and strain with the thin-walled portion with pocket 15 adjacency, so that the distance each other of a pair of

wall

22,22 in the recess 20 becomes big, be accompanied by the distortion of a such head member 11A, the width of this slit 16 is adjusted, so that the width of the slit 16 that marks each other in the mutual opposed

side

12,12 of a pair of

head member

11A, 11B reduces (width that reduces the zone slit 16 in addition of width by adjustment assembly 30 becomes big from seeing in appearance).

In such basis first embodiment, the adjustment assembly 30 of width that is used to adjust slit 16 is because can move on the direction of the length direction of slit 16, so this adjustment assembly 30 can be moved and is fixed on the optional position on the direction of the length direction of slit 16, can adjust the width of slit 16 in the zone corresponding (slit 16) with the above width of 100 μ m for example with this optional position.

Again,, not only set for and spread all over along the roughly total length of the direction of the length direction of this slit and roughly certain, and can be set in for example a certain regulation zone and become big according to intention or diminish for the width of the slit of adjusting.

Therefore, adjust the width that assembly 30 is adjusted slit 16 by using, the flow of the coating fluid that makes in slit 16 circulation and discharge from the front end of dispense tip 10, on the roughly whole length of the direction of these slit 16 length directions, keeping roughly certain, thereby can keep the thickness of the lip-deep coating fluid that is coated on applied thing equably.

In addition, when high coating fluid supplies in the pocket 15 with viscosity with high pressure, owing to put on the pressure on the coating fluid, the width of slit 16 becomes big in the substantial middle portion of its length direction, produce the so-called middle phenomenon that expands, though it is discrete to worry that the flow of the coating fluid of discharge produces, but by set hypothesis the width of slit 16 of such middle expansion phenomenon, also can make slit 16 in circulation and the flow of the full-bodied coating fluid of discharging from the front end of dispense tip 10 roughly certain in the roughly whole length maintenance that spreads all over these slit 16 length directions.

In order to adjust the width of slit 16, by having used adjustment assembly 30 as described above, come as required and suitably to determine the length on the direction of the length direction of slit 16 in this adjustment assembly 30, pushing part when making a head member 11A distortion can not moved partly, even when the width of the slit 16 of adjusting the regulation zone, there is no need as prior art, when adjusting the width of slit 16 by the direct and local pushing of having used the adjustment bolt, carry out the adjustment of repeated multiple times, so can easily adjust the width of slit 16.

And then; owing to adjusting assembly 30 is to utilize the oil as fluid that is filled in its inside to be compressed the fluid pressure (oil pressure) that produces; increase the formation of the length on the direction of the length direction of slit 16 with variation tendency very slowly; so utilize this adjustment assembly 30; make head member 11A distortion and make the action of variation of width of the slit of being adjusted 16 very slow, can carry out for example fine width adjustment of micron order.

Particularly, owing to adopted following adjustment assembly 30, it selects oil as the fluid that is filled in the fluid pressure chamber 34, and utilizes this oil to be compressed and the oil pressure that produces, so the loss can reduce the width of adjusting slit 16 time.

Then, second embodiment of the present invention is described, but,, omits its explanation so, use prosign for the part identical with this first embodiment because only be to adjust the formation of assembly 30 with the difference of above-mentioned first embodiment.

As Fig. 5 and shown in Figure 6, be used for being formed with wedge shape resettlement section 40 on the roughly rectangular-shaped adjustment assembly 30 of being of second embodiment of the present invention, front surface 33 upper sheds of assembly 30 are being adjusted in this wedge shape resettlement section 40, and are being positioned at along the both ends of the surface upper shed at the two ends of the direction of the length direction of slit 16.

Wedge shape resettlement section 40 has: a pair of

wall

42,42, and it intersects with front surface 33 of adjusting assembly 30, and is that the direction of bearing of trend (above-below direction among Fig. 6) of slit 16 is opposed mutually towards the circulating direction along coating fluid; Bottom surface 41, it is connected to each other this a pair of

wall

42,42, and peristome one side to front surface 33 in wedge shape resettlement section 40.

In addition, a pair of

wall

42,42 in the wedge shape resettlement section 40 tilts mutually, and (distance on the direction of the bearing of trend of slit 16) becomes big gradually along with one side of the peristome in wedge shape resettlement section 40 so that to each other distance of this a pair of

wall

42,42.

And then, in this wedge shape resettlement section 40, towards in a pair of

wall

42,42 of the direction of the bearing of trend of slit 16, in the crest line portion of intersecting of wall 42 of front end one side of dispense tip 10 and bottom surface 41, be formed with at the upwardly extending tunneling hole 43 in side along the length direction of slit 16, by this tunneling hole 43, form thin-walled portion, this thin-walled portion is used to promote wedge shape described later resettlement section 40 to be inserted into and the strain when mobile, and the stress when relaxing strain is concentrated.

In wedge shape resettlement section 40, be inserted with the wedge-shaped member 45 that has a pair of pushing

face

46,46, this pushing

face

46,46 is close on a pair of

wall

42,42 in this wedge shape resettlement section 40, the adjustment screw element 47 that front surface 33 1 sides from adjust assembly 30 connect this wedge-shaped member 45 towards the back side 31 1 sides is by being screwed among the screwed hole 41A on the bottom surface 41 that is formed in the wedge shape resettlement section 40, and this wedge-shaped member 45 is in order to being fixed in the mode of adjusting assembly 30 inside.

In described second embodiment as described above, when adjusting the width of slit 16, the adjustment assembly 30 that can promptly move on the direction of the length direction of slit 16 at the bearing of trend of recess 20 at first moves to and will reduce on the regional corresponding position of slit 16 width.

