CN100354700C - Faraday rotator, optical isolator, polarizer, and diamond-like carbon thin film - Google Patents
Faraday rotator, optical isolator, polarizer, and diamond-like carbon thin film Download PDFInfo
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- CN100354700C CN100354700C CNB2005100845333A CN200510084533A CN100354700C CN 100354700 C CN100354700 C CN 100354700C CN B2005100845333 A CNB2005100845333 A CN B2005100845333A CN 200510084533 A CN200510084533 A CN 200510084533A CN 100354700 C CN100354700 C CN 100354700C
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Abstract
New material useful in miniature, low-cost Faraday rotators, polarizers (analyzers) and magnetic substances; in Faraday rotators and optical isolators that can handle a plurality of wavelengths; and in miniaturizing, and reducing the cost and enhancing the performance of, optical isolators and various optical devices. Optical isolator (60b) as one example is configured by rectilinearly arranging a wavelength-selective Faraday rotator (30), a polarizer (20) and an analyzers (40) formed from a DLC thin film, and a magnetic substance (50) that is transparent to light. Integrally forming these using thin-film lamination technology simplifies the fabrication procedure to enable manufacturing miniature, low-cost optical isolators.
Description
The present invention is that application number is 02157549.5, denomination of invention is divided an application for the patented claim of " Faraday rotator, optical isolator, polarizer and diamond-like carbon film ".
Technical field
The present invention relates to Faraday rotator, optical isolator, polarizer and diamond-like carbon film, more specifically to the Faraday rotator that is used for rotating the light wave plane of polarization---in the optical communication field---, be used to stop Returning beam arrive the optical isolator of light source, be used for only seeing through light a given polarized component polarizer and as the diamond-like carbon film of optical communication field material.
Background technology
In the optical communication system that constitutes by optical fiber and optical element, be incorporated into light source once more sometimes from the light of optical connector node and light path element reflection.The return light source noise that light beam the produced subject matter in optical communication system and the optical devices design normally of---particularly semiconductor laser---.
Be generally used for stopping that the device of Returning beam is an optical isolator, its composed component is a Faraday rotator, a polarizer, an analyzer and a magnet assembly.
Utilize magnet assembly that phosphor (magneto-optic memory technique) is applied a magnetic field, the Faraday rotator rotation is along the plane of polarization of the incident beam of this magnetic direction propagation.Simultaneously, polarizer (analyzer) only allows a given polarized light component to pass through, and stops except that the composition this polarization.
As shown in figure 14, optical isolator 6 is shaped as the assembly of a polarizer 2, a Faraday rotator 3, an analyzer 4 and a magnet assembly, and utilizes non-repulsion (non-repelling) characteristic of magneto-optic memory technique to stop incident light introducing once more the other way around.Below, with reference to Figure 14 common optical isolator assembly is described more specifically.
Incident light from light source 1 at first is filtered into a plane of polarization by polarizer 2, and then by Faraday rotator 3, thereby this plane of polarization is rotated 45 °.Along with its plane of polarization has been rotated 45 °, incident light passes and penetrates from analyzer 4, and a part enters analyzer 4 once more as Returning beam, and is introduced once more in the Faraday rotator 3.Faraday rotator 3 rotates 45 ° with the plane of polarization of Returning beam once more, because its plane of polarization has been rotated 90 ° altogether, this Returning beam can not pass through polarizer 2, thereby has stopped Returning beam.
Being appreciated that angled with the arrow of light of representing to send from light source 1 or Returning beam and arrow that draw, is the schematically illustrating of polarization direction of emission light or Returning beam.
Usually yttrium iron garnet (below be written as YIG) crystal or bismuth are substituted garnet crystal as traditional Faraday rotator (phosphor).In addition, for conventional polariser (analyzer), use rutile (titanium dioxide) monocrystalline or the glass of silver-colored in its surface particle usually with the single direction orientation; And, use Rare-Earth Magnetic material based on samarium for the magnet assembly that applies magnetic field to phosphor.
The yig crystal or the alternative garnet crystal of bismuth that are mainly used in traditional Faraday rotator must have certain thickness, and to obtain required faraday's anglec of rotation, this has caused bigger profile.Equally, for be mainly used in conventional polariser (analyzer), silver-colored particle is in its surface with the situation of the rutile single crystals and the glass of single direction orientation, with main with the situation of making phosphor is applied the magnet assembly in magnetic field based on the Rare-Earth Magnetic material of samarium, because they must take certain volume, so this profile becomes bigger.And---its basic comprising element is a Faraday rotator, a polarizer (analyzer) and a magnet assembly---has overall large-sized problem especially for traditional isolator.
