CN100417939C - Field ionization nano gas sensor and manufacturing method thereof - Google Patents
Field ionization nano gas sensor and manufacturing method thereof Download PDFInfo
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- CN100417939C CN100417939C CNB2005100950823A CN200510095082A CN100417939C CN 100417939 C CN100417939 C CN 100417939C CN B2005100950823 A CNB2005100950823 A CN B2005100950823A CN 200510095082 A CN200510095082 A CN 200510095082A CN 100417939 C CN100417939 C CN 100417939C
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Abstract
The invention relates to a field ionization nano gas sensor and a manufacturing method thereof. The sensor comprises a field ionization nanometer tip and a metal needle, wherein a plurality of pins are arranged on a base, the metal needle penetrates through a small hole in the middle of the base and is fixed below the field ionization nanometer tip, and a metal net cover is arranged above the field ionization nanometer tip and is fixed on the base by a steel hoop. In the manufacturing method of the field ionization nano gas sensor, each metal needle and the field ionization nano tip form the field ionization gas sensor, and the plurality of metal needles are the field ionization gas sensor array. Each field ionization nanometer tip and the metal needle are connected in the circuit as two electrodes, the distance between the metal needle and the field ionization nanometer tip is adjusted by the micrometer caliper, and meanwhile, the one-dimensional nanometer material is used as the ionization tip of the sensor, so that the ionization capacity of the field ionization nanometer tip is improved, the breakdown voltage of the gas sensor is reduced, and the stability of the gas sensor is improved.
Description
Affiliated field the present invention relates to field of gas detection and nano-sensor field, particularly relates to a kind of field-ionization nano gas sensor and method for making.
Background technology
Field ionization effect is to utilize the tunnel ionisation effect that solid surface produces and with the gas ionization around the electric field, ion that ionization produces and electronics travel motion under the interpolar effect of electric field forms electric current under the highfield effect, is referred to as dark current.When ion reaches some, can produce the avalanche effect current rush, be referred to as to puncture.It is good more to be used for the more little then ionization effect of eletrode tip radius-of-curvature of ionization, adopts monodimension nanometer material to reduce the voltage breakdown of gas effectively as the ionization tip of field-ionization device, improves the stability of device.Gas with various has different ionization energy, thereby has different ionization voltages, and in a vacuum, the voltage breakdown of pure gas correspondence is changeless, but in mixing air, because the complicated voltage breakdown of gas componant can fluctuate among a small circle.But indoor gas componant one regularly, and a small amount of sensitive gas can make voltage breakdown have greatly changed, detection principle of the present invention that Here it is.
The monodimension nanometer material that is used for field-ionization nano gas sensor must meet following condition: 1, the tip size of nano material is little, is beneficial to the ionization of sensitive gas, can reduce voltage breakdown effectively.2, the antioxygenic property of nano material is good, and airborne oxygen is very serious to the oxidation at material tip, and this just needs material itself to have very strong antioxygenic property.3, the intensity of nano material is big, and combine firmly with substrate, in the field-ionization process, the bombardment of ion and electron pair material is very severe, require material to have very high intensity, and will be combined in the substrate securely, fly in electrode or the air otherwise can break away from substrate, influence testing result.
The type of gas sensor is a lot, but utilize the gas sensor of field ionization effect also only to rest on the Study on Theory stage, particularly with monodimension nanometer material as also just in a vacuum the theoretical research of the nano gas sensor at field-ionization tip.The article that people such as Ashish Modi delivered on " Nature " about carbon nano-tube field-ionization gas sensor in 2003, the gas that detects in the article is to the detection of pure gas under vacuum state, at present, can in mixing air, detect the field-ionization gas sensor of certain gas componant and not report more there is not report about field-ionization nano gas sensor structure and method for making.
