CH663066A5 - TURBOMOLECULAR PUMP WITH LOW-INDUCTIVE DC MOTOR, BRAKE DEVICE AND METHOD FOR OPERATING THE SAME. - Google Patents
TURBOMOLECULAR PUMP WITH LOW-INDUCTIVE DC MOTOR, BRAKE DEVICE AND METHOD FOR OPERATING THE SAME. Download PDFInfo
- Publication number
- CH663066A5 CH663066A5 CH5781/83A CH578183A CH663066A5 CH 663066 A5 CH663066 A5 CH 663066A5 CH 5781/83 A CH5781/83 A CH 5781/83A CH 578183 A CH578183 A CH 578183A CH 663066 A5 CH663066 A5 CH 663066A5
- Authority
- CH
- Switzerland
- Prior art keywords
- rotor
- turbomolecular pump
- motor
- shaft
- pump according
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 11
- 239000010959 steel Substances 0.000 claims description 11
- 239000000523 sample Substances 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 230000000368 destabilizing effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/08—Structural association with bearings
- H02K7/09—Structural association with bearings with magnetic bearings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
- H02K7/106—Structural association with clutches, brakes, gears, pulleys or mechanical starters with dynamo-electric brakes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P3/00—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters
- H02P3/06—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters for stopping or slowing an individual dynamo-electric motor or dynamo-electric converter
- H02P3/18—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters for stopping or slowing an individual dynamo-electric motor or dynamo-electric converter for stopping or slowing an ac motor
- H02P3/22—Arrangements for stopping or slowing electric motors, generators, or dynamo-electric converters for stopping or slowing an individual dynamo-electric motor or dynamo-electric converter for stopping or slowing an ac motor by short-circuit or resistive braking
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2380/00—Electrical apparatus
- F16C2380/26—Dynamo-electric machines or combinations therewith, e.g. electro-motors and generators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
Description
Die Erfindung betrifft eine Turbomolekularpumpe mit magnetisch gelagertem Rotor und kollektorlosem Gleichstrommotor zum Antrieb des Rotors, einem Sensor zur Erfassung von Rotorschwingungen senkrecht zur Drehachse und einer elektrisch wirkenden Bremseinrichtung für den Rotor. The invention relates to a turbomolecular pump with a magnetically mounted rotor and a collectorless DC motor for driving the rotor, a sensor for detecting rotor vibrations perpendicular to the axis of rotation and an electrically acting braking device for the rotor.
Eine solche Lagerung wird in der Deutschen Patentschrift 2 825 551 beschrieben. Bei dieser Lagerung erfolgt die radiale Stabilisierung durch passive Magnetlager, die aber axial destabilisierend wirken. Axial wird der Rotor durch mechanische Leitlager gestützt. Weiterhin wird in der Deutschen Auslegeschrift 2 349 033 eine Turbomolekularpumpe beschrieben, deren Rotor sowohl radial als auch axial durch aktive Magnetlager berührungsfrei gelagert wird. Such storage is described in German Patent 2,825,551. With this type of bearing, the radial stabilization is carried out by passive magnetic bearings, which have an axially destabilizing effect. The rotor is axially supported by mechanical guide bearings. Furthermore, in German Auslegeschrift 2 349 033 a turbomolecular pump is described, the rotor of which is supported in a contact-free manner both radially and axially by active magnetic bearings.
Die in diesen beiden Schriften beschriebenen Pumpen benötigen für den Fall starker Rotorschwingungen, die durch Stoss von aussen angeregt werden können, oder bei Versagen der Magnetlagerung, Notlager. Nun stellt aber ein schnelldrehender Rotor einer Turbomolekularpumpe einen Energiespeicher dar. The pumps described in these two documents require emergency bearings in the event of strong rotor vibrations, which can be excited by external shock, or if the magnetic bearing fails. However, a fast rotating rotor of a turbomolecular pump represents an energy store.
