CN100359368C - Microelement and manufacturing method - Google Patents
Microelement and manufacturing method Download PDFInfo
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- CN100359368C CN100359368C CNB2004101035377A CN200410103537A CN100359368C CN 100359368 C CN100359368 C CN 100359368C CN B2004101035377 A CNB2004101035377 A CN B2004101035377A CN 200410103537 A CN200410103537 A CN 200410103537A CN 100359368 C CN100359368 C CN 100359368C
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- groove
- solution
- microcomponent
- substrate
- guiding runner
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 239000000758 substrate Substances 0.000 claims description 40
- 238000000926 separation method Methods 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 25
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 4
- 238000004381 surface treatment Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 238000009832 plasma treatment Methods 0.000 claims description 2
- 230000007547 defect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 42
- 230000004888 barrier function Effects 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 230000002950 deficient Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 210000000988 bone and bone Anatomy 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002094 self assembled monolayer Substances 0.000 description 1
- 239000013545 self-assembled monolayer Substances 0.000 description 1
- 238000001338 self-assembly Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
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Abstract
The present invention relates to a microelement and a manufacturing method thereof. The microelement comprises a base plate, an isolating layer and a solution, wherein the isolating layer is arranged on the base plate. At least one groove and a guidance flow passage communicated with the groove are defined. The solution is positioned in the groove. The partial solution flows into the guidance flow passage through the capillary phenomenon between the groove and the guidance flow passage. In the present invention, because the guidance flow passage is arranged, when the solution contacts the base plate, the solution in the balancing groove can be automatically adjusted by the guidance flow passage along with the depth of the manufacturing process, the overmuch solution is discharged out of the groove, and the probability of mixed flow, turbulent flow and the defect of end points is reduced. After the solution is completely dried, a uniform forming film is formed.
Description
Technical field
The invention relates to a kind of microcomponent and manufacture method thereof, particularly relevant for a kind of microcomponent that utilizes runner (channel) design and capillary action (capillary) to make the fluid thickness homogenising in it.
Background technology
Ink ejecting method can be used for making microcomponent, for example, colored filter (ColorFilter), display of organic electroluminescence (organic electroluminescentdisplay, OELD), micro-optic mirror (Microlenses) and give birth to the doctor and detect wafer (Bio-Chip); In the manufacture process of general microcomponent, can on a substrate, define predetermined pattern, be called pixel (pixel), and be aided with the structural design of channel form (trench), when falling within on the substrate, can there be uniform film to produce to reach the ink-jet ink dot.But because the physical behavio(u)r of ink ejecting method opens stage beginning in ink-jet usually, belong to unsure state, make that the defective of producing is more serious, and work as the stage that ink-jet reaches steady and continuous spray figure, then its homogeneity is comparatively good.In addition, when deposit of ink is on substrate, because between small pixel and channel form structure, it is poor to produce the capillarity build-up of pressure, makes dried film thickness that uneven phenomenon be arranged.Again, when being closed, move, can cause the pixel at two ends to produce serious defective because of capillary force causes the liquid between groove as if the channel form structure.
No. 2003/0193057 patent of US provides a kind of have dynamo-electric glimmering active display and manufacture method thereof, with reference to figure 1a, 1b, 1c, when manufacturing has dynamo-electric glimmering active display, on a substrate 1, form one first electrode layer 2 earlier, then on first electrode layer 2, form one first separation layer (insulation) 3 and one second separation layer 4, form a barrier layer (barrier) 8 respectively at the two ends 41 and 42 of the runner 40 that forms by second separation layer 4 afterwards, can reduce the organic polymer layers 5 that is filled in the runner 40 and 6 the thickness difference opposite sex by this barrier layer 8.
Yet, because separation layer is the structure by the twice processing procedure section of formation difference, and need in runner, to form a barrier layer, can make processing procedure complicated.