At present, detected gas is normally used is catalytic combustion type gas sensor, oxide semiconductor gas sensor and electrochemical gas sensor.The detecting element of catalytic combustion type gas sensor is generally platinum silk (also can surface be coated with rare metal Catalytic Layer such as platinum, palladium), during use platinum filament is passed to electric current, keep 300 ℃～400 ℃ high temperature, this moment is if contact with inflammable gas, inflammable gas will burn on the rare metal Catalytic Layer, therefore the temperature of platinum filament can rise, and the resistance value of platinum filament also rises.The size of the resistance change by measuring platinum filament is just known the concentration of inflammable gas.Catalytic combustion type gas sensor only is applicable to inflammable gas, and poor selectivity, and sensing range is below the lower explosive limit of gas.
Electrochemical gas sensor general using liquid (or solid, organogel etc.) electrolyte, its output form can be the electric currents that gas direct oxidation or reduction produce, and also can be the electromotive force that ionization produces in ion electrode.Electrochemical gas sensor is highly sensitive, selectivity good, but electrochemical gas sensor is vulnerable to the influence of factor such as the dry or ambient humidity variation of electrolytic solution, need often to demarcate, and serviceable life is short.
Semiconductor gas sensor has the branch of N type and P type in the semiconductor gas sensor.N type resistance when detecting reduces with the increase of gas concentration; P type resistance increases with the increase of gas concentration.SnO
2The Metal Oxide Semiconductor Gas Sensing material belongs to N-type semiconductor, and the oxygen in 200～300 ℃ of its absorbed airs of temperature forms the negative ion absorption of oxygen, the electron density in the semiconductor is reduced, thereby its resistance value is increased.The reducibility gas that can supply with electronics is arranged (as C when running into
2H
5OH, CO etc.) time, original Xi Fu oxygen desorption, and be adsorbed on the metal-oxide semiconductor (MOS) surface with the positive ion state by reducibility gas; Oxygen desorption ejected electron, reducibility gas is also wanted ejected electron with the absorption of positive ion state, thereby oxide semiconductor conduction band electron density is increased, and resistance value descends.Reducibility gas has not existed, and metal-oxide semiconductor (MOS) can recover the negative ion absorption of oxygen again automatically, makes resistance value be elevated to original state.Here it is, and semiconductor gas sensor detects the ultimate principle of reducibility gas.That semiconductor gas sensor has is highly sensitive, the response fast, good stability, use characteristic of simple, but only is applicable to the detection reducibility gas, and selectivity is bad.
Patent CN 1527051A utilizes nano material to detect organic gas, belong to gas sensor, this patent is to use the catalytic performance of nano material that organic gas catalysis disassociation is produced ion, detect the concentration of ion with electrode, the limitation of this patent is that the catalytic action selectivity of nano material is very strong, the organic gas that different catalysts is different, promptly only to certain or certain several organic gas sensitivity, other gas can not respond the sensor made from different catalysis materials.
Summary of the invention
The technical problem to be solved in the present invention promptly the present invention seeks to: overcome the weak point of existing gas sensor, a kind of simple in structure, easy to use, field-ionization nano gas sensor and method for making that selectivity is high are provided.
Technical scheme of the present invention is: a kind of field-ionization nano gas sensor, comprise base, and pin, the field-ionization nano tip, wire netting, metal needle is characterized in that:
5～10 pins are arranged on the base, four long tube pin are used for the fixing of field-ionization nano tip and draw with electrode, remaining is the short tube pin, highly identical, as the extraction electrode of metal needle, metal needle passes the below that the middle aperture of base is fixed on the field-ionization nano tip, and its distance is regulated as required, wire netting covers on top, field-ionization nano tip, is fixed on the base with stirrup.
Base adopts the insulating rigid material, comprises resin material, and there is aperture at the center of base, the aperture is slightly larger than the diameter of metal needle, metal needle is just passed, fluted below base, the front portion that can hold the round end of metal needle afterbody, pin is a metal material, pass base, and with base be one, there are four long tube pin and 1～6 short tube pin in base top, the length pin of base below is highly identical separately, the assembling when being used for the field-ionization nano gas sensor application.
Adopt the monodimension nanometer material array as the field-ionization nano tip, comprise carbon nano pipe array, zinc oxide nano-wire array, the tin oxide nano linear array, the monodimension nanometer material array is fixed in the substrate, adopt silicon chip as the substrate of fixed field ionize nanotip or adopt the substrate of sheet metal, and then substrate is fixed on the long tube pin as fixed field ionize nanotip.