Wird der mit Nenndrehzahl rotierende Rotor bei einer Störung durch die Notlager aufgefangen und muss bis zum Stillstand in den Notlagern laufen, so wird bei Fehlen einer Bremsmöglichkeit die Rotationsenergie des Rotors als Reibungsenergie in den Notlagern verbraucht, was in der Regel zur Zerstörung derselben führt. Um eine Zerstörung der Notlager zu vermeiden, flutet man die Turbomolekularpumpe mit Gas, das sich durch Reibung erwärmt und somit die Rotationsenergie abführt. If the rotor rotating at nominal speed is caught by the emergency bearings in the event of a malfunction and has to run to a standstill in the emergency bearings, the rotational energy of the rotor is used as friction energy in the emergency bearings in the absence of braking, which generally leads to their destruction. In order to avoid destroying the emergency camps, the turbomolecular pump is flooded with gas, which heats up due to friction and thus dissipates the rotational energy.
Zum Bremsen von Rotoren benutzt man in vielen Fällen den im Rotor eingebauten Antriebsmotor, den man als Generator schaltet. Dieses Verfahren ist bei kollektorlosen Gleichstrommotoren mit permanentmagnetischem Rotor durch Anschluss von äusseren Widerständen an die Statorwicklung leicht möglich, jedoch verhindert bei Statoren mit Eisenkern, deren hohe Induktivität einen ausreichenden Stromfluss und eine schnelle Bremswirkung. Drehstrommotoren sind zum In many cases, the drive motor built into the rotor, which is switched as a generator, is used to brake rotors. This method is easily possible for collectorless DC motors with a permanent magnetic rotor by connecting external resistors to the stator winding, but prevents stators with an iron core whose high inductance ensures sufficient current flow and a quick braking effect. AC motors are for
Bremsen ungeeignet, da schon bei kurzzeitiger Stromunterbrechung deren Generatorwirkung aussetzt. Brakes unsuitable, since their generator effect ceases even if the power supply is briefly interrupted.
Motore mit Eisen im Stator üben ausserdem radiale Anziehungskräfte aus, die den stabilisierenden Magnetlagerkräften entgegenwirken. Insbesondere Drehstrommotore, die auf einen kleineren Luftspalt wegen des erforderlichen Magnetisierungsstromes angewiesen sind, üben starke Radialkräfte auf den Rotor aus. Motors with iron in the stator also exert radial attractive forces that counteract the stabilizing magnetic bearing forces. In particular, three-phase motors, which rely on a smaller air gap due to the required magnetizing current, exert strong radial forces on the rotor.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine magnetisch gelagerte Turbomolekularpumpe mit einem elektronisch kommutierten Gleichstrommotor anzugeben, der keine destabilisierenden Kräfte auf die Magnetlagerung ausübt, sich durch Anschliessen externer Widerstände an die Motorspulen wirksam bremsen lässt und ein Verfahren anzugeben, wie die Pumpe bei Betriebsstörungen stillgesetzt werden kann bei schonendem Betrieb der Notlager. The present invention is based on the object of specifying a magnetically mounted turbomolecular pump with an electronically commutated direct current motor which does not exert any destabilizing forces on the magnetic bearing, can be effectively braked by connecting external resistors to the motor coils, and a method of how the pump is stopped in the event of malfunctions can be with careful operation of the emergency camp.
Die Lösung der Aufgabe erfolgt erfindungsgemäss durch Ausbildung der Rotorwelle der Turbomolekularpumpe als Hohlwelle in die ein radial sektorweise mit wechselnder Polarität magnetisierter Ringmagnet innerhalb einer in die Hohlwelle eingebauten Stahlglocke angeordnet ist, der mit einer in der Stahlglocke befestigten Stahlwelle einen Luftspalt bildet, in den die Antriebsspulen des eisenlosen Motorstators hineinragen. The object is achieved according to the invention by designing the rotor shaft of the turbomolecular pump as a hollow shaft into which a ring magnet magnetized radially in sectors with changing polarity is arranged within a steel bell built into the hollow shaft, which forms an air gap with a steel shaft fastened in the steel bell, into which the drive coils of the ironless motor stator protrude.
