CN100343639C - Heterogeneous ceramic temperature sensor and its preparing method - Google Patents

Heterogeneous ceramic temperature sensor and its preparing method Download PDF

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CN100343639C
CN100343639C CNB2005100104020A CN200510010402A CN100343639C CN 100343639 C CN100343639 C CN 100343639C CN B2005100104020 A CNB2005100104020 A CN B2005100104020A CN 200510010402 A CN200510010402 A CN 200510010402A CN 100343639 C CN100343639 C CN 100343639C
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mosi
positive electrode
negative electrode
ceramic
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CN1749715A (en
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邵文柱
崔玉胜
甄良
冯立超
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Harbin Institute of Technology
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Harbin Institute of Technology
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Abstract

The present invention relates to a complex phase ceramic temperature sensor and a preparing method thereof, particularly to a sensor and a preparing method thereof. The present invention solves the problems of larger dimension, slower reaction speed to temperature, and different thermal expansion coefficient existed among ceramic materials in the process of integration and miniaturization of the existing ceramic thermocouple. A positive electrode 3 of the present invention is positioned in the center of a circle of a sensor 7, the positive electrode 3 is wrapped by an insulating body 5, a mixed connecting body 6 is arranged on the right end of the sensor 7, the positive electrode 3 is connected with the mixed connecting body 6, a negative electrode 4 is clamped on the middle part by the insulating body 5, and the negative electrode 4 is connected with the mixed connecting body 6. The present invention has the method that the complex phase ceramic material proportioning and grain diameter sizes of the positive electrode 3, the negative electrode 4, the insulating body 5 and the mixed connecting body 6 are determined, and the complex phase ceramic temperature sensor 7 can be namely obtained by the obtained complex phase ceramic material which is sintered under the condition of high temperature after the complex phase ceramic material and a caking agent are respectively and uniformly mixed to be pressed and shaped by a cold isostatic pressing method. The present invention has the characteristics of small dimension, fast temperature response and good heat stability.

Description

Complex phase ceramic thermopair and preparation method thereof
Technical field
The present invention relates to a kind of thermopair and preparation method thereof, especially adopt complex phase ceramic as thermopair of thermoelectric material and preparation method thereof.
Background technology
Temperature is the physical quantity that often will measure in production, life and the scientific research process, and thermocouple is a kind of the most frequently used temperature thermocouple.The temperature-measurement principle of thermocouple is namely worked as the conductor material that will disconnect and is placed certain temperature field to produce thermo-electromotive force at fracture based on Seebeck effect.Common thermopair is by the metal material manufacturing.Also have Seebeck effect in semiconductor material and the conducting ceramic material, and conducting ceramic material often has very high Seebeck coefficient, thereby also have a lot of conducting ceramic materials to be manufactured into thermopair and obtained application in practice.In ceramic electric thermo-couple, because it is poor as there being bigger hot matching factor between the conducting ceramic material of positive electrode and negative electrode, thereby common ceramic electric thermo-couple mostly is assembly structure, it generally includes the sleeve pipe of one one end closure as an electrode, coaxial mounted stock is as another electrode in the sleeve pipe, and the stock end applies the length variations that certain contact pressure causes owing to thermal expansion coefficient difference with compensation by flexible member or structure.The ceramic electric thermo-couple size of sleeve structure is bigger, reaction velocity to temperature is slower, in integrated and miniaturization process, exist the difference of the thermal expansivity between the variety classes stupalith, can cause thermal shock inefficacy and thermoelectrical potential output problem of unstable.