Summary of the invention
The object of the present invention is to provide a kind of microcomponent, have the design of flowing, its objective is that in order to make fluid reach the balance of pressure in the groove runner, the smooth shaping of guiding film is even via little coating with capillarity guiding fluid.
According to the present invention, a kind of microcomponent is provided, comprise a substrate, a separation layer and a solution, separation layer is arranged on the substrate, wherein defines a guiding runner that has a groove at least and be communicated with groove, and wherein this directed stream road has portion of a plurality of class; Solution is arranged in groove, and the part of solution is guided in the runner and flow to by the capillarity between groove and the guiding runner.
A kind of microcomponent of the present invention, groove have a set width r, and the guiding runner is to be the convergence shape with respect to groove, and have a minimum widith a1, and the ratio range of minimum widith a1 and groove width r are to be 0＜a1/r≤1.
A kind of microcomponent of the present invention, groove have one first end and are positioned at one second end of the end opposite of first end, and all are communicated with a guiding runner at first end and second end.
A kind of microcomponent of the present invention more comprises a conductive layer, and between substrate and separation layer, wherein solution is to be positioned on the conductive layer, and conductive layer is to be made by indium tin oxide; Again, substrate can be a glass.
A kind of microcomponent of the present invention, the xsect of groove changes, also can cause pressure gap, direct fluid flows, and therefore its cross-sectional shape can be the design of quadrilateral, trapezoid, trapezoidal, parabolic profile, equilateral triangle, del or positive T shape; In addition, will be appreciated that gash depth also can be the design of the non-homogeneous degree of depth.
Again in the present invention, provide a kind of manufacture method of microcomponent, comprise the following steps: at first, a substrate and a microfluid generation device are provided, wherein be filled with a solution in the microfluid generation device; Then, the separation layer that forms a patterning wherein defines a guiding runner that has a groove at least and be communicated with groove on substrate, and wherein this directed stream road has portion of a plurality of class; Afterwards, provide solution in groove, and, the part of solution is flow to the directed stream road from groove by the capillarity between groove and the guiding runner by the microfluid generation device.
The manufacture method of a kind of microcomponent of the present invention is forming separation layer before on the substrate, and substrate is with plasma treatment or form single thin film certainly and handle the mode of (Self AssembledMonolayer) and carry out surface treatment, and forms a conductive layer on substrate.
The manufacture method of a kind of microcomponent of the present invention the part of solution flows to the directed stream road from groove after, makes solution dry in groove and guiding runner, and the guiding runner is separated with groove.
The manufacture method of a kind of microcomponent of the present invention, microfluid generation device can be an ink gun or a point gum machine, and can contain particulate in the solution.
A kind of microcomponent of the present invention comprises: a substrate; One separation layer is arranged on this substrate, wherein defines a guiding runner that has a groove at least and be communicated with this groove, and wherein this directed stream road has portion of a plurality of class, and this guiding runner is divergent shape with respect to this groove; And a solution, be arranged in this groove, wherein the part of this solution can flow in this guiding runner.
Microcomponent of the present invention, wherein this groove has a set width r, and this directed stream road has a breadth extreme a2, and the ratio range of this breadth extreme a2 and this groove width r is 1≤a2/r＜100.
In the present invention, by the guiding runner is set, when solution touches substrate, carrying out along with processing procedure, the guiding runner can be adjusted the solution in the balance groove automatically, and too much solution is discharged outside the groove, reduces the probability of mixed flow flow-disturbing and end points defective, behind the last solution bone dry, a uniform film forming.
Description of drawings
Fig. 1 a, 1b, 1c are the synoptic diagram that dynamo-electric glimmering active display and manufacture method thereof are arranged for No. 2003/0193057, US;
Fig. 2 a is the synoptic diagram for the manufacture method of microcomponent of the present invention;
Fig. 2 b is the synoptic diagram for groove among Fig. 2 a and guiding runner;
Fig. 3 a, 3b, 3c, 3d are the synoptic diagram for the variation of groove of the present invention and guiding runner.
