CN100399594C - Method for increasing sensibility of superconductive quantum interference device - Google Patents
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- CN100399594C CN100399594C CNB2004100960784A CN200410096078A CN100399594C CN 100399594 C CN100399594 C CN 100399594C CN B2004100960784 A CNB2004100960784 A CN B2004100960784A CN 200410096078 A CN200410096078 A CN 200410096078A CN 100399594 C CN100399594 C CN 100399594C
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- 238000000034 method Methods 0.000 title claims abstract description 30
- 230000005291 magnetic effect Effects 0.000 claims abstract description 93
- 230000008878 coupling Effects 0.000 claims abstract description 12
- 238000010168 coupling process Methods 0.000 claims abstract description 12
- 238000005859 coupling reaction Methods 0.000 claims abstract description 12
- 239000010408 film Substances 0.000 claims description 46
- 229910021521 yttrium barium copper oxide Inorganic materials 0.000 claims description 32
- 239000010409 thin film Substances 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 16
- BTGZYWWSOPEHMM-UHFFFAOYSA-N [O].[Cu].[Y].[Ba] Chemical compound [O].[Cu].[Y].[Ba] BTGZYWWSOPEHMM-UHFFFAOYSA-N 0.000 claims description 14
- 241000238366 Cephalopoda Species 0.000 claims description 11
- 229910000889 permalloy Inorganic materials 0.000 claims description 11
- 238000002360 preparation method Methods 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 10
- 230000005294 ferromagnetic effect Effects 0.000 claims description 10
- 238000005538 encapsulation Methods 0.000 claims description 9
- 229910000859 α-Fe Inorganic materials 0.000 claims description 9
- 238000010884 ion-beam technique Methods 0.000 claims description 8
- 238000013461 design Methods 0.000 claims description 7
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 claims description 7
- MUKYGUZFFPFWQM-UHFFFAOYSA-N [Cu]=O.[Ba].[Pr] Chemical compound [Cu]=O.[Ba].[Pr] MUKYGUZFFPFWQM-UHFFFAOYSA-N 0.000 claims description 5
- 238000004804 winding Methods 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000004549 pulsed laser deposition Methods 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000005357 flat glass Substances 0.000 claims description 3
- 230000004907 flux Effects 0.000 abstract description 9
- 230000035699 permeability Effects 0.000 abstract description 8
- 230000002708 enhancing effect Effects 0.000 abstract 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000000523 sample Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 229910052712 strontium Inorganic materials 0.000 description 3
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 3
- 229910000976 Electrical steel Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 206010020751 Hypersensitivity Diseases 0.000 description 1
- 210000004556 brain Anatomy 0.000 description 1
- 238000005097 cold rolling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 235000016768 molybdenum Nutrition 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 229910000815 supermalloy Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Abstract
The present invention discloses a method for enhancing the sensibility of a superconductive quantum interference device (SQUID), which is characterized in that a layer of magnetic medium is arranged into the coupling structure of a magnetic flux converter and an SQUID to increase magnetic flux density so as to enhance the sensibility of the SQUID. Compared with an SQUID with the same effective area, an external magnetic field changes a flux quantum corresponding to a little magnetic field change, which relatively increases the effective area of the SQUID. The method can increase the effective area to mu dielectric permeability times of that of original effective area, wherein the mu is the dielectric permeability. Compared with the prior art, two to three order of magnitude can be enhanced.
Description
Technical field
The present invention relates to a kind of increase superconducting quantum interference device effective area, improve its sensitivity of method.
