CN100377240C - Manufacturing method and apparatus for optical information medium - Google Patents

Manufacturing method and apparatus for optical information medium Download PDF

Info

Publication number
CN100377240C
CN100377240C CNB2005101185167A CN200510118516A CN100377240C CN 100377240 C CN100377240 C CN 100377240C CN B2005101185167 A CNB2005101185167 A CN B2005101185167A CN 200510118516 A CN200510118516 A CN 200510118516A CN 100377240 C CN100377240 C CN 100377240C
Authority
CN
China
Prior art keywords
mould
resin
layer
substrate
mentioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2005101185167A
Other languages
Chinese (zh)
Other versions
CN1783269A (en
Inventor
吉成次郎
塚越拓哉
平田秀树
小卷壮
山家研二
田中敏文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Publication of CN1783269A publication Critical patent/CN1783269A/en
Application granted granted Critical
Publication of CN100377240C publication Critical patent/CN100377240C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Manufacturing Optical Record Carriers (AREA)

Abstract

To form a transparent intermediate layer to have uniform thickness and to exactly transfer a base pattern having a rugged pattern that the stamper has to the transparent intermediate layer, when a multi-layered optical information medium wherein a plurality of information recording layers are laminated via the transparent intermediate layer consisting of resin and the rugged pattern holding information exists on the surface of the transparent intermediate layer is manufactured. In the manufacturing method for the multi-layered optical information medium, a stage wherein after a resin layer is formed on the information recording layer, a stamper which can transmit active energy light is brought into contact with the surface of the resin layer, successively the resin layer is irradiated with the active energy light through the stamper and then the stamper is stripped to form the transparent intermediate layer to which the rugged pattern is transferred is provided, the stamper at least whose surface having the rugged pattern formed thereon is constituted of polyolefin resin or fluororesin is used and the transparent intermediate layer is so formed that the difference between the maximum thickness and the minimum thickness of the transparent intermediate layer on an information recording area is <=10 &mu m.