Summary of the invention
The present invention is bigger in order to solve existing ceramic electric thermo-couple size, reaction speed to temperature is slower, exist the difference of the thermal coefficient of expansion between the variety classes ceramic material in integrated and miniaturization process, thermal shock inefficacy and the thermoelectrical potential of causing exported unsettled problem.Content and grain size by conducting phase in the adjustment diphase ceramic material and insulation phase ceramics powder have been proposed, realize between positive electrode and the negative electrode and thermode conduction tagma and insulator region between complex phase ceramic thermopair and preparation method thereof of thermal expansion matching, the concrete technical scheme of dealing with problems is as follows:
Complex phase ceramic thermopair of the present invention is by positive electrode 3, negative electrode 4, insulator 5 and mixing connector 6 are formed, positive electrode 3 is positioned on the axis that thermopair 7 circle centre positions are linked to be, positive electrode 3 is by insulator 5 parcels, cylindrical mixing connector 6 is fixed on the center of thermopair 7 right-hand members, the right side of positive electrode 3 is connected with the left side of mixing connector 6, the left side of positive electrode 3 is positive electrode connectors 2, negative electrode 4 insulated bodys 5 are clipped in the middle part of thermopair 7 radiuss of a circle, the inboard, right part of negative electrode 4 links to each other with the cylindrical that mixes connector 6, and the outer round surface that is extended down to thermopair 7 at the outside projection in the left part of negative electrode 4 becomes negative electrode connector 1.
The Si that the positive electrode 3 of above-mentioned complex phase ceramic thermocouple, negative electrode 4, insulator 5, mixing connector 6 adopt 3N 4Particle size be 1～3 μ m, the particle size of SiC is 0.2～0.6 μ m, MoSi 2Particle size be 0.1～0.5 μ m.
Positive electrode 3 is by weight percentage by 25～35% MoSi 2, 50～60% Si 3N 4Form MoSi with 5～15% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 1: 7～20;
Negative electrode 4 is by weight percentage by 40～50% SiC, 40～50% Si 3N 4Make SiC and Si with 5～15% rare earth oxide sintering agent 3N 4The ratio of ceramic powder particle size is 1: 5～15;
Insulator 5 is by weight percentage by 25～35% MoSi 2, 50～60% Si 3N 4Make MoSi with 5～15% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 0.5～1.5: 1;
Mixing connector 6 respectively 50% is mixed and made into by weight by the diphase ceramic material of forming positive electrode 3 and the diphase ceramic material of forming negative electrode 4.
It is finished the preparation method of complex phase ceramic thermopair by following steps:
Step 1, determine positive electrode 3, negative electrode 4, insulator 5, mix the proportioning and the grain size of the diphase ceramic material of connector 6:
A, positive electrode 3 are by weight percentage by 25～35% MoSi 2, 50～60% Si 3N 4Make MoSi with 5～15% rare earth oxide sintering agent 2With Si 3N 4Powder particle size is respectively 0.1～0.5 μ m and 1～3 μ m, and size ratio is 1: 7～20;
B, negative electrode 4 are by weight percentage by 40～50% SiC, 40～50% Si 3N 4Make SiC and Si with 5～15% rare earth oxide sintering agent 3N 4The ceramic powder particle size is respectively 0.2～0.6 μ m and 1～3 μ m, and size ratio is 1: 5～15;
C, insulator 5 are by weight percentage by 25～35% MoSi 2, 50～60% Si 3N 4Make MoSi with 5～15% rare earth oxide sintering agent 2With Si 3N 4Powder particle size is 1～3 μ m, and size ratio is 0.5～1.5: 1;
D, mix connector 6 and respectively 50% be mixed and made into by weight by the diphase ceramic material of forming positive electrode 3 and the diphase ceramic material of forming negative electrode 4;
Step 2, will be through positive electrode 3 that step 1 obtains, negative electrode 4, insulator 5, mix diphase ceramic material that connector 6 forms respectively with cementing agent by weight 100: 4～10 mix the back with rolling, the isostatic cool pressing method is suppressed or with the powder slurry casting casting forming after under 1600～1750 ℃ of hot conditions sintering promptly obtain complex phase ceramic thermopair 7 after 0.5～1 hour.
Said method draws according to following principle and in conjunction with Fig. 3:
1, utilize conducting phase A content to be W 1Diphase ceramic material with conducting mutually B content be W 2Diphase ceramic material, have the performance of akin thermal coefficient of expansion, by adjusting the content of diphase ceramic material conducting phase, making it thermal coefficient of expansion can reach unanimity.
2, according to the relation between the content of conducting multiphase ceramics material and size pair and the diphase ceramic material electric conductivity, determine conduction threshold.
It is little that the complex phase ceramic thermocouple that adopts preparation method of the present invention to prepare has the thermocouple size, reaction speed to temperature is fast, the conducting network is to the characteristics of thermal stress good stability, matches with suitable peripheral circuit and instrument can be implemented in the small space size and in the temperature survey that has under wearing and tearing, corrosion and the thermal shock conditions.
