Summary of the invention
Technical problem to be solved by this invention provides the hydrogen-air fuel cell catalytic membrane manufacture method that a kind of technology is simple, catalyst can be not overlapping on carbon paper.
In order to solve the problems of the technologies described above, the technical solution used in the present invention is: in final vacuum less than 8 * 10
-4In the high vacuum electric field of Pa, being anodal target with carbon paper, is the negative pole electron gun with the platinum bar, is the thermoplastic of platinum bar with heater coil, and platinum bar electron beam carries out sputter to anodal carbon paper target under comprehensive deflecting coil effect.
As a kind of improvement of the present invention, be the thermoplastic of platinum bar with graphite electrode assistant heating coil.
The softening heating power supply of adjustable platinum bar is 0 ∽ 5V, 60 ∽ 100A; Adjustable high voltage power supply is 0 ∽ 10KV, 5 ∽ 50mA; Row vertical yoke current generator power 5 ∽ 50W.
Adopt the hydrogen-air fuel cell catalytic membrane manufacture method of technique scheme, it is a kind of magnetic control vacuum sputtering, be different from external sputter mode commonly used, it is granule size platinum catalyst, arrangement order position and shatter value on carbon paper, all in the magnetic control scope, it is similar with the operation principle of picture tube basically, but much simple, be the hydrogen-air fuel cell catalytic membrane manufacture method that a kind of technology is simple, catalyst can be not overlapping on carbon paper.
Embodiment
Below in conjunction with the drawings and specific embodiments the present invention is elaborated.
Referring to accompanying drawing, whole work is all carried out in high vacuum, and final vacuum should be less than 8 * 10
-4Pa, 1 is carbon paper among the figure, is equivalent to the phosphor screen of picture tube, is anodal in electric field; 2 for the platinum bar be negative pole; 3 is graphite electrode; Platinum bar 2 and graphite electrode 3 are equivalent to the filament of picture tube; 4 is heater coil; 5,6,7,8 is comprehensive deflecting coil, divide position, four directions installation up and down, with carbon paper 1 is anodal target, with platinum bar 2 is the negative pole electron gun, with heater coil 4 and graphite electrode 3 is 2 thermoplastics of platinum bar, and platinum bar electron beam carries out sputter to anodal carbon paper 1 target under comprehensive deflecting coil 5,6,7,8 effects.
Equipment comprises with lower unit:
1, vacuum system, each one of mechanical pump, diffusion pump;
2, softening heating power supply one cover of the adjustable platinum of 0-5V 100A;
3,0-10KV 50mA adjustable high voltage power supply one cover;
4, each cover of the capable vertical yoke current generator of power 50W;
5, target (carbon paper) automatic transfer equipment one cover (80 every batch) can carry out continuity production as required;
6,5KW, 380V stabilized voltage power supply one cover;
7, one in computer of control.
Each Elementary Function is as follows:
1, vacuum system requires in 30 minutes gas pressure in vacuum to be reduced to 8 * 10
-4Below the Pa;
2, regulate the size of heating power supply, can change the softening degree of platinum and then the granular size that control is splashed to the platinum particles on the carbon paper;
3, regulate the 0-10KV high voltage source, can change the speed and the density of sputter platinum particles;
4, the direction of control row vertical yoke current and and time relation, just can be by the rule of lining by line scan with each nano level platinum particles by orderly one by one being tiled on the carbon paper and phenomenons such as zero lap accumulation of the requirement of shatter value.
5, the target automatic transfer equipment is an oval conveyer belt, and it can will descend a slice to go to sputter pros after preceding a slice sputter is intact automatically, and its conversion speed will be adjusted automatically according to every sputtering time, and the useful load of each conveyer belt is 80.
6,5KW 380V stabilized voltage power supply, require that the fluctuation ratio of power supply is not more than in 24 hours non-stop operating times ± 1%.
7, when using first, operation by hand earlier, the measurement of vacuum degree is reached the size of the platinum particles of sputter as required, and arrangement position and the shatter value of particle on carbon paper, the power that platinum is softening, the height of sputtering voltage, the power polarity of row-field scanning and with signals such as time relation,,, will all be undertaken in the work afterwards as control program by transducer input computer by this program.
This magnetron sputtering method can make the use amount of platinum, at the 0.4-0.6mg/cm that uses chemical method
2Be reduced to less than 0.1mg/cm
2, simultaneously, can guarantee product quality, accomplish the consistency of each product specification and parameter, and then guaranteed the possibility of the industrialization production automation.This device also can be used for other field that other needs vacuum sputtering except that the making of serving the proton exchange membrane assembly.
Embodiment:
Carbon paper target with 100 * 50mm is an example.
The requirement granularity is 2nm, and shatter value is 0.5nm, and then behavior 5.5 * 10
7Particle, total population is 15.125 * 10
9
Condition of work:
1, vacuum degree: 8 * 10
-1Pa;
2, the voltage that is added on heater coil is 3V, electric current 75A, and power 225VA, during frequency 50Hz, the platinum temperature is 800 ℃.
3, the sawtooth waveforms frequency values of line deflector coil 5,6 is 55KC power 10W;
4, the sawtooth waveforms frequency values of field deflection coil 7,8 is 27.5KC power 20W;
5, be 8.5KV by carbon paper target (positive pole) to the voltage between the platinum bar (negative pole), be 1 second every carbon paper target sweep time.