Description

The manufacture method of optical data media
The application is female case (application number: division 02127515.7).
Technical field
The invention relates to the manufacture method of optical data media.
Technical background
In recent years, densification and the high capacity for CD requires more and more higher.Though the recording capacity of the DVD of current sale (Digital Versatile Disk) single face has about 4.7GB, is equivalent to about 7 times compact disk, still the extensive exploitation development can be write down the technology of more information.
Technology as improving the video disc recording capacity has the short wavelengthization of recording/reproducing light beam, the high NA of object lens (opening number) change in the recording/reproducing light beam irradiates optics system, the multiple stratification of information recording layer, many-valued record etc.In these, the ternary record that utilizes the information recording layer multiple stratification to form is compared with high NAization with the short wavelengthization, can obtain great high capacity with low cost.Form the multi-layer optical information medium of 3 yuan of records, for example be documented in the spy and opened that flat 9-161329 communique, spy are opened flat 9-63122 communique, the spy opens in the flat 10-302315 communique.
(the following multilayer medium that also claim) show as opening in above-mentioned each communique in the multi-layer optical information medium, generally are the middle layers that the clamping transparent resin forms, and make several information recording layers form stacked structure.Specifically, be on substrate, to form the 1st information recording layer, form the surface thereon and have the middle layer of convex-concave pattern, form the 2nd information recording layer thereon again, above-mentioned convex-concave pattern is replicated on the 2nd information recording layer.As above-mentioned convex-concave pattern, the pre-pit (prepit) or the groove (groove) (guide groove) that keep data, trace information, address information etc. are for example arranged.In the formation of this convex-concave pattern,, generally be 2P (the Photo polymerigation photopolymerization) method of utilizing mould that resin bed is pushed as putting down in writing in above-mentioned each communique.
In the multilayer medium,, require the distance deviation on the direction in the medium face between the adjacent information recording layer little in order to ensure the stability of focus servo (focws servo).That is, be located at the middle layer between the recording layer, required thickness must be evenly.When the uneven thickness in middle layer is very big, when duplicating convex-concave pattern with mould extruding, mould is difficult to the middle layer extruding evenly, and the result is easy to produce replication defective.The middle layer is that the uneven thickness in middle layer is excessive when being made of ultraviolet curing resin isoreactivity energy ray curing resin or radiation-curing type resin, is easy to produce when the middle layer is solidified and solidifies inequality, also is easy to produce replication defective thus.
When forming the middle layer, promptly enable to duplicate convex-concave pattern to the middle layer exactly by mould, if mould is difficult to when breaking away from from the middle layer throw off, promptly liftability is very poor, a part of middle layer can strip down together with mould, produces defective.Therefore, the resin for constituting the middle layer requires the liftability of mould to get well.For example, constitute the middle layer by ultraviolet curing resin, and when on opaque information recording layer, forming the middle layer, because the ultraviolet ray that requires to be used to solidify shines the middle layer by mould, so mould must constitute by ultraviolet ray being transparent material to ultraviolet ray.
In common whirl coating, resin is supplied on the substrate surface that is fixed on the universal stage, make the substrate rotation, rely on centrifugal force to make the resin expansion.The center pit that uses when in order to form the driving CD being installed on substrate so resin can not be supplied to rotation center (substrate center place), is supplied with to carry out ring-type equidistantly from rotation center.Yet resin is supplied with the position more away from rotation center, and the resin layer thickness of dish outer peripheral portion is thicker than circumferential portion in the dish.That is, the middle layer exists the uneven thickness phenomenon on radial direction.Stacked number along with information recording layer in the multi-layer information medium increases, and the number in middle layer also increases, and the uneven thickness in middle layer forms accumulation.Its result, at the peripheral part of dish, even the recording/reproducing light beam vertically to substrate incident, can not form vertically with substrate by the recording/reproducing light beam of information recording layer surface reflection, its result is to picking up the light quantity minimizing that light device (pick-up) returns.Therefore, the interior circumferential portion at dish forms different regeneration output with outer peripheral portion.
Open a kind of scheme of proposition in the flat 9-161329 communique above-mentioned spy, that is, the operation of setting is to accompany under the state of liquid resin between substrate and the mould, and substrate and mould are rotated together, and liquid resin is expanded between substrate and mould.In common whirl coating, be after supplying to resin on the discoid substrate surface, make the resin expansion by rotary plate.At this moment, near the substrate outer peripheral edges,, finally cause near the resin bed thickening of substrate outer peripheral edges because surface tension causes that resin swells.Opposite with it, in the method for this communique record, because resin is to expand being under the clamp position between substrate and the mould, so can suppress near the resin bed thickening substrate periphery.In same communique,, do not notice for the liftability of mould for the not record of constituent material of mould yet.In same communique, all put down in writing by the substrate irradiation ultraviolet radiation.
In above-mentioned spy opens embodiment 1 in the flat 9-63122 communique, on the 1st regeneration specific information face that forms by the position phase groove that keeps data, the translucent middle layer that formation is made up of the potpourri of silicon and silicon nitride is provided with ultraviolet curable resin layer more thereon.The surface of this ultraviolet curable resin layer, the position phase groove that duplicates formation that utilizes mould of serving as reasons is formed the 2nd regeneration specific information face.In this embodiment, used the transparent mould that forms by plastics, injected ultraviolet ray by mould.In same communique, for the thickness that is present in the resin bed between the neighbor information face is not evenly aroused attention, do not cause concern about the liftability of mould yet.
Open among the embodiment of flat 10-302315 communique above-mentioned spy, light-cured resin is dropped on the transparent mould, thereon behind the mounting substrate, rotate transparent mould with the rotational speed of 2000rpm, make the light-cured resin expansion, then, by transparent mould irradiation ultraviolet radiation, make resin solidification.Above-mentioned transparent mould is by at the thick transparent plastic plectane of 5mm with form between Ni molding of convex-concave pattern, fill light-cured resin, after solidifying with the UV-lamp irradiation, peels off Ni molding and forms.In this embodiment, the transparent mould sub-surface is made of light-cured resin, and the resin of extension object is a light-cured resin, so the liftability of mould is very poor.In this communique, the light-cured resin of the light-cured resin of transparent mould sub-surface and extension object all is a ultraviolet curing resin.Ultraviolet curing resin still exists the residual polymerization initiating agent to absorb ultraviolet ray after the curing.Therefore, the transparent mould that uses in this communique is very low to the ultraviolet transparency, and is very undesirable.
Yet, in the optical data media that has only 1 layer of information recording layer, when utilizing injection mo(u)lding to make resin substrate, generally be to form groove simultaneously or give convex-concave patterns such as putting pit.But, for example, require in the high-precision tabula rasa substrate at reference disk etc., on the high rigidity that forms by glass etc., high-precision level and smooth substrate surface, form transparent resin layer with above-mentioned convex-concave pattern, on this transparent resin layer, also can form information recording layer.On this transparent resin layer, the same with the middle layer in the multi-layer optical information medium, form above-mentioned convex-concave pattern by extruding with mould.
Brief summary of the invention
The objective of the invention is to make several information recording layers stacked by the transparent intermediate layer that forms by resin in manufacturing, when on the surface of transparent intermediate layer, having the multi-layer optical information medium of convex-concave pattern of maintenance information, make above-mentioned transparent intermediate layer form homogeneous thickness, the parent figure of convex-concave pattern that mould has, above-mentioned is copied on the transparent intermediate layer exactly.
For CD,, need to improve line recording density and track density for satisfying the requirement of densification and high capacity.For this reason, need to reduce pre-pit, make ditch apart from narrower.Thus, rush to the trickle pre-pit of accurately formation and the parent figure of groove at mould.
The objective of the invention is to form signal recording layer containing on the middle layer radiation gel-type resin, that have ditch and convex-concave patterns such as pre-groove and pre-pit on the surface, when making such optical data media, form the middle layer of uniform thickness, the parent figure of the above-mentioned convex-concave pattern that mould has is copied on the middle layer exactly.
These purposes can reach according to the present invention of following (1)～(20).
(1) a kind of manufacture method of optical data media is that several information recording layers that will have an interblock by transparent intermediate layer respectively are located on the substrate, makes the method for optical data media,
Be provided with following operation, promptly forming at least on 1 layer the above-mentioned information recording layer formation face of substrate of information recording layer, after formation contains the resin bed of active energy beam curing resin, making above-mentioned active energy beam is that the mould with convex-concave pattern that can pass through and surperficial contacts with resin layer surface, then shine above-mentioned active energy beam to resin bed by mould, then peel off mould, form the transparent intermediate layer that duplicates above-mentioned convex-concave pattern
As above-mentioned mould, form the surface of above-mentioned convex-concave pattern at least, with polyolefin-based resins or fluorine resin constitute,
Form transparent intermediate layer, the difference that makes the maximum ga(u)ge of the transparent intermediate layer on interblock and minimum thickness is less than 10 μ m.
(2) the optical data media manufacture method of above-mentioned (1),
Aforesaid substrate is the plate-like with center pit,
Aforesaid substrate is positioned on the universal stage, uses to have plectane portion and, form the state that stops up center pit at the central locking device that forms the back shaft of one of this plectane portion,
Be provided with following operation, the coating liquid that is about to contain the active energy beam curing resin supplies to after the outer peripheral face of above-mentioned back shaft, by aforesaid substrate is rotated with above-mentioned locking device, above-mentioned coating liquid is extended on above-mentioned information recording layer, form above-mentioned resin bed.
(3) manufacture method of the optical data media of above-mentioned (1) or (2) is provided with before making mould and above-mentioned resin bed contacts, by shining the operation that above-mentioned active energy beam not exclusively solidifies above-mentioned resin bed.
(4) the optical data media manufacture method of above-mentioned (3), pass through rotary plate, after making the coating liquid extension that contains above-mentioned active energy beam curing resin and forming above-mentioned resin bed, shine above-mentioned active energy beam, above-mentioned resin bed is not exclusively solidified while reduce the rotational speed of substrate.
(5) the optical data media manufacture method of above-mentioned (4), the coating liquid that the part of pruning at least when above-mentioned resin bed forms is overflowed from the substrate outer peripheral edges shines above-mentioned active energy beam subsequently, and above-mentioned resin bed is not exclusively solidified.
(6) any optical data media manufacture method in above-mentioned (1)～(5) makes above-mentioned mould contact with above-mentioned resin layer surface in reduced pressure atmosphere.
(7) any optical data media manufacture method in above-mentioned (1)～(6), forming average thickness on above-mentioned interblock is the above-mentioned transparent intermediate layer of 5～50 μ m.
(8) a kind of manufacture method of optical data media, be on substrate, the optical data media manufacture method that has several information recording layers of interblock respectively by the transparent intermediate layer setting, be provided with following operation, promptly after supply contains the coating liquid of active energy beam curing resin on the above-mentioned information record formation face of the substrate that forms 1 layer of information recording layer at least, above-mentioned active energy beam can pass through, and the mould that makes the surface have convex-concave pattern contacts with above-mentioned coating liquid, mould is rotated with substrate, the above-mentioned coating liquid that extends forms resin bed, then, shine active energy beam to resin bed, form the transparent intermediate layer that has duplicated convex-concave pattern by mould;
As above-mentioned mould, the surface that forms above-mentioned convex-concave pattern is used at least by polyolefin-based resins or fluororesin and is constituted.
(9) the optical data media manufacture method of above-mentioned (8), the thickness of above-mentioned mould is 0.3～1.8mm.
(10) the optical data media manufacture method of above-mentioned (8) or (9) makes above-mentioned mould contact with above-mentioned coating liquid in reduced pressure atmosphere.
(11) any optical data media manufacture method in above-mentioned (1)～(10) is given up after above-mentioned mould uses up.
(12) a kind of manufacture method of optical data media, be on substrate, to have 1 layer of information recording layer at least, between information recording layer and substrate, and/or between the adjacent 2 layers information recording layer, has the optical data media manufacture method in the middle layer of containing radiation-curing type resin.Be provided with following operation,
That is, have on the surface between the mould and substrate of convex-concave pattern, form the state that clamping contains the resin bed of radiation-curing type resin, then,, then peel off mould, form the middle layer of duplicating above-mentioned convex-concave pattern to above-mentioned resin bed irradiation radioactive ray,
As above-mentioned mould, the surface that forms above-mentioned convex-concave pattern is to use the mould that is made of cyclic polyolefin or polystyrene resin.
(13) the optical data media manufacture method of above-mentioned (12), as above-mentioned mould, the surface that forms above-mentioned convex-concave pattern is to use the mould that is made of the noncrystalline cyclic polyolefin at least.
(14) the optical data media manufacture method of above-mentioned (12) or (13), the disposition interval of above-mentioned convex-concave pattern are below the 0.7 μ m.
(15) a kind of manufacturing installation of optical data media, be manufactured on the substrate respectively by the transparent intermediate layer setting have interblock several information recording layers optical data media manufacturing installation, have following each one,
Resin formation portion forms the resin bed that contains the active energy beam curing resin on the above-mentioned information recording layer formation face of the substrate that forms 1 layer of information recording layer at least;
The mould contact site, it is permeable and form the mould that the surface of above-mentioned convex-concave pattern is made of polyolefin-based resins or fluororesin at least to make the surface have active energy beam convex-concave pattern, above-mentioned, contacts with resin layer surface;
Above-mentioned active energy beam is shone by mould to resin bed in irradiation portion;
Stripping portion peels off mould;
In the difference of maximum ga(u)ge that forms transparent intermediate layer on the interblock and minimum thickness below 10 μ m.
(16) a kind of manufacturing installation of optical data media is to have on the discoid substrate of center pit, has the manufacturing installation of manufacturing optical data media of several information recording layers of interblock respectively by the transparent intermediate layer setting.
Have resin bed formation portion, form at least on the above-mentioned information recording layer formation face of substrate of 1 layer of information recording layer and form the resin bed that contains the active energy beam curing resin,
Above-mentioned resin bed forms part and has locking device, coating liquid supply unit and rotating part,
Above-mentioned locking device has plectane portion and forms the back shaft of one with central authorities of this plectane portion, above-mentioned medium pore can be formed obturation;
Above-mentioned coating liquid supply unit is that the coating liquid that will contain the active energy beam curing resin is fed on the outer peripheral face of above-mentioned back shaft;
Above-mentioned rotating part makes aforesaid substrate be rotated with above-mentioned locking device portion.
And then have mould contact site, irradiation portion and a stripping portion,
Above-mentioned mould contact site, with the surface have convex-concave pattern, above-mentioned active energy beam permeable, form the mould that the above-mentioned surface of convex-concave pattern is made of polyolefin-based resins or fluororesin at least, contact with resin layer surface,
Above-mentioned active energy beam is shone by mould to resin bed in above-mentioned irradiation portion,
Above-mentioned stripping portion peels off mould.
(17) the optical data media manufacturing installation of above-mentioned (15) or (16) record, pass through rotary plate, the coating liquid that contains above-mentioned active energy beam curing resin is extended, form above-mentioned resin bed, reduce the rotational speed of substrate when above-mentioned coating liquid extends, formation can be shone the structure of above-mentioned active energy beam.
(18) the optical data media manufacturing installation of above-mentioned (17) also has the device of eliminating, and when above-mentioned coating liquid extends, eliminates the coating liquid that a part is overflowed from the aforesaid substrate periphery at least.
(19) any optical data media manufacturing installation in above-mentioned (15)～(18), its formation is that above-mentioned mould is contacted with above-mentioned resin layer surface.
(20) a kind of manufacturing installation of optical data media, be on substrate, make and have 1 layer of information recording layer at least, between information recording layer and substrate, and/or between the adjacent 2 layers information recording layer, have the manufacturing installation of this optical data media in the middle layer that contains radiation-curing type tree, have with the lower part;
Mould, the surface is made of cyclic polyolefin or polystyrene resin, and above-mentioned surface has the following convex-concave pattern of disposition interval 0.7 μ m,
Maintaining part can keep containing the resin bed of radiation-curing type resin with clamp position between above-mentioned mould and aforesaid substrate;
Radiation exposure portion;
The mould stripping portion.
First aspect of the present invention, the transparent intermediate layer that has a convex-concave pattern by clamping surface on substrate forms several information recording layers, obtains the multilayer medium.Above-mentioned convex-concave pattern is pre-pit and groove as previously mentioned, on the convex-concave pattern formation face of transparent intermediate layer, forms reflection horizon (comprising semitransparent layer) and recording layer etc., the configuration information recording layer.
Above-mentioned transparent intermediate layer is to contain the resin bed of active energy beam curing resin, pushes with the mould with above-mentioned convex-concave pattern parent figure to form.
The mould that the present invention uses first aspect, integral body is to be made of polyolefin-based resins or fluororesin, the surface that perhaps forms above-mentioned parent figure is to be made of polyolefin-based resins or fluororesin at least.Thus, to the transparent intermediate layer of being made up of the solidfied material of active energy beam curing resin, liftability is fine.
The mould that the present invention uses first aspect is that above-mentioned active energy beam is permeable.Thus, can shine active energy beam by mould.Thereby, be present in the information recording layer between substrate and the transparent intermediate layer, be under the opaque situation to active energy beam, by mould irradiation active energy beam, resin bed is solidified.If by mould irradiation active energy beam, resin bed solidify from the mould contact area.Thus, mould can obtain better liftability.
Yet polyolefin-based resins and fluororesin are because absorption of UV is very high, and its transmitance is very low, and is needless to say more with respect to ultraviolet curing resin, and other resins such as polycarbonate are higher for ultraviolet transmitance.Therefore, among the present invention,, can obtain the transparent intermediate layer that fully solidifies by the ultraviolet ray of mould to resin bed irradiation sufficient intensity.
Utilize the mass-produced resin molding of injection mo(u)lding because price is very cheap, so with after can give up.On the other hand, the mould that utilizes additive method and other materials to make because price is very high, so must use repeatedly, when using, must be washed off attached to lip-deep resin at every turn.Opposite with it, with after the mould given up, with after also just needn't wash, so significantly improved the production efficiency of medium, and can significantly reduce the production cost of medium.
First aspect of the present invention comprises the 1st kind of form and the 2nd kind of form of following explanation;
