CN100336163C - Excimer lamp - Google Patents
Excimer lamp Download PDFInfo
- Publication number
- CN100336163C CN100336163C CNB038222515A CN03822251A CN100336163C CN 100336163 C CN100336163 C CN 100336163C CN B038222515 A CNB038222515 A CN B038222515A CN 03822251 A CN03822251 A CN 03822251A CN 100336163 C CN100336163 C CN 100336163C
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- Prior art keywords
- electrode
- discharge vessel
- gas molecular
- excimer gas
- layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/067—Main electrodes for low-pressure discharge lamps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/067—Main electrodes for low-pressure discharge lamps
- H01J61/0675—Main electrodes for low-pressure discharge lamps characterised by the material of the electrode
Abstract
An excimer lamp having a dielectric discharge container encapsulating discharge gas for excimer light emission, characterized in that an electrode having at least two layers of conductive film is provided on the outer surface of the discharge container and one of the two layers of conductive film that is located on the discharge container side contains chromium.
Description
Technical field
The present invention is relevant Excimer gas molecular discharging lamp.
Background technology
Excimer gas molecular discharging lamp is for example using xenon to use under the situation of gas as discharge, and radiating centre wavelength is the high-energy vacuum ultraviolet of 172nm.Therefore it is mainly used to replace radiation 185nm and the ultraviolet Cooper-Hewitt lamp of 254nm wavelength, and many light sources that Excimer gas molecular discharging lamp is applied to the ultraviolet lamp of the accurate glass substrate of cleaning (using up clean) liquid crystal watch showing device and mono crystalline semiconductor plate etc.
Vacuum ultraviolet is meant the ultraviolet ray of the scope of wavelength below the above 200nm of 50nm.This vacuum ultraviolet is made it to take place ozone by airborne oxygen absorption.Therefore, the object being treated surface of glass substrate of liquid crystal watch showing device etc. is by being shone the ozone that takes place by vacuum ultraviolet in air, it produces the effect that multiplies each other with the vacuum ultraviolet that sees through again, thereby can decompose the organic substance of removing the handled thing surface etc. and it is cleaned.
The synthetic quartz glass that the vacuum ultraviolet transmissivity is good is used as the discharge vessel of Excimer gas molecular discharging lamp.For Excimer gas molecular discharging lamp, enclosed in its discharge vessel and be used for the luminous discharge gas of Excimer gas molecular.By to this gas in addition the high frequency voltage critical discharge of matter that makes it to produce electrolysis radiate vacuum ultraviolet.
In the past, as discharge vessel, cylindrical duct or the little cylindrical duct of diameter that adopt the dual structure of enclosing discharge gas more.For example, open Fig. 4 record of 2001-243920 number as the spy of the patent gazette of Japan.Developed the Excimer gas molecular discharging lamp that a kind of discharge vessel that adopts square box replaces this dual discharge vessel cylindraceous.Such example, for example, the spy who is recorded in the patent disclosure communique of Japan opens the 2000-260396 communique.
With in the discharge vessel of gas, its opposed outer surface is provided with pair of electrodes in the discharge of having enclosed xenon that Discharge illuminating uses and krypton etc.By between electrode, applying high frequency voltage, can radiate expeditiously gas the ultraviolet ray of intrinsic wavelength.In the discharge vessel that constitutes for cylindrical duct, in the discharge space that is separated by dual cylindrical duct, fill discharge gas, to the outer surface that is formed at the outside cylindrical pipe be close between the electrode of inner surface of inside cylindrical pipe and apply high frequency voltage by dual structure.The vacuum ultraviolet of wavelength below 200nm, owing to absorbed by the oxygen in the atmosphere, reach is short.Therefore, following strategy is used, and promptly in the front of the irradiation unit that the Excimer gas molecular discharging lamp with dual cylindrical duct is housed quartz glass plate is set, and portion's inert gas of packing within it is to keep the uitraviolet intensity on irradiation thing surface.
And for guard electrode from influence on every side, electrode is protected by the method for protective mulch.For example open record in flat 5-174792 number as spy at the open communique of Japan Patent.
Summary of the invention
Recently, develop a kind of as being represented that by Fig. 1 the discharge vessel 1 of the quartz system of square box shape is made into extremely long Excimer gas molecular discharging lamp.In this discharge vessel 1, the height up and down of cross section is ten number mm, about amplitude be the thin deltiod of tens of mm, its longitudinally length have more than the 1m unexpectedly.Discharge vessel 1 is exactly by the two ends of the synthetic quartz glass pipe of such length being stopped up firmly, in the inner filling xenon and manufactured.
