CN100369284C - Magnetic tunnel conjunction element using composite ferromagnetic layer as ferromagnetic electrode - Google Patents
Magnetic tunnel conjunction element using composite ferromagnetic layer as ferromagnetic electrode Download PDFInfo
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- CN100369284C CN100369284C CNB2004100308930A CN200410030893A CN100369284C CN 100369284 C CN100369284 C CN 100369284C CN B2004100308930 A CNB2004100308930 A CN B2004100308930A CN 200410030893 A CN200410030893 A CN 200410030893A CN 100369284 C CN100369284 C CN 100369284C
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- ferromagnetic layer
- magnetic tunnel
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Abstract
The present invention discloses a magnetic tunnel junction element which uses a compound ferromagnetic layer as a ferromagnetic electrode. The magnetic tunnel junction element comprises a substrate, a buffer layer, a guiding layer, a free layer, an insulating layer, a pinning layer, an inverse ferromagnetic layer and a protective layer, wherein the buffer layer and the guiding layer are arranged on the substrate; a compound ferromagnetic layer which is formed by two different nonferromagnetic materials is used as the free layer; a compound ferromagnetic layer which is formed by two different nonferromagnetic materials is used as the pinning layer. By regulating the thickness of the thin ferromagnetic layer of the compound ferromagnetic layer, the spin polarization rate of the compound ferromagnetic layer can be continuously regulated. Accordingly, the tunnel magneto resistance value of the element can be regulated and controlled. By regulating the thickness of the thin ferromagnetic layer of the compound ferromagnetic layer which is used as the free layer, the coercive force of the free layer can be continuously regulated. Accordingly, the field switching value of the element can be regulated.
Description
Technical field
The present invention relates to a kind of magnetic tunnel junction element that is applied to magnetic memory device such as magnetic RAM or other magnetic sensor devices.
Background technology
Magnetic tunnel-junction has bigger magnetoresistance to be changed, and is the critical elements of magnetic memory device, magnetic sensor device etc., has obtained to use widely.Fig. 1 is the structure of known magnetic tunnel-junction (MTJ), and its each layer is followed successively by: substrate 11, resilient coating 12, inverse ferric magnetosphere 13, (pinning) ferromagnetic layer 14, (freedom) ferromagnetic layer 16, be clipped in thin dielectric layer 15 between two ferromagnetic layers, and protective layer 17.Can parallel or arranged anti-parallel under the driving in the magnetic field that the ferromagnetic layer outside magnetic field of the insulating barrier both sides of this element or read-write electric current line produce, thereby show as the low or high-resistance state of element, its corresponding tunnel magnetoelectricity resistance (TMR) then defines the ratio of the resistance the when difference of height resistance is arranged in parallel with two ferromagnetic layers for this reason.Tunnel magneto resistance value size is relevant with the size of the spin polarizability (P) of ferromagnetic layer, can use formula TMR=2P
1P
2/ (1-P
1P
2) represent P wherein
1, P
2Spin polarizability for the ferromagnetic electrode layer of insulating barrier both sides.Usually, the material of the ferromagnetic layer of MTJ element is Co, Ni
XFe
100-X, Co
YFe
100-YEtc. ferromagnetic elemental metals or alloy, wherein the spin polarizability with the CoFe alloy is maximum (about 50%), but almost irrelevant with composition Y, document [D.J.Monsma andS.S.P.Parkin, Appl.Phys.Lett.77,883 (2000); 77,720 (2000)] spin polarizability that has disclosed the CoFe alloy remains unchanged promptly irrelevant with its component Y in bigger composition range substantially.By as seen above-mentioned, for adopting magnetic tunnel-junction is magnetic memory device or other magnetic sensor devices of senser, how to regulate and control the spin polarizability of ferromagnetic electrode, and then obtain design and application that the regulatable magnetic tunnel junction element of tunnel magneto resistance value will make things convenient for related device greatly.
In addition, the coercive force (H of free ferromagnetic in magnetic tunnel-junction
C) size determined with this magnetic tunnel-junction to be the size of the switch yard that changes between the high low resistance state of magnetic electron device, adopt external magnetic field or adopt the magnetic field of the electric current generation of read-write electric current line can realize changing between the high low resistance state of device, and size that how can the regulating switch field also is the key of this type of senser element design, also is one of difficult point to be solved.If can realize the coercitive adjusting to this free ferromagnetic simply, and then just can realize the regulation and control to this element switch field, this will make things convenient for the design and the application of related device greatly.
Summary of the invention
Can continuously adjustable problem for the coercive force that solves above-mentioned ferromagnetic electrode spin polarizability and free ferromagnetic, the purpose of this invention is to provide a kind of is the magnetic tunnel junction element of ferromagnetic electrode with compound ferromagnetic layer.
To achieve these goals, provided by the invention a kind of be that the magnetic tunnel junction element of ferromagnetic electrode comprises a substrate and a resilient coating that is provided with, an inverse ferric magnetosphere, an insulating barrier, an and protective layer on substrate with compound ferromagnetic layer, also comprise:
One guide layer is located on the described resilient coating, and described guide layer has (111) texture;
One compound ferromagnetic layer is arranged on the described inverse ferric magnetosphere as pinning layer; And
One compound ferromagnetic layer is arranged on the described insulating barrier as free layer.