Embodiment
For above and other objects of the present invention, feature and advantage can be become apparent, a preferred embodiment cited below particularly, and cooperate appended icon, be described in detail below.
With reference to figure 2a, microcomponent 100 of the present invention comprises a substrate 110, a conductive layer 120, a separation layer 130 and a solution 140, and wherein substrate 110 can be made by glass, as the substrate of whole microcomponent.
Conductive layer 120 is formed on the substrate 110, and between substrate 110 and separation layer 130, and can (indium tin oxide ITO) makes, and can be used as the electrode of microcomponent 100 by indium tin oxide.
Know clearly it, in Fig. 2 b, groove 131 is to have a set width r, and guiding runner 132 is to be the convergence shape with respect to groove 131, and have a minimum widith a1, and the ratio range of minimum widith a1 and groove width r is to be 0＜a1/r＜1, by equilibrium equation (2 γ of capillary theory
p/ R
p=2 γ
d/ R
d-2 γ
PdCos (θ
a)/r) worked as θ as can be known
aWith γ for fixedly the time, can be by the width value of control groove 131 and guiding runner 132, the part of the solution 140 in groove 131 can be concerned because of the width ratio between groove 131 and the guiding runner 132, and flow in the guiding runner 132 by capillarity, reach the purpose that balance flows.
In addition, it should be noted in separation layer 130 it generally is that definition has a plurality of grooves, at this for convenience of description, in Fig. 2 b, only show one.
Again, it should be noted that the shape of guiding runner is not limited to the shape shown in Fig. 2 b, for example, with reference to the separation layer 130a shown in Fig. 3 a, guiding runner 132a does not have portion of class, but with respect to the shape of groove 131a for the convergence shape; Again, with reference to the separation layer 130b shown in Fig. 3 b, guiding runner 132b is to be divergent shape with respect to groove 131b, and has a breadth extreme a2, and the ratio range of breadth extreme a2 and groove width r is to be 1＜a2/r＜100th, preferably; Again, with reference to the separation layer 130c shown in Fig. 3 c, guiding runner 132c has the width identical with groove 131c, that is the ratio of the width of guiding runner 132c and the width of groove 131c is 1.
In addition, the guiding runner also is not limited to only be arranged at an end of groove, for example, with reference to the separation layer 130d shown in Fig. 3 d, can all be communicated with a guiding runner 132d in the two ends of groove 131d.
Again, the xsect of groove can be the design of quadrilateral, trapezoid, trapezoidal, parabolic profile, equilateral triangle, del or positive T shape.In addition, will be appreciated that in the present embodiment that be that the groove with even depth explains, but be not limited to this, gash depth also can be the design of the non-homogeneous degree of depth.
The structure of microcomponent 100 of the present invention below illustrates its manufacture method as mentioned above.
With reference to figure 2a, at first on a carrying platform 200, place a substrate 110, and the mode that single thin film (selfassembly monolayer) handles is handled or formed certainly on substrate 110 surfaces carry out surface treatment, the hydrophilic and hydrophobic matter of being wanted to obtain with plasma (plasma); Then, form conductive layer 120 on substrate 110, afterwards, the separation layer 130 that forms patterning is on conductive layer 120, and wherein definition has groove 131 and guiding runner 132 at least; Then, provide solution 140 in groove 131 and with conductive layer 120, to contact by a microfluid generation device 300 that is filled with solution 140, and, the part of solution 140 is flow to the guiding runner 132 from groove 131 by the capillarity between groove 131 and the guiding runner 132; At last, make solution 140 in groove 131 and guiding runner 132, after the drying, guiding runner 132 be separated, with groove 131 with the microcomponent that obtains wanting.
Will be appreciated that microfluid generation device 300 can be an ink gun or a point gum machine, and can contain particulate in the solution 140.