In this discharge vessel 1, by on smooth and below each self-forming mode pattern metallic film and with as electrode.The top electrode of discharge vessel 1 almost is formed into and covers on this smooth surface comprehensively.On the other hand, the electrode of bottom is made into cancellous pattern figure, and vacuum ultraviolet just shines the below from the gap of this mesh.Because vacuum ultraviolet by oxygen absorption, is decayed rapidly in air, and only can be arrived very short distance.
For example, the vacuum ultraviolet of wavelength 172nm can only shine the following distance of 10mm.Therefore, shine broad area, then need to make it to have the smooth surface irradiation of maximum area from discharge vessel 1 for making from the vacuum ultraviolet of Excimer gas molecular discharging lamp radiation.Thereby the electrode of bottom is made into mesh-shape, and vacuum ultraviolet just shines downwards from the gap of these electrodes.According to such radiation modality, then do not need to open 2001-243920 number as the spy of the patent disclosure communique that is recorded in Japan, in lamp house, fill not active gases, or use quartz glass plate in the lamp house front.
The Excimer gas molecular discharging lamp of in above-mentioned background technology, being put down in writing, adopted netted, wire, tabular, or the metal of tubulose etc. is as electrode.Particularly, on the ultraviolet irradiation face of discharge vessel 1, adopt the electrode of netted or wire, ultraviolet ray irradiates from the gap of this net or line.
Use netted, wire, tabular, or during the electrode of tubulose etc., its problem is at electrode and forms in the minim gap between the electrolyte of discharge vessel 1 and produce sparkover.Because this sparkover, electrode substance will disperse (sputter) and cause the stained of light transmission window, thus absorbing light.Therefore, produce the problem that ultraviolet delivery efficiency descends.In a word, if see through under the situation that forms electrode on the face, then can not keep ultraviolet delivery efficiency not descend for a long time in the ultraviolet ray of discharge vessel 1.
As the method for the problem that solves such sparkover, can consider to use evaporation, means such as sputter or ion plating directly form membrane electrode on discharge vessel 1.Electrode with said method forms because do not produce the gap between discharge vessel 1 and electrode, and can suppress the generation of spark.
Owing to synthetic quartz glass has the material that outstanding vacuum ultraviolet transmissivity is used as discharge vessel 1, yet, since the metal that forms with evaporation and sputtering method therewith quartz glass adhesion strength extremely a little less than, and make and be very easy to peel off with the membrane electrode of above-mentioned gimmick formation.
The present invention carries out at above-mentioned problem, and purpose is to provide a kind of Excimer gas molecular discharging lamp that is difficult to the membrane electrode that peels off from discharge vessel that possesses.
According to the 1st invention,, and make electrode be combined on the discharge vessel very doughtily because the being adjacent to property of chromium that layer contained that is arranged in discharge vessel one side among 2 layers of conducting film and discharge vessel is strong.
According to invention 2, can by methods such as evaporation and sputter form on the ultraviolet irradiation face of discharge vessel and discharge vessel between the electrode that is difficult to peel off very close to each other.Its result, by suppressing discharge vessel and interelectrode sparkover and follow ultraviolet penetrating window stained in this, but the high ultraviolet delivery efficiency of long term maintenance.
According to invention 3, can make the strong adhesion strength that obtains discharge vessel and electrode, and the ultraviolet high delivery efficiency that comes from the outstanding vacuum ultraviolet transmissivity of synthetic quartz glass is killed two birds with one stone.
When vacuum ultraviolet when irradiation that is come from Excimer gas molecular discharging lamp, produce ozone with oxygen reaction on every side the atmosphere.In the former example, quilts such as aluminium are used as the electrode of Excimer gas molecular discharging lamp, the problem of existence be since kind electrode to the chemical instability of ozone and deterioration.For such problem, can consider to use to the stable platinum of ozone chemistry, palladium, gold, or nickel is as electrode material.
