CN100420653C - Laser prepn process of potassium/sodium niobtae no-lead piezoelectric ceramic - Google Patents

Laser prepn process of potassium/sodium niobtae no-lead piezoelectric ceramic Download PDF

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CN100420653C
CN100420653C CNB2006101652563A CN200610165256A CN100420653C CN 100420653 C CN100420653 C CN 100420653C CN B2006101652563 A CNB2006101652563 A CN B2006101652563A CN 200610165256 A CN200610165256 A CN 200610165256A CN 100420653 C CN100420653 C CN 100420653C
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laser
nitrogen
piezoelectric ceramic
preheating
ceramics
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CN1974481A (en
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季凌飞
蒋毅坚
付宗义
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CHENGDU 3D CHANGE TECHNOLOGY Co Ltd
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Beijing University of Technology
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Abstract

The laser preparation process of no-lead potassium sodium niobate piezoelectric ceramic belongs to the field of no-lead piezoelectric ceramic technology. The preparation process includes compounding material based on NaxK1-xNbO3, pre-baking, pressing into ceramic biscuit, pre-heating with laser as heat source at 150-300 deg.c for 30-60 sec, heating in the temperature raising speed of 10-20 deg.c/min, at 800-1100 deg.c while spraying oxygen or nitrogen, axially drawing after 30-120 sec at the speed of 0.02-0.06 mm/s for 1-10 mm, turning off laser to cool while further spraying oxygen or nitrogen. The piezoelectric ceramic has average density over 97 %, Tc up to 400 deg.c, and d33 of 30-70pC/N.