Further, the material of described substrate is selected from a kind of of silicon or glass.
Further, the material of described resilient coating is selected from Ta or (Ni
XFe
100-X)
YCr
100-Y, 77＜X＜83,50＜Y＜70 wherein.
Further, the material of described guide layer is selected from Cu or Cu/Ni
XFe
100-XDuplicature, wherein 77＜X＜83.
Further, the component of described inverse ferric magnetosphere is Mn and X, and described element X is selected from least a among Fe, Ir, Ni, Pt, the Pd.
Further, the material of described insulating barrier is selected from Al
2O
3, or comprising one of them the oxide or the nitride of element of Al, Hf, Ti, Zr, Si at least, its thickness is between 0.5 to 3nm.
Further, the material of described compound ferromagnetic layer is selected from the duplicature FM that two kinds of different ferromagnetic materials are formed
1/ FM
2, ferromagnetic material FM wherein
1Or FM
2Be selected from Co, Ni
XFe
100-X, or Co
YFe
100-YA kind of but inequality, 77＜X＜83,10＜Y＜90.
Further, the FM in the described compound ferromagnetic layer
1Thickness be 2.5 to 10nm; FM
2The thickness of layer is between 0 to 4nm, and next-door neighbour's insulating barrier.
Compared with prior art, the present invention has following advantage:
The magnetic tunnel junction element of the present invention preparation, the thickness by regulating the thin ferromagnetic layer of contiguous insulating barrier one side in the compound ferromagnetic layer is the spin polarizability of adjustable compound ferromagnetic layer continuously, thereby can regulate and control the tunnel magneto resistance value of this element; By regulating as the thickness of the thin ferromagnetic layer of contiguous insulating barrier one side in the compound ferromagnetic layer of the free layer coercive force of adjustable this free layer continuously, thus the switch yard size that can regulate this element.
Description of drawings
Fig. 1 is the structure of known magnetic tunnel junction element;
Fig. 2 is the structure of magnetic tunnel junction element of the present invention;
Fig. 3 is the TMR value of magnetic tunnel-junction sample of the embodiment of the invention one and the relation of the ferromagnetic intercalation thickness of CoFe;
Fig. 4 is the free coercive force HC of magnetic tunnel-junction sample of the embodiment of the invention three and the relation of the ferromagnetic intercalation thickness of CoFe.
Embodiment
As shown in Figure 2, its each layer of magnetic tunnel junction element structures of the present invention is followed successively by: substrate 11, resilient coating 12, guide layer 120, inverse ferric magnetosphere 13, (pinning) compound ferromagnetic layer 140, insulating barrier 15, (freedom) compound ferromagnetic layer 160 and protective layer 17.
Embodiment one: magnetic tunnel-junction Si/Ta (5)/NiFe (20)/Cu (6)/FeMn (12)/NiFe (8)/CoFe (0-4)/Al
2O
3(1.7)/and NiFe (13)/Cu (50)/Ta (5), the numerical value in its bracket is the thickness of each rete, and its unit is a nanometer, and above-mentioned NiFe is Ni
81Fe
19, FeMn is Fe
50Mn
50, CoFe is Co
50Fe
50Each rete begins to deposit successively resilient coating Ta, guide layer NiFe/Cu, inverse ferric magnetosphere FeMn from the Si substrate; combination electrode layer NiFe/CoFe is as pinning layer; free layer is NiFe (special case that can regard compound ferromagnetic layer herein as, promptly the thickness of another layer is 0), protective layer Cu/Ta.As shown in Figure 3, along with CoFe thickness increases since 0, the spin polarizability of compound ferromagnetic layer begins dull increasing, the TMR value is also dull thereupon to be increased, be increased to saturation value 26% from 17%, realized the adjustable continuously of ferromagnetic electrode spin polarizability thus, thereby made that the tunnel magneto resistance value of this element is adjustable continuously.
Embodiment two: magnetic tunnel-junction Si/Ta (5)/NiFe (20)/Cu (6)/FeMn (12)/NiFe (8)/Co (0-4)/Al
2O
3(1.7)/and NiFe (13)/Cu (50)/Ta (5), the numerical value in its bracket is the thickness of each rete, and its unit is a nanometer, and above-mentioned NiFe is Ni
81Fe
19, FeMn is Fe
50Mn
50Each rete begins to deposit successively resilient coating Ta from the Si substrate, guide layer NiFe/Cu, and inverse ferric magnetosphere FeMn, combination electrode layer NiFe/Co are as pinning layer, and free layer is NiFe, protective layer Cu/Ta.Along with Co thickness increases since 0, the spin polarizability of compound ferromagnetic layer begins dull increasing, and the TMR value is also dull thereupon to be increased, and is increased to saturation value 24% from 17%, realized the adjustable continuously of ferromagnetic electrode spin polarizability thus, thereby made that the tunnel magneto resistance value of this element is adjustable continuously.