Yet the bad material of the adherence of these and synthetic quartz glass failed to be used for the membrane electrode of Excimer gas molecular discharging lamp in the past.Inventors find that in wide variety of materials chromium is suitable for conduct and platinum, palladium, gold, or nickel, and all good material of both sides' adherence of synthetic quartz glass.According to invention 4, can make with the adhesion strength of discharge vessel and electrode by force, and the good chemical stability two of electrode pair ozone is upright.If can use platiniferous, palladium, gold, or the layer that contains nickel covers the layer contain chromium fully then can suppress the deterioration that the oxidation etc. of chromium causes significantly.
Invention 5 of the present invention be and the 1st, 2,3, or 4 invention is relevant, it is characterized in that at least one side in the above-mentioned 2 layers conductive film, forms with ion plating method or sputtering method.
Inventors, by very many result of experiment, discovery is in a lot of methods, and ion plating and sputtering method are better than the conducting film that contains chromium is combined on the discharge vessel of Excimer gas molecular discharging lamp especially, and the 2nd conductive film are combined on the conductive film that contains chromium again.And inventors find, if reference ion plating method and sputtering method, the bond strength of the conducting film that the employing ion plating method is made is then more excellent.
As mentioned above,, can be combined in the conducting film that contains chromium very doughtily on the discharge vessel of Excimer gas molecular discharging lamp according to invention 5, and, can be combined in the 2nd conducting film very doughtily on the conducting film that contains chromium.
In the present invention, the thickness 0.2 μ m of electrode is above for well.The thin resistance that then causes of electrode becomes big problem.Particularly for applying high-tension Excimer gas molecular discharging lamp, if its electrode is thin, then the heating of electrode becomes big, finally can produce broken string sometimes, and sparkover etc. make the life-span of lamp reduce.Because the thickness of electrode is made for more than the 0.2 μ m, the heating of electrode is suppressed, and the deterioration of close property is inhibited, and the life-span of lamp then improves.
The opening ultraviolet lamp of irradiation ultraviolet radiation in air because the distance of discharge vessel and shone thing is in 10mm, and with about 3mm for well, so below the preferred 1mm of the thickness of electrode.When electrode is to use evaporation, sputter, or ion plating method is when forming, below the preferred 10 μ m of the thickness of electrode.If electrode is too thick, because more than the formation spended time of electrode etc., cost up caused.When using evaporation, sputter, or the method for ion plating is when forming electrode, and the thickness of electrode is more preferably below the 1 μ m.Owing to thickness is located at below the 1 μ m, can suppresses to chap on the electrode.
The thickness that contains the conducting film of chromium, preferred 0.01 μ m-0.1 μ m.If too thin, then the binding ability of itself and discharge vessel reduces, and is too thick, because the resistivity of chromium produces the problem of all conductivity reductions of electrode greatly.
In order to make electrode that sufficient conductivity all be arranged, in 2 layers of conducting film that invention 1 of the present invention is put down in writing, using the material higher from the layer of a discharge vessel side far away is preferred, and the layer of a discharge vessel side far away is with thicker in good than chrome-containing layer than the conductance of chromium.Being formed by the metal than chromium good conductivity mostly of thickness of electrode is then better.
At electrode surface, to be provided with the electrode protection material for well.By protective material is set, the corrosion of the oxidation of electrode etc. is suppressed, and improves the life-span of lamp.The thickness of electrode protection material, with below the 0.2 μ m more than the 0.05 μ m for well.The material of the protective material of electrode, preferred MgF
2And SiO
2These materials, ultraviolet transmittance is good, mechanical strength and outstanding to the chemical stability of oxygen and ozone etc.Particularly, Excimer gas molecular discharging lamp, the distance that is used to its discharge vessel and shone thing is under the airborne situation of the very near position below the 10mm, and is very effective to the deterioration that suppresses electrode by the electrode protection material is set.
Description of drawings
Fig. 1, demonstration be an example of the present invention, it is the oblique view that has omitted the Excimer gas molecular discharging lamp of long size pars intermedia.
Fig. 2, demonstration be an example of the present invention, it is the vertical section figure that has omitted the Excimer gas molecular discharging lamp of long size pars intermedia.
Fig. 3, demonstration be an example of the present invention, it is the vertical section enlarged drawing that is formed at the electrode on the discharge vessel outer surface of Excimer gas molecular discharging lamp.
Embodiment
Below, be illustrated with regard to example of the present invention with reference to figure.
What Fig. 1-Fig. 3 showed is an example of the present invention.
