CN100367070C - Micro-electromechanic system scanning lens with dispersion hinge and multi-supporting accessories - Google Patents
Micro-electromechanic system scanning lens with dispersion hinge and multi-supporting accessories Download PDFInfo
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- CN100367070C CN100367070C CNB200410056963XA CN200410056963A CN100367070C CN 100367070 C CN100367070 C CN 100367070C CN B200410056963X A CNB200410056963X A CN B200410056963XA CN 200410056963 A CN200410056963 A CN 200410056963A CN 100367070 C CN100367070 C CN 100367070C
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- scanning mirror
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Abstract
The present invention provides a scanning mirror device of a micro-electro-mechanical system, which comprises a scanning mirror, a rotating comb tooth, a fixed comb tooth, dispersing serpentine springs and an anchor, wherein the scanning mirror and the rotating comb tooth are driven by electrostatic force of fixed plane internal and/or external teeth. The mirror is attached to a rotating comb structure by a plurality of supporting accessories; the serpentine springs are used as flexible hinges for linking a removable structure to a fixed supporting structure.
Description
The mutual reference of related application
The application's case is the application case that continues of the U.S. patent application case of No. the 10/648th, 551, the sequence number that proposes on August 25th, 2003, and this application case is incorporated herein with way of reference.
Technical field
The present invention relates to MEMS (micro electro mechanical system) (MEMS) equipment, and more detailed speech relate to the MEMS scanning mirror.
Background technology
The various electrostatic comb actuator designs of MEMS scanning mirror have been proposed.The widespread use of these equipment comprises bar-code reader, laser printer, confocal microscope, the projection display, rear projection TV and wearable display.Usually the MEMS scanning mirror drives when its main resonance to realize high scan angles.In order to ensure stable operation, guarantee that mirror and relevant removable frame thereof will be vital in the internal vibration of wanted condition shape with minimum and main resonatnt frequency.In addition, this predominant frequency must away from other structural vibration frequency to avoid will and the non-potential coupling of being wanted between the condition shape.
Non-desired structural vibration will increase the mirror dynamic deformation and cause the optical resolution of demoting.In addition, some structural vibration mode can cause rotatable move and fixing broach contacts and disconnects this actuator together.The high amplitude that two or more structural vibration mode with close resonance frequency of can being coupled cause hinge to lose efficacy with generation.Therefore, need the stability of vibration of a kind of apparatus and method when improving resonance effectively in the design of MEMS scanning mirror, and guarantee the optical resolution of these equipment.
Summary of the invention
In one embodiment of the invention, a kind of MEMS scanning mirror equipment comprises a scanning mirror, rotation broach, fixed fingers, decentralized snake-shaped springs and anchor.This scanning mirror and this rotation broach are driven by the electrostatic force from the fixed pan and/or plane external tooth.By a plurality of Holder Fasteners mirror is connected to this rotation pectination.A plurality of serpentine springs serve as the flexible hinge that removable frame is linked to fixed support structure.
Description of drawings
Figure 1A, 1B and 1C have illustrated the top view of the layer in the MEMS equipment in one embodiment of the invention.
Fig. 2 A, 2B and 2C have illustrated the top view of the layer in the MEMS equipment in another embodiment of the present invention.
Fig. 3 has illustrated the distortion of scanning mirror in one embodiment of the invention.
Embodiment
Figure 1A has illustrated MEMS scanning mirror equipment 100 in one embodiment of the present of invention.Equipment 100 comprises top layer 100A (Figure 1B) and bottom 100B (Fig. 1 C).
Referring to Figure 1B, top layer 100A comprises rotation broach 108, and these rotation broach are connected on the opposite side of class girder construction 103A and 103B.The most proximal end of beam body 103A and 103B is connected to the opposite side of scanning mirror 101 by a plurality of Holder Fasteners 102.In other words, each beam body all is connected to scanning mirror 101 in a plurality of positions.The position of careful selection Holder Fasteners 102 and number are to minimize the dynamic deformation of scanning mirror 101 by finite element analysis.The optical resolution of coming improvement equipment 100 by the dynamic deformation that reduces scanning mirrors 101 with Holder Fasteners 102.
To 105H beam body 103A and 103B are attached to bottom 100B with dispersing mode along the turning axle (for example, x-axle) of scanning mirror 101 by eight serpentine springs/hinge 105A.In detail, the far-end of beam body 103A is connected to anchor 104A, and the far-end of beam body 103B is connected to anchor 104H by springs/hinges 105H by springs/hinges 105A.Along its length, to 105D beam body 103A is connected to corresponding anchor 104B to 104D by springs/hinges 105B, and to 105G beam body 103B is connected to corresponding anchor 104E to 104G by springs/hinges 105E.In one embodiment, spring 105B is located in beam body 103A in 103B to 105G.Anchor 104A is installed on the bottom 100B (Fig. 1 C) to 104H.