Embodiment three: magnetic tunnel-junction Si/Ta (5)/NiFe (20)/Cu (6)/FeMn (12)/NiFe (8)/CoFe (2.5)/Al
2O
3(1.7)/and CoFe (0-4)/NiFe (13)/Cu (50)/Ta (5), the numerical value in its bracket is the thickness of each rete, and its unit is a nanometer, and above-mentioned NiFe is Ni
81Fe
19, FeMn is Fe
50Mn
50, CoFe is Co
50Fe
50Each rete begins to deposit successively resilient coating Ta from the Si substrate, and guide layer NiFe/Cu, inverse ferric magnetosphere FeMn, combination electrode layer NiFe/CoFe be as pinning layer, and combination electrode layer CoFe/NiFe be as free layer, protective layer Cu/Ta.As shown in Figure 4, along with the CoFe thickness in the free layer increases since 0, coercive force as the compound ferromagnetic layer of free layer begins dull increasing, and has realized the coercitive adjustable continuously of free ferromagnetic electrode layer thus, and then just can realize the regulation and control to the switch yard of this element.
Claims (6)
1. one kind is the magnetic tunnel junction element of ferromagnetic electrode with compound ferromagnetic layer, comprises a substrate and a resilient coating that is provided with, an inverse ferric magnetosphere, an insulating barrier on substrate, reaches a protective layer, it is characterized in that, also comprises:
One guide layer is located on the described resilient coating, and described guide layer has (111) texture;
One compound ferromagnetic layer is arranged on the described inverse ferric magnetosphere as pinning layer; And
One compound ferromagnetic layer is arranged on the described insulating barrier as free layer;
The material of described compound ferromagnetic layer is selected from the duplicature FM that two kinds of different ferromagnetic materials are formed
1/ FM
2, ferromagnetic material FM wherein
1Or FM
2Be selected from Co, Ni
XFe
100-X, or Co
YFe
100-YA kind of but inequality, 77＜X＜83,10＜Y＜90, and FM wherein
1Thickness be 2.5 to 10nm; FM
2The thickness of layer is between 0 to 4nm, and next-door neighbour's insulating barrier.
2. as claimed in claim 1 a kind of be the magnetic tunnel junction element of ferromagnetic electrode with compound ferromagnetic layer, it is characterized in that the material of described substrate is selected from a kind of of silicon or glass.
3. as claimed in claim 1 a kind of be the magnetic tunnel junction element of ferromagnetic electrode with compound ferromagnetic layer, it is characterized in that the material of described resilient coating is selected from Ta or (Ni
XFe
100-X)
YCr
100-Y, 77＜X＜83,50＜Y＜70 wherein.
4. as claimed in claim 1 a kind of be the magnetic tunnel junction element of ferromagnetic electrode with compound ferromagnetic layer, it is characterized in that the material of described guide layer is selected from Cu or Cu/Ni
XFe
100-X, 77＜X＜83 wherein.
5. as claimed in claim 1 a kind of be the magnetic tunnel junction element of ferromagnetic electrode with compound ferromagnetic layer, it is characterized in that the component of described inverse ferric magnetosphere is Mn and X, described element X is selected from least a among Fe, Ir, Ni, Pt, the Pd.
6. as claimed in claim 1 a kind of be the magnetic tunnel junction element of ferromagnetic electrode with compound ferromagnetic layer, it is characterized in that the material of described insulating barrier is selected from Al
2O
3, or comprising one of them the oxide or the nitride of element of Al, Hf, Ti, Zr, Si at least, its thickness is between 0.5 to 3nm.
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| CN100369284C true CN100369284C (en) | 2008-02-13 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101359761B (en) * | 2008-09-26 | 2011-12-28 | 清华大学 | Novel microwave oscillator driven by spinning current |
| JP2012235015A (en) * | 2011-05-06 | 2012-11-29 | Sony Corp | Storage element and storage device |
| KR101446338B1 (en) * | 2012-07-17 | 2014-10-01 | 삼성전자주식회사 | Magnetic device and method of manufacturing the same |
| CN103811045B (en) * | 2014-02-28 | 2016-06-15 | 北京航空航天大学 | A kind of high reliability, also can the difunctional memory element of many bit storage |
| CN105470385A (en) * | 2015-10-30 | 2016-04-06 | 上海磁宇信息科技有限公司 | Manufacturing process of cross-torque array-type magnetic random memory |
| CN114136613B (en) * | 2021-10-20 | 2023-06-09 | 中国航发四川燃气涡轮研究院 | Monitoring system and online monitoring method for working state of engine bearing |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5966323A (en) * | 1997-12-18 | 1999-10-12 | Motorola, Inc. | Low switching field magnetoresistive tunneling junction for high density arrays |
| CN2591723Y (en) * | 2002-12-24 | 2003-12-10 | 中国科学院物理研究所 | Nail punching thin film with laminated ferro magnetic layer |
-
2004
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5966323A (en) * | 1997-12-18 | 1999-10-12 | Motorola, Inc. | Low switching field magnetoresistive tunneling junction for high density arrays |
| CN2591723Y (en) * | 2002-12-24 | 2003-12-10 | 中国科学院物理研究所 | Nail punching thin film with laminated ferro magnetic layer |
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