Description of drawings
Fig. 1 is the one-piece construction synoptic diagram of complex phase ceramic thermopair.
Fig. 2 is the A-A cut-open view of Fig. 1.
Fig. 3 is the graph of a relation between diphase ceramic material thermal expansivity and the conducting phase content.
Fig. 4 is different Mo Si 2And the thermal expansivity figure of the diphase ceramic material of SiC conducting phase content.
Wherein Reference numeral is: 1-negative electrode connector, and 2-positive electrode connector, the 3-positive electrode, the 4-negative electrode, the 5-insulator, 6-mixing connector is formed, the 7-thermopair.
Embodiment
The specific embodiment one: present embodiment (is seen Fig. 1, Fig. 2) by positive electrode 3, negative electrode 4, insulator 5 and mixing connector 6 form, positive electrode 3 is positioned on the axis that thermocouple 7 circle centre positions are linked to be, positive electrode 3 is by insulator 5 parcels, cylindrical mixing connector 6 is fixed on the center of thermocouple 7 right-hand members, right side at positive electrode 3 is connected with the left side of mixing connector 6, the left side of positive electrode 3 is positive electrode connectors 2, negative electrode 4 insulated bodys 5 are clipped in the middle part of thermocouple 7 radiuss of a circle, the inboard, right part of negative electrode 4 links to each other with the cylindrical that mixes connector 6, the outer round surface that is extended down to thermocouple 7 at the outside projection in the left part of negative electrode 4 becomes negative electrode connector 1, positive electrode 3, negative electrode 4, insulator 5, mixing connector 6 adopts the proportioning of following diphase ceramic material and grain size to form: positive electrode 3 is by weight percentage by 25～35% MoSi 2, 50～60% Si 3N 4Make MoSi with 5～15% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 1: 7～20; Negative electrode 4 is by weight percentage by 40～50% SiC, 40～50% Si 3N 4Make SiC and Si with 5～15% rare earth oxide sintering agent 3N 4The ratio of ceramic powder particle size is 1: 5～15; Insulator 5 is by weight percentage by 25～35% MoSi 2, 50～60% Si 3N 4Make MoSi with 5～15% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 0.5～1.5: 1; Mixing connector 6 respectively 50% is mixed by weight by the diphase ceramic material that forms positive electrode 3 and the diphase ceramic material that forms negative electrode 4.The Si that positive electrode 3, negative electrode 4, insulator 5, mixing connector 6 adopt 3N 4Particle size be 1～3 μ m, the particle size of SiC is 0.2～0.6 μ m, MoSi 2Particle size be 0.1～0.5 μ m.
Embodiment two: present embodiment adopts the following step:
Utilize conducting phase A content to be W 1Diphase ceramic material and conducting mutually B content are W 2Diphase ceramic material, performance (seeing Fig. 3) with akin thermal coefficient of expansion, and then by adjusting the content of conducting phase in the diphase ceramic material, making it thermal coefficient of expansion can reach unanimity, and reaches the heat coupling between positive electrode material and the negative electrode material.Before the thermal coefficient of expansion of adjustment as the diphase ceramic material of positive electrode and negative electrode, at first need determine the content of the conducting phase ceramics powder of the required interpolation of diphase ceramic material conducting; According to the relation between the content of conducting multiphase ceramics material and size pair and the diphase ceramic material electric conductivity, determine conduction threshold.Experiment shows that the content of conductive phase ceramic material and size are as follows to the impact of diphase ceramic material electric conductivity: use SiC and Si 3N 4Size ratio is 1: 5 raw material powder, resulting SiC-Si 3N 4The conduction threshold content of composite diphase material is 30% (percentage by weight); With MoSi 2As the conducting phase, work as MoSi 2With Si 3N 4Size ratio is 1: 1 o'clock, and conduction threshold content is 40% (percentage by weight); Work as MoSi 2With Si 3N 4Size ratio was down to 1: 7 o'clock, below the conduction threshold content decrease to 20% (percentage by weight).Ceramic material of the present invention adopts ceramic powders Si 3N 4Particle size be 1～3 μ m, the particle size of SiC is 0.2～0.6 μ m, MoSi 2Particle size be 0.1～0.5 μ m.