Simultaneously, Faraday rotator, polarizer (analyzer) and magnet are expensive, and to make the traditional optical isolator cost with these composed components expensive more thereby make.Another problem is, because the single composed component in the traditional optical isolator is independently, so their integrated process complexity has more strengthened cost.
In addition, owing to determine that the universal law of Faraday rotator angle is its thickness, traditional Faraday rotator only can a corresponding single wavelength.For with the traditional optical isolator of traditional Faraday rotator as a composed component, thing followed problem also is that they only can handle a single wavelength basically.
Summary of the invention
As mentioned above, the objective of the invention is: the first, respectively to Faraday rotator, polarizer, analyzer, magnet and optical isolator, carry out miniaturization and reduction cost with these composed components; The second, make Faraday rotator and optical isolator can handle a plurality of wavelength; The 3rd, a kind of at first for polarizer, and various optical devices carry out miniaturization, reduce cost and improve the useful new material of performance.
The invention reside in a kind of Faraday rotator, be used for only rotating setted wavelength polarization of incident light face selectively, it is characterized in that having: magneto-optic parts, the polarization of incident light face that rotation is propagated along its magnetic direction with wavelength selectivity; With a dielectric multilayer film, wherein low-index layer and high refractive index layer are alternately laminated, are used for the incident light of at least one wavelength is limited in this magneto-optic parts.
Preferably, this dielectric multilayer film is characterised in that the incident beam with a plurality of wavelength is limited in these magneto-optic parts.
Further preferably, these magneto-optic parts are characterised in that by the gadolinium iron garnet film and constitute.
Further preferably, this dielectric multilayer film is characterised in that by constituting as the monox of low-index layer with as the titanium dioxide of high refractive index layer is alternately laminated.
Further preferably, these magneto-optic parts and dielectric multilayer film are characterised in that by the integrated formation of vapour phase process.
Under independent aspects of the present invention, a kind of have optical isolator wavelength selectivity, that be used for only stopping selectively the Returning beam of setted wavelength incident light, it is characterized in that having: magneto-optic parts are used to rotate the polarization of incident light face of propagating along its magnetic direction; One magnet assembly is used for the magneto-optic parts are applied magnetic field; One dielectric multilayer film, wherein low-index layer and high refractive index layer are alternately laminated, are used for the incident light of at least one wavelength is limited in this magneto-optic parts; One polarizer is used for selecting polarized component from incident beam; With an analyzer that is used in combination with this polarizer.
Preferably, this dielectric multilayer film is characterised in that the incident beam with a plurality of wavelength is limited in these magneto-optic parts.
Further preferably, these magneto-optic parts are characterised in that by the gadolinium iron garnet film and constitute.
Further preferably, this magnet assembly is characterised in that, and is ferromagnetic by at room temperature showing, the gallium nitride magnetic semiconductor film of optical transparency is constituted.
Further preferably, this dielectric multilayer film is characterised in that by constituting as the monox of low-index layer with as the titanium dioxide of high refractive index layer is alternately laminated.
Further preferably, this polarizer and analyzer be characterised in that, has by with the particle beams or the energy beam structure along the direction irradiation distributed refractive index that diamond-like carbon film obtained that tilts with film thickness direction.
Further preferably, this particle beams is characterised in that it is ion beam, electron beam, proton beam, alpha ray or neutron beam; This energy beam is light, X ray or gamma-rays.
Further preferably, these magneto-optic parts, magnet assembly, dielectric multilayer film, polarizer and analyzer are characterised in that by the integrated formation of vapour phase process.
Further preferably, this polarizer and analyzer be characterised in that, use in the light zone transparent and under the optical communications wavelength from 1200nm to 1700nm extinction coefficient be 3 * 10
-4Or littler diamond-like carbon film.
In another aspect of this invention, a kind of polarizer is characterised in that, has by with the particle beams or the energy beam structure along the direction irradiation distributed refractive index that diamond-like carbon film obtained that tilts with film thickness direction.
Preferably, this particle beams is characterised in that it is ion beam, electron beam, proton beam, alpha ray or neutron beam; This energy beam is light, X ray or gamma-rays.
Further preferably, this polarizer is characterised in that, use in the light zone transparent and under the optical communications wavelength from 1200nm to 1700nm extinction coefficient be 3 * 10
-4Or littler diamond-like carbon film.