In the 1st kind of form, after by active energy beam curing resin groups resin layer, mould is contacted with this resin layer surface, then, make its curing to resin bed irradiation active energy beam, form transparent intermediate layer by mould.
In the 1st kind of form, before pushing above-mentioned resin bed, resin bed is not exclusively solidified, then, under state, resin bed is almost completely solidified, form transparent intermediate layer by the mould extruding with mould.When forming transparent intermediate layer, be provided with incomplete curing process, by carrying out 2 stage solidification, can realize following effect.
The 1st effect that incomplete curing process produces is set, and is the mechanical property that has improved medium.Not exclusively but the resin bed that solidifies is in the curing process full solidification.That is, be divided into 2 curing.This situation is compared with 1 full solidification, and the amount of contraction of resin bed diminishes.Thus, medium can obtain the favorable mechanical characteristic.
Below explanation is provided with the 2nd effect that incomplete curing process produces.When incomplete curing process was not set, resin bed formed between operation and the mould extrusion process at resin bed owing to have flowability, and it is even that resin bed often is level, can produce thickness distribution in its face on the resin bed.When mould contacted with resin bed, the face of whole mould was difficult to contact with resin bed simultaneously.Thus, mould at first contacts with a part of resin bed.At this moment, when resin bed has flowability, because resin can flow to the part of the initial contact of mould, so on resin bed, often can produce thickness distribution in its face.Therefore, when incomplete curing process is not set, be difficult to the stable transparent intermediate layer that forms with even specific thickness.These problems can be removed by incomplete curing process is set.
Below explanation is provided with the 3rd effect that incomplete curing process produces.The mould extrusion process carries out for preventing to sneak into bubble between resin bed and the pressing mold, being preferably in the reduced pressure atmosphere.Yet when not establishing incomplete curing process, contained volatile ingredient is easy to volatilization in the resin bed in reduced pressure atmosphere.For this reason, between resin bed and pressing mold, be easy to sneak into the bubble that above-mentioned volatile ingredient constitutes.If be provided with incomplete curing process, this problem can be eliminated, owing to can form higher decompression degree, almost completely can prevent to be sneaked into by the bubble that the gas beyond the volatile ingredient causes.
Incomplete curing process is set, when utilizing spin coated to form resin bed, on one side rotary plate, Yi Bian after extension in its surface applies liquid and forms resin bed, preferably reduce the rotational speed of substrate on one side.Shine active energy beam on one side, above-mentioned resin bed is not exclusively solidified.During spin coated, the resin bed periphery of extension is easy to protuberance, but the rotational speed by slowly reducing substrate and shine active energy beam can suppress above-mentioned protuberance.When not exclusively solidifying, owing to the centrifugal force that resin bed is worked reduces smoothly, so be difficult to produce thickness and rerum natura inequality on the resin bed.
Shine active energy beam on one side in the rotational speed that on one side slowly reduces substrate and carry out incomplete resin layer when solidifying, before the active energy beam irradiation, preferably eliminate the coating liquid that a part is overflowed by substrate peripheral at least.Like this, the coating liquid measure of being overflowed by substrate peripheral can form homogenising spreading all on the whole circumference direction.Thus, after the resin bed full solidification forms transparent intermediate layer, needn't eliminate again.When not eliminating, the coating liquid by substrate peripheral overflows after rotation stops, returning substrate one side because of surface tension, and the result forms annular convex near the resin bed periphery, and side forms annular recessed portion within it.When overlapping mould solidifies resin bed on the resin bed of this state, can on transparent intermediate layer, form in the space that above-mentioned annular recessed portion causes.
In the 1st kind of form, when forming resin bed, preferably adopt the locking device of following explanation.This locking device has plectane part and forms the back shaft of one with these plectane part central authorities.In the 1st kind of form, the discoid substrate that will have center pit is positioned on the universal stage, by locking device the substrate center hole is formed blocked state, after the coating liquid that will contain the active energy beam curing resin supplies to the back shaft surface of locking device, by substrate and locking device are rotated together, coating liquid is extended form resin bed.
In common whirl coating, resin is supplied on the substrate surface that is fixed on the universal stage, rotary plate utilizes centrifugal force that resin is extended.Owing to form the center pit that to use when the driving CD is installed,, form by rotation center and supply with on the substrate to carry out ring-type equidistantly so resin can not be supplied to rotation center (substrate center).Yet resin is supplied with the position more away from rotation center, and what perimembranous formed in the dish peripheral part ratio dish is thick more.That is, transparent intermediate layer becomes big along the uneven thickness on the radial direction.In the multi-layer information medium, along with the stacked number of information recording layer increases, the transparent intermediate layer number also increases, so the uneven thickness of transparent intermediate layer forms accumulation.The result is, at the outer peripheral portion of dish, even vertical substrate incident recording/reproducing light beam can not formed vertically with substrate yet by the recording/reproducing light beam of information recording layer surface reflection, the result reduces to picking up the light quantity that light device (pick-up) returns.Thus, in the regeneration output different of the interior circumferential portion of dish with formation on the outer peripheral portion.
Opposite with it, utilize above-mentioned locking device, if resin is supplied near its central authorities, promptly near the rotation center, the thickness increase of the outer peripheral portion of transparent intermediate layer is alleviated.
Known have, though be not the multilayer medium, but the center pit of disc board is to stop up, resin is fed near the central authorities of this locking device, be near the rotation center by locking devices such as tabular component, plectane portion, inaccessible plate, lids, is rotated coating (spy open flat 10-320850 communique, with the 10-249264 communique, with the 10-289489 communique, with the 11-195250 communique, with the 11-195251 communique).
Yet there is the following problem that illustrates in the locking device of putting down in writing in above-mentioned each communique.
Open above-mentioned spy that flat 10-320850 communique, spy are opened flat 10-249264 communique, the spy opens in the flat 11-195250 communique, take out the tabular component of locking device and even the method for lid after not being documented in spin coated, so be difficult to by industrial utilization.
Above-mentioned spy opens in the flat 10-289489 communique, put down in writing spin coated after, after the plectane portion of locking device taken out by punching or with electromagnet absorption, on one side more on one side the rotating disc substrate resin bed is solidified.Yet, when taking out locking device,, be easy to produce disorderly on the resin coating film because locking device has been added very big acceleration by punching with electromagnet.
Above-mentioned spy opens and has put down in writing a kind of locking device that makes central authorities' formation integral structure of supporter and toroidal lid in the flat 11-195251 communique.Also put down in writing in this communique by this supporter is set, made the dismounting of locking device and the item that the position coincide and is easy to form.This supporter is the hollow tube-shape thing that has 1 hole at least, or several clavas.Resin is injected the inside of hollow or with after in several clava area surrounded, disc board and locking device rotate together, form resin bed on disc board.If use this locking device, locking device is easy to take out.Also put down in writing in the same communique make locking device be separated from disc board after, disc board is remained static down, resin bed is solidified.
Put down in writing in the same communique resin on the hollow that is located at locking device the hole or adjacent clava between flow out, be rotated coating.Yet, block resin flows by the wall (hole is with exterior domain) or the clava of supporter.The resin that is plugged can flow on the disc board in a unpredictable timing quickly.Thus, be easy to produce the inequality of filming.This locking device, very complicated with the shape of resin surface of contact, and, very big with the resin contact area, so be difficult to the locking device wash clean.When on the locking device surface during cull, filming, it is uneven to be easy to produce.In the table 1 of this communique, when being 4～16mm, research has been done in the change of coating thickness, but from its result as can be known, the coating thickness inequality depends on the external diameter of hollow about the hollow external diameter, external diameter is big more, and uneven thickness is also big more.That is, even resin is fed to hollow inside, think that coating starting position and rotation center are inconsistent, the circumferential position of hollow has formed the position of coating beginning.Consider resin viscosity when higher,,, be difficult to significantly reduce the inequality of resin coating film thickness so use the method for this communique record owing to be difficult to make the hollow external diameter less than 4mm.
For the locking device before this, as shown in Figure 2, the locking device 300 that uses in first aspect of the present invention, by on plectane part 301, being provided with back shaft 302, so the locking device 300 in the medium manufacturing process is easy to install, particularly after the spin coated, locking device 300 is easy to take out.
Above-mentioned spy opens in the flat 11-195251 communique and puts down in writing, and blocks resin by the wall or the clava of supporter, and filming as previously mentioned, it is uneven to be easy to produce.Opposite with it, use locking device shown in Figure 2, be fed on the periphery of back shaft and carry out spin coated owing to will apply liquid, be difficult to produce inequality so film.Use locking device shown in Figure 2, what adhere to resin is the outer peripheral face of back shaft, opens comparing of putting down in writing in the flat 11-195251 communique with above-mentioned spy, and locking device is easy to wash clean.Open in the flat 11-195251 communique above-mentioned spy, owing to will apply the supporter inside that liquid is fed to hollow tube-shape, in order to ensure the higher coating liquid flowability of viscosity, what the external diameter of supporter can not be formed is very little, thus, the coating starting position is far away from rotation center.Opposite with it, use locking device shown in Figure 2, compare with same communique, owing to can significantly reduce the external diameter of back shaft, so can significantly reduce the inequality of coating thickness.
Below the 2nd kind of form of first aspect of the present invention described.In the 2nd kind of form, after the coating liquid that will contain the active energy beam curing resin is fed on the substrate, mould is contacted with this coating liquid, then, mould is rotated with substrate, form resin bed behind the coating liquid that extends, then shine active energy beam to resin bed, form transparent intermediate layer by mould.In the 2nd kind of form,, coating liquid extends down, so can form thickness resin bed relatively uniformly because being the state that is clamped between substrate and the stamping die.
The same with the 2nd kind of form of first aspect of the present invention, open flat 9-161329 communique and above-mentioned spy above-mentioned spy and open and disclose the method that extends under a kind of state that resin clip is held between substrate and the mould in the flat 10-302315 communique.Yet, as previously mentioned, open in the flat 9-161329 communique above-mentioned spy, the constituent material of mould is not disclosed, more do not pay close attention to the liftability of mould.In same communique, by the substrate irradiation ultraviolet radiation, for constitute not record of mould by transparent material.On the other hand, open above-mentioned spy that the transparent mould sub-surface is to be made of light-cured resin among the embodiment of flat 10-302315 communique, and the resin of extension object also is a light-cured resin, so the liftability of mould is very poor, the ultraviolet ray transmissivity of mould is very low.Therefore, use above-mentioned spy to open in flat 9-161329 communique and the flat 10-302315 communique of Te Kai the method for record respectively, can not obtain with first aspect present invention in the effect of the 2nd kind of homomorphosis.
Put down in writing a kind of method in the Te Kaiping 1-285040 communique, promptly, radiation-curing type resin is shootd out on the surface of mould, thereon behind the crimping glazing base-board for plate, the irradiation radioactive ray, then mould and CD are peeled off with substrate, in the graph copying of the mold surface method to the optical disc surface.The invention of same communique record, it is the same with first aspect of the present invention to constitute this point with regard to mould by olefin resin.Yet, do not put down in writing the multilayer medium in the same communique.Be not conceived to the homogeneity of the radiation-curing type resin layer thickness of copy pattern in the same communique yet.
In aspect second of the present invention, be formed between substrate and the information recording layer and/or the surface that is provided with between the adjacent 2 layers information recording layer has the middle layer of convex-concave pattern.Above-mentioned convex-concave pattern is pre-pit and groove, forms reflection horizon (comprising semitransparent layer) and recording layer etc. on the formation face of the convex-concave pattern in middle layer, becomes information recording layer.
Above-mentioned middle layer is by pushing formation with the mould with above-mentioned convex-concave pattern parent figure to containing radiation-curing type resin.
The mould that uses in second aspect of the present invention, integral body is made of cyclic polyolefin or polystyrene resin, perhaps is that the surface that forms above-mentioned parent figure is made of cyclic polyolefin or polystyrene resin at least.Thus, for the middle layer that the solidfied material by radiation-curing type resin forms, liftability is good, and cyclic polyolefin is better.
The mould that uses in second aspect of the present invention can see through radioactive ray.Thus, can shine radioactive ray by mould.Thus, by mould irradiation radioactive ray resin bed is solidified.Therefore substrate is opaque, when having opaque information recording layer between substrate and middle layer, does not hinder resin bed to solidify.During by mould irradiation radioactive ray, the curing of resin bed is the zone from joining with mould.Thus, the liftability of mould is better.
And, because the absorption of UV of cyclic polyolefin is very high, so for the very low ultraviolet curing resin of its transmitance, much less,, also very high to ultraviolet transmitance for other resins such as polycarbonate.Therefore, second aspect of the present invention is by the ultraviolet ray of mould to resin bed irradiation sufficient intensity, the middle layer that can fully be solidified.
Utilize the mass-produced resin mould of injection mo(u)lding, because price is very low, so give up after available.On the other hand, the mould price made from additive method and other materials is very high, though can use repeatedly, when using, must clean attached to lip-deep resin at every turn.Opposite with it, with after the mould given up, with after needn't clean, so improved the production efficiency of medium significantly, and significantly reduced the production cost of medium.
Yet, put down in writing in the Te Kaiping 1-285040 communique radiation-curing type resin shootd out on the mold surface, thereon the crimping CD with substrate after, the irradiation radioactive ray, then mould and CD are peeled off the method for the graph copying that makes mold surface to the optical disc surface with substrate.The invention of putting down in writing in the same communique constitutes this point with regard to mould by olefin resin and says, and is the same with second aspect of the present invention.Yet not record does not hint as olefin resin yet and uses cyclic polyolefin in same communique.In the embodiment of same communique, used the polymethylpentene of crystallinity wire olefin resin to make mould.In same communique, be not conceived to the homogeneity of the radiation-curing type resin layer thickness of copy pattern.Do not put down in writing the multilayer medium in the same communique yet.
As previously mentioned, in order to satisfy the requirement of optical data media densification and high capacity, must on mould, accurately form trickle parent figure.When utilizing injection mo(u)lding to form mould, during cooling, because resin shrinkage is easy to produce the liftability inequality.That is, as accurately duplicating convex-concave pattern by metal mold to resin, during cooling, because resin shrinkage, figure produces skew.This map migration, even side-play amount is identical, the disposition interval of figure is more little, influences big more.
Open the polymethylpentene that uses among the embodiment of flat 1-285040 communique above-mentioned spy, owing to be crystalline wire olefin resin, so when cooling off after the injection mo(u)lding, shrink very big on the different directions.Thus, can produce very big map migration.The groove pitch that the embodiment of same communique forms is that 1.6 μ m are wide, and when making narrow track pitch medium, when using polymethylpentene, map migration has exceeded permissible range recently.Because polymethylpentene is very fragile, when forming tabular body very thin as mould, there is easily cracked problem.And then know that according to present inventors' research when using polymethylpentene, it is big that the distortion of mould (warpage or distortion) is easy to become.
Tygon and polypropylene also have crystallinity in the olefin resin, thus the same with polymethylpentene, there are map migration and easily cracked problem.Tygon and polypropylene are because the kind of the lower molecular level of suitable trickle figure with injection-molded moulding formation, so during injection mo(u)lding, need significantly improve the melt temperature of resin, the result, temperature when taking out mould from metal pattern is also very high, so mould is easy to distortion (warpage or distortion).
Opposite with it, as to use in second aspect of the present invention cyclic polyolefin forms noncrystalline usually, and polystyrene resin is owing to be noncrystalline, so above-mentioned map migration is very little, the mould distortion is very little.Noncrystalline cyclic polyolefin particularly, the map migration of mould and distortion significantly diminish, so again owing to be difficult to cracked ideal.
During injection mo(u)lding,, preferably improve the resin melt temperature in order to duplicate trickle figure exactly.Cyclic polyolefin is owing to having ring texture, so thermotolerance is very high.Thus, the resin melt temperature in the time of can improving injection mo(u)lding is so can duplicate trickle figure exactly.And during injection mo(u)lding, even the resin melt temperature is set in high temperature, the mould distortion is also very little.
And then present inventors find, the resin melt temperature by with the cyclic polyolefin injection mo(u)lding time is set in the high temperature higher than previously used temperature, can make map migration minimum, and the deflection of mould is suppressed in the scope of no any problem.
Description of drawings
Fig. 1 is the fragmentary cross-sectional view of expression according to the optical data media configuration example of the 1st kind of example manufacturing according to the present invention.
Fig. 2 is the sectional view of the working procedure of coating part in the 1st kind of form of the 1st kind of example of explanation.
Fig. 3 is the sectional view of the working procedure of coating part in the 1st kind of form of the 1st kind of example of explanation.
Fig. 4 is the sectional view of the working procedure of coating part in the 1st kind of form of the 1st kind of example of explanation.
Fig. 5 is the sectional view of the working procedure of coating part in the 1st kind of form of the 1st kind of example of explanation.
Fig. 6 is the sectional view of the working procedure of coating part in the 1st kind of form of the 1st kind of example of explanation.
Fig. 7 is the sectional view of the working procedure of coating part in the 1st kind of form of the 1st kind of example of explanation.
Fig. 8 is the sectional view of the working procedure of coating part in the 1st kind of form of the 1st kind of example of explanation.
Fig. 9 is the sectional view of explanation curing process.
Figure 10 is the sectional view of explanation stripping process.
Figure 11 is the sectional view of the stacked operation of explanation.
Figure 12 (A)～(D) is the sectional drawing of used locking device configuration example in the 1st kind of form of the 1st kind of example of expression.
Figure 13 is the part sectional drawing of working procedure of coating in the 2nd kind of form of the 1st kind of example of explanation.
Figure 14 is the part sectional drawing of working procedure of coating in the 2nd kind of form of the 1st kind of example of explanation.
Figure 15 is the part sectional drawing of working procedure of coating in the 2nd kind of form of the 1st kind of example of explanation.
Figure 16 is illustrated in the drawing that forms trickle figure on the substrate to substitute photo, is the scanning electron microscope photo that is illustrated in the groove figure that forms on the transparent intermediate layer surface.
Figure 17 is the curve map of the transparent intermediate layer thickness relationship of the radial direction position of indicating panel and this position.
Figure 18 is the part sectional drawing that expression utilizes the optical data media configuration example of the 2nd kind of example manufacturing of the present invention.
Figure 19 is the part sectional drawing that expression utilizes the optical data media configuration example of the 2nd kind of example manufacturing of the present invention.