Background technology
The discovery of superconductive tunnel effect once obtained the extensive attention of scientific circles and society, the superconducting quantum interference device that grows up thus (SQUID) is used widely as the hypersensitive detector, so far, though the appearance of SQUID had for three more than ten years, but only after the thin film technique development, just really be applied, with the variation of SQUID, be that all detect the sensitiveest scheme of magnetic fields or magnetic flux at present as senser mensuration magnetic field.Along with the high-temperature superconductor progress of research, the performance of various high-temperature superconducting thin film SQUID is also improving constantly, as adopt yttrium barium copper oxide (YBCO) inclined-plane to tie (ramp-typeJosephson junction), praseodymium barium copper oxygen (PBCO) potential barrier, the magnetic flow convertor of multi-turn, with the coupling of multi-turn input coil, (1Hz 77K) is the magnetic flux noise density
(seeing list of references [1] for details); Domestic twin crystal knot SQUID, it is several to utilize magnetic flow convertor can reduce under the resolution 77K in magnetic field, 1Hz place
Though high-temperature device has brought facility to application, the performance of high temperature SQUID is still the principal element that limits its practical ranges at present.For example, biomagnetics fields such as heart magnetic, brain magnetic have just proposed the more requirement of highfield resolution to high temperature SQUID, and common biological magnetic signal is in the 50-500fT scope.Many scientific researches group is devoted to how to improve design, improve technology and experiment condition, the performance that improves SQUID is to satisfy this performance index, in order to increase effective area, adopted the design of multiple high temperature SQUID, the structure of various magnetic flow convertor of now having studied and the structure of SQUID see list of references [2]-[4] for details.These schemes have to the SQUID of big inductance (large tracts of land) pick-up winding and small inductor is coupled in order to obtain big effective area, thereby have brought many couplings and technological problems.
List of references:
[1].A New Concept for Integrated YBa2Cu3O7 MagnetometersR.Scharnweber，and M.Schilling，(1997)，IEEE Trans.Appl.Supercond.Vol.7，No.2，3485.
[2].Magnetic field-induced noise in directly coupled high T[sub c]superconducting quantum interference device magnetometersF.P.Milliken，S.L.Brown，and R.H.Koch，(1997)，Appl.Phys.Lett.71(13)，1857.
[3].Multilevel YBaCuO.flux.transformers with high T，SQUIDs：Aprototype high.T，SQUID magnetometer working at 77KB.Oh，R.H.Koch，W.J.Gallagher，R.P.Robertazzi，and W.Eidelloth，(1991)，Appl.Phys.Lett.59(1)，123.
[4].High-Tc super conducting quantum interference devices with slotsor holes：Low 1/f noise in ambient magnetic fieldsE.Dantsker，S.Tanaka，and John Clarke，(1997)，Appl.Phys.Lett.70(15)，2037
Summary of the invention
Problem at the prior art existence, the object of the present invention is to provide a kind ofly increases the superconducting quantum interference device effective area, improves its sensitivity of method by insert one deck magnetic medium in magnetic flow convertor and SQUID coupled structure, and this method may further comprise the steps:
1) deposit ferromagnetic film on substrate;
2) survey the magnetic hysteresis loop of magnetic film, find out magnetic hysteresis loop long and narrow, surround the magnetizing mediums film that area is little and coercive force is low, standby;
3) preparation multi-turn magnetic flow convertor;
4) preparation binode SQUID is dc SQUID;
5) with magnetic flow convertor, the substrate that is coated with magnetic thin film and SQUID coupling encapsulation.
Further, in step 1, deposit 1000-5000 respectively with the pulsed laser deposition method
Ferrite or permalloy film.
Further, in step 2, adopt vibrating specimen magnetometer under the low-intensity magnetic field of fT, to survey the magnetic hysteresis loop of magnetic film, seek the magnetic film that loop line is long and narrow and coercive force is low.
Further, it is as follows to prepare the method for multi-turn magnetic flow convertor in step 3:
Elder generation is at the strontium titanates (S of φ 18mm * 0.5mm
iT
rO
3) prepare the magnetic flow convertor of three-layer thin-film (YBCO-PBCO-YBCO) 8-18 circle input coil in the substrate: first epitaxial growth bottom yttrium barium copper oxide (YBCO) superconducting thin film, high incidence angle ion beam etching prepares low-angle edge counterdie, and figure is for can being outer ring, magnetic flow convertor upper strata the superconducting film bar that superconducting thin film and the inner ring of middle multi-turn input coil of pick-up winding is connected, forms the loop after the etching; Adopt again and block mask method and prepare praseodymium barium copper oxygen (PBCO) film in intermediate layer as separator, epitaxial growth top layer yttrium barium copper oxide (YBCO) superconducting thin film then, plate the electrode silverskin, etch the superconducting coil loop figure that top layer is formed by the multi-turn input coil of the pick-up winding of a periphery and core.