According to a further aspect in the invention, this diamond-like-carbon film is characterised in that, in the light zone transparent and under the optical communications wavelength from 1200nm to 1700nm extinction coefficient be 3 * 10
-4Or it is littler.
Further preferably, this optics is characterised in that, use in the light zone transparent and under the optical communications wavelength from 1200nm to 1700nm its extinction coefficient be 3 * 10
-4Or littler diamond-like carbon film.
Therefore, in the present invention, might carry out miniaturization and reduce cost Faraday rotator, polarizer, analyzer, magnet assembly and the optical isolator with these composed components.Equally, might make Faraday rotator and the optical isolator that to handle a plurality of wavelength.And, can provide a kind of, and various optical devices carry out miniaturization, reduce cost and improve the useful new material of performance at first for polarizer.
A kind of method that makes diamond-like carbon film generation qualitative change of the present invention, comprise the steps: to utilize at least one zone of the particle beams or energy beam irradiation diamond-like carbon film, improving this regional refractive index, thereby in described diamond-like carbon film, form distributed refractive index structures.Diamond-like carbon film of the present invention is characterised in that its index distribution is rendered as the pattern that a kind of thickness of this film relatively is orientated obliquely.
According on the other hand, its distributed refractive index pattern of diamond-like carbon film of the present invention is by forming as the described method of diamond-like carbon film generation qualitative change that makes of one of claim 1 to 5.
According on the other hand, diamond-like carbon film of the present invention is characterized in that in the light zone transparent, and has 3 * 10-4 or littler extinction coefficient under the optical communications wavelength from 1200nm to 1700nm.
The invention still further relates to a kind of polarizer,, obtain to have the structure of distributed refractive index by direction irradiation diamond-like carbon film with the particle beams or energy beam edge and film thickness direction inclination.
With reference to accompanying drawing by the following detailed description, for those skilled in the art, above-mentioned and other purposes of the present invention, feature, aspect and advantage will be conspicuous.
Description of drawings
Fig. 1 is for schematically illustrating the Faraday rotator view according to the embodiment of the invention 1;
Fig. 2 is according to simulation, and the expression Faraday rotator is for the function curve of single wavelength;
Fig. 3 is according to simulation, and the expression Faraday rotator is for the function curve of two wavelength;
Fig. 4 is according to simulation, and the expression Faraday rotator is for the function curve of two wavelength;
Fig. 5 is according to simulation, and the expression Faraday rotator is for the function curve of two wavelength;
Fig. 6 is according to simulation, and the expression Faraday rotator is for the function curve of two wavelength;
Fig. 7 is according to simulation, and the expression Faraday rotator is for the function curve of three wavelength;
Fig. 8 is for schematically illustrating the optical isolator view according to the embodiment of the invention 2;
Fig. 9 is for schematically illustrating the optical isolator view according to the embodiment of the invention 2;
Figure 10 is for schematically illustrating the polarizer process drawing according to the embodiment of the invention 3;
Figure 11 is according to simulation, and the function curve of the polarizer of DLC film is used in expression;
Figure 12 is the measurement result curve of the spectral transmissions characteristic of the DLC film of the actual manufacturing of expression use parallel flat plasma CVD method;
The optical indicatrix of the DLC film that Figure 13 calculates based on the measurement result among Figure 12 for expression;
Figure 14 is for schematically illustrating the structural drawing of ordinary optical isolator.
Embodiment
Elaborate embodiments of the invention hereinafter with reference to accompanying drawing.Be appreciated that with parts identical or of equal value in the identical Reference numeral mark accompanying drawing, and will be no longer to its repetition of explanation.
Fig. 1 is for schematically illustrating the Faraday rotator view according to the embodiment of the invention 1.
As shown in Figure 1, this Faraday rotator 30 has, and a magneto-optic parts 30-1 is used to rotate the polarization of incident light face of propagating along its magnetic direction; With dielectric multilayer film 30-2, be used for the incident light of at least one wavelength is limited in these magneto-optic parts 30-1.
These magneto-optic parts 30-1 is made of a gadolinium iron garnet (below be written as GIG) film and dielectric multilayer film 30-2, and this dielectric multilayer film 30-2 is by constituting as the monox of low-index layer with as the titanium dioxide of high refractive index layer is alternately laminated.
As shown in Figure 1, by respectively being set in magneto-optic parts 30-1 both sides, dielectric multilayer film 30-2 produces cavity resonator structure to constitute Faraday rotator 30.The cavity resonator structure of this dielectric multilayer film 30-2 can be limited in the incident light of setted wavelength among the magneto-optic parts 30-1.The result is to make it might rotate setted wavelength polarization of incident light face selectively.
