CH671652B - - Google Patents
Info
- Publication number
- CH671652B CH671652B CH302286A CH302286A CH671652B CH 671652 B CH671652 B CH 671652B CH 302286 A CH302286 A CH 302286A CH 302286 A CH302286 A CH 302286A CH 671652 B CH671652 B CH 671652B
- Authority
- CH
- Switzerland
Links
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH302286A CH671652B (nl) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH302286A CH671652B (nl) | 1986-07-29 | 1986-07-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH671652B true CH671652B (nl) | 1989-09-15 |
Family
ID=4246873
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH302286A CH671652B (nl) | 1986-07-29 | 1986-07-29 |
Country Status (1)
Country | Link |
---|---|
CH (1) | CH671652B (nl) |
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1986
- 1986-07-29 CH CH302286A patent/CH671652B/de unknown