Wire netting is wrapped up by stirrup, stirrup is used for wire netting is fixed on base, the metal needle afterbody has round end, its role is in the manufacturing process of field-ionization nano gas sensor metal needle is fixed on the screw rod of micrometer caliper easily, can easily the screw rod of metal needle from micrometer caliper be unloaded again when completing.
Metal needle in the field-ionization nano gas sensor is single or many formation sensor arraies, and every corresponding short tube pin of metal needle is as its extraction electrode.
A kind of method for making of field-ionization nano gas sensor, it is characterized in that: earlier the field-ionization nano tip is bonded in the substrate, then substrate is welded on four long pins, the most advanced and sophisticated ohm of long tube pin and field-ionization nano is connected, metal needle is passed the aperture at base center, the round end rear portion of metal needle afterbody is bonded on the screw rod of micrometer caliper, then base is fixed on the processing platform, the field-ionization nano tip is connected in the circuit as two electrodes with metal needle, according to the magnitude of voltage in the needs initialization circuit of adjustable range, with the distance between micrometer caliper adjusting metal needle and the field-ionization nano tip, current rush in circuit, when punch-through occurring, metal needle promptly in place, be fixed on metal needle on the base this moment, again base and metal needle are unloaded from processing platform, and metal needle and short tube pin are welded with lead, wire netting on the back cover, promptly obtain the field-ionization nano gas sensor of single piece of metal pin, the job operation of the field-ionization gas sensor array of many metal needles promptly is the metal needle fixing means in the above job operation of repetition.
The present invention with respect to the beneficial effect of prior art is:
One, prior art patent 1527051A uses the catalytic performance of nano material that organic gas catalysis disassociation is produced ion, detect the concentration of ion with electrode, its limitation is that the catalytic action selectivity of nano material is strong, the organic gas that different catalysts is different, promptly the gas sensor made from different catalysis materials is only to certain or certain several organic gas sensitivity, other gas can not respond, gas sensor configuration of the present invention is to adopt the monodimension nanometer material array as the most advanced and sophisticated ionized gas of field-ionization nano, utilize the little characteristics of monodimension nanometer material radius-of-curvature, strengthened effectively the ionisation of gas effect with respect to prior art, improved the sensitivity and the selectivity of gas sensor.Gas sensor of the present invention can detect any gas simultaneously, comprises organic gas and inorganic gas (as oxygen, nitrogen etc.).
They are two years old, field-ionization nano of the present invention tip is by substrate and monodimension nanometer material is bonding forms, the monodimension nanometer material pointed end, the back side bonds together with gold paste and base material, and base material adopts silicon chip or adopts the substrate of sheet metal as fixed field ionize nanotip.Illustrate that the present invention utilizes the intensity of monodimension nanometer material big, and combine firm characteristics with substrate, in the field-ionization process, when the bombardment of ion and electron pair material is very severe, monodimension nanometer material still has very high intensity, can be combined in securely in the substrate, can not break away from substrate and fly to, influence testing result in electrode or the air.
Its three, in the method for making of field-ionization nano gas sensor of the present invention: every metal needle all constitutes the field-ionization gas sensor with field-ionization nano is most advanced and sophisticated, and many metal needles are the field-ionization gas sensor array.Wherein each field-ionization nano is most advanced and sophisticated is connected in the circuit as two electrodes with metal needle, according to the magnitude of voltage in the needs initialization circuit of adjustable range, with the distance between micrometer caliper adjusting metal needle and the field-ionization nano tip, distance between field-ionization nano tip and the metal needle is controlled at tens～tens microns, help gas flow, reduce the voltage breakdown of gas sensor again, improved the stability of gas sensor.The array structure of field-ionization gas sensor has improved the power of test of sensor to mixed gas simultaneously.
Description of drawings
Fig. 1 is a processing platform synoptic diagram of making field-ionization nano gas sensor;
Fig. 2 is the structural drawing of field-ionization nano gas sensor;
Fig. 3 sweeps as the carbon nano pipe array at field-ionization nano tip on being bonded at the bottom of the silicon wafer-based
Retouch electromicroscopic photograph.