Description

A kind of laser preparation method of lead free piezoelectric ceramics of potassium sodium niobate
Technical field
The invention belongs to the leadless piezoelectric ceramics preparation field.
Background technology
Piezoelectric ceramics is widely used in high-tech sectors such as information, laser, navigation and biology.Yet now extensive use mostly be the lead base piezoceramic material, produce, use and discarded after treating processes in cause serious harm all can for the mankind and ecotope, so development of new high-performance Pb-free piezoelectric ceramics be one urgent, have a task of great society and economic implications.Compare with the lead base material, the leadless piezoelectric ceramics density of conventional sintering method preparation is low, and performance is difficult to satisfy produces actual needs, and the main path that improves its performance is always to seek new high performance composition system.Therefore at present disclosed the and report of document is adopting ion doping or replacing the protection of metathetical multicomponent columbate leadless piezoelectric ceramics system Recipe; as Chinese patent publication number CN1511802A; Chinese patent publication number CN1644562A, Chinese patent publication number CN1810711A etc.Document " development of high-performance potassium-sodium niobate lead-free piezoelectric ceramics " (electronic component and material Vol.24No.11), the representative document of " preparation and performance of niobium tantalate leadless piezoelectric ceramics " (electronic component and material Vol.23No.11) and other relevant potassium sodium niobate research: Y.P.Guo, K.I.Kakimoto, et al.:Materials Letters, 59 (2005) 241, S.D.Bu, E.Shin, et al:Applied Physics Letters, the piezoelectric that also is near the new chemical composition system of searching accurate similar shape phase boundary that 73 (1998) 1442 grades are reported is to reach the purpose of improving the piezoelectric ceramics performance.
Mono-crystalline piezoelectric materials can present the piezoelectric property more much bigger than other direction in a certain direction, but the preparation cost height, preparation size is limited.Utilize the crystal grain orienting technology, might produce the new ceramic material that has the oriented growth feature with the similar crystal grain of monocrystalline, reach the purpose of improving piezoelectric property.Document Nature, 432 (2004) 84 reports, people such as Yasuyoshi Saito adopt the method for reaction template, by with epitaxially grown thin slice multilayer stack back sintering, prepare (the K with grain orientation feature that performance can reach the practical application standard 0.44Na 0.52Li 0.04) (Nb 0.84Ta 0.10Sb 0.06) O 3Polycrystalline ceramics.But this kind technical matters link is many, the flow process complexity, and the cost height, but also the necessary interpolation of considering suitable template crystal grain should not realize large-scale mass production.Document " piezoelectric ceramics crystal grain orienting technology " (electronic component and material Vol.23No.11) is also concentrated to have introduced and is comprised that the several frequently seen of this achievement in research reaches in the piezoelectric ceramics crystal grain orienting technology of grinding, but the report of not relevant with laser preparation grain orientation growth technology.Chinese patent ZL200410050131.7, ZL03148244.9, ZL03148245.7 etc. have reported laser sintered dielectric ceramic and crystalline ceramics technology, but the potassium-sodium niobate series piezoelectric ceramic has the advantages that to be different from above-mentioned pottery, thereby himself characteristics and unique severity are arranged on technology of preparing, be different from the technology of preparing of above-mentioned pottery.Be embodied in: 1, need special technique technology to realize the oriented growth of crystal grain in the pottery, reach the purpose of improving the piezoelectric ceramics performance.2, need in sintering process, suppress the volatilization of easy volatile elements such as Na, K, can guarantee that just obtaining high-compactness becomes porcelain.3, need strict monitoring temperature in the preparation, therefore need to be converted into by temp measuring system the monitoring of laser power the real-time strictness of sample temperature is monitored, control with generation and disappearance process Transient liquid phase in the sintering, improve the density of pottery, and help obtaining the pure phase structure of ceramic uhligite, to guarantee into the good physical behavior of porcelain.These all be the above-mentioned Chinese patent technical scheme of having announced can't realize.
Through document and patent retrieval, relevant at present high-compactness lead free piezoelectric ceramics of potassium sodium niobate and the laser preparation method thereof with grain orientation growth characteristics yet there are no report.
Summary of the invention
The object of the present invention is to provide a kind of employing laser as direct heat source, do not adding template crystal grain, under the situation without post-processed such as forge hot, hot pressing, preparation has the high-compactness lead free piezoelectric ceramics of potassium sodium niobate of grain orientation growth characteristics, obtains good physicals.
The objective of the invention is to be achieved through the following technical solutions:
1) with Nb 2O 5, K 2CO 3, Na 2CO 3Be raw material, according to chemical formula Na xK 1-xNbO 3Prepare burden, after pre-burning, compressing tablet become biscuit of ceramics, be that thermal source carries out the irradiation preheating with laser, warm up time 30~60s, 150~300 ℃ of preheating temperatures;
2) preheating finishes the back intensification, and 10~20 ℃/min of heat-up rate sprays oxygen or nitrogen to this ceramic sample when being warming up to 800~1100 ℃;
3) behind 30~120s, above-mentioned ceramic sample is in axial direction lifted motion, speed is 0.02~0.06mm/s;
4) finish lift distance 1~10mm after, light is closed in cooling, continues logical oxygen or nitrogen 3~10min;