Further, it is as follows to prepare the method for dc SQUID in step 4:
Epitaxial growth 1800 at the bottom of the strontium titanate base of 10mm * 10mm * 0.5mm
The yttrium barium copper oxide of left and right thickness (YBCO) superconducting thin film, on same substrate, prepare two binode SQUID by ion beam etching with same design parameter, purpose is in order to guarantee that at least one binode SQUID can use, and symmetrical structure is also more convenient when coupling.
Further, in step 5, will insert in dc SQUID and the magnetic flow convertor coupled structure by the magnetic films of step 1,2 preparations, be respectively magnetic flow convertor from down to up, be coated with sheet glass, the dc SQUID of magnetic film, the modulation feedback coil, the outside is encapsulated by seal box.
Further, in step 1,2, at first grow on the substrates of different ferrite of different-thickness, area or the film of permalloy in the low-intensity magnetic field below fT, are measured the magnetic hysteresis loop of magnetizing mediums film then.
Further, described magnetic film is directly long on dc SQUID annular distance, identical with the annular distance shape, come step of replacing 1,2 with this, then with the coupling of this dc SQUID and magnetic flow convertor, be respectively the dc SQUID that magnetic flow convertor, separator, annular distance are coated with magnetic film from down to up, the modulation feedback coil, the outside which is provided with lead-in wire with the seal box encapsulation.
Further, described substrate is sheet glass or silicon chip.
Further, magnetic flow convertor, the substrate that is coated with magnetic thin film, dc SQUID coupling encapsulation and magnetic flow convertor, separator, annular distance are coated with the performance that SQUID pops one's head between these two kinds of packaged types of dc SQUID coupling encapsulation of magnetic film and compare, use on a selective basis.
The present invention is by inserting the effective area that one deck magnetic medium increases dc SQUID in the structure of multi-turn magnetic flow convertor and dc SQUID coupling, dc SQUID outside magnetic field increases a flux quantum
The time, the zero-pressure tunnel current changes one-period.After in coupled structure, inserting one deck magnetic medium, increased magnetic flux density in the SQUID effective area (
μ is a dielectric permeability), to compare with the dc SQUID of equal effective area, external magnetic field changes a flux quantum correspondence and the variation in littler magnetic field, thereby has been equivalent to increase the effective area of dc SQUID.This design maximum in theory can increase to μ (dielectric permeability) to effective area doubly, compare with the scheme that increases sensitivity in document above-mentioned [2]-[4], can be easy to improve two to three orders of magnitude, but, magnetisable material stagnates because having back, in fact can not reach μ doubly, but less than μ doubly.So to select the material of inserting magnetic medium, its H-B, the H-M curve is necessary long and narrow and coercive force is little.
Description of drawings
Fig. 1 is the multi-turn input coil magnetic flow convertor of the present invention's preparation;
Fig. 2 is the design configuration of dc SQUID among the present invention;
Fig. 3 is the figure after being coupled;
Fig. 4 is the structural representation after the coupling of SQUID probe encapsulates among the present invention.
Embodiment
Description of reference numerals
1-multi-turn input coil magnetic flow convertor
2-dc SQUID design configuration
The 3-separator
4-modulates feedback coil
The magnetizing mediums that the present invention will insert requires under low-intensity magnetic field coercive force very little, is approximately 0 or less than 10
-15Magnitude, and initial permeability by following table, is selected ferrite and permalloy than higher.