Among Fig. 1: 1, field-ionization nano tip; 2, wire netting; 3, base; 4, metal needle; 5, short tube pin; 6, long tube pin; 7, baffle plate; 8, micrometer caliper; 9, base plate; 10, circuit; 11, field-ionization nano gas sensor.
Field-ionization nano tip 1 is by substrate with monodimension nanometer material is bonding forms, under the substrate The surface is coated with one deck gold paste, the monodimension nanometer material pointed end, and the back side is sticking with gold paste and base material Be connected together; Wire netting 2 has stirrup to be fixed on the base; Base 3 is disc, Middle thicker than the edge, there is individual groove at the center below base 3, and there is aperture at the groove center, and is whole Individual base 3 is made by insulating materials; Metal needle 4 its afterbodys have round end, use in manufacturing process Be bonded in the front end of the screw rod of micrometer caliper 8, and be easy to unload down, and pass and cause The aperture at ionization nano gas sensor base 3 centers is take long tube pin 6 and metal needle 4 as two Electrode connects in circuit 10, and the number of metal needle 4 determines the number of short tube pin 5, Every metal needle 4 all consists of field-ionization gas sensor 11 with field-ionization nano most advanced and sophisticated 1, Many metal needles 4 are the field-ionization gas sensor array. Long tube pin 6 and short tube pin 5 by Metal material is made, for cylindrical, and four long tube pin 6, remaining is short tube pin 5, according to The number of metal needle 4 is determined the number of short tube pin 5, every metal needle 4 corresponding short tube pin 5 as its extraction electrode; Hold up two next baffle plates 7 at base plate 9, front apron 7 is to use Fix the base 3 of field-ionization nano gas sensor; The screw rod of micrometer caliper 8, Pass and be fixed on the backboard 7; Base plate 9 plays the effect of support; Send a telegraph processed field From nano gas sensor 11, by base 3, length pin 5,6 and the field-ionization nano point End 1 forms, and circuit 10 is made up of power module, load resistance and ammeter, power module The voltage of 0-1000V can be provided, and its magnitude of voltage is set constant, transfers with micrometer caliper 8 The distance at joint metal needle 4 and field-ionization nano tip 1, the current rush in circuit 10, Punch-through occurs, the distance of this moment is exactly the distance that needs, and metal needle 4 can be fixed on On the base 3, unload then processed field-ionization nano gas sensor 11, and with gold Belong to pin 4 and get up with short tube pin 5 usefulness wire bonds, wire netting 2 on the cover, single piece of metal pin 4 Field-ionization nano gas sensor 11 namely machines, the field-ionization gas of many metal needles 4 The processing method of body sensor array namely is that the metal needle 4 in the above processing method of repetition is fixing Method.
Be in the structure chart of field-ionization nano gas sensor at Fig. 2:
The 1st, the field-ionization nano tip is by substrate with monodimension nanometer material is bonding forms substrate Lower surface is coated with one deck gold paste, monodimension nanometer material pointed end, the back side gold paste and base material Bond together; The 2nd, wire netting has stirrup to be fixed on the base; The 3rd, base is Disc, middle thicker than the edge, there is individual groove at the center below base, and the groove center has little The hole, whole base is made by insulating materials; The 4th, metal needle, its afterbody has round end, is making Be used in the process being bonded on the screw rod of micrometer caliper, and be easy to unload down, the number of metal needle 4 Order determines the number of short tube pin 5, and every metal needle 4 all consists of with field-ionization nano most advanced and sophisticated 1 Field-ionization gas sensor 11, many metal needles are the field-ionization gas sensor array. The 5th, the short tube pin, the 6th, the long tube pin is made by metal material, for cylindrical, four long tubes is arranged Pin 6, remaining is short tube pin 5, determines the number of short tube pin 5 according to the number of metal needle 4, Every metal needle 4 corresponding short tube pin 5 are as its extraction electrode.