Referring to Fig. 1 C, bottom 100B comprises surperficial 106A to 106H, and it serves as the anchoring surface of removable frame among the top layer 100A (Figure 1A).In detail, anchor 104A is adhered to corresponding surperficial 106A to 106H to 104H.Chamber 107 holds the rotation of scanning mirror 101 and non-contact bottom layer 100B.In one embodiment, fixed fingers 110 provides static driven power with driven sweep mirror 101.In another embodiment, fixed fingers 110 is provided for increasing the static biasing force of the driving efficient of removable frame.In another embodiment, fixed fingers 110 provides static driven power and static biasing force.When observing from the top down fixed fingers 109 and 110 and the rotation broach 108 interlaced.
As described above, spring 105A to 105H along beam body 103A and 103B distribute.The distribution with translational stiffness reversed by careful these springs of adjustment can effectively separate all model frequencies of removable frame and can will rotate the mode design at lowest resonant frequency.Because main resonatnt frequency is minimum and away from other structural modal frequency, will not excite any other non-desired mode of oscillation so mirror rotates.
Use a plurality of springs, maximum stress on each indivedual spring and tension force significantly are lower than traditional scanning mirror design of only being supported by a pair of torsion beam body.The reliability of therefore, disperseing spring design significantly improvement equipment.Generally, system reliability and servo and optical property all are improved by embodiments of the invention.
Fig. 2 A has illustrated MEMS scanning mirror equipment 200 in one embodiment of the invention.Equipment 200 comprises top layer 200A (Fig. 2 B) and bottom 200B (Fig. 2 C).
Referring to Fig. 2 B, top layer 200A comprises mirror 201, and it is connected to beam body 203A and 203B by a plurality of Holder Fasteners 202.Similar to shown in Figure 1B of mirror 201 and Holder Fasteners 202.Rotation broach 208 is connected to the side of beam body 203A and 203B.
To 205H beam body 203A and 203B are connected to the fixed surface 204 of top surface 200A along the turning axle of scanning mirror 201 with dispersing mode by springs/hinges 205A.In detail, the far-end of beam body 203A is connected to surface 204, and the far-end of beam body 203B is connected to surface 204 by springs/hinges 205H by springs/hinges 205A.Along its length, to 205D beam body 203A is connected to surface 204 by springs/hinges 205B, and to 205G beam body 203B is connected to surface 204 by springs/hinges 205E.
Referring to Fig. 2 C, bottom 200B comprises chamber 207, and it holds the rotation of scanning mirror 201 and non-contact bottom layer 200B.In one embodiment, fixed fingers 210 provides static driven power with driven sweep mirror 201.In another embodiment, fixed fingers 210 is provided for increasing the static biasing force of the driving efficient of moving structure.In another embodiment, fixed fingers 210 provides static driven power and static biasing force.Fixed fingers 210 is interlaced with rotation broach 208 when observing from the top down.
Fig. 3 shows the typical mirror dynamic deformation of mirror 301.Mirror 301 is along the rotation of x-axle, in its sensing page or leaf or outside the page or leaf.Showed whole mirror dynamic deformation 302.X-axle and y-axle have formed the plane at place, an original mirror surface.The z-axle is used to describe outside the mirror plane and moves.The mirror dynamic deformation is the function of mirror thickness, sweep frequency, mirror size and the anglec of rotation.The peak to peak dynamic deformation must less than wavelength 1/4th in case end the optical property of diffraction-limited scanning mirror.According to estimates, mirror accessory structure that is proposed and the method shown in Figure 1A and the 2A reduced the mirror dynamic deformation up to 50%.
Various other adjustment and the combination of the characteristics of these embodiment that disclosed within the scope of the present invention.For example, though scanning mirror 201 is driven by fixed pan external tooth 210, we can revise embodiments of the invention makes scanning mirror 201 be driven by the fixed pan internal tooth.Following claim comprises many embodiment.
Claims (8)
1. micro-electromechanical system (MEMS) scanning mirror equipment, it comprises:
The one scan mirror;
One girder construction, one end are connected on this scanning mirror, and this girder construction extends to the other end away from this scanning mirror; With
A plurality of springs, the end of each is connected to this girder construction, wherein these springs along a turning axle of this scanning mirror arrange and at least one spring between another spring and this scanning mirror.
2. equipment according to claim 1, wherein the other end of at least one these a plurality of spring is connected to a corresponding anchor that is adhered to corresponding fixed surface.