Fig. 1 is the oblique view that has omitted the Excimer gas molecular discharging lamp of long size pars intermedia.Fig. 2 is the vertical section figure that has omitted the Excimer gas molecular discharging lamp of long pars intermedia.Fig. 3 is the vertical section enlarged drawing that is formed at the electrode 3 on the outer surface of discharge vessel 1 of Fig. 2.
Excimer gas molecular discharging lamp with the discharge vessel 1 of the square box shape that adopts the long size of fore-and-aft direction is an example, and this example is described.As shown in Figures 1 and 2, be the both ends open portion of cornue 1a of square synthetic quartz glass system of growing crosswise at cross section, be welded with front and back wallboard 1b respectively with the identical shaped substantially synthetic quartz glass system of cornue 1a cross section.So, the both ends open portion of cornue 1a is blocked, has just formed discharge vessel 1.
This little apicule pipe 1c is that its quilt of pipe of synthetic quartz glass system is welded in outside adding on the wallboard 1b of front and back highlightedly.In its pipe, communicate with the open pore that is pre-formed at the central part substantially of front and back wallboard 1b.The outside of lower wall panels on cornue 1a is formed with the metallic film as electrode 2,3.The formation of this metallic film is before being welded on cornue 1a both ends open portion to front and back wallboard 1b or thereafter can.
Electrode 2, by film forming in almost cover above the cornue 1a on the panel surfaces comprehensively.Electrode 3, film forming are on cornue 1a lower wall panels, and it is made into the mesh-shape pattern and covers the bottom substantially comprehensively.
Fig. 3 has shown the sectional drawing of electrode 3.Electrode 2 and 3 any one all be, form earlier the 1st layer chromium film 3a, continue to form the 2nd layer nickel film 3b then.
These films are by forming metal evaporation on the synthetic quartz glass surface.These films especially preferably form with ion plating method or sputtering method.If reference ion plating method and sputtering method, more preferably ion plating method then.In plasma space, the metal bump glass surface that is ionized, and be combined in formation film on glass forcefully.The mesh-shape pattern of electrode 3 is after the 2nd layer of formation, adopts etching method to form need not partly removing.
In the electrode 2, on cornue 1a, form thick chromium layer and the thick nickel dam of 0.35 μ m of 0.05 μ m on almost all surfaces of wallboard.In the electrode 3, the pattern of the almost holomorphism ramify shape bottom this cornue 1a lower wall panels, it is identical with electrode 2, and chromium layer and the 0.35 μ m thick nickel dam thick by 0.05 μ m form.Therefore, the thickness of electrode, the both sides of electrode 2 and electrode 3 are 0.4 μ m.
And,, be formed the magnesium fluoride layer as electrode protection material 4 on the surface of electrode 2 and electrode 3.Electrode protection material 4 for example, can adopt and shelter not wanting the position, and the evaporation magnesium fluoride makes it be formed at necessary position again.As the forming method of electrode protection material 4, vacuum evaporation, ion plating method or sputtering method etc. all can use, and but, is optimum because of vacuum vapour deposition cheap for manufacturing cost.
In this example, electrode 2 and electrode 3 both sides are formed the electrode protection material 4 of the thick magnesium fluoride of 0.1 μ m.As the material of electrode protection material 4, except magnesium fluoride, can use silicon dioxide (SiO
2).For electrode 2 and electrode 3 are not exposed, preferably electrode protection material 4 is covered in electrode 2 and electrode 3 comprehensively.
Filling discharge and use gas to discharge vessel 1 is inner, is by from the little apicule pipe 1c deaeration of a side time, injects to discharge from the little apicule pipe 1c of opposite side to be accomplished with gas.After this, the point of both sides' little apicule pipe 1c dissolved seal and make and to be sealed, and finish the filling of discharge with gas.When being installed on the equipment by lamp, little apicule pipe 1c also can be used as the support sector of lamp.In this example, xenon is used as discharge and uses gas filling in discharge vessel 1 the inside.Its result, the Excimer gas molecular discharging lamp of this example can radiate, and centre wavelength is the high energy vacuum ultraviolet of 172nm.
According to the Excimer gas molecular discharging lamp of above-mentioned formation, because the electrode that forms on the discharge vessel surface is to form nickel dam between the chromium layer that outstanding adhesion is arranged of following discharge vessel, the adhesion on this electrode and discharge vessel surface strengthens.This is because the both sides of chromium and synthetic quartz glass and nickel have outstanding adhesion.As a comparative example, except the electrode (thickness 0.4 μ m) that has chrome-containing layer not and only be made of nickel dam, all this example with above-mentioned is identical for other, and has made Excimer gas molecular discharging lamp.