Then, connected the adjustment screw element 47 of adjusting the wedge-shaped member that inside had 45 of assembly 30 by being screwed into, wedge-shaped member 45 is moved progressively, with a pair of pushing face in this wedge-shaped member 45 46,46, push a pair of

wall

42,42 in the wedge shape resettlement section 40 that this 46,46 in a pair of pushing face is close to and tilt mutually respectively.

So, utilization moves wedge-shaped member 45 and the pushing force that produces, adjust in the assembly 30 at this, the part that contains a pushing face 32 is shown in the arrow Y among Fig. 6, with by tunneling hole 43 and by the part of thin-walled property as fulcrum, produce strain in the mode towards front end one side shifting of dispense tip 10, this a pair of pushing

face

32,32 distance each other of adjusting in assembly 30 becomes big.That is, adjust the length of assembly 30 on the bearing of trend of slit 16 and become big.

wall

22,22 in the recess 20 becomes big, be accompanied by the distortion of a such head member 11A, the width adjustment of the slit 16 that will mark each other in the mutual

opposed side

12,12 of a pair of

head member

11A, 11B is for reducing (width that reduces the zone slit 16 in addition of width by adjustment assembly 30 becomes big from seeing in appearance).

In such basis second embodiment, though can access and the identical effect of above-mentioned first embodiment, but particularly, it or not the oil pressure that utilizes compression to produce as the oil of the such fluid of first embodiment, but adopted the adjustment assembly 30 of the mechanical pushing force of utilizing wedge-shaped member 45 gained, so even also can carry out correspondence when in Clean room for example, using apparatus for coating.

In addition, also can consider the adjustment assembly 30 that dual-purpose uses in this second embodiment: utilize the pushing force that wedge-shaped member 45 is moved and produce, increase the length on the direction of the bearing of trend of slit 16; The adjustment assembly 30 of Shi Yonging in the above-described first embodiment: utilize compressed fluid and the fluid pressure that produces, increase the length on the direction of the bearing of trend of slit 16.

In addition, in each above-mentioned embodiment, though make be provided with the recess 20 of adjusting assembly 30 only be formed among a pair of head member 11A, the 11B that constitutes dispense tip 10, on the head member 11A of the groove 12A that is not formed with the pocket 15 that draws on the side 12, but can certainly on the opposing party side 17 among another head member 11B, form recess 20, and adjustment assembly 30 is set in this recess 20.

; because this adjustment assembly 30 is by being out of shape head member to adjust the width of slit 16; institute is so that another head member 11B when distortion; accompany with it, the shape of pocket 15 also is out of shape, and the certain state that flows that supplies to the coating fluid in the pocket 15 is destroyed; the flow of the coating fluid of discharging from the front end of dispense tip 10 may be subjected to bad influence; so as described in each above-mentioned embodiment, preferably, adjust the width of slit 16 by a head member 11A is changed.

In addition, in each above-mentioned embodiment, adjust assembly 30 though in the recess 20 that the mode of extending with the length direction along slit 16 forms, be provided with one, be not limited thereto, also can as required a plurality of adjustment assemblies 30 be set in a recess 20.

And then, in each above-mentioned embodiment, each head member 11A, the 11B that constitutes dispense tip 10 is illustrated as one though comprise the part of the front end that constitutes dispense tip 10, but be not limited thereto, for example, also can be and the hard part of superhard alloy etc. has been installed with respect to the front end of

head member

11A, 11B.

In addition, in each above-mentioned embodiment, though the dispense tip 10 that is made of a pair of

head member

11A, 11B is illustrated, but also can be for example to constitute dispense tip 10 by the head member more than 3, mutual opposed side is marked the slit more than 2 at the front opening of dispense tip 10 each other in this head member more than 3, and the coating fluid more than 2 kinds side by side is coated on the surface of applied thing in the mode that forms stratiform.

Claims

1. spreading implement, has the dispense tip that constitutes by a plurality of head members, mark each other in the slit of the groove shape of the front end upper shed of aforementioned dispense tip mutual opposed side in aforementioned a plurality of head members, coating fluid circulates in aforementioned slit and discharges from the front end of aforementioned dispense tip, it is characterized in that:

With aforementioned head member in the side of the side thereof opposite that marks aforementioned slit one side on, form the recess that has a pair of wall, described wall is the direction of the bearing of trend of aforementioned slit towards the circulating direction along aforementioned coating fluid, and opposed mutually,

Be provided with the adjustment assembly in this recess, this assembly makes aforementioned head member distortion by the length that increases on the direction of the bearing of trend of aforementioned slit, increasing aforementioned a pair of wall distance to each other, thereby can adjust the width of aforementioned slit,

Aforementioned recess to be forming in the upwardly extending mode in side along the length direction of aforementioned slit,

Aforementioned adjustment assembly can move and fixing to the optional position on the direction of the length direction of aforementioned slit.

2. spreading implement as claimed in claim 1 is characterized in that:

Aforementioned adjustment assembly portion within it forms fluid pressure chamber, utilizes the compression indoor fluid of filling of this fluid pressure and the fluid pressure that produces, increases the length on the direction of the bearing of trend of aforementioned slit.

3. spreading implement as claimed in claim 1 is characterized in that:

The wedge-shaped member that aforementioned adjustment assembly utilizes its inside to have moves and the pushing force that produces, increases the length on the direction of the bearing of trend of aforementioned slit.

4. apparatus for coating, it is characterized in that: each described spreading implement that claim 1～claim 3 is installed in the mode with the front end of aforementioned dispense tip and applied thing arranged opposite, by discharging coating fluid from the front end of aforementioned dispense tip, coating fluid is coated on the aforementioned applied thing that the front end with respect to aforementioned dispense tip relatively moves.