Fig. 3 sweeps as the carbon nano pipe array at field-ionization nano tip on being bonded at the bottom of the silicon wafer-based Retouch electromicroscopic photograph, the carbon nano pipe array among the figure adopts template and chemical vapour deposition technique combination Preparation, as the field-ionization nano tip, the average diameter of CNT as we can see from the figure Be 60nm, highly be about several microns, orientation is consistent, and is effective to ionisation of gas, energy Enough effectively reduce the breakdown voltage of gas sensor.
Embodiment
The concrete making step of field-ionization nano gas sensor is as follows:
Adopt the method for chemical vapor deposition to prepare carbon nano pipe array, its preparation process is as follows: at first steam one deck gold on silicon chip substrate, subsequently with magnetically controlled sputter method deposited iron catalyzer in the above, the method for utilizing chemical vapor deposition again is carbon nano tube array grows in the above.Adopt silicon chip as substrate, steam one deck gold in the above, be bonded at carbon nano pipe array at the bottom of the silicon wafer-based with conducting resinl then on as field-ionization nano tip 1.
Field-ionization nano tip 1 is welded on four long tube pin 6, base 3 is fixed on the front apron 7 of processing platform, metal needle 4 is passed the aperture at base 3 centers, metal needle 4 afterbody round end rear portions are bonded at the top of micrometer caliper screw rod 8 with double faced adhesive tape, then metal needle 4 and field-ionization tip 1 are connected in the circuit 10 as two electrodes, the magnitude of voltage of power module in metal needle 4 of Tiao Jieing and the distance setting circuit 10 between the field-ionization tip 1 as required, regulate distance between metal needle 4 and the field-ionization tip 1 by adjustable screw mircrometer gauge 8, observe the variation of reometer in the circuit 10 simultaneously, when appearring in current rush, punch-through stops to regulate, cut off the loop of circuit 10, aperture in base 3 drips epoxide-resin glue, when epoxide-resin glue cements when solid, processed field-ionization nano gas sensor 11 is taken off from processing platform, metal needle 4 and short tube pin 5 usefulness wire bonds are got up, wire netting 2 on the cover, promptly finish the making of field-ionization nano gas sensor 11.
It is even that the method for employing alumina formwork and chemical vapor deposition prepares the aperture, the carbon nano pipe array that orientation is consistent, and its preparation process is as follows:
Porous alumina formwork utilizes the two-step anodization method obtained.Its concrete steps are as follows: high-purity aluminium flake (99.99%) is cut into the small pieces that diameter is 22mm, cleans with organic solvent, the back that finishes is at N
2Protect 500 ℃ to anneal natural cooling 4 hours down.With the aluminium flake acetone ultrasonic cleaning after the annealing, in energising polishing in polishing fluid (volume ratio of absolute ethyl alcohol and perchloric acid is 9: 1) under 0 ℃.Polished aluminium flake is carried out an anodic oxidation, electrolytic solution is the oxalic acid solution of 0.3M, the once oxidation layer is removed with phosphoric acid (6wt%) and chromic acid (1.8wt%) mixed acid solution, carries out two-step anodization then under the condition identical with anodic oxidation condition.Behind the secondary oxidation, utilize saturated SnCl
4Solution is removed the aluminium at the back side, because a barrier layer is arranged between aluminium lamination and alumina formwork, so remove barrier layer with phosphoric acid, also handles for reaming simultaneously.Just can obtain required porous alumina formwork to its cleaning-drying at last.
To put into quartz boat by the alumina formwork that two-step anodization makes, place the quartz ampoule that is placed on the tube wall stove.At first feed nitrogen with the air in the vent pipe and other residual gas, flow is 200sccm.Be heated to 600 ℃ then, treat to feed acetylene behind the temperature stabilization, nitrogen flow is adjusted to 100sccm, the volume flow ratio of acetylene and nitrogen is 10: 100, and the time that feeds acetylene is 40min.Reaction finishes after annealing to be handled, and the time of annealing is 10h.Under nitrogen protection, naturally cool to room temperature then.The template that deposited carbon nano-tube is heated 1h in 350 ℃ of following air atmospheres, to remove the agraphitic carbon on surface.Sample thief utilizes 10%NaOH solution dissolving partial oxidation aluminium, steams one deck gold then at the aluminium oxide back side.On silicon base, steam one deck gold, with conducting resinl the alumina formwork back side is bonded on the silicon substrate, as field-ionization nano tip 1.