Step 1, determine positive electrode 3, negative electrode 4, insulator 5, mix the proportioning and the grain size of the diphase ceramic material of connector 6:
A, positive electrode 3 are by weight percentage by 25～35% MoSi 2, 50～60% Si 3N 4Make MoSi with 5～15% rare earth oxide sintering agent 2With Si 3N 4Powder particle size is respectively 0.1～0.5 μ m and 1～3 μ m, and particle diameter ratio is 1: 7～20; The diphase ceramic material of above-mentioned composition and particle size preparation is a conducting state, and room temperature resistivity is 6.7 * 10 -2The greenhouse resistivity of the diphase ceramic material of Ω .m and insulator compares, and 7 orders of magnitude have descended;
B, negative electrode 4 are by weight percentage by 40～50% SiC, 40～50% Si 3N 4Make SiC and Si with 5～15% rare earth oxide sintering agent 3N 4The ceramic powder particle size is respectively 0.2～0.6 μ m and 1～3 μ m, and size ratio is 1: 5～15; The greenhouse resistivity of the diphase ceramic material of above-mentioned composition and particle size preparation and the diphase ceramic material of insulator relatively, resistivity 5 orders of magnitude that descend can guarantee to obtain lower and stable resistance value.Experimental measurements shows (see figure 4), adds 30% MoSi 2With two kinds of composite diphase material thermal expansivity basically identicals that add 45% SiC, thereby select for use conduction add mutually for the composite diphase material of 45%SiC as the negative electrode 4 of thermopair can and insulator 5 around it and corresponding positive electrode 3 between to reach essentially identical thermal expansion adaptive, avoid the influence of thermal stress to the conducting network stabilization;
C, insulator 5 are by weight percentage by 25～35% MoSi 2, 50～60% Si 3N 4Make MoSi with 5～15% rare earth oxide sintering agent 2With Si 3N 4Powder particle size is 1～3 μ m, and size ratio is 0.5～1.5: 1; Find out that thus key difference between insulator and the positive electrode just is grain size different of conducting phase ceramics powder diameter size and insulation phase ceramics powder.The diphase ceramic material of above-mentioned composition and particle size preparation, room temperature resistivity is 6.1 * 10 5Ω .m;
D, mix connector 6 and respectively 50% be mixed and made into by weight by the diphase ceramic material of forming positive electrode 3 and the diphase ceramic material of forming negative electrode 4; The mixing connector 6 of high temperature tie point is to mix the conductive material that make the back by positive electrode and negative electrode diphase ceramic material, because the size of tie point is less, temperature homogeneity is better, and the composition transition of high temperature tie point can not bring considerable influence to measuring process;
Step 2, the positive electrode 3 that will obtain through step 1, negative electrode 4, insulator 5, (cementing agent is by methylcellulose 1～25% by weight percentage with cementing agent respectively for the diphase ceramic material that mixing connector 6 is formed, rubber 50～75%, the potpourri that butyral resin 1～25% is formed) mixing the back by weight 100: 4～10 adopts the isostatic cool pressing method (also can adopt rolling, the method of slip-casting) is pressed into positive electrode core bar and mixing connector 6 earlier, intermediate insulation body 5 more successively superposes, negative electrode 4 and outer insulator 5, blank sintering under 1600～1750 ℃ of hot conditions of the coaxial configuration that isostatic cool pressing is repeatedly made promptly obtains complex phase ceramic thermopair 7 after 0.5～1 hour.
The specific embodiment three: the difference of present embodiment and the specific embodiment two is that positive electrode 3 is by weight percentage by 30～35% MoSi 2, 50～55% Si 3N 4(described rare earth oxide sintering agent is by weight percentage by La with 10～15% rare earth oxide sintering agent 2O 350%, Y 2O 350% consists of) make MoSi 2With Si 3N 4The ratio of powder particle size is 1: 7～14.Negative electrode 4 is by weight percentage by 40～45% SiC, 40～45% Si 3N 4Make SiC and Si with 10～15% rare earth oxide sintering agent 3N 4The ratio of ceramic powder particle size is 1: 5～10.Insulator 5 is by weight percentage by 30～35% MoSi 2, 50～55% Si 3N 4Make MoSi with 10～15% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 0.5～1: 1, MoSi 2Particle size is selected the ceramic powders of 1～2 μ m.Other step is identical with embodiment two.