Magnetic permeability and other performances of typical case's soft magnetic material
| Material | Chemical composition (%) | Initial permeability | Maximum permeability | Coercive force amperes per meter (oersted) | μ 0M STesla (Gauss) | Resistivity 10 4Ohm meter | Curie point ℃ |
| Pure iron | 0.05 impurity | 10000 | 200000 | 4.0 (0.05) | 2.15 (21500) | 10 | 770 |
| Silicon steel (hot rolling) | 4 silicon, Yu Weitie | 450 | 8000 | 4.8 (0.6) | 1.97 (19700) | 60 | 690 |
| Silicon steel (cold rolling grain orientation) | 3.3 silicon, Yu Weitie | 600 | 10000 | 1.6 (0.2) | 20 (20000) | 50 | 700 |
| 45 permalloys | 45 nickel, Yu Weitie | 2500 | 25000 | 2.4 (0.3) | 1.6 (16000) | 50 | 440 |
| 78 permalloys | 78.5 nickel, Yu Weitie | 8000 | 100000 | 4.0 (0.05) | 1.0 (10000) | 16 | 580 |
| Supermalloy | 79 nickel, 5 molybdenums, 0.5 manganese, Yu Weitie | 10000～ 12000 | 1000000～ 1500000 | 0.32 (0.004) | 0.8 (8000) | 60 | 400 |
| Ferrite | - | 10 3～10 4 | - | 10～1 (～0.1-0.01) | 0.5 (5000) | 10 4～10 3 | 100～600 |
Embodiment 1:
On the glass substrate of a plurality of 10mm * 10mm * 0.4mm, deposit 1000-5000 respectively earlier with the pulsed laser deposition method
Ferrite film, under fT magnitude low-intensity magnetic field, measure the magnetic hysteresis loop of magnetic film then with vibrating specimen magnetometer, select the magnetic film that loop line is long and narrow and coercive force is low, standby.
Prepare multi-turn magnetic flow convertor and dc SQUID ring again: elder generation is at the strontium titanates (SiTrO of φ 18mm * 0.5mm
3) go up the magnetic flow convertor that preparation three-layer thin-film (YBCO-PBCO-YBCO) 14 encloses input coils, at first epitaxial growth bottom yttrium barium copper oxide (YBCO) superconducting thin film in substrate adopts high incidence angle ion beam etching to prepare low-angle edge counterdie; Prepare praseodymium barium copper oxygen (PBCO) film in intermediate layer as separator with blocking mask method again; Epitaxial growth top layer yttrium barium copper oxide (YBCO) superconducting thin film then, plate the electrode silverskin, etch the top layer figure, as shown in Figure 1, what we designed here is the input coils of 14 circles, though magnetic flow convertor input coil the best of this structure is 18 circles in theory, in fact this coil is whole only at 1mm
2About area on, the number of turns is many, narrow, the easy fracture of film bar, so 8-14 circle is preferable selection.Dc SQUID is epitaxial growth 1800 at the bottom of the strontium titanate base of 10mm * 10mm * 0.5mm
The yttrium barium copper oxide of thickness (YBCO) superconducting thin film goes out the SQUID figure by ion beam etching, as shown in Figure 2.
Magnetic flow convertor, the glass substrate and the dc SQUID that are coated with ferrite film encapsulate at last.Figure such as Fig. 3 are coupled during encapsulation, and the encapsulation schematic diagram is tested after the probe assembling finishes as shown in Figure 4, compares with the probe of not inserting the magnetizing mediums film.
Embodiment 2:
Present embodiment at first will deposit 1000-5000 respectively with the pulsed laser deposition method on the glass substrate of 10mm * 10mm * 0.4mm
78 permalloys and 45 permalloy films, under fT magnitude low-intensity magnetic field, adopt vibrating specimen magnetometer to measure the magnetic hysteresis loop of magnetic film again, seek the magnetic film that loop line is long and narrow and coercive force is low.