Figure 20 is the part sectional drawing that expression utilizes the optical data media configuration example of the 2nd kind of example manufacturing of the present invention.
The working of an invention form
Below describe example of the present invention in detail.
The 1st kind of example
Optical data media
The optical data media that this example is suitable for, information recording layer have at least 2 folded layer by layer structures.Information recording layer in this instructions contains regeneration special layer or recording layer at least.So-called regeneration special layer be exist the information of holding the record convex-concave patterns such as pre-pit, the layer of antireflection part regeneration light beam at least, so-called recording layer is to contain layers recording materials, that can rewrite and write afterwards record identification such as phase-transition material and organic pigment.On recording layer, be maintenance and tracking servo pre-formatted information etc., and convex-concave patterns such as groove and pre-pit are set.
So-called multilayer medium in this instructions have several information recording layers, and, exist to utilize see through the recording/reproducing light beam of other information recording layers, write down or the medium of the information recording layer of regenerating.Between adjacent information recording layer, there is the transparent intermediate layer that can see through the recording/reproducing light beam.
Fig. 1 represents the multilayer medium configuration example according to the manufacturing of this example.Medium shown in Figure 1 are that the 1st information recording layer IL-1 is set on the substrate SB of plate-like, pass through stacked the 2nd information recording layer IL-2 of transparent intermediate layer TL on this information recording layer IL-1.On the 1st information recording layer IL-1 and the 2nd information recording layer IL-2, form the convex-concave pattern that constitutes by groove and pre-pit respectively.On the 2nd information recording layer IL-2, form protective seam PL.Below the each several part of these medium constituted describe.
Substrate SB, protective seam PL
In medium shown in Figure 1, the recording/reproducing light beam is not from substrate SB side, but injects from protective seam PL side.Therefore, substrate SB needs not to be transparent for the recording/reproducing light beam.The thickness of substrate SB is generally 0.2～1.8mm, is preferably 0.4～1.2mm.The substrate of substrate SB and common optical data media is the same, can be made of resin.At this moment, the convex-concave pattern on the needed substrate SB of the 1st information recording layer IL-1 surface can utilize injection mo(u)lding to form.But the surface of rigid substrates such as glass plate and resin plate, sheet metal can utilize the 2P method to form convex-concave pattern, also can form substrate SB.
Protective seam PL has the light transmission through the recording/reproducing light beam.For protective seam PL, also can use resin plate or glass plate with substrate SB condition of equivalent thickness.But, recording/reproducing light beam irradiates optics system as high NAization, for corresponding with high record density, is preferably made protective seam PL slimming.At this moment the thickness of protective seam PL is preferably chosen in 30～300 mu m ranges.Protective seam PL crosses when approaching, and can produce very big optical effect attached to the lip-deep dust of protective seam PL.On the other hand, when protective seam is blocked up, be difficult to form high NAization.
When making protective seam PL slimming, for example, the sheet that translucent resin is formed can be utilized various bonding agents or bonding agent fit together and form protective seam PL, also can apply translucent resin and form protective seam PL.
In the medium of structure shown in Figure 1, also can be to inject the recording/reproducing light beam by substrate SB to information recording layer IL-1, IL-2 to constitute.
Information recording layer
On information recording layer IL-1, IL-2, form convex-concave patterns such as pre-pit and groove.This convex-concave pattern duplicates formation by the convex-concave pattern that will form on the transparent intermediate layer TL surface.But, see the information recording layer IL-1 that the bosom exists from recording/reproducing light beam light incident side, by being located at the formation of duplicating of convex-concave pattern on the substrate SB.Information recording layer contains regeneration special layer or recording layer at least.
The regeneration special layer is owing to needing antireflection part regeneration light beam (information recording layer IL-2) or reflection most of (information recording layer IL-1), so form by metal (comprising alloy) film or the film formed reflection horizon of dielectric multilayer.Information recording layer in the regeneration specialized media only is made of the reflection horizon usually.
Recording layer can be any one in following, but use the phase-change type recording materials rewriting type or Worm type, use that the magneto-optical recorder material can the rewriting type, with organic pigment as the recording materials Worm type, also can use other recording materials.But, to compare with other recording materials, light transmission rate is very high, for this reason, owing to the stacked number of recording layer can be increased, preferably uses the phase-change type recording materials.In recording medium, though can be only by recording layer configuration information recording layer, as required, other layer such as reflection horizon and dielectric layer can be set also.
For example, the information recording layer in the phase-change type recording medium, common structure are in the both sides of recording layer dielectric layer to be set.Inject side from the recording/reproducing light beam and see and be present in innermost information recording layer IL-1 that common structure is to form stacked from downside successively by reflection horizon, dielectric layer, phase-change type recording layer, dielectric layer among Fig. 1.For information recording layer IL-2, because need to see through the recording/reproducing light beam, do not establish the reflection horizon usually, but as required, the reflection horizon that the recording/reproducing light beam is translucent can be set, also can form the structure the same with IL-1.
The composition of used phase-change type recording materials does not have particular determination among the present invention, at least preferably contains Sb and Te.The recording layer that forms by Sb and Te only, crystallized temperature can hang down to about 130 ℃, because of the preservation reliability insufficient, so preferably add other elements.As at this moment interpolation element element M (element M is at least a kind of element selecting from In, Ag, Au, Bi, Se, Al, P, Ge, H, Si, C, V, W, Ta, Zn, Ti, Ce, Tb, Sn, Pb, Pd and Y) preferably.In these, consider from improving the effect of preserving reliability, preferably Ge.
Constitute the recording layer atoms of elements and represent than with formula I SbaTebMc, when a+b+c=1, it is desirable to a=0.2～0.85, b=0.1～0.6, c=0～0.25 even more ideal be c=0.01～0.25.
When Sb content was very few, the crystallization underspeed was enough rapid, rewrote difficulty.On the other hand, when Sb content was too much, the crystallization excessive velocities was difficult to form the noncrystalline record identification.When M content was very few, the effect of adding M was insufficient, when M content is too much, is accompanied by phase change, and reflectance varies is very little, is difficult to obtain degree of modified tone fully.When Te content is very few, be difficult to amorphous materialization, and be difficult to form record identification.On the other hand, and Te content is when too much, and crystallization speed is slow, rewrites difficulty.
In the multilayer medium, as mentioned above, because several recording layers are overlapping, the light loss of recording/reproducing light beam increases.Thus, in the scope of not damaging function, make recording layer thin as much as possible as recording layer.But cross when approaching, can damage function as recording layer.For this reason, the ideal thickness of recording layer be 2～50nm, ideal be 4～20nm.
When using the phase-change type recording layer, information recording layer, as previously mentioned, the most handy a pair of dielectric layer forms the structure of clamping recording layer.In this structure, preferably utilize the splash method to form recording layer and each dielectric layer.As the dielectric that uses in the dielectric layer, all cpds of at least a kind of metal ingredient preferably from contain Si, Ge, Zn, Al rare earth element etc., selecting for example.As compound preferably oxide, nitride, sulfide or fluoride, also can use and contain the potpourri more than 2 kinds in these compounds.Each dielectric layer thickness is preferably 10～500nm.
Transparent intermediate layer
Transparent intermediate layer TL is the solidfied material of ultraviolet curing resin isoreactivity energy line gel-type resin, and is by the high material of recording/reproducing light beam transmitance is constituted.
The thickness of transparent intermediate layer does not have particular determination, and the crosstalk between the neighbor information recording layer is set in the allowed band, and that good is 5～50 μ m, better 10～50 μ m.Transparent intermediate layer is crossed when approaching, and crosstalk is excessive.And transparent intermediate layer is when blocked up, and uneven thickness is easy to increase, internal stress also increases easily, and the thickness of whole medium also can increase.Above-mentioned said average thickness is meant the average of maximum ga(u)ge in the interblock and minimum thickness addition.So-called interblock in this instructions, be regeneration special-purpose information recording layer and write afterwards or rewritable information recording layer among, form pre-pit and groove and the zone of the information of can holding the record.That is, be the zone that has the energy recording track.But in the above-mentioned recording track, except the magnetic track (common recording track) of record data, also contain the magnetic track that usefulness is write in examination.
As previously mentioned, when utilizing common whirl coating to form transparent intermediate layer, on the radial direction of transparent intermediate layer, because uneven thickness increases, regeneration output at interior perimembranous and peripheral part is easy to produce difference, is easy to produce from the mould copy pattern time and duplicates inequality.On information recording area, the maximum ga(u)ge of transparent intermediate layer and minimum thickness poor generally is less than 10 μ m, better less than 6 μ m, is preferably in below the 3 μ m.By making transparent intermediate layer form so little thickness distribution, i.e. may command regeneration output changes.In the 1st kind of form, utilize whirl coating to form resin bed after, duplicate convex-concave pattern with mould extrusion resin layer.Yet, in the 1st kind of form, when the uneven thickness of transparent intermediate layer is very big, owing to can not evenly push with mould the transparent intermediate layer (resin bed) before solidifying, so be easy to produce replication defective.For this reason, in the 1st kind of form, the difference that preferably makes the maximum ga(u)ge of transparent intermediate layer and minimum thickness is in above-mentioned scope.
The maximum ga(u)ge of transparent intermediate layer and the difference of minimum thickness are the smaller the better, but when using whirl coating, are difficult to make above-mentioned difference to reach zero.As long as it is above-mentioned difference is enough little, just very little to the influence of regeneration output change.Therefore, above-mentioned difference there is no need little below 1 μ m.
Manufacture method (the 1st kind of form)
Below the 1st kind of form manufacture method of this example is applicable to that the situation of making medium shown in Figure 1 describes.In the 1st kind of form,, preferably use above-mentioned locking device to form transparent intermediate layer in order to reduce the thickness distribution of transparent intermediate layer.In the manufacture method of this example, be provided with working procedure of coating, curing process, stripping process and the stacked operation of following explanation.
Following illustrative example in addition, also can be used the resin that is cured by other active energy beams such as electronics lines to using the situation of ultraviolet curing resin to describe as the active energy beam curing resin.
Working procedure of coating
As shown in Figures 2 and 3, the substrate SB that at first will have a center pit CH is positioned on the universal stage 200.On substrate SB, form the 1st information recording layer IL-1.The center pit CH of substrate SB is inserted the circular protrusion 201 of universal stage 200, fix.These figure are sectional views, have only expressed the end face that presents section, and the diagram of depth direction is omitted.Sectional view after this too.
Then, utilize locking device 300 to stop up center pit CH.This locking device 300 has the plectane portion 301 of stopping up center pit CH, form the back shaft 302 of one with its central authorities and the protuberance 303 of formation one in the plectane portion 301 of a relative side with center pit CH.Form chimericly by the interior circumferential portion that makes protuberance 303 and projection 201, locking device 300 can be fixed on the universal stage 200, also can determine the position of substrate SB and locking device 300 simultaneously.But substrate SB and locking device 300 fixing method on universal stage 200 does not have particular determination, for example, can make locking device 300 and universal stage 200 chimeric again making under the chimeric state of substrate SB and locking device 300 yet.
Below, as shown in Figure 4, shoot out the coating liquid 500 that forms by resin or resin solution by the nozzle 400 of liquid discharging device, coating liquid 500 is fed on the outer peripheral face of back shaft 302.At this moment, make universal stage 200, coating liquid is spreaded all on the plectane part 301 equably preferably with the lower speed rotation of 20～100rpm.
Then, as shown in Figure 5, rotate at a relatively high speed, coating liquid 500 is extended by making universal stage 200.Like this, on substrate SB, form resin bed RL.
The extension condition of coating liquid is unqualified.In whirl coating, except that the viscosity of coating liquid, under the identical situation of other conditions, from theoretical side, the thickness of filming is proportional with the square root that applies fluid viscosity.On the other hand, rotational speed is big more, and rotational time is long more, and it is thin more to film.Therefore want to make resin bed RL form the thickness of regulation, rotational speed during spin coated and rotational time can suitably be determined according to the viscosity of coating liquid.
In working procedure of coating, as previously mentioned, preferably irradiation ultraviolet radiation not exclusively solidifies resin bed RL.By incomplete curing process is set, can realize above-mentioned effect.
When not exclusively solidifying, also can be after forming resin bed RL, after locking device 300 taken off from substrate SB, irradiation ultraviolet radiation again.But in this example, form resin bed RL among Fig. 5 after, as shown in Figure 6, irradiation ultraviolet radiation in the process that reduces substrate SB rotational speed preferably in spin coated.When reducing speed now, to through deceleration time 30% during begin irradiation ultraviolet radiation, and, proceed at least through 80% of deceleration time.When the irradiation beginning was slow, resin bed was easy to be deposited in outer circumferential side.When the irradiation beginning was slow, resin can not solidify in lower rotary area, and the result is under uncured state, because centrifugal force becomes very weak, so be easy to increase the protuberance of outer peripheral portion.When making the timing that stops the ultraviolet ray irradiation too early, resin bed is easy to produce uneven.The reduction curve of substrate SB rotational speed does not have particular restriction, is beginning in stopping period, and preferably the rotational speed reduction amount (rate of deceleration) in the time per unit is constant, or changes reposefully.That is, the rate of deceleration can be constant, also can reduce gradually or increase gradually, preferably sets constant.
The state of cure of resin bed RL in incomplete curing process is the degree that resin bed RL goes up remaining cementability.The remaining incomplete curing resin layer that cementability is arranged utilizes mould extruding, can carry out graph copying, be actually do not have mobile.Be used for not exclusively solidifying required ultraviolet irradiation amount, decide according to the resin bed constituent material, that good is 10～200mJ/cm 2, be more preferably 30～100mJ/cm 2
Make in the method for resin bed curing irradiation ultraviolet radiation under the state in substrate SB that locking device 300 is packed on reduction rotational speed limit, limit.At this moment, the coating liquid on locking device 300 surfaces is also during irradiation ultraviolet radiation, after the curing, and when from substrate SB, taking out locking device 300, inner peripheral meeting of resin bed sometimes or produce burr, or the formation of burr fragment disperses, and very undesirable.In order to prevent that this burr from producing, near the best irradiation ultraviolet radiation not locking device 300.That is, preferably control range of exposures, the internal diameter that makes the ultraviolet radiation zone territory is slightly greater than the external diameter of the plectane part 301 of locking device 300.During the expansion of coating liquid, coating liquid forms radial dispersing from the outer peripheral edges of substrate SB, and when to this irradiation ultraviolet radiation, the coating liquid that disperses is radial extension attitude from the substrate outer peripheral edges, is easy to solidify.For anti-this phenomenon takes place, preferably control range of exposures, make the outer peripheral edges in ultraviolet radiation zone territory roughly consistent with the outer peripheral edges of substrate SB.
Range of exposures, for example, can be by the cover of regulation shape be set, blocking ultraviolet ray, i.e. may command between ultraviolet source and substrate SB.Also can use the projection exposure machine that can shine precision graphic to control.Except projection exposure machine, also can shine the ultraviolet lamp of specific region type selectively.As this device, the point type UV irradiation unit and the Duo Shi lamp of ウ シ オ electrical equipment (strain) system for example arranged.In the point type UV irradiation unit, lens are installed in the end of fiber unit, can adjust the shape of irradiation area.For example, establishing irradiation area is rectangle, on one side rotary plate SB shine on one side, can make resin layer surface form the ring-type irradiation.When using above-mentioned many formulas lamp, preferably with above-mentioned cover and use.
When resin bed not exclusively solidifies, as previously mentioned, when forming resin bed, preferably eliminate the coating liquid that a part is overflowed from substrate SB periphery.Specifically, preferably use the topping machanism have as the lamellar part of blade, make its close substrate SB circumferential lateral surface eliminate coating liquid.
Then, make locking device 300 be separated from substrate SB, form state shown in Figure 7 after, as shown in Figure 8, mould 100 is contacted with resin bed RL.Below mould 100,,, can on resin bed RL, form the figure of groove so duplicate by it owing to formed the parent figure of groove.At this moment, can utilize the deadweight extrusion resin layer RL of mould 100, also can apply loading, extrusion resin layer RL from the outside mould 100.As long as suitably determine the extruding force and the extrusion time of mould, just can be exactly with the parent graph copying on mould 100 surfaces to resin bed RL, common, preferably with 0.5 * 10 5～5 * 10 5Pa pushed for 0.1～5 second.
Mould 100 contacts with resin bed RL's, is preferably in the reduced pressure atmosphere and carries out.The pressure of above-mentioned reduced pressure atmosphere below 30Kpa for well, better below 10Kpa.By mould is contacted with resin bed, can prevent to sneak into bubble between the two.Extruding there is no need to carry out in reduced pressure atmosphere.Therefore, can push by improving environmental pressure.
Curing process, stripping process, stacked operation
In curing process, as shown in Figure 9,, make resin bed RL solidify to form transparent intermediate layer TL by mould 100 irradiation ultraviolet radiations.Also can rotary plate SB one side, one side irradiation ultraviolet radiation.After the curing, in stripping process shown in Figure 10, peel off mould 100 from transparent intermediate layer TL.Then in stacked operation shown in Figure 11, utilize spraying process and coating process, on transparent intermediate layer TL, form the 2nd information recording layer IL-2.
Locking device
The locking device that uses in the 1st kind of form is not limited to structure shown in Figure 2, so long as have the just passable of plectane part and back shaft.Locking device 300 shown in Figure 2 has the plectane part 301 and the columned back shaft 302 of circular cone shape, in addition, also can use the locking device of other structures, for example respectively by shown in Figure 12 (A)～Figure 12 (D).
Locking device shown in Figure 12 (A) is the plectane part 301 of circular cone shape of contraction and the back shaft 302 of rounding frustum below having.Back shaft is formed the rounding frustum, both can make the centre of the more close plectane part 301 in coating starting position of coating liquid, more can reduce the inequality of coating thickness.And, different with the situation that whole back shaft 302 formation are very thin, also can suppress the reduction of back shaft 302 physical strengths, when utilizing clamp controlling back shaft 302, owing to be difficult to fall, so very convenient when assembling and disassembling and handover locking device.Whole back shaft 302 there is no need to be the rounding frustum.That is, a part that is back shaft 302 is towards the swedged gradually circular cone shape of plectane part 301, and than it more in the zone near plectane portion, the diameter of back shaft must strengthen.
Locking device shown in Figure 12 (B), the section configuration of plectane part 301 is different with Figure 12 (A).For coating liquid is extended on plectane part 301 equably, the thickness of plectane part 301 is reduced gradually towards outer peripheral portion.At this moment, in the section of plectane part 301, the upper limb shape that coating liquid extends also can be the linearity shown in Figure 12 (A), also can be the curve-like shown in Figure 12 (B).Shown in Figure 12 (C), the periphery of plectane part 301 also can be vertical plane.But among Figure 12 (C), the perimeter thicknesses t of plectane part 301 is preferably in below the 0.4mm.When thickness t is excessive, be difficult to application of resin layer equably.Shown in Figure 12 (D), also the thickness of plectane part 301 can be formed uniformity.
