CN100356177C - 高精度隧道式加速度计及其制备方法 - Google Patents
高精度隧道式加速度计及其制备方法 Download PDFInfo
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- CN100356177C CN100356177C CNB2003101224783A CN200310122478A CN100356177C CN 100356177 C CN100356177 C CN 100356177C CN B2003101224783 A CNB2003101224783 A CN B2003101224783A CN 200310122478 A CN200310122478 A CN 200310122478A CN 100356177 C CN100356177 C CN 100356177C
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CNB2003101224783A CN100356177C (zh) | 2003-12-25 | 2003-12-25 | 高精度隧道式加速度计及其制备方法 |
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CNB2003101224783A CN100356177C (zh) | 2003-12-25 | 2003-12-25 | 高精度隧道式加速度计及其制备方法 |
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CN1635381A CN1635381A (zh) | 2005-07-06 |
CN100356177C true CN100356177C (zh) | 2007-12-19 |
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CNB2003101224783A Expired - Fee Related CN100356177C (zh) | 2003-12-25 | 2003-12-25 | 高精度隧道式加速度计及其制备方法 |
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Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101323426B (zh) * | 2008-07-02 | 2011-05-04 | 北京航空航天大学 | 一种超重质量块面内微型惯性器件结构及其制备方法 |
CN105319394B (zh) * | 2015-12-07 | 2018-03-13 | 太原理工大学 | 一种基于共振光隧穿效应的角加速度检测器及检测方法 |
CN105548610B (zh) * | 2015-12-07 | 2018-05-04 | 太原理工大学 | 一种基于共振光隧穿效应的加速度检测器及检测方法 |
CN106908623B (zh) * | 2017-02-22 | 2021-11-30 | 南开大学 | 精密测量加速度的单分子装置 |
CN107747981A (zh) * | 2017-09-27 | 2018-03-02 | 东南大学 | 电感悬臂梁无线无源流量传感器 |
CN107765036A (zh) * | 2017-09-27 | 2018-03-06 | 东南大学 | 电感双端固支梁无线无源加速度传感器 |
CN107817058A (zh) * | 2017-09-27 | 2018-03-20 | 东南大学 | 电感悬臂梁无线无源温度传感器 |
CN107727696A (zh) * | 2017-09-27 | 2018-02-23 | 东南大学 | 电感悬臂梁无线无源湿度传感器 |
CN107576821A (zh) * | 2017-09-27 | 2018-01-12 | 东南大学 | 电感悬臂梁无线无源加速度传感器 |
CN107782472A (zh) * | 2017-09-27 | 2018-03-09 | 东南大学 | 电感双端固支梁无线无源应力传感器 |
CN111579818B (zh) * | 2020-07-06 | 2021-09-28 | 吉林大学 | 一种高灵敏度低噪声加速度检测装置及方法 |
CN112034203B (zh) * | 2020-07-17 | 2022-02-11 | 北京大学 | 一种高精度隧道式加速度计及其制备方法 |
CN112505354B (zh) * | 2021-01-25 | 2021-06-01 | 杭州麦新敏微科技有限责任公司 | Mems线性加速度计和形成方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5436452A (en) * | 1992-06-15 | 1995-07-25 | California Institute Of Technology | Uncooled tunneling infrared sensor |
US5526703A (en) * | 1992-08-21 | 1996-06-18 | Smiths Industries Aerospace & Defense Systems, Inc. | Force detecting sensor and method of making |
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2003
- 2003-12-25 CN CNB2003101224783A patent/CN100356177C/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5436452A (en) * | 1992-06-15 | 1995-07-25 | California Institute Of Technology | Uncooled tunneling infrared sensor |
US5526703A (en) * | 1992-08-21 | 1996-06-18 | Smiths Industries Aerospace & Defense Systems, Inc. | Force detecting sensor and method of making |
Non-Patent Citations (3)
Title |
---|
一种新型的微机械电子遂穿加速度计 杨拥军等.东南大学学报,第30卷第6期 2000 * |
电子隧道传感器的原理、现状与发展 龙志峰等.光学 精密工程,第6卷第2期 1998 * |
硅尖的制备及在传感器技术中的应用 王艳华等.传感器技术,第22卷第6期 2003 * |
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CN1635381A (zh) | 2005-07-06 |
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Assignee: Beijing sealand Jiaxing United Technology Co., Ltd. Assignor: Peking University Contract fulfillment period: 2008.11.18 to 2015.11.18 contract change Contract record no.: 2008110000221 Denomination of invention: High precision tunnel type accelerometer and preparation method thereof Granted publication date: 20071219 License type: Exclusive license Record date: 20081230 |
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Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2008.11.18 TO 2015.11.18; CHANGE OF CONTRACT Name of requester: BEIJING GUOHAI JIAXING UNITED SCIENCE CO., LTD. Effective date: 20081230 |
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