Magnetic flow convertor that preparation is used to be coupled and dc SQUID ring: elder generation is at the strontium titanates (SiTrO of φ 18mm * 0.5mm
3) the last magnetic flow convertor for preparing three-layer thin-film (YBCO-PBCO-YBCO) 14 circle input coils, epitaxial growth bottom yttrium barium copper oxide (YBCO) superconducting thin film, high incidence angle ion beam etching prepares low-angle edge counterdie, prepare praseodymium barium copper oxygen (PBCO) film in intermediate layer as separator with blocking mask method again, epitaxial growth top layer yttrium barium copper oxide (YBCO) superconducting thin film then, etch the top layer figure earlier and plate the electrode silverskin again, last figure as shown in Figure 1.Dc SQUID is epitaxial growth 1800 at the bottom of the strontium titanate base of 10mm * 10mm * 0.5mm
The yttrium barium copper oxide of thickness (YBCO) superconducting thin film goes out the SQUID figure by ion beam etching, plates one deck permalloy film (thickness is by measuring decision under the weak magnetic of test during magnetic hysteresis loop) in the middle of the SQUID annular distance (about 4 μ m * 110 μ m), as shown in Figure 2.
At last magnetic flow convertor, separator, the SQUID that is coated with magnetic film are encapsulated, figure is coupled as shown in Figure 3 during encapsulation, and the encapsulation schematic diagram is tested after the probe assembling finishes as shown in Figure 4, compares with the probe of not inserting the magnetizing mediums film.
Claims (9)
1. method that increases the superconducting quantum interference device effective area, this method may further comprise the steps:
Step 1: deposit ferromagnetic film on several substrates;
Step 2: survey the magnetic hysteresis loop of each ferromagnetic film under the fT magnitude low-intensity magnetic field, find out wherein long and narrow, the encirclement ferromagnetic film that area is little and coercive force is low of magnetic hysteresis loop, standby;
Step 3: preparation multi-turn magnetic flow convertor;
Step 4: preparation binode SQUID is dc SQUID;
Step 5: with multi-turn magnetic flow convertor, the substrate that is deposited with ferromagnetic film and dc SQUID coupling encapsulation.
2. the method for increase superconducting quantum interference device effective area as claimed in claim 1 is characterized in that, deposits 1000-with the pulsed laser deposition method in step 1
Ferrite film or permalloy film.
3. the method for increase superconducting quantum interference device effective area as claimed in claim 1 is characterized in that, adopts vibrating specimen magnetometer to survey the magnetic hysteresis loop of ferromagnetic film in step 2 under fT magnitude low-intensity magnetic field.
4. the method for increase superconducting quantum interference device effective area as claimed in claim 1 is characterized in that, the method for preparing the multi-turn magnetic flow convertor in step 3 is as follows:
The first magnetic flow convertor of preparation three-layer thin-film multi-turn input coil at the bottom of the strontium titanate base: epitaxial growth bottom yttrium barium copper oxide (YBCO) superconducting thin film, high incidence angle ion beam etching prepares low-angle edge counterdie, and figure is for can being outer ring, magnetic flow convertor upper strata the superconducting film bar that superconducting thin film and the inner ring of middle multi-turn input coil of pick-up winding is connected, forms the loop after the etching; Adopt again and block mask method and prepare praseodymium barium copper oxygen (PBCO) film in intermediate layer as separator, epitaxial growth top layer yttrium barium copper oxide (YBCO) superconducting thin film then, plate the electrode silverskin, etch the superconducting coil loop figure that the multi-turn input coil by the pick-up winding of a periphery and core of top layer forms, be of a size of φ 18mm * 0.5mm at the bottom of the strontium titanate base, input coil is a 8-18 circle input coil.
5. the method for increase superconducting quantum interference device effective area as claimed in claim 1 is characterized in that, the method for preparing dc SQUID in step 4 is as follows:
Epitaxial growth yttrium barium copper oxide (YBCO) superconducting thin film at the bottom of the strontium titanate base, by two binode SQUID of ion beam etching preparation with same design parameter, be of a size of 10mm * 10mm * 0.5mm at the bottom of the described strontium titanate base, yttrium barium copper oxide (YBCO) superconducting thin film thickness is
6. the method for increase superconducting quantum interference device effective area as claimed in claim 1, it is characterized in that, in step 5, to insert in dc SQUID and the multi-turn magnetic flow convertor coupled structure by the ferromagnetic film of step 1,2 preparations, be respectively the multi-turn magnetic flow convertor from down to up, be deposited with substrate, the dc SQUID of ferromagnetic film, the modulation feedback coil, the outside is encapsulated by seal box.