The specific embodiment four: the difference of present embodiment and the specific embodiment three is that positive electrode 3 is by weight percentage by 25～30% MoSi 2, 56～60% Si 3N 4Make MoSi with 10～15% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 1: 15～20; Negative electrode 4 is by weight percentage by 35～40% SiC, 46～50% Si 3N 4Make SiC and Si with 10～15% rare earth oxide sintering agent 3N 4The ratio of ceramic powder particle size is 1: 10～15; Insulator 5 is by weight percentage by 25～30% MoSi 2, 56～60% Si 3N 4Make MoSi with 10～15% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 1～1.5: 1.Other step is identical with embodiment two.
The specific embodiment five: the difference of present embodiment and the specific embodiment three and the specific embodiment four is that positive electrode 3 is by weight percentage by 30% MoSi 2, 60% Si 3N 4Make MoSi with 10% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 1: 7; Negative electrode 4 is by weight percentage by 45% SiC, 45% Si 3N 4Make SiC and Si with 10% rare earth oxide sintering agent 3N 4The ratio of ceramic powder particle size is 1: 5; Insulator 5 is by weight percentage by 30% MoSi 2, 60% Si 3N 4Make MoSi with 10% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 1: 1.Other step is identical with embodiment two.
The complex phase ceramic thermopair that finally makes need be demarcated before use, determines its thermoelectrical potential---the corresponding relation between the temperature.The cold junction correction need be carried out when in use measuring with thermocouple as absolute temperature, the cold junction correction can be carried out such as measurement when the relative variation of certain some temperature.
The present invention has only enumerated the conducting phase as negative electrode with SiC, with MoSi 2As the conducting phase of positive electrode, with Si 3N 4The proportioning and particle size and the ratio that prepare mutually the ceramic powders of the required use of complex phase ceramic thermocouple as insulation.When the conducting phase of using other kind and insulation phase ceramics powder stock, the selection of the proportioning of needed raw material and particle size and ratio is identical with the present invention with analytical method.

Claims (9)

1, the complex phase ceramic thermocouple, it is characterized in that it is by positive electrode (3), negative electrode (4), insulator (5) and mixing connector (6) form, positive electrode (3) is positioned on the axis that thermocouple (7) circle centre position is linked to be, positive electrode (3) is wrapped up by insulator (5), cylindrical mixing connector (6) is fixed on the center of thermocouple (7) right-hand member, the right side of positive electrode (3) is connected with the left side of mixing connector (6), the left side of positive electrode (3) is positive electrode connector (2), negative electrode (4) insulated body (5) is clipped in the middle part of thermocouple (7) radius of a circle, the inboard cylindrical with mixing connector (6) in the right part of negative electrode (4) links to each other, the outer round surface that is extended down to thermocouple (7) at the outside projection in the left part of negative electrode (4) becomes negative electrode connector (1), and positive electrode (3) is by weight percentage by 25～35% MoSi 2, 50～60% Si 3N 4Make MoSi with 5～15% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 1: 7～20; Negative electrode (4) is by weight percentage by 40～50% SiC, 40～50% Si 3N 4Make SiC and Si with 5～15% rare earth oxide sintering agent 3N 4The ratio of ceramic powder particle size is 1: 5～15; Insulator (5) is by weight percentage by 25～35% MoSi 2, 50～60% Si 3N 4Make MoSi with 5～15% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 0.5～1.5: 1; Mixing connector (6) respectively 50% is mixed by weight by the diphase ceramic material that forms positive electrode (3) and the diphase ceramic material that forms negative electrode (4).
2, complex phase ceramic thermocouple according to claim 1 is characterized in that positive electrode (3), negative electrode (4), insulator (5), mixes the Si that connector (6) adopts 3N 4Particle size be 1～3 μ m, the particle size of SiC is 0.2～0.6 μ m, MoSi 2Particle size be 0.1～0.5 μ m.
3, complex phase ceramic thermocouple according to claim 2 is characterized in that the ceramic powders Si that adopts 3N 4Particle size be 2 μ m, the particle size of SiC is 0.4 μ m, MoSi 2Particle size be 0.3 μ m.