In above-mentioned steps 3) and the process of step 4) in always to this ceramic sample spray oxygen or nitrogen, the temperature control in the whole process is to be that thermal source carries out irradiation with laser.
According to above-mentioned processing method, can obtain having the high-compactness (ρ=4.41~4.46g/cm of grain orientation growth characteristics 3) piezoelectric ceramics, Curie temperature height (T c>400 ℃).After polarization, piezoelectric constant d 33Between 30~70pC/N.
Compared with prior art, the invention has the beneficial effects as follows:
1. in open sintering process, can carry out instantaneous adjusting and pass through the real-time strict temperature control of temp measuring system laser power by program, also can be aided with lifting and in sintering process, feeding work atmosphere of microcomputer control sample table or laser head, come to control more exactly the oriented growth process and the densification process of ceramic crystalline grain.
2. the Na for preparing xK 1-xNbO 3Leadless piezoelectric ceramics density height (ρ=4.41~4.46g/cm 3), relative density can be greater than 97%.
3. elapsed-time standards short (<10 minutes) under the sintering high temperature (800~1100 ℃) passes to work atmosphere in addition, is easy to suppress atom volatilizations at high temperature such as Na, K, guarantees the set of dispense ratio.
4. the Na for preparing xK 1-xNbO 3Leadless piezoelectric ceramics has the perovskite structure of pure phase, helps the raising of piezoelectric property.
5. the present invention improves the piezoelectric property of perovskite typed leadless piezoelectric ceramics with the approach that obtains grain orientation growth and raising ceramic dense degree, so is not subject to the set of dispense ratio, and processing method is suitable for preparing the potassium-sodium niobate series ceramic material of each set of dispense ratio.
Description of drawings
Fig. 1 is the prepared Na of the present invention 0.5K 0.5NbO 3The leadless piezoelectric ceramics x-ray diffractogram of powder.As can be seen, prepared leadless piezoelectric ceramics has the perovskite structure of pure phase.
Fig. 2 (a) is the prepared Na of the present invention 0.5K 0.5NbO 3Leadless piezoelectric ceramics microstructure laser confocal scanning figure.With comparing with the component microstructure of ceramics of the preparation of conventional sintering method shown in Fig. 2 (b), the crystal grain of laser sintered sample has tangible oriented growth feature as can be seen, and void content is low, the density height.
Fig. 3 is the prepared Na of the present invention 0.35K 0.65NbO 3Leadless piezoelectric ceramics dielectric thermogram.Laser sintered as can be seen Na 0.5K 0.5NbO 3Leadless piezoelectric ceramics with 410 ℃ have tangible transformation temperature, meet the pure phase phase change characteristics of this kind material, have 410 ℃ high curie point simultaneously, demonstrate the good operation temperature profile.
Fig. 4 is the prepared Na of the present invention 0.85K 0.15NbO 3Leadless piezoelectric ceramics tuning curve figure, line smoothing does not have clutter.
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in further detail.
Embodiment 1:
Adopt the low-power laser irradiation preheating by Nb 2O 5, K 2CO 3, Na 2CO 3The biscuit of ceramics that powder forms through batching, pre-burning, compressing tablet carries out sample temperature by temp measuring system and monitors in real time, warm up time 30s, 150 ℃ of preheating temperatures, speed raising laser power density with 20 ℃/min heats up then, during to 900 ℃, adopts the logical oxygen of nozzle ceramic plate in sintering, behind the 50s, microcomputer control sample table or laser head lift along the ceramic plate axial direction due and move, and pull rate is 0.02mm/s, finish to lift apart from behind the 1mm, light is closed in cooling, continues logical oxygen 5min.
Sample performance value: ρ=4.45g/cm 3, Tc=400 ℃, d 33=57pC/N, ε=311.52, tan δ (%)=4.94.
Embodiment 2:
Adopt the low-power laser irradiation preheating by Nb 2O 5, K 2CO 3, Na 2CO 3The biscuit of ceramics that powder forms through batching, pre-burning, compressing tablet, warm up time 60s, 270 ℃ of preheating temperatures improve laser power density with the speed of 15 ℃/min then and heat up, during to 1100 ℃, adopt the logical oxygen of nozzle ceramic plate in sintering, behind the 30s, microcomputer control sample table or laser head lift along the ceramic plate axial direction due and move, pull rate is 0.05mm/s, finish lifting apart from behind the 5mm, light is closed in cooling, continues logical oxygen 3min.
Sample performance value: ρ=4.46g/cm 3, Tc=410 ℃, d 33=63pC/N, ε=303.46, tan δ (%)=4.09.
Embodiment 3:
Adopt the low-power laser irradiation preheating by Nb 2O 5, K 2CO 3, Na 2CO 3The biscuit of ceramics that powder forms through batching, pre-burning, compressing tablet, warm up time 50s, 300 ℃ of preheating temperatures improve laser power density with the speed of 10 ℃/min then and heat up, during to 800 ℃, adopt the logical oxygen of nozzle ceramic plate in sintering, behind the 120s, microcomputer control sample table or laser head lift along the ceramic plate axial direction due and move, pull rate is 0.06mm/s, finish lifting apart from behind the 10mm, light is closed in cooling, continues logical oxygen 10min.
Sample performance value: ρ=4.46g/cm 3, Tc=412 ℃, d 33=70pC/N, ε=309.78, tan δ (%)=4.25.
Embodiment 4:
Adopt the low-power laser irradiation preheating by Nb 2O 5, K 2CO 3, Na 2CO 3The biscuit of ceramics that powder forms through batching, pre-burning, compressing tablet, warm up time 60s, 300 ℃ of preheating temperatures improve laser power density with the speed of 10 ℃/min then and heat up, during to 900 ℃, adopt the logical nitrogen of nozzle ceramic plate in sintering, behind the 80s, microcomputer control sample table or laser head lift along the ceramic plate axial direction due and move, pull rate is 0.05mm/s, finish lifting apart from behind the 10mm, light is closed in cooling, continues logical nitrogen 10min.
Sample performance value: ρ=4.41g/cm 3, Tc=385 ℃, d 33=34pC/N, ε=297.21, tan δ (%)=4.02.