In locking device, back shaft 302 minimum diameters on the plectane part 301, good is less than 4mm, more preferably less than 2mm.When the diameter of the back shaft 302 on the plectane part 301 is excessive, the centre of coating starting position meeting stray circle plate portion 301, the uneven thickness of resin bed RL on the direction of footpath can strengthen.But when back shaft 302 diameters on the plectane part 301 were too small, the physical strength of back shaft 302 was not enough, and what above-mentioned minimum diameter was good is more than the 0.5mm, more than the better 0.7mm.The length of back shaft 302 does not have particular determination, considers when controlling easy operating etc., can suitably determine, to be convenient to supplying with coating liquid to its outer peripheral face, that good is 5-100mm, is more preferably 10～30mm.When back shaft 302 is too short, be difficult to supply with coating liquid, also be difficult to control to outer peripheral face.And back shaft 302 is manipulated pretty troublesome when long.
The diameter of plectane part 301 is more preferably greater than the center pit CH diameter of substrate SB, and, littler than the internal diameter of the 1st information recording layer IL-1.But, when coating liquid 500 spreads to plectane part 301 following, can pollute the inner peripheral surface of substrate SB, so more than the big 4mm of diameter of the diameter of plectane part 301 than center pit CH, more than the more preferably big 8mm.Because when taking out plectane part 301, the resin bed shape on its next door is easy to produce disorderly, so more than the little 3mm of internal diameter of the diameter of plectane part 301 than the 1st information recording layer IL-1, more than the better little 5mm.Concrete size, with the internal diameter of the diameter of center pit and information recording layer and different, but when being generally used for making the CD of diameter 60～130mm, the diameter of circular slab part 301 is 20～40mm, in the scope of best 25～38mm.
The constituent material of locking device does not have particular determination, can be that metal, resin, pottery etc. are any, can be to use the compound substance more than 2 kinds in these yet.Plectane part 301 can be made of different materials with back shaft 302.In order to have excellent mechanical intensity, permanance, dimensional accuracy, locking device preferably is made of metal.As metal, preferably stainless steel alloy, aluminium, aluminium alloy.
The whole surface on the surface of locking device 300, particularly plectane part 301, best surfaces warp tension ratio coating liquid is low.If it is moistening that the surface of locking device 300 is difficult to coated liquid, be easy to clean attached to the lip-deep coating liquid of locking device.Capillary control can realize by the constituent material of suitable selection locking device, to reducing capillary zone, and hydrophobic, oleophobic processing that the most handy teflon processing etc. are implemented.
Manufacture method (the 2nd kind of form)
Below the 2nd kind of form of this example described.In the 2nd kind of form, just working procedure of coating is different with the 1st kind of form.
In the working procedure of coating of the 2nd kind of form, as shown in figure 13, shoot out the coating liquid 500 that forms by resin or resin solution by the nozzle 400 of liquid discharging device, the 1st information recording layer IL-1 that is fed to substrate SB forms near the interior circumferential portion of face.At this moment, universal stage 200 is rotated 1 time at least with lower speed, make coating liquid 500 form ring-type retention band.
Then, as shown in figure 14, mould 100 is contacted with coating liquid 500.At this moment, rely on the deadweight extrusion coating liquid 500 of mould 100, also can be revolve and add loading extrusion coating liquid 500,, preferably rely on the own wt of stamping die 100 to push for preventing mould 100 distortion to mould 100 from the outside.Be not limited in the method, for example, also can resin be coated on substrate SB and/or the mould 100 in advance.
Then, as shown in figure 15, make substrate SB and mould 100, coating liquid 500 is extended between substrate SB and stamping die 100, form resin bed RL together with higher speed rotation.The thickness of resin bed RL and homogeneity thereof depend on the viscosity, rotational speed and the rotational time when extending that apply liquid, the resin bed RL of required thickness for obtaining, and also for improving the homogeneity of its thickness, these conditions can suitably be set.Specifically preferably set respectively, the coating fluid viscosity is that 50～1000cp, rotational speed are that 500～6000rpm, rotational time were 1～10 second.
The contacting to be preferably in the reduced pressure atmosphere and carry out of mould 100 and coating liquid 500.Pressure in the above-mentioned reduced pressure atmosphere good below 30Kpa, below the better 10Kpa.Can prevent that like this bubble from sneaking among the resin bed RL.The extension of coating liquid 500 also can be carried out under reduced pressure atmosphere.
The same with the 1st kind of form afterwards, carry out resin bed RL curing, peel off mould 100 and form the 2nd Information Level IL-2 from resin bed RL.
The something in common of the 1st kind of form and the 2nd kind of form
Below the something in common of the 1st kind of form and the 2nd kind of form is described.
In this example, the surface that mould 100 is contacted with resin bed RL is to be made of polyolefin-based resins or fluororesin at least.Used resin so long as when resin bed RL solidified the high resin of the used ultraviolet ray transparency get final product.As polyolefin-based resins, for example can from tygon, polypropylene, polymethylpentene, suitably select.As fluororesin, for example can from teflon, poly-(chlorotrifluoroethylene), poly-perfluor vinethene, suitably select.
The manufacture method of mould 100 does not have particular determination, when constituting mould by polyolefin-based resins, preferably utilizes the injection mo(u)lding manufactured.When constituting mould, can suitably from extrusion forming sintering method, extrinsion pressing, compression forming method, injection molding method etc., select manufacture method according to the kind of fluororesin by fluororesin.Be located at mould 100 lip-deep above-mentioned parent figures, can when moulding, form simultaneously.But, forming on the higher substrate of rigidity by the material high (resin or glass etc.) the active energy beam permeability, can utilize the 2P method to form polyolefin-based resins layer and fluororesin layer with above-mentioned parent figure, make mould 100.
The shape and size of mould do not have particular determination, the common the same ring-type that forms with resin bed RL, and external diameter and the internal diameter of its external diameter and internal diameter and resin bed RL are roughly the same.But when setting, the external diameter that makes mould 100 is slightly greater than the external diameter of substrate SB, makes to be easy to peel off mould 100 from transparent intermediate layer TL to become easy in stripping process.The thickness of mould 100 is preferably in the scope of 0.3～3mm usually.Mould 100 is crossed when approaching, and is difficult to make mold for molding, is difficult to form uniform convex-concave pattern on whole mould face.On the other hand, when mould 100 was blocked up, the rigidity of mould was too high, was difficult to produce the mould that fully distortion waits distortion, so mould exists distortion.Slight distortion can obtain correcting at the extrusion die period of the day from 11 p.m. to 1 a.m, but the higher mould of rigidity is difficult to correct.Thus, when mould was blocked up, the distortion of mould also can copy on the transparent intermediate layer to former state, had increased the inequality of transparent intermediate layer thickness greatly.
In the 2nd kind of form, resin clip is held between substrate and the mould, both rotate simultaneously under this state, and resin is extended.At this moment the centrifugal force that produces in rotation has played the effect of correcting the mould distortion.In order effectively to utilize this effect, it is thin that mould is formed, specifically the thickness of mould with 0.3～1.8mm for well, best 0.3～1.4mm.
Timing, irradiation time and the exposure intensity of ultraviolet ray irradiation also can exert an influence to the liftability of uneven thickness, replication defective and the mould of transparent intermediate layer.For this reason, in this example, preferably by the ultraviolet relevant condition of shining of following explanation control.In the 1st kind of form, after the bubble between eliminating mould and the resin bed contacts both fully, irradiation ultraviolet radiation.In the 2nd kind of form, irradiation ultraviolet radiation at once after extend finishing makes the resin of extension can not surmount substrate outer rim and mould outer rim and flows out.In the 1st kind of form and the 2nd kind of form, peel off down mould for the transparent intermediate layer that is easy to after solidify, must make the transparent intermediate layer full solidification.Solidify when insufficient, because transparent intermediate layer is residual cementability arranged, mould is difficult to break away from.Solidify when insufficient, the physical strength of transparent intermediate layer is also insufficient, when peeling off mould, damages transparent intermediate layer sometimes.For transparent intermediate layer is fully solidified, ultraviolet irradiation amount preferably is taken as 1J/cm 2More than.When being provided with above-mentioned incomplete curing process in the 1st kind of form, not exclusively the total of the ultraviolet irradiation amount after ultraviolet irradiation amount in the curing process and the mould extruding is preferably 1J/em 2More than.
Embodiment
Embodiment 1 (the 2nd kind of form)
Utilize injection mo(u)lding to make the surface and be provided with the external diameter 120mm of groove figure, the discoid substrate SB (polycarbonate system) of internal diameter (center-hole diameter) 15mm, thickness 1.2mm.Utilize injection mo(u)lding to make the surface and be provided with the diameter 120mm of the parent figure of groove, the transparent mould 100 (polymethylpentene system) of thickness 0.6mm.On substrate and mould, the degree of depth that the disposition interval of groove is taken as 0.6 μ m, groove is taken as 40nm.On the groove figure formation face of aforesaid substrate, utilize the splash method to form reflection horizon, dielectric layer, phase-change type recording layer and dielectric layer successively, and form the 1st information recording layer IL-1.
Then, substrate-placing on universal stage, on one side with low speed rotation, is dripped ultraviolet curing resin in about 1 week on one side near the interior week of substrate SB.Then, in a single day rotation stops after, mounting mould 100 on the ultraviolet curing resin that drips, almost be simultaneously, substrate SB and mould 100 are rotated together, kept for 2 seconds with rotational speed 2000rpm, ultraviolet curing resin is extended, behind the formation resin bed RL, stop the rotation.
Then, be cured to resin bed RL irradiation ultraviolet radiation, form transparent intermediate layer TL by mould 100.Ultraviolet irradiation amount is taken as 1J/cm 2Then, peel off mould 100 from transparent intermediate layer TL.Do not adhere to ultraviolet curing resin on the mould 100 under peeling off, can confirm that the release of mould 100 is fine.
Then, on transparent intermediate layer TL, utilize the splash method to form the thick Au film of 60nm, as the 2nd information recording layer IL-2.Make to estimate and use sample.
Utilize scanning electron microscope to take pictures to this evaluation with the Au film surface of sample, this photo is shown in Figure 16.As shown in Figure 16, do not exist replication defective, duplicate the channel form figure exactly.
On transparent intermediate layer TL surface, stick splicing tape, peel off by guiding, peel off down transparent intermediate layer TL from sample,, utilize the variation in thickness on contact step difference determinator (DEKTAK3 of DEKTAK society system) the mensuration radial direction for the transparent intermediate layer TL under peeling off.The result as shown in figure 17.In curve shown in Figure 17, transverse axis is the distance apart from the transparent intermediate layer center.As can be seen from Figure 17, the variation in thickness of this transparent intermediate layer on radial direction is very little.Specifically, the transparent intermediate layer on interblock (in the scope of radius 25～55mm), the difference of maximum ga(u)ge and minimum thickness reaches below the 6 μ m.
Embodiment 2 (the 1st kind of form)
On the substrate SB that in embodiment 1, uses, with embodiment 1 the same the 1st information recording layer IL-1 that forms.
Then,, utilize the method for using locking device 300, form transparent intermediate layer TL in the following order as Fig. 2～shown in Figure 8.Used be made of stainless steel alloy with plug device 300, have shape shown in Figure 2, the diameter of plectane part 301 is that the diameter of 38mm, back shaft 302 is 1mm, longly is 20mm.At first substrate SB is positioned on the universal stage, after again locking device 300 being packed among the center pit CH of substrate SB, on one side with 60rpm rotation universal stage, on one side with the ultraviolet curing resin (MPZ 203 of Japanese chemical drug society system, viscosity under 25 ℃ is 90mPas) be fed on the outer peripheral face of back shaft 302, then make universal stage rotate for 3 seconds, resin is extended, form resin bed RL with 2000rpm.After locking device 300 is separated from from substrate SB, the mould 100 that uses among the embodiment 1 is positioned on the resin bed RL, utilizes autoclave that the whole face of mould 100 is evenly pushed.After the pressure relief,, resin bed RL is solidified, form transparent intermediate layer by mould 100 irradiation ultraviolet radiations.Ultraviolet irradiation amount is identical with embodiment 1.Then, peel off mould 100 from transparent intermediate layer TL.Do not adhere to ultraviolet curing resin on the mould 100 under peeling off, confirm that the release of mould 100 is fine.
Then, on transparent intermediate layer TL, with embodiment 1 the same the 2nd information recording layer IL-2 that forms, as the evaluation sample.When utilizing scanning electron microscope to observe the 2nd information recording layer IL-2 surface of this evaluation usefulness sample, confirm not exist to duplicate the seal defective, duplicate groove figure exactly.
With the embodiment 1 the same variation in thickness of measuring on the transparent intermediate layer radial direction, the results are shown in table 1.In the table 1, Δ T is the poor of transparent intermediate layer maximum ga(u)ge on the interblock (scope of radius 25～55mm) and minimum thickness, T MIt is the average thickness of transparent intermediate layer.
Table 1
Table 1 (embodiment 2)
Radial direction position (mm) 25 30 35 40 45 55 T M (μm) ΔT (μm)
Transparent intermediate layer thickness (μ m) 18.9 19.6 20.3 20.8 21.3 20.5 20.1 2.4
As shown in table 1, the Δ T of this transparent intermediate layer is 2.4 μ m, and thickness evenness is good.
Comparative example 1
On the substrate that in embodiment 1, uses, the same with embodiment 1, form the 1st information recording layer IL-1.
Then, substrate SB is positioned on the universal stage,, near the interior week of substrate SB, drips ultraviolet curing resin in about 1 week on one side on one side with low speed rotation.Then, improve rotational speed, keep about 2 seconds with the rotational speed of 2000rpm, ultraviolet curing resin is extended after, stop the rotation.Affirmation is positioned in the mould 100 that uses among the embodiment 1 on the resin bed RL after forming resin bed RL on the whole base plate face, utilizes the hot high pressure device evenly to push on whole of mould 100.After the pressure relief,, resin bed RL is solidified, form transparent intermediate layer TL by mould 100 irradiation ultraviolet radiations.Ultraviolet irradiation amount is identical with embodiment 1.Then, peel off down mould 100 from transparent intermediate layer TL.Do not adhere to ultraviolet curing resin on the mould 100 under peeling off, can confirm that the liftability of mould 100 is good.
Then, on transparent intermediate layer TL, with embodiment 1 the same the 2nd information recording layer IL-2 that forms, as the evaluation sample.When utilizing scanning electron microscope observation evaluation to use the 2nd information recording layer IL-2 surface of sample, find out to have replication defective everywhere.
With the embodiment 1 the same variation in thickness of measuring on the transparent intermediate layer TL radial direction.The result as shown in figure 17.The variation in thickness of this transparent intermediate layer TL on radial direction is very big as can be seen from Figure 17.Specifically, surpass 10 μ m at the maximum ga(u)ge of the last transparent intermediate layer TL of interblock (scope of radius 25～55mm) and the difference of minimum thickness.When the uneven thickness of transparent intermediate layer was so big, the resin bed RL before solidifying also can exist and its equal above uneven thickness, so mould 100 can not form extruding uniformly, the result thinks also can produce replication defective.
By the comparison of this comparative example 1 with the foregoing description 1 and embodiment 2, the effect of using above-mentioned locking device to produce in the effect that clearer and more definite the 2nd kind of form produces and the 1st kind of form.
Embodiment 3 (the 1st kind of form)
Except at pressure be positioned in mould 100 on the resin bed RL in the environment of 5Kpa, other are the same with embodiment 2, form transparent intermediate layer TL.This transparent intermediate layer TL can't see on whole at all and sneaks into bubble.
With the embodiment 1 the same uneven thickness of measuring this transparent intermediate layer TL.The result is as shown in table 2.
Table 2
Table 2 (embodiment 3)
Radial direction position (mm) 25 30 35 40 45 55 T M (μm) ΔT (μm)
Transparent intermediate layer thickness (μ m) 18.6 19.4 20.5 21.3 21.0 20.4 20.0 2.7
As shown in table 2, the Δ T of this transparent intermediate layer TL is 2.7 μ m, and thickness evenness is good.
Embodiment 4 (the 1st kind of form)
The same with embodiment 1, form the 1st information recording layer IL-1 on the substrate SB that in embodiment 1, uses.
Then use the locking device 300 that uses among the embodiment 2, form transparent intermediate layer TL in the following order.At first, substrate SB is positioned on the universal stage, after packing into locking device 300 in the center pit CH of substrate SB, on one side with 60rpm rotation universal stage, on one side the ultraviolet curing resin that uses among the embodiment 2 is fed on the outer peripheral face of back shaft 302, then, make universal stage rotate for 3 seconds with 2000rpm, the extension resin.
When the extension resin, in the moment of extending near end, make the lamellar circumferential lateral surface that eliminates device near substrate SB through 2 seconds, the resin that overflows from substrate SB periphery was eliminated for 1 second.Then make to eliminate device and leave substrate SB, begin simultaneously universal stage is slowed down, slow down beginning after 0.3 second, irradiation time is that 0.5 second uitraviolet intensity is 160mW/cm 2At this moment ultraviolet irradiation amount is 80mJ/cm 2, form the resin bed RL that not exclusively solidifies thus.Begin to be taken as for 1 second from deceleration to the time that rotation stops.For ultraviolet lamp, use order white プ レ シ ジ ヨ Application (strain) system UV Spot Cure BHG-250, range of exposures is set at the circle of diameter 120mm, irradiation ultraviolet radiation on whole base plate SB face.On locking device 300, irradiation ultraviolet radiation not, the cover of configuration diameter 40mm.
Then, be in the environment of 5Kpa at pressure, with mould 100 mountings used among the embodiment 1 to resin bed RL, with 2 * 10 5After the pressure of Pa pushed for 0.5 second down, pressure relief then, by mould 100 irradiation ultraviolet radiations, made resin bed RL full solidification, forms transparent intermediate layer TL.For ultraviolet lamp, use ウ シ オ motor (strain) system high-pressure mercury-vapor lamp (4KW), shine to whole base plate SB face.Exposure 80mJ/cm when ultraviolet irradiation amount at this moment and above-mentioned incomplete curing 2Add and be set at 1J/cm together 2On whole transparent intermediate layer TL face, do not find out fully and sneak into bubble.
Then, peel off down mould 100 from transparent intermediate layer TL.Do not adhere to ultraviolet curing resin on the mould 100 under peeling off, confirm that the release of mould 100 is fine.
Then, on transparent intermediate layer TL, with embodiment 1 the same the 2nd information recording layer IL-2 that forms, as the evaluation sample.When utilizing scanning electron microscope to observe the 2nd information recording layer IL-2 surface of this assess sample, confirm not have replication defective, duplicate the channel shaped figure exactly.
Variation in thickness on the radial direction of the laser focusing displacement meter LT8010 mensuration transparent intermediate layer TL of utilization (strain) キ one エ Application ス system the results are shown in table 3.Interblock radius on this sample is the scope of 23～58mm.
Table 3
Table 3 (embodiment 4)
Radial direction position (mm) 23 25 30 35 40 45 50 55 58 T M (μm) ΔT (μm)
Transparent intermediate layer thickness (μ m) 19.4 20.1 20.3 20.7 21.0 21.2 21.3 21.5 21.5 20.5 2.1
Δ T is minimum in the table 3, is 2.1 μ m.Make resin bed not exclusively solidify the effect of generation with utilization before the mould extruding as can be known by this result.
In this sample, there is not the space among the transparent intermediate layer TL.Yet,, in other the same comparative samples of making, have the space among near the transparent intermediate layer TL the interblock periphery with this sample except when resin bed forms, not eliminating from the resin that overflow substrate SB periphery.
Comparative example 2
On the substrate SB that in embodiment 1, uses, the same with embodiment 1, form the 1st information recording layer IL-1.
Then, substrate SB is positioned on the universal stage,, drips the ultraviolet curing resin that uses among the embodiment 4 to 20mm place, distance substrate SB center in about 1 week on one side on one side with the 60rpm rotation.Then, improve rotational speed, kept for 3 seconds with the rotational speed of 2000rpm, ultraviolet curing resin is extended after, stop the rotation.Affirmation under the condition identical with embodiment 4, utilizes mould 100 extrusion resin layer RL and irradiation ultraviolet radiation (exposure 1J/cm after forming resin bed RL on the whole base plate SB face 2), form transparent intermediate layer TL.
