CH671652B - - Google Patents

Info

Publication number
CH671652B
CH671652B CH302286A CH302286A CH671652B CH 671652 B CH671652 B CH 671652B CH 302286 A CH302286 A CH 302286A CH 302286 A CH302286 A CH 302286A CH 671652 B CH671652 B CH 671652B
Authority
CH
Switzerland
Application number
CH302286A
Other languages
German (de)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to CH302286A priority Critical patent/CH671652B/de
Publication of CH671652B publication Critical patent/CH671652B/de

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00Heating by electric discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
CH302286A 1986-07-29 1986-07-29 CH671652B (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CH302286A CH671652B (nl) 1986-07-29 1986-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH302286A CH671652B (nl) 1986-07-29 1986-07-29

Publications (1)

Publication Number Publication Date
CH671652B true CH671652B (nl) 1989-09-15

Family

ID=4246873

Family Applications (1)

Application Number Title Priority Date Filing Date
CH302286A CH671652B (nl) 1986-07-29 1986-07-29

Country Status (1)

Country Link
CH (1) CH671652B (nl)

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