3. equipment according to claim 1, wherein the other end of at least one a plurality of spring is connected to a fixed surface.
4. equipment according to claim 1 also comprises:
A plurality of rotation broach, it is connected to this girder construction; With
The plurality of fixed broach, wherein these fixed fingers and these rotation broach are interlaced.
5. equipment according to claim 1, wherein this of this girder construction end is connected to a plurality of positions on this scanning mirror.
6. equipment according to claim 1, wherein this MEMS scanning mirror equipment is the part of the system that selects from the group that is made of a bar-code reader, a printer, a confocal microscope, a display, a TV and a wearable display.
7. equipment according to claim 1, wherein this at least one spring is arranged in an opening of this girder construction.
8. equipment according to claim 1 further comprises:
One extra girder construction, its end that is positioned at this scanning mirror certainly extends to the other end away from this scanning mirror, and wherein this of this extra girder construction end is connected to the extra a plurality of positions on this scanning mirror; With a plurality of additional springs, its each a end all is connected to this extra girder construction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410056963XA CN100367070C (en) | 2004-08-24 | 2004-08-24 | Micro-electromechanic system scanning lens with dispersion hinge and multi-supporting accessories |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410056963XA CN100367070C (en) | 2004-08-24 | 2004-08-24 | Micro-electromechanic system scanning lens with dispersion hinge and multi-supporting accessories |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1740843A CN1740843A (en) | 2006-03-01 |
| CN100367070C true CN100367070C (en) | 2008-02-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB200410056963XA Expired - Fee Related CN100367070C (en) | 2004-08-24 | 2004-08-24 | Micro-electromechanic system scanning lens with dispersion hinge and multi-supporting accessories |
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Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5736766B2 (en) * | 2010-12-22 | 2015-06-17 | ミツミ電機株式会社 | Optical scanning device |
| EP2823351A4 (en) * | 2012-03-07 | 2016-01-06 | Univ Singapore | A mems iris diaphragm for an optical system and method for adjusting a size of an aperture thereof |
| AU2013294616B2 (en) | 2012-07-26 | 2016-04-28 | Apple Inc. | Dual-axis scanning mirror |
| US8711495B2 (en) | 2012-10-01 | 2014-04-29 | Apple Inc. | MEMS autofocus actuator |
| CN105607249B (en) * | 2015-12-21 | 2018-06-26 | 西安励德微系统科技有限公司 | A kind of torsional micro-mirror of the not contour pivotal quantity in unilateral side |
| CN108226936B (en) * | 2017-11-10 | 2022-02-11 | 无锡英菲感知技术有限公司 | Time division sharing window laser radar system based on micro-mirror |
| CN108089174B (en) * | 2017-11-10 | 2021-12-03 | 无锡英菲感知技术有限公司 | Double-scanning view field sharing window laser radar system based on micro-mirror |
| CN108061884B (en) * | 2017-11-10 | 2021-12-03 | 无锡英菲感知技术有限公司 | Shared window laser radar system based on micro-mirror |
| CN107942509B (en) * | 2017-12-11 | 2020-06-12 | 无锡英菲感知技术有限公司 | Micro mirror with distributed elastic structure |
| CN110879466A (en) * | 2019-12-04 | 2020-03-13 | 中国科学院光电技术研究所 | Device for realizing low-frequency large-angle MEMS scanning mirror |
| CN116086420B (en) * | 2023-02-20 | 2024-03-12 | 北京中科海芯科技有限公司 | Vibrating ring MEMS gyroscope and manufacturing method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6686639B1 (en) * | 2002-09-30 | 2004-02-03 | Innovative Technology Licensing, Llc | High performance MEMS device fabricatable with high yield |
| US20040099739A1 (en) * | 2002-11-22 | 2004-05-27 | Ting-Tung Kuo | Bidirectional mems scanning mirror with tunable natural frequency |
| US6758983B2 (en) * | 2000-05-31 | 2004-07-06 | The Regents Of The University Of California | Staggered torsional electrostatic combdrive and method of forming same |
-
2004
- 2004-08-24 CN CNB200410056963XA patent/CN100367070C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6758983B2 (en) * | 2000-05-31 | 2004-07-06 | The Regents Of The University Of California | Staggered torsional electrostatic combdrive and method of forming same |
| US6686639B1 (en) * | 2002-09-30 | 2004-02-03 | Innovative Technology Licensing, Llc | High performance MEMS device fabricatable with high yield |
| US20040099739A1 (en) * | 2002-11-22 | 2004-05-27 | Ting-Tung Kuo | Bidirectional mems scanning mirror with tunable natural frequency |
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| Publication number | Publication date |
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| CN1740843A (en) | 2006-03-01 |
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