Field-ionization nano tip 1 is welded on four long tube pin 6, base 3 is fixed on the front apron 7 of processing platform, metal needle 4 is passed the aperture at base 3 centers, the round end rear portion of metal needle 4 afterbodys is bonded at the top of micrometer caliper screw rod 8 with double faced adhesive tape, then metal needle 4 and field-ionization tip 1 are connected in the circuit 10 as two electrodes, the magnitude of voltage of power module in metal needle 4 of Tiao Jieing and the distance setting circuit 10 between the field-ionization tip 1 as required, adjustable screw mircrometer gauge 8 is regulated the distance between metal needle 4 and the field-ionization tip 1 then, observe the variation of reometer in the circuit 10 simultaneously, when appearring in current rush, punch-through stops to regulate, cut off the loop of circuit 10, aperture in base 3 drips epoxide-resin glue, be about to processed field-ionization nano gas sensor 11 when solid and take off when epoxide-resin glue cements from processing platform, metal needle 4 and short tube pin 5 usefulness wire bonds are got up, wire netting 2 on the cover, promptly finish the making of field-ionization nano gas sensor 11.
Adopt the Hydrothermal Preparation zinc oxide nano array, its preparation process is as follows: with the NaOH solution of 30ml 0.5M, it is in the autoclave of 50ml that the H2O2 solution of 5ml 30% adds volume, add the pure smooth Zn sheet of a slice 1cm * 1cm after stirring, put into baking oven after the sealing and be heated to 160-200 ℃ of reaction 3-6 hour.Take out the Zn sheet behind the question response, with deionized water and alcohol washing, last products therefrom is put into vacuum drying chamber at 40 ℃ and is drying to obtain the ZnO array.Select stainless steel as backing material, be coated with one deck gold paste, the back side is posted on the ZnO of gold paste and put into muffle furnace, 800 ℃ of heating 1 hour, cooling gradually then promptly obtains the field-ionization nano tip of ZnO array.
Field-ionization nano tip 1 is welded on four long tube pin 6 then, base 3 is fixed on the baffle plate 7 of processing platform, 3 apertures of center processing of base 3, metal needle 4 is passed an aperture at base 3 centers, the round end rear portion of metal needle 4 afterbodys is bonded at the top of micrometer caliper screw rod 8 with double faced adhesive tape, then metal needle 4 and field-ionization tip 1 are connected in the circuit 10 as two electrodes, the magnitude of voltage of power module in metal needle 4 of Tiao Jieing and the distance setting circuit 10 between the field-ionization tip 1 as required, adjustable screw mircrometer gauge 8 is regulated the distance between metal needle 4 and the field-ionization tip 1 then, observe the variation of reometer in the circuit 10 simultaneously, when appearring in current rush, punch-through stops to regulate, cut off the loop of circuit 10, aperture in base 3 drips epoxide-resin glue, when epoxide-resin glue cements when solid base 3 and metal needle 4 are unloaded from processing platform, then second metal needle 4 passed the another one aperture at base 3 centers, the round end rear portion of metal needle 4 afterbodys is bonded at the top of micrometer caliper screw rod 8 with double faced adhesive tape, metal needle 4 and field-ionization tip 1 are connected in the circuit 10 as two electrodes, the magnitude of voltage of power module in metal needle of regulating as required 4 and the distance setting circuit 10 between the field-ionization tip 1 then, for three field-ionization gas sensor array characteristic differences that three metal needles 4 are formed, this magnitude of voltage also should be different with primary magnitude of voltage, adjustable screw mircrometer gauge 8 is regulated the distance between metal needle 4 and the field-ionization tip 1 again, observe the variation of reometer in the circuit 10 simultaneously, when appearring in current rush, punch-through stops to regulate, cut off the loop of circuit 10, aperture in base 3 drips epoxide-resin glue, when epoxide-resin glue cements when solid processed field-ionization nano gas sensor 11 is taken off from processing platform, using the same method inserts the 3rd metal needle 4 again.At last three metal needles 4 are got up with 3 short tube pin, 5 usefulness wire bonds respectively, wire netting 2 on the cover, promptly finish the making of field-ionization nano gas sensor.