On the electrode film of the both sides' of this example and comparative example Excimer gas molecular discharging lamp, be carved into the slit of go plate-like, stick thereon when peeling again after the adhesive tape, observe electrode film and whether peel off, be the crosscut disbonded test from discharge vessel.Know that from its result be separated with the electrode of this example of chromium layer, the electrode than comparative example is combined on the discharge vessel more strongly.
In life test, the Excimer gas molecular discharging lamp of this example, longer than the life-span of the Excimer gas molecular discharging lamp of comparative example.Simultaneously, by changing the chromium layer, the thickness of nickel dam and electrode carries out life test in this example, as can be known the thickness of electrode more than 0.2 μ m for well, the thickness of chromium layer with below the 0.1 μ m more than the 0.01 μ m for well.
And, come coated electrode by adopting the electrode protection material of forming by magnesium fluoride, improved the life-span of Excimer gas molecular discharging lamp.And know the thickness of leading this electrode protection material, with below the 0.2 μ m more than the 0.05 μ m for well.
In above-mentioned example, nickel is used as the 2nd layer, but, uses platinum, palladium, and gold, or silver has also obtained same effect.
In above-mentioned example, though show be discharge vessel 1 by front and back wallboard 1b, and the square box shape of the length of 1b and dihedral pipe 1a is not limited only to this.Open the cylindrical duct of the dual structure of 2001-243920 number record for the spy of the open communique of Japan Patent, packing in the cylindrical duct of minor diameter is arranged discharges uses the discharge vessel of gas, and the spy of the open communique of Japan Patent opens the discharge vessel etc. of the square box shape of 2000-260396 number record, and the present invention is also effective.
In above-mentioned example, demonstration be to form with little apicule pipe 1c to be connected in towards the opening of discharge vessel 1 inside, but, with other tubing or merely to form open pore also passable.Open pore is used to filling discharge gas.For not hindering ultraviolet irradiation, open pore, with on the wallboard beyond the wallboard that is arranged on ultraviolet direct projection direction for well.
In above-mentioned example, demonstration be that front and back sidewall paneling 1b is welded on cornue 1a openings at two ends portion, make discharge vessel 1 therefrom, but, the method for production of discharge vessel 1 is not limited to this.
For example, also can be welded on the both ends open portion of cross section to front and back wallboard 1b for the oval bobbin of the wide square synthetic quartz glass of horizontal stroke.In addition, also be shaped to the cylinder tubulose, cornue 1a two ends are melted the thing that envelope is ended.In discharge vessel 1, the last lower wall panels that forms electrode 2,3 is smooth and parallel the getting final product of cardinal principle on a large scale.Therefore, for example (,) the left and right sides wallboard of the container of cylinder tubulose to bend to the semicircle tubular also passable, for example fusion sealing front and rear side wallboard also can because of the fusion bending again.
In addition, even, also can obtain the effect same with the present invention welding respectively and make under the discharge vessel situation with 6 blocks of synthetic quartz glass sheet materials.In this case, because of each wallboard is made of different sheet material, can change to ultraviolet transmittance or the high material of reflectivity to wallboard arbitrarily.
In above-mentioned example, demonstration be that whole wallboards of discharge vessel 1 are made of synthetic quartz glass.Yet the wallboard beyond the wallboard of the irradiation usefulness that ultraviolet ray sees through is so long as electrolyte may not be used synthetic quartz glass.
Above-mentioned example is to be that the vacuum ultraviolet Excimer gas molecular discharging lamp of 172nm is the explanation that example is done with the radiation wavelength, and but, the present invention is not limited thereto.In addition, for example use gas as discharge, also can demonstrate the effect same with the present invention with KrI and ArF.If during with KrI then radiate 191nm, then radiate the vacuum ultraviolet of 193nm wavelength with ArF.
In above-mentioned example, on discharge vessel, be formed with the electrode of forming by layers 1 and 2, but, electrode of the present invention may not be defined in 2 layers of structure.For example, between layers 1 and 2, or the 2nd layer with the 1st a layer of opposite side, can be provided with the 3rd layer, also can be made into electrode with the multi-ply construction more than 3 layers.