In addition, adjust the thickness of magneto-optic parts 30-1, or in magneto-optic parts 30-1 the more dielectric layer of inner laminated, make and might rotate not only single wavelength selectively, and the polarization of incident light face of a plurality of wavelength.And, adjust thickness and the configuration of magneto-optic parts 30-1 (being included in the more dielectric layer of its inner laminated) and dielectric multilayer film 30-2, make it possible to control incident light wavelength and the number of wavelengths that plane of polarization is rotated.
Below, set forth such fact with utilizing the analog result in Fig. 2 to Fig. 7:, can control incident light wavelength and number of wavelengths that its plane of polarization is rotated by adjusting thickness and the configuration of magneto-optic parts 30-1 (being included in the more dielectric layer of its inner laminated) and dielectric multilayer film 30-2.
Fig. 2 to Fig. 7 is according to simulation, and the function curve of the Faraday rotator of setted wavelength incident light polarization face is rotated in expression selectively.Use respectively with tantalum oxide (Ta
2O
5) substitute the data of GIG film, and in dielectric multilayer film monox (SiO
2) be used for simulation as low-index layer and titanium dioxide as the data of high refractive index layer, as Fig. 2 to shown in Figure 7.
Calculate from analog result, 1000nm is radiated at the transport property that is produced on the multilayer film of being made up of tantalum oxide, monox and titanium dioxide to the infrared light of 2000nm wavelength.
Fig. 2 is according to simulation, and the function curve of the Faraday rotator of single wavelength polarization of incident light face is only rotated in expression selectively.
Multi-layer film structure for Fig. 2 can be expressed as 1L (1H 1L)
52M (1L 1H)
51L, wherein L represents silicon dioxide; H represents titania; And M represents the tantalum oxide of GIG film as an alternative.The coefficient that is attached to L, H and M front represents that the refractive index of supposing silicon dioxide is n with the optical film thickness of 1500nm wavelength design, and when optical film thickness was 1L, actual physics film thickness d was expressed as
d＝(1/4n)λ
In addition, (1H 1L)
5Each alternately laminated five layers of expression titanium dioxide layer and silicon dioxide layers, ten layers altogether.
When the infrared light with 1000 to 2000nm wavelength shone this multi-layer film structure, as shown in Figure 2, the incident light that only is approximately the 1500nm wavelength produced resonance in the magneto-optic parts; From about 1250nm in the 1850nm wavelength region may, its contiguous incident light is blocked.Can draw from this analog result, the Faraday rotator by multi-layer film structure is made is limited in the magneto-optic parts by the incident light with single wavelength, plays only to rotate selectively single wavelength incident light polarization face in Fig. 2.
Fig. 3 is according to simulation, and the function curve of the Faraday rotator of two wavelength polarization of incident light faces is only rotated in expression selectively.
Multi-layer film structure for Fig. 3 can be expressed as 1L (1H 1L)
6(5.2M 1L 1H)
61L.Implication and Fig. 2 of the represented multi-layer film structure of this symbol are similar.
When the infrared light with 1000 to 2000nm wavelength shines this multi-layer film structure, as shown in Figure 3, only be approximately 1380nm and in the magneto-optic parts, produce resonance with the incident light that is approximately the 1710nm wavelength; From about 1250nm in the 1850nm wavelength region may, its contiguous incident light is blocked.Obviously draw from these analog results,,, a plurality of incident beams of two wavelength can be limited in the magneto-optic parts by changing the thickness of magneto-optic parts in the multi-layer film structure for Fig. 2.Can draw from these results, the Faraday rotator of being made by multi-layer film structure among Fig. 3 plays only to rotate selectively two wavelength incident light polarization faces.
Similar to Fig. 3, Fig. 4 is according to simulation, and the function curve of the Faraday rotator of two wavelength polarization of incident light faces is only rotated in expression selectively.
Multi-layer film structure for Fig. 4 can be expressed as 1L (1H 1L)
62.2M 1L 2M (1L1H)
61L.Implication and Fig. 2 of the represented multi-layer film structure of this symbol are similar.