In addition, will be appreciated that above-mentioned surface treatment can be only to handle at trench region or only handle at non-trench region.
In the present invention, by the guiding runner is set, when solution touches substrate, along with the carrying out of processing procedure, the guiding runner can be adjusted the solution in the groove automatically, and too much solution is discharged outside the groove, reduce the probability of mixed flow and flow-disturbing, behind the last solution bone dry, a uniform film forming.
The above only is preferred embodiment of the present invention; so it is not in order to limit scope of the present invention; any personnel that are familiar with this technology; without departing from the spirit and scope of the present invention; can do further improvement and variation on this basis, so the scope that claims were defined that protection scope of the present invention is worked as with the application is as the criterion.
Being simply described as follows of symbol in the accompanying drawing:
1: substrate
2: the first electrode layers
3: the first separation layers
4: the second separation layers
5,6: organic polymer layers
8: barrier layer
40: runner
41,42: end
100: microcomponent
110: substrate
120: conductive layer
130,130a, 130b, 130c, 130d: separation layer
131,131a, 131b, 131c, 131d: groove
132,132a, 132b, 132c, 132d: guiding runner
132 ': portion of class
140: solution
200: carrying platform
300: the microfluid generation device
Claims (24)
1, a kind of microcomponent is characterized in that described microcomponent comprises:
One substrate;
One separation layer is arranged on this substrate, wherein defines a guiding runner that has a groove at least and be communicated with this groove, and wherein this directed stream road has portion of a plurality of class; And
One solution is arranged in this groove, and wherein the part of this solution is by this groove and should the capillarity of guiding between the runner, and flows in this guiding runner.
2, microcomponent according to claim 1 is characterized in that:
This groove has a set width r, and this guiding runner is to be the convergence shape with respect to this groove.
3, microcomponent according to claim 2 is characterized in that:
This directed stream road has a minimum widith a1, and the ratio range of this minimum widith a1 and this groove width r is to be 0＜a1/r≤1.
4, microcomponent according to claim 1 is characterized in that:
This groove has one first end and is positioned at one second end of the end opposite of this first end, and all is communicated with a guiding runner at this first end and this second end.
5, microcomponent according to claim 1 is characterized in that:
More comprise a conductive layer, between this substrate and this separation layer, wherein this solution is to be positioned on this conductive layer.
6, microcomponent according to claim 5 is characterized in that:
This conductive layer is to be made by indium tin oxide.
7, microcomponent according to claim 1 is characterized in that:
This substrate is to be a glass.
8, microcomponent according to claim 1 is characterized in that:
This gash depth is heterogeneous.
9, microcomponent according to claim 1 is characterized in that:
The xsect of this groove is a quadrilateral.
10, microcomponent according to claim 1 is characterized in that:
The xsect of this groove is a trapezoid.
11, microcomponent according to claim 1 is characterized in that:
The xsect of this groove is for trapezoidal.
12, microcomponent according to claim 1 is characterized in that:
The xsect of this groove is a para-curve.
13, microcomponent according to claim 1 is characterized in that:
The xsect of this groove is an equilateral triangle.
14, microcomponent according to claim 1 is characterized in that:
The xsect of this groove is a del.
15, microcomponent according to claim 1 is characterized in that:
The xsect of this groove is positive T shape.
16, a kind of manufacture method of microcomponent is characterized in that the manufacture method of described microcomponent comprises:
One substrate and a microfluid generation device are provided, wherein are filled with a solution in this microfluid generation device;
The separation layer that forms a patterning wherein defines a guiding runner that has a groove at least and be communicated with this groove on this substrate, wherein this directed stream road has portion of a plurality of class; And
Provide this solution in this groove by this microfluid generation device, and, the part of this solution is flow to this guiding runner from this groove by the capillarity between this groove and this guiding runner.