In above-mentioned example, electrode 2 and electrode 3 all are 2 layers of structures, but, may not be necessary that a both sides makes 2 layers of structure.For example, can only make 2 layers of structure to the electrode 3 of ultraviolet irradiation aspect.By adopting chrome-containing layer, electrode is combined in this effect on the discharge vessel very doughtily, no matter be the electrode of ultraviolet irradiation face, also is that the electrode of non-ultraviolet irradiation face all can obtain equally.Therefore, very thin light electrode as discharge vessel such advantage of adhering very doughtily, even the electrode of ultraviolet irradiation aspect, whether even the electrode of ultraviolet irradiation aspect can obtain too.
Yet, in non-irradiation ultraviolet radiation one side, if use netted, wire, tabular, or during the electrode of tubulose etc., even at electrode and form between minim gap between the electrolyte of discharge vessel and produce sparkover, produce dispersing (sputter) and stained light transmission window of electrode substance, also do not have the problem of ultraviolet delivery efficiency decline and so on.
Relative therewith, in ultraviolet irradiation one side, cause the stained of light transmission window, the serious problems that then exist ultraviolet delivery efficiency to reduce if use the electrode of netted or wire.In a word, the present invention of application and ultraviolet irradiation one side makes the adhesion that prevents the stained of light transmission window and enhanced film electrode pair discharge vessel obtain two first and stands.Therefore, the present invention is applied to the electrode of ultraviolet irradiation one side of discharge vessel, than being used for not irradiation ultraviolet radiation side, in the industrial significance that has more.
The application, on September 20th, 2002 was applied patent in Japan, served as that the spy is willing to that the patent application of 2002-275489 is as the basis with the application number.Record and narrate according to this, special full content of being willing to the specification of 2002-275489 is used as citing document and inserts this specification.
(utilizing on the industry possibility)
Feature of the present invention is the electrode that has 2 layers of conducting film the outer surface setting of discharge vessel, In above-mentioned 2 layers conducting film, the layer that is positioned at discharge vessel one side contains chromium, according to the present invention, and energy Obtain membrane electrode and be combined in very doughtily Excimer gas molecular discharging lamp on the discharge vessel.
Claims (6)
1. Excimer gas molecular discharging lamp, wherein possesses the discharge vessel that constitutes by dielectric, described discharge vessel inside has been enclosed and has been used for the luminous discharge gas of Excimer gas molecular, it is characterized in that, outer surface at described discharge vessel possesses the electrode that has 2 layers of conducting film at least, in described 2 layers of conducting film, the layer that is positioned at discharge vessel one side contains chromium.
2. Excimer gas molecular discharging lamp according to claim 1 is characterized in that, described electrode is to have the pattern film forming in gap, and ultraviolet ray can see through this gap.
3. Excimer gas molecular discharging lamp according to claim 1 is characterized in that described discharge vessel contains synthetic quartz glass.
4. Excimer gas molecular discharging lamp according to claim 1 is characterized in that, in described 2 layers of conducting film, away from the layer of discharge vessel one side, contains select at least a from platinum, palladium, gold or nickel.
5. according to claim 1,2,3 or 4 described Excimer gas molecular discharging lamps, it is characterized in that at least one side in described 2 layers of conducting film utilizes ion plating method or sputtering method to form.