When the infrared light with 1000 to 2000nm wavelength shines this multi-layer film structure, as shown in Figure 4, only be approximately 1410nm and in the magneto-optic parts, produce resonance with the incident light that is approximately the 1670nm wavelength; From about 1250nm in the 1850nm wavelength region may, its contiguous incident light is blocked.Obviously draw from these analog results,,, a plurality of incident beams of two wavelength can be limited in the magneto-optic parts by inner laminated dielectric layer in the magneto-optic parts in multi-layer film structure for Fig. 2.Can draw from these results, by inner laminated dielectric layer in its magneto-optic parts, the Faraday rotator of being made by multi-layer film structure among Fig. 4 plays only to rotate selectively two wavelength incident light polarization faces.
Similar to Fig. 3, Fig. 5 is according to simulation, and the function curve of the Faraday rotator of two wavelength polarization of incident light faces is only rotated in expression selectively.
Multi-layer film structure for Fig. 5 can be expressed as 1L (1H 1L)
62.3M 1L 2M (1L1H)
61L.Implication and Fig. 2 of the represented multi-layer film structure of this symbol are similar.
When the infrared light with 1000 to 2000nm wavelength shines this multi-layer film structure, as shown in Figure 5, only be approximately 1420nm and in the magneto-optic parts, produce resonance with the incident light that is approximately the 1690nm wavelength; From about 1250nm in the 1850nm wavelength region may, its contiguous incident light is blocked.Obviously draw from these analog results,,, can change the resonance peak of two wavelength of the incident light that is limited in the magneto-optic parts by adjusting the thickness of magneto-optic parts in the multi-layer film structure for Fig. 4.Can draw from these results, by adjusting the thickness of its magneto-optic parts, the Faraday rotator of being made by multi-layer film structure among Fig. 5 plays only to rotate selectively two incident light polarization faces that are different from Fig. 4 medium wavelength.
Similar to Fig. 3, Fig. 6 is according to simulation, and the function curve of the Faraday rotator of two wavelength polarization of incident light faces is only rotated in expression selectively.
Multi-layer film structure for Fig. 6 can be expressed as 1L (1H 1L)
62.2M 1L 1H 1L2M (1L 1H)
61L.Implication and Fig. 2 of the represented multi-layer film structure of this symbol are similar.
When the infrared light with 1000 to 2000nm wavelength shines this multi-layer film structure, as shown in Figure 6, only be approximately 1450nm and in the magneto-optic parts, produce resonance with the incident light that is approximately the 1620nm wavelength; From about 1250nm in the 1850nm wavelength region may, its contiguous incident light is blocked.Obviously draw from these analog results,, also can change the resonance peak of two wavelength that are limited in the incident light in the magneto-optic parts by being adjusted in the multi-layer film structure medium thickness of inner laminated in the magneto-optic parts for Fig. 4.Can draw from these results, by being adjusted at the medium thickness of inner laminated in its magneto-optic parts, the Faraday rotator of being made by multi-layer film structure among Fig. 6 plays only to rotate selectively two incident light polarization faces that are different from Fig. 4 wavelength.
Fig. 7 is according to simulation, and the function curve of the Faraday rotator of three wavelength polarization of incident light faces is only rotated in expression selectively.
Multi-layer film structure for Fig. 7 can be expressed as 1L (1H 1L)
62.2M 4L 2M (1L1H)
61L.Implication and Fig. 2 of the represented multi-layer film structure of this symbol are similar.
When the infrared light with 1000 to 2000nm wavelength shone this multi-layer film structure, as shown in Figure 7, the incident light that only is approximately 1330nm, 1530nm and 1760nm wavelength produced resonance in the magneto-optic parts; From about 1250nm in the 1850nm wavelength region may, its contiguous incident light is blocked.Obviously draw from these analog results, for Fig. 2, by adjust magneto-optic parts in the multi-layer film structure with the magneto-optic parts in the thickness and the configuration of inner laminated dielectric layer, a plurality of incident beams of three wavelength can be limited in the magneto-optic parts.Can draw from these results, the Faraday rotator of being made by multi-layer film structure in Fig. 7 plays only to rotate selectively three wavelength incident light polarization faces.
Obviously draw from the analog result of Fig. 2 to Fig. 7, by adjusting thickness and the configuration of magneto-optic parts 30-1 (being included in the more dielectric layer of its inner laminated) and dielectric multilayer film 30-2, can control incident light wavelength and the number of wavelengths of utilizing Faraday rotator 30 that its plane of polarization is rotated.
Therefore, by above-mentioned according to embodiment 1, by means of the cavity resonator structure that dielectric multilayer film 30-2 respectively is set in magneto-optic parts 30-1 both sides, what Faraday rotator 30 can not only be with single wavelength, and the incident light of a plurality of wavelength can be limited among the magneto-optic parts 30-1.