Then, the same with embodiment 4, on transparent intermediate layer TL, form the 2nd information recording layer IL-2, make to estimate and use sample, carry out the mensuration the same for this evaluation with sample with embodiment 4, the result is as shown in table 4.
Table 4
Table 4 (comparative example 2)
Radial direction position (mm) 23 25 30 35 40 45 50 55 58 T M (μm) ΔT (μm)
Transparent intermediate layer thickness (μ m) 13.4 15.8 18.6 20.3 21.4 22.2 22.8 23.3 23.5 18.5 10.1
The mechanical property evaluation of CD sample
The evaluation of making respectively in embodiment 4 and comparative example 2 is with on the 2nd information recording layer IL-2 of sample; utilize whirl coating (moving for 10 seconds) coating ultraviolet curing resin (viscosity under 25 ℃ is 5000cp) with 2000rpm; irradiation ultraviolet radiation is cured, and forms protective seam PL as the CD sample.When spin coated, the same when forming with transparent intermediate layer TL, use locking device 300 can obtain the thickness uniform protection layer.
Utilize (strain)
Figure C20051011851600311
Mechanical precision measure the mechanical property that machine DC-1010C measures these CD samples, the result is as shown in table 5.R-Skew represents the distortion on the radial direction in the table 5, and T-Skew represents the distortion on the Zhou Fangxiang.
Table 5
Surface deflection amount (μ m) Twist angle (μ m) R-Skew (deg.) T-Skew (deg.)
Embodiment 4 comparative examples 2 242 308 58.4 95.3 0.32 0.44 0.25 0.34
When transparent intermediate layer forms,, can improve the mechanical property of CD as known from Table 5 by incomplete curing process is set.
The mould 100 that utilization is made by poly-perfluor vinethene (the サ イ ト Star プ of Asahi Glass Co., Ltd's system) injection mo(u)lding replaces above-mentioned mould, and in addition, experimentize the same with the various embodiments described above obtains the result identical with the various embodiments described above.
The 2nd kind of example
The optical data media that this example is suitable for has 1 layer of information recording layer at least.
Information recording layer in this manual contains regeneration special layer or recording layer at least.So-called regeneration special layer be have the information of holding the record convex-concave patterns such as pre-pit, the layer of antireflection part regeneration light beam at least, so-called recording layer is to contain layers recording materials, that record identification can be rewritten and write afterwards such as phase-transition material and organic pigment.For recording layer,, be provided with convex-concave patterns such as groove and pre-pit in order to keep pre-formatted information and tracking servo etc.
So-called multilayer medium in this instructions are to have several information recording layers and medium that have the information recording layer that utilizes the recording/reproducing light beam that sees through other information recording layers to write down or regenerate.Between adjacent information recording layer, there is the middle layer that can see through the recording/reproducing light beam.
Show respectively among Figure 18 and Figure 19 according to this example and make in the medium formation example of multilayer medium.Medium shown in Figure 180 are on the substrate SB of plate-like, are provided with the 1st middle layer TL-1, the 1st information recording layer IL-1, the 2nd middle layer TL-2, the 2nd information recording layer IL-2 and protective seam PL successively.Medium shown in Figure 19 are on the substrate SB of plate-like, are provided with the 1st information recording layer IL-1, middle layer TL, the 2nd information recording layer IL-2 and protective seam PL successively.Illustrated among Figure 20 in the medium of making according to this example, had only the individual layer medium configuration example of 1 layer of information recording layer.Medium shown in Figure 20 are to be provided with middle layer TL, information recording layer TL and protective seam PL on discoid substrate SB successively.
In these medium, on information recording layer IL, IL-1, IL-2, form the convex-concave pattern that forms by groove and pre-pit respectively.Medium shown in Figure 19 are to have saved the 1st middle layer TL-1 from medium shown in Figure 180.Thus, on substrate SB, form the convex-concave pattern that constitutes by groove and pre-pit.
Below the formation of each several part in these medium is described.
Substrate SB, protective seam PL
In these medium, the recording/reproducing light beam is not from substrate SB side, but from the incident of protective seam PL side.Therefore, to need not for the recording/reproducing light beam be transparent to substrate SB.The thickness of substrate SB is generally 0.2～1.8mm, is preferably 0.4～1.2mm.Substrate SB among Figure 19 is the same with the substrate of common optical data media, can be made of resin.This situation, the necessary substrate SB concave-convex surface figure that is used for information recording layer IL-1 utilizes injection mo(u)lding to form.On the other hand, the substrate SB among Figure 18 and Figure 20 is the high level and smooth substrate of being made by glass, resin or metal etc. of rigidity,, utilizes the 2p method that middle layer TL-1 or the TL that forms above-mentioned convex-concave pattern is set thereon.
Protective seam PL has the light transmission that can see through the recording/reproducing light beam.Also can use resin plate and glass plate with substrate SB condition of equivalent thickness for protective seam PL.But, make the high NAization of recording/reproducing light beam irradiates optical system, for corresponding, preferably make protective seam PL slimming with high record density.At this moment protective seam PL thickness preferably is selected from 30～300 mu m ranges.Protective seam PL crosses when approaching, and can produce very big optical effect attached to the lip-deep dust of protective seam PL.On the other hand and protective seam PL when blocked up is difficult to form high NAization.
When making protective seam PL slimming, for example, the sheet of translucent resin being formed with various bonding agents and bonding agent fits together and form protective seam PL, also can apply translucent resin forms protective seam PL.
Show respectively in the medium of structure that at Figure 18～Figure 20 its formation is by substrate SB the recording/reproducing light beam to be incided on information recording layer IL, IL-1, the IL-2.
Information recording layer
On information recording layer IL, IL-1, IL-2, form the convex-concave pattern of pre-pit and groove etc.This convex-concave pattern forms by duplicating the convex-concave pattern that forms on middle layer TL, TL-1, TL-2 or the substrate SB surface.Information recording layer contains regeneration special layer or recording layer at least.
The regeneration special layer, owing to need antireflection part regeneration light beam (information recording layer IL-2) or the most of regeneration of reflection light beam (information recording layer IL, IL-1), so form the reflection horizon by metal (comprising alloy) film or dielectric multilayer film.Information recording layer in the regeneration specialized media only is made of the reflection horizon usually.
Recording layer can be any in following, promptly, use the phase-change type recording materials can be the rewriting type or Worm type, use the magneto-optical recorder material can the rewriting type, with the note down Worm type of material of organic pigment, etc., also can utilize other recording materials.But, to compare with other recording materials, light transmission rate is very high, and for this reason, the stacked number of recording layer can be a lot, preferably use the phase-change type recording materials.In recording medium, though can be only by recording layer configuration information recording layer, as required, other layer such as reflection horizon or dielectric layer can be set also.
For example, the information recording layer in the phase-change type recording medium, its structure normally is located at dielectric layer the both sides of recording layer.From recording/reproducing light beam light incident side, be present in innermost information recording layer IL-1, its structure normally the downside from figure successively by the stepped construction of reflection horizon, dielectric layer, phase-change type recording layer, dielectric layer.For information recording layer IL-2, because need to see through the recording/reproducing light beam, thus do not establish the reflection horizon usually, but as required, the reflection horizon that the recording/reproducing light beam is translucent can be set, its structure is the same with IL-1.
The middle layer
Middle layer TL, TL-1, TL-2 are the solidfied materials of ultraviolet curing resin isoradial gel-type resin, and, be by the very high material of recording/reproducing light beam transmitance is constituted.But among Figure 18 and Figure 20, the middle layer TL, the TL-1 that are present between substrate SB and information recording layer TL, the TL-1 do not need the recording/reproducing bundle is transparent.
Be present in the intermediate layer thickness between adjacent 2 layers of information recording layer, do not have particular determination, during the multilayer medium, preferably the crosstalk between the neighbor information recording layer is set in the allowed band, preferably 5～50 μ m are more preferably 10～50 μ m.On the other hand, the intermediate layer thickness that is present between substrate and the information recording layer is preferably 1～100 μ m usually.
Below when making medium shown in Figure 20, the method that forms middle layer TL on substrate SB describes.In addition following illustrative example explanation, also can use the resin that utilizes other radiation-curings such as electronics line as the situation of radiation-curing type resin use ultraviolet curing resin.
At first, between the mould and substrate SB of parent convex-concave pattern, form the state that clamping contains the resin bed of radiation-curing type resin with groove and pre-pit.At this moment, to the afterburning extrusion resin layer of mould, perhaps rely on mould own wt extrusion resin layer by the outside.Under this state, by the mould irradiation ultraviolet radiation, above-mentioned resin bed is solidified, form middle layer TL.Then peel off down mould from middle layer TL.Form information recording layer IL and protective seam PL afterwards, obtain the medium of structure shown in Figure 20.
In order to make resin bed between mould and substrate SB, form clamp position, can use any in following 2 kinds of methods.In the 1st kind of method, utilize whirl coating after forming resin bed on the substrate SB, mould is positioned on the resin bed pushes.In the 2nd kind of method, with circular resin is supplied to the interior circumferential portion of substrate SB, on it, under this state, substrate SB and mould are rotated together the mould mounting, by spin coated resin is extended between substrate SB and mould.
In this example, the surface that mould contacts with resin bed is to be made of cyclic polyolefin or polystyrene resin at least, for the above reasons, preferably is made of the noncrystalline cyclic polyolefin.Used resin use in solidifying with resin bed to ultraviolet ray be the transparency high for well.As the good noncrystalline cyclic polyolefin of ultraviolet permeability, have with the norborene based compound as initial substance, this material also has good thermotolerance.
Specifically, the noncrystalline cyclic polyolefin that preferably has the constitutional repeating unit of representing with following formula (1).
[changing 1]
Figure C20051011851600351
In the above-mentioned formula (1), q is 0～4 integer, R 1And R 2Represent hydrogen atom, halogen atom, methyl, ethyl, propyl group, butyl, ethidine, methoxycarbonyl group, cyano group or pyridine radicals respectively.R 1And R 2Can be identical, also can be different.R 1And R 2Also can mutually combine and form ring.
The noncrystalline cyclic polyolefin that uses in this example is preferably only represented the homopolymer that same unit forms in the constitutional repeating unit by above-mentioned formula (1), but also can is R 1, R 2The multipolymer that different multiple constitutional repeating units forms more than with q.Also can be except above-mentioned constitutional repeating unit, also contain other structural units, as the multipolymer of ethene etc.The noncrystalline cyclic polyolefin that uses in this example, preferred number average molecular weight are 5,000～100,000, especially preferably 10,000～40,000.
Halogen atom in the formula (1), ester group, fine base, pyridine radicals are also referred to as polar group in the following description.
Such noncrystalline cyclic polyolefin, can use following as monomer, for example, norborene, with its alkyl and/or alkylidene radical substituent, for example, 5-methyl-2-norborene, 5,6-dimethyl-2-norborene, 5-ethyl 2-norborene, 5-butyl-2-norborene, 5-ethidine-2-norborene etc.; Bicyclopentadiene, 2,3-dihydro bicyclopentadiene, their methyl, ethyl, propyl group, alkyl replacement such as butyl, with halogen isopolarity base replacement: two methene base octahydro-naphthalenes, its alkyl and/or alkylidene radical replacement, with halogen isopolarity base replacement, for example, the 6-methyl isophthalic acid, 4:5,8-two methene bases 1,4,4a, 5,6,7,8, the 8a-octahydro-naphthalene, 6-ethyl 1,4:5,8-two methene bases-1,4,4a, 5,6,7,8, the 8a-octahydro-naphthalene, 6-ethylidene-1,4:5,8-two methene bases-1,4,4a, 5,6,7,8, the 8a-octahydro-naphthalene, 6-chloro-1,4:5,8-two methene bases-1,4,4a, 5,6,7,8, the 8a-octahydro-naphthalene, 6-cyano group-1,4:5,8-two methene bases-1,4,4a, 5,6,7,8, the 8a-octahydro-naphthalene, 6-pyridine radicals-1,4:5,8-two methene bases-1,4,4a, 5,6,7,8, the 8a-octahydro-naphthalene, 6-methoxycarbonyl group-1,4:5,8-two methene bases-1,4,4a, 5,6,7,8,8a-octahydro-naphthalene etc.; 3～4 polymers of cyclopentadiene, for example, 4,9:5,8-two methene base 3a, 4,4a, 5,8,8a, 9,9a-octahydro-1H-fluorenes, 4,11:5,10:6,9-three methene base-3a, 4,4a, 5,5a, 6,9,9a, 10,10a, 11,11a-ten dihydros-1H-encircles penta anthracene etc., utilizes known ring-opening polymerization method, and the ring-opening polymerization polymer that polymerization obtains utilizes common method of hydrotreating, the saturated polymer that hydrogenation makes.
About such cyclic polyolefin, open flat 3-223341 communique, spy the spy and open record to some extent in the clear 60-26024 communique etc.
When using the noncrystalline cyclic polyolefin, for example, the spy opens and puts down in writing in the flat 5-81699 communique, alkylphenol condensation can be mixed in the noncrystalline cyclic polyolefin.
In this example, can use commercially available noncrystalline cyclic polyolefin.As commercially available noncrystalline cyclic polyolefin, ゼ オ ネ Star Network ス and ゼ オ ノ ア (all by Japanese ゼ オ Application (strain) system), ア ペ Le (Mitsui Chemicals (strain) system), ア one ト Application (JSR (strain) system) etc. are arranged.ア one ト Application and ゼ オ ネ Star Network ス are with the ring-opening polymerization of norborneol alkene monomer, the product of hydrogenation.ア ペ Le is ethene tetracyclododecen multipolymer { (C 2H 4) m-(C 12H 16) n.Good in these is that ゼ オ ネ Star Network ス, ゼ オ ノ ア and ア ペ Le, ゼ オ ネ Star Network ス and ゼ オ ノ ア are better, and ス is especially good for ゼ オ ネ Star Network.As ゼ オ ネ Star Network ス, that best is Zeonex E28R and Zeonex 280R, and as ゼ オ ノ ア, that best is Zeon or 1060R and Zeonor 1420R.Zeonex E28R and Zeonex 280R have the constitutional repeating unit of above-mentioned formula (1) expression.
The resin mould can utilize the injection mo(u)lding manufactured.In injection molding method, be with forming the graph copying that forms on the metal mold by Ni etc. to resin, make the resin mould.To cyclic polyolefin, when particularly above-mentioned ゼ オ ネ Star Network ス carries out injection mo(u)lding, in being no more than the thermotolerance scope of used resin, improve resin melt temperature (being also referred to as the injection machine temperature) as far as possible.By improving the resin melt temperature, be easy to exactly trickle graph copying with mould (metal mold) to resin.Specifically, the resin melt temperature is taken at more than 320 ℃, is preferably in more than 350 ℃.But, when the resin melt temperature is too high, accelerated the decomposition of resin, very bad, the analyte of generation causes the superficiality of resin mould to worsen attached on the metal mold surface, and is very bad.For this reason, the resin melt temperature is preferably below 400 ℃, better below 380 ℃.
The shape and size of mould do not have particular determination, usually and the resin bed shape of copy pattern roughly the same, its external diameter and internal diameter are also respectively with the external diameter of resin bed with internal diameter is roughly the same gets final product.But the external diameter that makes mould during setting is slightly greater than the external diameter of substrate SB, and this can make mould strip down from the middle layer at an easy rate.The thickness of mould is preferably in the scope of 0.3～3mm usually.Mould is crossed when approaching, and mould is difficult to moulding, also is difficult to form on whole mould face uniform convex-concave pattern.And mould is when thick, and the rigidity of mould is too high, owing to be difficult to produce the mould that fully distortion waits distortion, has distortion on the mould, and slight distortion can obtain correcting at the extrusion die period of the day from 11 p.m. to 1 a.m, but the rigidity of mould then is difficult to correct when very high.When mould is blocked up, copies on the middle layer to the distortion meeting former state of mould, and strengthened the inequality of intermediate layer thickness for this reason.
Under the state that resin clip is held between substrate SB and the mould, both are rotated and the method for extension resin in, the centrifugal force that rotation produces has played the effect of correcting the mould torsional deformation, in order effectively to utilize this effect, be preferably formed as thin mould, specifically, the thickness of mould is preferably 0.3～1.8mm, is preferably 0.3～1.4mm.
This example to from mould to the middle layer duplicate trickle, accurately during convex-concave pattern, effective especially.Specifically, the disposition interval of convex-concave pattern, that is, the disposition interval of the disposition interval of groove or pre-pit row is below 0.7 μ m, and is particularly below 0.6 μ m, more effective.If suitable this example of use, can be exactly with so trickle graph copying to the middle layer.But, when the figure disposition interval is too narrow, then be difficult to accurately duplicate, usually, during convex-concave pattern more than forming arrangement pitches 0.1 μ m, use this example ideal.
In the regeneration specialized media that keeps pre-pit information, the disposition interval of pre-pit row is identical with track pitch, and in the optical recording media of plough groove type record, track pitch is identical with the arrangements of grooves spacing.On the other hand, in the optical recording media of boss groove recording mode, track pitch is 1/2 times of groove assortment spacing.For example, in the DVD-RW of groove recording mode, track pitch and arrangements of grooves spacing all are 0.74 μ m, and among the DVD-RAM of boss groove recording mode, track pitch is narrow in 0.61 μ m, and the arrangements of grooves spacing is 1.22 μ m.
The feature of this example is to constitute mould by specific resin, can obtain above-mentioned effect like this.The middle layer of concrete order and condition when therefore, forming to(for) the use mould do not have particular determination.That is, no matter use above-mentioned the sort of order and condition, as long as use the above-mentioned mould that limits in this example, under identical order and condition, all than the better effect of the injection-molded acquisition of mould before using.
Embodiment
Install on metal pattern that 0.3mm is thick, the Ni mould of profile 150mm, utilize injection mo(u)lding, form the resin mould of thick 0.6mm, profile 120mm continuously.The convex-concave pattern that forms on the resin mould is the channel form figure of wide 0.16 μ m, disposition interval 0.32 μ m, degree of depth 25nm.Used resin is as shown in table 6 below.Resin melt temperature during injection mo(u)lding and metal pattern temperature are respectively 360 ℃ and 130 ℃ during with Zenonex E28R, use other resins, form optimization according to various resins, make the map migration of resin mould and distortion reach minimum.
From utilize the continuously shaped a plurality of resin moulds that obtain, extract 10, with the naked eye check the number that produces map migration and break.With (strain) the little wild face contact amount of surveying mechanical precision analyzer (LM-1200) mensuration resin mould of device, these the results are shown in table 6.
Then, clamping ultraviolet curing resin between the level and smooth polycarbonate substrate of thickness 1.1mm and resin mould, utilize spin coated that resin is extended after, by resin mould irradiation ultraviolet radiation, make resin solidification, form the middle layer.Then, the resin mould is therefrom stripped down on the interbed.After this a succession of operation, retrieval has or not the distortion of adhering to ultraviolet curable resin and resin mould.This mensuration, various resin moulds carry out 10 respectively at every turn shown in the his-and-hers watches 6.To adhere to resin and produce the resin mould number of being out of shape and be shown in table 6.
Table 6
Resin mould No. Constituent material Mouldability is estimated Replicability is estimated
Map migration Breaking during shaping Face departure (μ m) The resin that adheres to after peeling off Distortion after peeling off
1 2 3 Zeonex E28R ァ ベ Le polystyrene 0/10 0/10 0/10 0/10 0/10 5/10 60 90 100 0/10 0/10 6/10 0,/10 0/10 breaks
4 (comparisons) 5 (comparison), 6 (comparisons) 7 (comparison) Polymethylpentene polypropylene polycarbonate PMMA 10/10 10/10 0/10 0/10 6/10 0/10 0/10 3/10 150 240 50 90 0/10 0/10 10/10 10/10 0,/10 0/10 damages
The effect of this example as known from Table 6, in resin mould No.1, the No.2 that is formed by the noncrystalline cyclic polyolefin, formability and replicability all obtain good results.Opposite with it, the resin mould No.4 by the polymethylpentene of crystallinity wire olefin resin forms has produced map migration, because the face departure is very big, is not suitable for forming trickle figure to the middle layer.When departure is very big,,, cause focus servo and tracking servo instability on the middle layer face to face so the information recording layer that forms produces distortion and crooked owing to can not form the uniform middle layer of thickness.The face departure permissible value of this situation is below 100 μ m.
In the resin mould No.3 that forms by polystyrene, peelable from the middle layer, break but produce.And at the resin mould No.6 that forms by polycarbonate with by PMMA (among the resin mould No.7 that polymethylmethacrylate forms, because it is very high to the cohesive of ultraviolet curing resin, when peeled off in the middle layer, resin mould and polycarbonate substrate all were damaged.