Claims (1)

1. the laser preparation method of a lead free piezoelectric ceramics of potassium sodium niobate is characterized in that, may further comprise the steps:
1) with Nb 2O 5, K 2CO 3, Na 2CO 3Be raw material, according to chemical formula Na xK 1-xNbO 3Prepare burden, after pre-burning, compressing tablet become biscuit of ceramics, be that thermal source carries out the irradiation preheating with laser, warm up time 30~60s, 150~300 ℃ of preheating temperatures;
2) preheating finishes the back intensification, and 10~20 ℃/min of heat-up rate sprays oxygen or nitrogen to this ceramic sample when being warming up to 800~1100 ℃;
3) behind 30~120s, above-mentioned ceramic sample is in axial direction lifted motion, speed is 0.02~0.06mm/s;
4) finish lift distance 1~10mm after, light is closed in cooling, continues logical oxygen or nitrogen 3~10min;
In above-mentioned steps 3) and the process of step 4) in always to this ceramic sample spray oxygen or nitrogen, the temperature control in the whole process is to be that thermal source carries out irradiation with laser.
CNB2006101652563A 2006-12-15 2006-12-15 Laser prepn process of potassium/sodium niobtae no-lead piezoelectric ceramic Expired - Fee Related CN100420653C (en)

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CN101337813B (en) * 2008-08-15 2012-07-04 合肥学院 Multicomponent few-lead piezoelectric ceramics of high tension performance and method for preparing same
CN106087058A (en) * 2016-06-22 2016-11-09 桂林电子科技大学 A kind of K0.5na0.5nbO3base ferroelectric piezoelectric single crystal and preparation method thereof
CN107892567B (en) * 2017-11-03 2020-12-04 北京工业大学 (Bi)1/2K1/2)TiO3Base binary leadless piezoelectric ceramic and preparation thereof
CN109704754A (en) * 2019-03-15 2019-05-03 上海朗研光电科技有限公司 The preparation method of CaCu 3 Ti 4 O base ceramic material and its huge dielectric constant ceramic capacitor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1460657A (en) * 2003-07-04 2003-12-10 北京工业大学 Continuously adjustable and controllable power laser preparation method by using high dielectric constant Ta2O5 base ceramics
CN1480427A (en) * 2003-07-04 2004-03-10 北京工业大学 Method of instantaneous controlling laser power for preparing ceramics in base of Ta2O5 with high dielectric constant
CN1587200A (en) * 2004-06-28 2005-03-02 北京工业大学 Laser preparing method for Ta2O5 base transparent ceramics

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1460657A (en) * 2003-07-04 2003-12-10 北京工业大学 Continuously adjustable and controllable power laser preparation method by using high dielectric constant Ta2O5 base ceramics
CN1480427A (en) * 2003-07-04 2004-03-10 北京工业大学 Method of instantaneous controlling laser power for preparing ceramics in base of Ta2O5 with high dielectric constant
CN1587200A (en) * 2004-06-28 2005-03-02 北京工业大学 Laser preparing method for Ta2O5 base transparent ceramics

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