In addition, because magneto-optic parts 30-1 and dielectric multilayer film 30-2 are membrane structures, use the pellicular cascade technology they all might be integrated.Thereby this might carry out miniaturization and cutting down cost to magneto-optic parts 30-1, dielectric multilayer film 30-2 with the Faraday rotator 30 that they integrate, and simplify the manufacture process of Faraday rotator 30 in addition.
Fig. 8 and Fig. 9 are for schematically illustrating the optical isolator view according to the embodiment of the invention 2.
One polarizer 20 and an analyzer 40 are set in the both sides of Faraday rotator described in the embodiment 1, and along its top and bottom magnet assembly 5 are set, the optical isolator 60a in the pie graph 8.
As described in embodiment 1, the function of Faraday rotator 30 is only to rotate setted wavelength polarization of incident light face selectively.This can make up optical isolator 60a with Faraday rotator 30, only to stop the Returning beam of setted wavelength incident light selectively.
By along inclined direction shine diamond-like-carbon (below be written as DLC) film with the particle beams or energy beam, can constitute polarizer 20 and analyzer 40.(details of using the DLC film to constitute polarizer (analyzer) will be described in embodiment 3.〕
According to the above, except that Faraday rotator 30 has the membrane structure, because polarizer 20 and analyzer 40 also are membrane structure, so they are integrated by the pellicular cascade technology, miniaturization and the reduction cost of optical isolator 60a can be realized, and manufacture process can be simplified equally.
Because the gallium nitride magnetic semiconductor film is to optical transparency, so it can be placed in the path of incident beam.
This means that except polarizer 20, Faraday rotator 30 and analyzer 40, magnet assembly 50 can be set on as shown in Figure 9 the straight line.Therefore, use the pellicular cascade technology that they are integrated, 60a compares with optical isolator, can further realize optical isolator 60b is carried out miniaturization and cutting down cost, makes manufacture process simpler equally.
Figure 10 is for schematically illustrating the process drawing according to the polarizer of the embodiment of the invention 3.
This polarizer is characterised in that, forms by along inclined direction shining DLC film 11 with the particle beams or energy beam.Though, ion beam, electron beam, proton beam, alpha ray and neutron beam are the thinkable particles beams, light, X ray and gamma-rays are thinkable energy beams, are example but shine with ion beam here, set forth with reference to Figure 10 index distribution is applied to method on the DLC film.
As shown in figure 10, the mask 12 that at first on the DLC film, adheres to an index distribution pattern copy.From top mask 12, with carrying out oblique fire as helium or ar-ion beam.At the 11-1 place, its refractive index of part that is subjected to ion beam irradiation by mask 12 transparent regions changes.Simultaneously, at the 11-2 place, masked 12 barrier zones stop that its refractive index of part that is not subjected to ion beam irradiation does not change.Therefore, by changing mask pattern, can control the index distribution of DLC film.Utilize this effect, might in DLC film 11, have discrete polarization characteristic.
Here, periodical Diamond and Related Materials, No.7, reported such fact to 434 pages for 1998 the 432nd pages: by hydrogeneous DLC film is carried out ion exposure, its refractive index can change in 2.0 to 2.5 scopes.Should be appreciated that,, be not limited to hydrogeneous DLC film by changing refractive index such as the particle-irradiation of ion beam or by the energy beam irradiation, also might be such as nitrogenous DLC film and the DLC film that neither contains.
Aspect this, with reference to report, simulated the polarizer performance of using the DLC film with the hydrogeneous DLC film of ion exposure, its refractive index can change in from 2.0 to 2.5 scope.This simulation is to carry out under the following conditions: with the infrared beam of 1000nm to the 2000nm wavelength, with 65 ° of incident angle irradiation DLC films---wherein, 25 layers every layer alternately laminated for the low-index layer of 190.63nm (refractive index is 2.0) for the high refractive index layer of 152.5nm (refractive index is 2.5) and 25 layers every layer, 50 layers altogether.Figure 11 represents this Simulation result.
Obviously draw from Figure 11, polarization extinction ratio reaches about 35dB at the 1300nm place.Can draw from these results,, can make polarizer (analyzer) by using such as the particle beams of ion exposure or energy beam oblique illumination on the DLC film.
Below creating conditions of DLC film will be discussed.