Claims (3)

1. the manufacture method of an optical data media; On substrate, to have at least 2 layers of information recording layer; Has the optical data media manufacture method that contains radiation-curing type resin interlayer between information recording layer and the substrate and/or between the adjacent 2 layers information recording layer; It is characterized in that being provided with following operation; Namely; Have on the surface between the mould and substrate of convex-concave pattern; Form the state that clamping contains the resin bed of radiation-curing type resin; Then to above-mentioned resin bed irradiation radioactive ray; Then peel off mould; Formation has copied the intermediate layer of above-mentioned convex-concave pattern
As above-mentioned mould, the surface that forms above-mentioned convex-concave pattern is to be made of cyclic polyolefin or polystyrene resin at least.
2. according to the optical data media manufacture method of claim 1, it is characterized in that the surface that forms above-mentioned convex-concave pattern is to be made of the noncrystalline cyclic polyolefin at least as above-mentioned mould.
3. according to the optical data media manufacture method of claim 1 or 2, the disposition interval that it is characterized in that above-mentioned convex-concave pattern is below 0.7 μ m.
CNB2005101185167A 2001-05-01 2002-04-30 Manufacturing method and apparatus for optical information medium Expired - Fee Related CN100377240C (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001134232 2001-05-01
JP134232/2001 2001-05-01
JP200206/2001 2001-06-29
JP280839/2001 2001-09-14