7. the method for increase superconducting quantum interference device effective area as claimed in claim 1, it is characterized in that, in step 1,2, at first grow on the substrates of different ferrite film or the permalloy film of different-thickness, area are measured the magnetic hysteresis loop of ferrite film or permalloy film then in fT magnitude low-intensity magnetic field.
8. the method for increase superconducting quantum interference device effective area as claimed in claim 1, it is characterized in that, described ferromagnetic film directly is deposited on the dc SQUID annular distance, identical with the annular distance shape, come step of replacing 1,2 with this, then with this dc SQUID and the coupling of multi-turn magnetic flow convertor, be respectively multi-turn magnetic flow convertor, separator, annular distance from down to up and be deposited with the dc SQUID of ferromagnetic film, the modulation feedback coil, the outside encapsulates with seal box, which is provided with lead-in wire.
9. the method for increase superconducting quantum interference device effective area as claimed in claim 1 is characterized in that, described substrate is sheet glass or silicon chip.
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| CN103792500B (en) * | 2012-11-01 | 2017-12-29 | 中国科学院上海微系统与信息技术研究所 | Flux quantum based on SBC configurations counts direct reading circuit and method |
| CA2924365C (en) * | 2013-10-01 | 2022-05-03 | Gedex Systems Inc. | Dual squid measurement device |
| CN105203973B (en) * | 2015-09-18 | 2018-05-01 | 中国科学院电工研究所 | A kind of weak magnetic detection device |
| CN111035386B (en) * | 2018-10-12 | 2024-03-22 | 中国科学院物理研究所 | Miniature SERF magnetometer, use method and application thereof |
| CN116415675B (en) * | 2023-06-09 | 2023-09-22 | 中国科学技术大学 | System and method for modulating superconducting quantum bit transition frequency |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1029057C (en) * | 1990-09-20 | 1995-06-21 | 株式会社岛津制作所 | Direct current superconducting quantum interference device and manufacturing method for same |
| US5465049A (en) * | 1992-04-20 | 1995-11-07 | Sumitomo Electric Industries, Ltd. | Integrated type planar magnetic sensor having SQUID and flux transformer formed of oxide superconductor |
| US5825183A (en) * | 1995-05-22 | 1998-10-20 | Seiko Instruments Inc. | Radial differential squid magnetic flux meter |
-
2004
- 2004-11-29 CN CNB2004100960784A patent/CN100399594C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1029057C (en) * | 1990-09-20 | 1995-06-21 | 株式会社岛津制作所 | Direct current superconducting quantum interference device and manufacturing method for same |
| US5465049A (en) * | 1992-04-20 | 1995-11-07 | Sumitomo Electric Industries, Ltd. | Integrated type planar magnetic sensor having SQUID and flux transformer formed of oxide superconductor |
| US5825183A (en) * | 1995-05-22 | 1998-10-20 | Seiko Instruments Inc. | Radial differential squid magnetic flux meter |
Non-Patent Citations (4)
| Title |
|---|
| High-Tc super conducting quantum interferencedevices with slots or holes :Low 1/f nosie in ambientmagnetic fields. E.Dantsker,S.Tanaka,John Clarke.Appl.Phys.Lett.,Vol.70 No.15. 1997 * |
| Integrated YBa2Cu3O7 Magnetometers for biomagneticapplications. S.KREY, K.O.SUBKE, D.REIMER, M.SCHILLING, et al.Applied Superconductivity,Vol.5 No.7-12. 1998 * |
| Magnetic field-indued nosie in directly coupledhigh Tc superconducting quqntum interferencedevicemagnetometers. F.P.Milliken,S.L.Brown,R.H.Koch.Appl.Phys.Lett.,Vol.71 No.13. 1997 * |
| YBa2Cu3O7-δ thin-film gradiometers:fabricationand performance. W.Eidelloth, B,Oh,R.P.Robertazzi, W. J. Gallagher,R.H.Koch.Appl.Phys.Lett.,Vol.59 No.26. 1991 * |
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