The existing film formation technology of hydrogeneous DLC film comprises, adopts every kind in CVD (chemical vapor deposition) method, sputtering method, EB (electron beam) deposition process and the arc ions electrochemical plating (filtered arc method (filtered-arc method)) of heat or plasma.But, in fact, suppose in film, to introduce a large amount of hydrogen, and need the film thickness of 20 μ m magnitudes, can quick film forming CVD method look like only.Aspect this, will adopt parallel flat plasma CVD film formation method.
Adopt an example of the film formation condition of parallel flat plasma CVD method: substrate size is 30 square centimeters; It is 200 degrees centigrade that film forms substrate temperature; Pressure is 1.3 * 10
1To 1.3 * 10
-1Pa; Fluid volume (flow-volume) as the methane of pilot gas is 100sccm; Under the power of about 100W, apply the high frequency of 13.56MHz.Vacuum tank: rotary pump and expansion pump, carry out pressure control with nozzle.
Along inclined direction shine the above-mentioned DLC film of creating conditions down and making with the particle beams or energy beam, can change the refractive index of DLC film.The control refraction index changing can be with this DLC film as polarizer.
As mentioned above, according to embodiment 3, by along inclined direction shining the DLC film with the particle beams or energy beam, can make adopt thin shaped structure and with the stacked and integrated polarizer of other thin film optical componentss.
Figure 12 is a curve map, the measurement result of the spectral transmissions characteristic of the DLC film of the actual manufacturing of expression usefulness parallel flat plasma CVD method.On the thick glass substrate of 1.5mm, form the DLC film of 1.0 μ m film thicknesses.At this, make the DLC film by film formation condition in the parallel flat plasma CVD method of being set forth among the change embodiment 3, to improve its hydrogen concentration.
As shown in figure 12, the DLC film of manufacturing in this case has for the light from 500nm to the 2000nm wavelength that comprises optical communications wavelength and to approach 100% spectral transmissions characteristic.Should be appreciated that the spectral transmissions characteristic among Figure 12 is " a DLC film internal transmission ", got rid of the influence of reflection at the interface between the back side of DLC film sightingpiston, glass substrate and DLC film and glass sightingpiston.
Figure 13 is a curve map, the optical characteristics of the DLC film that expression is calculated based on measurement result among Figure 12.
As shown in figure 13, be appreciated that the wavelength such as the 1500nm place that are used for optical communication in hypothesis, the DLC film of manufacturing has refractive index n=1.55 in this case, Bees Wax k=4.48 * 10
-5
Simultaneously, at periodical Diamond and Related Materials, No.9,2000 the 1758th pages to 1761 pages contain relevant for the up-to-date representative paper of measuring the DLC optical characteristics.This paper is with 1.0 * 10
16Cm
-2The absorption coefficient of dosage DLC that helium radiation is surveyed is as the data of DLC absorption coefficient under the 1500nm wavelength.Based on the extinction coefficient k of this DLC absorption coefficient calculating under the 1500nm wavelength, so draw k=4 * 10
-4
Therefore, confirmed the DLC film made in this case, supposed to be used under the 1500nm wavelength of optical communication, compared with traditional DLC and to have low-down extinction coefficient.And as can be seen from Figure 13, not only for the 1500nm wavelength, and for the wavelength of 1200nm in the 1700nm scope, the extinction coefficient of the DLC film of manufacturing is 3 * 10 in this case
-4Or littler, this is lower than 4 * 10 of traditional DLC
-4To realize such as the more little more little advantage of signal attenuation in optical communication field for example of extinction coefficient.
Therefore, the DLC film of making in this case, have the good advantage that does not occur at present should be not only in optical communication, and at first at embodiment 3 described polarizers, and during various other use, has potential purposes.
Disclosed in this case implementation all should be thought example in all respects, and unrestricted.Scope of the present invention is not the elaboration that proposes above, and represented by the scope of claim; And comprise and the scope of claim meaning scope of equal value, and the institute in this scope changes.
Thereby, in the present invention, might carry out miniaturization and reduce cost to Faraday rotator, polarizer, analyzer, magnet assembly and with these optical isolators as its composed component as noted earlier.Equally, might make Faraday rotator and the optical isolator that to handle a plurality of wavelength.And, can provide a kind of and at first be used for, and various optical devices carry out miniaturization, reduce cost and improve the new material of performance polarizer.
Claims (11)
1. method that makes diamond-like carbon film generation qualitative change, comprise the steps: to utilize at least one zone of the particle beams or energy beam irradiation diamond-like carbon film, improving this regional refractive index, thereby in described diamond-like carbon film, form distributed refractive index structures.