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CNB021275157A Division CN1236440C (en) 2001-05-01 2002-04-30 Method and device for producing optical information medium

Publications (2)

Publication Number Publication Date
CN1783269A CN1783269A (en) 2006-06-07
CN100377240C true CN100377240C (en) 2008-03-26

Family

ID=36773340

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005101185167A Expired - Fee Related CN100377240C (en) 2001-05-01 2002-04-30 Manufacturing method and apparatus for optical information medium

Country Status (1)

Country Link
CN (1) CN100377240C (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8119266B2 (en) * 2007-01-09 2012-02-21 Konica Minolta Opto, Inc. Magnetic recording medium substrate, magnetic recording medium, method for manufacturing magnetic recording medium substrate, and method for manufacturing magnetic recording medium
JP6897636B2 (en) * 2018-06-18 2021-07-07 カシオ計算機株式会社 Resin sheet manufacturing method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0368442A2 (en) * 1988-11-08 1990-05-16 Pioneer Electronic Corporation Optical information record carrier and the method of producing the same
CN1141478A (en) * 1995-02-27 1997-01-29 索尼公司 Optical recording medium and method of mfg. same
JP2001043569A (en) * 1999-07-30 2001-02-16 Toshiba Corp Information recording medium for surface recording and reproducing and its production

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0368442A2 (en) * 1988-11-08 1990-05-16 Pioneer Electronic Corporation Optical information record carrier and the method of producing the same
CN1141478A (en) * 1995-02-27 1997-01-29 索尼公司 Optical recording medium and method of mfg. same
JP2001043569A (en) * 1999-07-30 2001-02-16 Toshiba Corp Information recording medium for surface recording and reproducing and its production

Also Published As

Publication number Publication date
CN1783269A (en) 2006-06-07

Similar Documents

Publication Publication Date Title
JP3635588B2 (en) Optical disc manufacturing method and multilayer optical disc
EP1866919B1 (en) Device and method for producing optical data media
CN100377240C (en) Manufacturing method and apparatus for optical information medium
KR20050025123A (en) Optical recording medium
US20050271856A1 (en) Optical recording medium and method for producing the same
KR100230244B1 (en) Manufacturing method of multilayer optical recording medium and device using it
JP2003085839A (en) Method of manufacturing optical recording medium
JP4618111B2 (en) Optical recording medium and manufacturing method thereof
TWI284898B (en) Manufacturing method optical recording media and optical recording media
JP2003196891A (en) Method of manufacturing multilayered optical recording medium and multilayered optical recording medium
JP2003022586A (en) Manufacturing method for optical information medium
JP2003196885A (en) Multilayer optical recording medium and its manufacturing method
KR20020084806A (en) Method and apparatus for manufacturing media of optical informations
US20100090358A1 (en) Process and apparatus for producing optical recording medium
US20040184397A1 (en) Optical recording medium, method of producing the same and protective film-forming resin
JP2003016702A (en) Producing method of optical information medium
US7688703B2 (en) Optical recording medium and production method thereof
US6692246B1 (en) Apparatus for uninterrupted multi-layer disc manufacturing
KR19990086849A (en) Multi-layer optical recording medium and manufacturing method thereof
JP2003016701A (en) Producing method of optical information medium
WO2003012784A1 (en) Optical recording medium, method of producing the same and protective film-forming resin
KR100364667B1 (en) Optical Recording Media And Methods OF Fabricating The Same and Molding Apparatus For Forming The Same
JP3129308B2 (en) Optical disk substrate, optical disk, and method of manufacturing optical disk substrate
CN100595832C (en) Optical information recording medium and manufacturing method of optical information recording medium
JPS6399932A (en) Manufacture of base for optical disk

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080326

Termination date: 20200430

CF01 Termination of patent right due to non-payment of annual fee