Claims (5)
1. field-ionization nano gas sensor is characterized in that: many pins that are equipped with on the metal needle (4) that passes base (3) and the base (3) and the field-ionization nano tip (1) that is covered with wire netting (2) are connected;
1.1, said field-ionization nano tip (1) is by substrate and monodimension nanometer material is bonding forms, the monodimension nanometer material pointed end, the back side bonds together with gold paste and base material, adopt the monodimension nanometer material array as field-ionization nano tip (1) simultaneously, wire netting (2) covers on the top of field-ionization nano tip (1), is fixed on the base (3) with stirrup;
1.2, said base (3) is disc and made by insulating material, and is middle thicker than the edge, is equipped with narrow meshed groove at the center, below of base (3);
1.3, the syringe needle of metal needle (4) passes the below that aperture in the middle of the groove is fixed on field-ionization nano tip (1), its distance is regulated as required, metal needle (4) is fixedly connected on the screw rod of micrometer caliper (8) by the round end of afterbody;
1.4, said pin forms for passing right cylinder short tube pin (5) and the long tube pin (6) that base (3) made by metal material, and link into an integrated entity with base (3), long tube pin (6) on the base (3) is highly identical, being used for being connected and fixed with electrode of field-ionization nano tip (1) substrate draws, short tube pin (5) on the base (3) is highly identical, as the extraction electrode of metal needle (4).
2. a kind of field-ionization nano gas sensor according to claim 1, it is characterized in that: described employing monodimension nanometer material array is field-ionization nano tip (1), described monodimension nanometer material array or carbon nano pipe array or zinc oxide nano-wire array or tin oxide nano linear array.
3. a kind of field-ionization nano gas sensor according to claim 1 is characterized in that: the substrate at said field-ionization nano tip (1), and adopt silicon chip or adopt the substrate of sheet metal as fixed field ionize nanotip (1).
4. a kind of field-ionization nano gas sensor according to claim 1 is characterized in that: said metal needle (4) is single or many formation sensor arraies, and the corresponding short tube pin of every metal needle (4) (5) is as its extraction electrode;
5. according to the method for making of a kind of field-ionization nano gas sensor described in the claim 1, it is characterized in that: this method for making is finished according to the following steps;
Earlier field-ionization nano tip (1) is bonded in the substrate, after substrate is welded on four long tube pin (6), long tube pin (6) is connected with field-ionization nano tip (1) ohm, again metal needle (4) is passed the aperture at base (3) center, then the round end with metal needle (4) afterbody is bonded on the screw rod of micrometer caliper (8), afterwards base (3) is fixed on the processing platform, then field-ionization nano tip (1) and metal needle (4) are connected in the circuit (10) as two electrodes, according to the magnitude of voltage in the needs initialization circuit (10) of adjustable range, with the distance between micrometer caliper (8) adjusting metal needle (4) and field-ionization nano tip (1), current rush in circuit (11), when punch-through occurring, metal needle (4) in place, be fixed on metal needle (4) on the base (3) this moment, again base (3) and metal needle (4) are unloaded from processing platform, and metal needle (4) and short tube pin (5) are welded with lead, wire netting (2) on the back cover, obtain the field-ionization nano gas sensor (11) of single piece of metal pin (4), the job operation of the field-ionization gas sensor array of many metal needles (4) is metal needle (4) fixing means in the above job operation of repetition.
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| CN101349671B (en) * | 2008-09-04 | 2011-08-31 | 上海交通大学 | Field effect tube and molecular ionization fusion gas sensor |
| CN103278662B (en) * | 2013-05-10 | 2016-08-10 | 福州大学 | Nano-nickel rod array atomic force microscope tip characterization sample and manufacture method thereof |
| CN108548864B (en) * | 2018-03-20 | 2022-02-08 | 上海交通大学 | Plasma gas sensor and method for manufacturing the same |
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