2. the method that makes diamond-like carbon film generation qualitative change as claimed in claim 1, wherein, the described particle beams is ion beam, electron beam, proton beam, alpha ray or neutron beam; Described energy beam is light, X ray or gamma-rays.
3. the method that makes diamond-like carbon film generation qualitative change as claimed in claim 1 wherein makes hydrogeneous diamond-like carbon film, nitrogenous diamond-like carbon film and do not conform to hydrogen also one of unazotized diamond-like carbon film qualitative change takes place.
4. the method that makes diamond-like carbon film generation qualitative change as claimed in claim 1 wherein makes to have less than 1.6 refractive index with less than 1 * 10 with respect to the light from 550nm to the 650nm wavelength coverage
3The DLC film generation qualitative change of extinction coefficient.
5. the method that makes diamond-like carbon film generation qualitative change as claimed in claim 1, wherein utilize the particle beams or energy beam along shining diamond-like carbon film, make the relative film thickness direction of structure of formed distributed refractive index tilt with the direction of film thickness direction inclination.
6. a diamond-like carbon film is characterized in that, its index distribution is rendered as a kind of pattern that is orientated in the plane of this film.
7. a diamond-like carbon film is characterized in that, its index distribution is rendered as the pattern that a kind of thickness of this film relatively is orientated obliquely.
8. a diamond-like carbon film is characterized in that, its distributed refractive index pattern is by forming as the described method of diamond-like carbon film generation qualitative change that makes of one of claim 1 to 5.
9. a polarizer by the direction irradiation diamond-like carbon film with the particle beams or energy beam edge and film thickness direction inclination, obtains to have the structure of distributed refractive index.
10. polarizer as claimed in claim 9, the wherein said particle beams are ion beam, electron beam, proton beam, alpha ray or neutron beam; Described energy beam is light, X ray or gamma-rays.
11. as claim 9 or 10 described polarizers, wherein said diamond-like carbon film is transparent in the light zone, and has 3 * 10 under the optical communications wavelength from 1200nm to 1700nm
-4Or littler extinction coefficient.
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| Application Number | Priority Date | Filing Date | Title |
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| JP2001387730 | 2001-12-20 | ||
| JP387730/2001 | 2001-12-20 | ||
| JP082784/2002 | 2002-03-25 |
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| CNB021575495A Division CN1242283C (en) | 2001-12-20 | 2002-12-20 | Faraday rotator, optical isolator, polarizer and diamond-like carbon film |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200710108710 Division CN101063752A (en) | 2001-12-20 | 2002-12-20 | Faraday rotator, optical isolator, polarizer, and diamond-like carbon thin film |
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| CN1734339A CN1734339A (en) | 2006-02-15 |
| CN100354700C true CN100354700C (en) | 2007-12-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200710108710 Pending CN101063752A (en) | 2001-12-20 | 2002-12-20 | Faraday rotator, optical isolator, polarizer, and diamond-like carbon thin film |
| CNB2005100845333A Expired - Fee Related CN100354700C (en) | 2001-12-20 | 2002-12-20 | Faraday rotator, optical isolator, polarizer, and diamond-like carbon thin film |
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| CN 200710108710 Pending CN101063752A (en) | 2001-12-20 | 2002-12-20 | Faraday rotator, optical isolator, polarizer, and diamond-like carbon thin film |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06186412A (en) * | 1992-12-18 | 1994-07-08 | Olympus Optical Co Ltd | Formation of fine pattern |
| WO2001083845A2 (en) * | 2000-05-02 | 2001-11-08 | Itac Limited | Magnetic sensor having diamond-like carbon thin film |
-
2002
- 2002-12-20 CN CN 200710108710 patent/CN101063752A/en active Pending
- 2002-12-20 CN CNB2005100845333A patent/CN100354700C/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06186412A (en) * | 1992-12-18 | 1994-07-08 | Olympus Optical Co Ltd | Formation of fine pattern |
| WO2001083845A2 (en) * | 2000-05-02 | 2001-11-08 | Itac Limited | Magnetic sensor having diamond-like carbon thin film |
Non-Patent Citations (2)
| Title |
|---|
| 用YAG激光制备类金刚石薄膜及其光学折射率研究 马玉蓉，王昕，张江泉 等.光学学报，第14卷第12期 1994 * |
| 高增透的类金刚石碳膜的红外吸收特性研究 汪贵华，杨伟毅，常本康.光学学报，第20卷第5期 2000 * |
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| CN1734339A (en) | 2006-02-15 |
| CN101063752A (en) | 2007-10-31 |
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