6. the manufacture method of an Excimer gas molecular discharging lamp, wherein this Excimer gas molecular discharging lamp possesses the discharge vessel that is made of dielectric, described discharge vessel inside has been enclosed and has been used for the luminous discharge gas of Excimer gas molecular, outer surface at described discharge vessel possesses the electrode that has 2 layers of conducting film at least, in described 2 layers of conducting film, the layer that is positioned at discharge vessel one side contains chromium, it is characterized in that at least one side in described 2 layers of conducting film utilizes ion plating method or sputtering method to form.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP275489/2002 | 2002-09-20 | ||
| JP2002275489A JP2004111326A (en) | 2002-09-20 | 2002-09-20 | Excimer lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1682349A CN1682349A (en) | 2005-10-12 |
| CN100336163C true CN100336163C (en) | 2007-09-05 |
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ID=32025035
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB038222515A Expired - Lifetime CN100336163C (en) | 2002-09-20 | 2003-09-19 | Excimer lamp |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2004111326A (en) |
| KR (1) | KR20050057224A (en) |
| CN (1) | CN100336163C (en) |
| TW (1) | TWI261288B (en) |
| WO (1) | WO2004027819A1 (en) |
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| JP2006294440A (en) * | 2005-04-12 | 2006-10-26 | Shinetsu Quartz Prod Co Ltd | Deformed synthetic quartz tube for excimer uv lamp, and its manufacturing method |
| JP4662358B2 (en) * | 2005-11-22 | 2011-03-30 | ユーテック株式会社 | External electrode discharge lamp |
| JP2008066188A (en) * | 2006-09-08 | 2008-03-21 | U-Tec Kk | External electrode discharge lamp |
| JP5071085B2 (en) * | 2007-12-11 | 2012-11-14 | ウシオ電機株式会社 | Excimer discharge lamp |
| KR100926354B1 (en) * | 2007-12-27 | 2009-11-11 | 주식회사 룩스온 | Excimer lamp of flat type and tube type, and manufacturing method thereof |
| JP5311271B2 (en) * | 2008-03-10 | 2013-10-09 | ウシオ電機株式会社 | Excimer lamp and method of manufacturing the excimer lamp |
| TWI437609B (en) * | 2008-05-30 | 2014-05-11 | Gs Yuasa Int Ltd | Discharge lamp of external electrode type and uv-irradiating device using the discharge lamp |
| JP5155041B2 (en) * | 2008-07-03 | 2013-02-27 | 浜松ホトニクス株式会社 | Planar mercury lamp and light emitting device |
| JP5163520B2 (en) * | 2009-01-29 | 2013-03-13 | ウシオ電機株式会社 | Fluorescent lamp and method of manufacturing the fluorescent lamp |
| JP5201042B2 (en) * | 2009-03-23 | 2013-06-05 | ウシオ電機株式会社 | Excimer lamp |
| JP4752944B2 (en) * | 2009-04-10 | 2011-08-17 | ウシオ電機株式会社 | Excimer discharge lamp |
| CN102214543B (en) * | 2010-04-02 | 2014-08-06 | 优志旺电机株式会社 | Fluorescent lamp and manufacture method of fluorescent lamp |
| JP6679064B2 (en) * | 2015-06-24 | 2020-04-15 | ウシオ電機株式会社 | Vacuum ultraviolet sensor |
| TWI724418B (en) * | 2019-05-09 | 2021-04-11 | 崇翌科技股份有限公司 | Excimer lamp |
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| JPH10133597A (en) * | 1996-07-26 | 1998-05-22 | Canon Inc | Wiring board, production of this wiring board, liquid crystal element having this wiring board and production of liquid crystal element |
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| JP4345153B2 (en) * | 1999-09-27 | 2009-10-14 | ソニー株式会社 | Manufacturing method of video display device |
| JP3589172B2 (en) * | 1999-10-18 | 2004-11-17 | 松下電工株式会社 | Field emission electron source |
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2002
- 2002-09-20 JP JP2002275489A patent/JP2004111326A/en active Pending
-
2003
- 2003-09-15 TW TW092125328A patent/TWI261288B/en not_active IP Right Cessation
- 2003-09-19 CN CNB038222515A patent/CN100336163C/en not_active Expired - Lifetime
- 2003-09-19 KR KR1020057003847A patent/KR20050057224A/en not_active Application Discontinuation
- 2003-09-19 WO PCT/JP2003/012039 patent/WO2004027819A1/en active Application Filing
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| JPH08152406A (en) * | 1994-11-29 | 1996-06-11 | Shimadzu Corp | Fluorescence analyzer |
| JP2000260396A (en) * | 1999-03-05 | 2000-09-22 | Quark Systems Co Ltd | Excimer lamp, excimer irradiation device, and organic compond decomposition method |
| JP2001023577A (en) * | 1999-07-02 | 2001-01-26 | Ushio Inc | Dielectric barrier discharge lamp |
| JP2002100324A (en) * | 2000-09-25 | 2002-04-05 | Toshiba Lighting & Technology Corp | Dielectric barrier discharge lamp and dielectric barrier discharge lamp device |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI261288B (en) | 2006-09-01 |
| TW200407936A (en) | 2004-05-16 |
| WO2004027819A1 (en) | 2004-04-01 |
| JP2004111326A (en) | 2004-04-08 |
| CN1682349A (en) | 2005-10-12 |
| KR20050057224A (en) | 2005-06-16 |
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