17, the manufacture method of microcomponent according to claim 16 is characterized in that:
Forming this separation layer before on this substrate, form a conductive layer on this substrate.
18, the manufacture method of microcomponent according to claim 16 is characterized in that:
The part of this solution flows to this guiding runner from this groove after, this guiding runner is separated with this groove.
19, the manufacture method of microcomponent according to claim 16 is characterized in that:
The microfluid generation device is to be an ink gun or a point gum machine.
20, the manufacture method of microcomponent according to claim 16 is characterized in that: forming this separation layer before on this substrate, this substrate is with plasma treatment or form the mode that single thin film handles certainly and carry out surface treatment.
21, the manufacture method of microcomponent according to claim 16 is characterized in that:
The part of this solution flows to this guiding runner from this groove after, make this solution dry in this groove and this guiding runner.
22, the manufacture method of microcomponent according to claim 16 is characterized in that:
Contain particulate in this solution.
23, a kind of microcomponent is characterized in that, comprising:
One substrate;
One separation layer is arranged on this substrate, wherein defines a guiding runner that has a groove at least and be communicated with this groove, and wherein this directed stream road has portion of a plurality of class, and this guiding runner is divergent shape with respect to this groove; And
One solution is arranged in this groove, and wherein the part of this solution can flow in this guiding runner.
24, microcomponent according to claim 23 is characterized in that: this groove has a set width r, and this directed stream road has a breadth extreme a2, and the ratio range of this breadth extreme a2 and this groove width r is 1≤a2/r＜100.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004101035377A CN100359368C (en) | 2004-12-29 | 2004-12-29 | Microelement and manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004101035377A CN100359368C (en) | 2004-12-29 | 2004-12-29 | Microelement and manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1797072A CN1797072A (en) | 2006-07-05 |
| CN100359368C true CN100359368C (en) | 2008-01-02 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004101035377A Expired - Fee Related CN100359368C (en) | 2004-12-29 | 2004-12-29 | Microelement and manufacturing method |
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| Country | Link |
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| CN (1) | CN100359368C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NO342032B1 (en) * | 2013-10-25 | 2018-03-12 | Trilobite Innovation As | Fluid refining device and assembly |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4005440A (en) * | 1974-03-12 | 1977-01-25 | Facit Aktiebolag | Printing head for ink jet printer |
| US6774392B2 (en) * | 2002-04-10 | 2004-08-10 | Samsung Sdi Co., Ltd. | Organic light emitting diode and method for producing the same |
| US20040202819A1 (en) * | 2002-11-18 | 2004-10-14 | Osram Opto Semiconductors Gmbh & Co. Ohg | Ink jet bank substrates with channels |
| CN1550334A (en) * | 2003-05-09 | 2004-12-01 | ������������ʽ���� | Base board ,device and manufacturing method ,active matrix base board manufacturing method and electro-optical device |
-
2004
- 2004-12-29 CN CNB2004101035377A patent/CN100359368C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4005440A (en) * | 1974-03-12 | 1977-01-25 | Facit Aktiebolag | Printing head for ink jet printer |
| US6774392B2 (en) * | 2002-04-10 | 2004-08-10 | Samsung Sdi Co., Ltd. | Organic light emitting diode and method for producing the same |
| US20040202819A1 (en) * | 2002-11-18 | 2004-10-14 | Osram Opto Semiconductors Gmbh & Co. Ohg | Ink jet bank substrates with channels |
| CN1550334A (en) * | 2003-05-09 | 2004-12-01 | ������������ʽ���� | Base board ,device and manufacturing method ,active matrix base board manufacturing method and electro-optical device |
Non-Patent Citations (1)
| Title |
|---|
| 微细加工技术在有机电微细加工技术在有机电致发光器件中的应用. 刘陈，邹雪城，尹盛.现代显示，第39期. 2003 * |
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| Publication number | Publication date |
|---|---|
| CN1797072A (en) | 2006-07-05 |
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