4, the preparation method of complex phase ceramic thermopair is characterized in that it is finished by following steps:
Step 1, determine positive electrode (3), negative electrode (4), insulator (5), mix the proportioning and the grain size of the diphase ceramic material of connector (6):
A, positive electrode (3) are by weight percentage by 25～35% MoSi 2, 50～60% Si 3N 4Make MoSi with 5～15% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 1: 7～20;
B, negative electrode (4) are by weight percentage by 40～50% SiC, 40～50% Si 3N 4Make SiC and Si with 5～15% rare earth oxide sintering agent 3N 4The ratio of ceramic powder particle size is 1: 5～15;
C, insulator (5) are by weight percentage by 25～35% MoSi 2, 50～60% Si 3N 4Make MoSi with 5～15% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 0.5～1.5: 1;
D, mixing connector (6) respectively 50% are mixed and made into by weight by the diphase ceramic material of forming positive electrode (3) and the diphase ceramic material of forming negative electrode (4);
Step 2, will be through positive electrode (3) that step 1 obtains, negative electrode (4), insulator (5), mix diphase ceramic material that connector (6) forms respectively with cementing agent by weight 100: 4～10 mix the back with rolling, the isostatic cool pressing method is suppressed or with the powder slurry casting casting forming after under 1600～1750 ℃ of hot conditions sintering promptly obtain complex phase ceramic thermopair (7) after 0.5～1 hour.
5, the preparation method of complex phase ceramic thermocouple according to claim 4 is characterized in that ceramic material adopts Si 3N 4, SiC and MoSi 2Ceramic powders, ceramic powders Si 3N 4Particle size be 1～3 μ m, the particle size of SiC is 0.2～0.6 μ m, MoSi 2Particle size be 0.1～0.5 μ m.
6, the preparation method of complex phase ceramic thermopair according to claim 4 is characterized in that cementing agent is made up of methylcellulose 1～25%, rubber 50%～75%, butyral resin 1～25% by weight percentage.
7, the preparation method of complex phase ceramic thermocouple according to claim 4 is characterized in that described rare earth oxide sintering agent is by weight percentage by La 2O 350%,, Y 2O 350% forms.
8, according to the preparation method of claim 4 or 5 described complex phase ceramic thermocouples, it is characterized in that positive electrode (3) is by weight percentage by 30～35% MoSi 2, 50～55% Si 3N 4Make MoSi with 10～15% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 1: 7～14; Negative electrode (4) is by weight percentage by 40～45% SiC, 40～45% Si 3N 4Make SiC and Si with 10～15% rare earth oxide sintering agent 3N 4The ratio of ceramic powder particle size is 1: 5～10; Insulator (5) is by weight percentage by 30～35% MoSi 2, 50～55% Si 3N 4Make MoSi with 10～15% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 0.5～1: 1.
9, according to the preparation method of claim 4 or 5 described complex phase ceramic thermocouples, it is characterized in that positive electrode (3) is by weight percentage by 30% MoSi 2, 60% Si 3N 4Make MoSi with 10% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 1: 7; Negative electrode (4) is by weight percentage by 45% SiC, 45% Si 3N 4Make SiC and Si with 10% rare earth oxide sintering agent 3N 4The ratio of ceramic powder particle size is 1: 5; Insulator (5) is by weight percentage by 30% MoSi 2, 60% Si 3N 4Make MoSi with 10% rare earth oxide sintering agent 2With Si 3N 4The ratio of powder particle size is 1: 1.
CNB2005100104020A 2005-09-29 2005-09-29 Heterogeneous ceramic temperature sensor and its preparing method Expired - Fee Related CN100343639C (en)

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CN102584241A (en) * 2012-02-24 2012-07-18 哈尔滨工业大学 Zirconium boride based composite ceramic material thermocouple and preparation method thereof
CN103592046B (en) * 2013-10-22 2016-08-17 中国科学院力学研究所 A kind of monoblock type thermocouple
CN103557953B (en) * 2013-11-21 2015-10-28 四川天微电子有限责任公司 Line-type temp sensor
KR101646711B1 (en) * 2014-04-25 2016-08-09 (주) 래트론 Temperature sensor element and method for manufacturing the same

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