Aussenläufermotore mit Stahlglocke als magnetischem Rückschluss und Magnetträger sind bekannt, jedoch werden in diesen Motoren Statoren mit Eisenkern verwendet, die destabilisierende radiale Kräfte auf den Rotor ausüben. Ein weiterer Nachteil ist die Wirbelstromausbildung im Eisen des Stators, die den Wirkungsgrad des Motors mindert. Bei der erfindungsgemässen Ausführung des Antriebsmotors der Turbomolekularpumpe ist der Stator eisenfrei und die entsprechenden Stahlteile im Rotor sind nur von statischen Magnetfeldern durchflutet. Diese Bauart gewährleistet geringe Verluste, Freiheit von destabilisierenden Radialkräften und geringe Spuleninduktivität. External rotor motors with a steel bell as a magnetic yoke and magnetic carrier are known, but stators with an iron core are used in these motors, which exert destabilizing radial forces on the rotor. Another disadvantage is the eddy current formation in the iron of the stator, which reduces the efficiency of the motor. In the embodiment of the drive motor of the turbomolecular pump according to the invention, the stator is iron-free and the corresponding steel parts in the rotor are only flooded with static magnetic fields. This design ensures low losses, freedom from destabilizing radial forces and low coil inductance.
Wegen des breiten Luftspaltes ist im Motor ein starker Ringmagnet erforderlich. Eine bevorzugte Bauform ist die segmentweise Zusammensetzung des Ringmagneten aus einzelnen Sm-Co-Magnetstücken. In den Spulenkörper des Motorstators sind 2 Hallsonden eingebaut, die die Rotorstellung erfassen und über eine elektronische Auswerteschaltung mit Hilfe von 4 Schalttransistoren die Motorspulen mit Strom beaufschlagen. Because of the wide air gap, a strong ring magnet is required in the motor. A preferred design is the segmental composition of the ring magnet from individual Sm-Co magnet pieces. Two Hall probes are installed in the coil body of the motor stator, which detect the rotor position and apply current to the motor coils via an electronic evaluation circuit using 4 switching transistors.
Ein Schwingungssensor misst die Schwingungsamplitude des Rotors senkrecht zur Drehachse. In einem elektronischen Überwachungsgerät wird die aktuelle Schwingungsamplitude mit einem vorgegebenen zulässigen Höchstwert verglichen. Bei Überschreitung dieses Höchstwertes wird der Motorantrieb abgeschaltet und Bremswiderstände werden angeschlossen. Diese Bremsschaltung bleibt so lange erhalten, bis die vorgegebene Schwingungsamplitude wieder unterschritten ist. A vibration sensor measures the vibration amplitude of the rotor perpendicular to the axis of rotation. In an electronic monitoring device, the current vibration amplitude is compared with a predetermined maximum value. If this maximum value is exceeded, the motor drive is switched off and braking resistors are connected. This brake circuit is maintained until the vibration amplitude falls below the specified value again.
Anhand eines Beispiels soll die Erfindung näher erläutert werden. Die Abbildung zeigt die wesentlichen Merkmale der erfindungsgemässen Turbomolekularpumpe. The invention will be explained in more detail using an example. The figure shows the essential features of the turbomolecular pump according to the invention.
In einem Gehäuse 20 sind die Statorscheiben 21 eingebaut, zwischen denen sich der Rotor 22 mit den Rotorscheiben dreht. Die Magnetlager 23 und 24a und 24b bestehen aus axial magnetisierten Permanentmagnetringen, die mit gleichen Polen aufeinandersitzen. Sie stabilisieren den Rotor in radialer Richtung. Die Magnetlager-Rotorringe 24b sind in die Rotorwelle, die als Hohlwelle ausgebildet ist, eingebaut. Die Magnetlager-Statorringe 24a sitzen auf gehäusefesten Trägern, konzentrisch in den Rotorringen. Die axiale Stabilisierung erfolgt, wie in der Deutschen Patentschrift 2 825 551 beschrieben durch Zapfenlager auf verschiebbaren The stator disks 21 are installed in a housing 20, between which the rotor 22 rotates with the rotor disks. The magnetic bearings 23 and 24a and 24b consist of axially magnetized permanent magnet rings which sit on top of one another with the same poles. They stabilize the rotor in the radial direction. The magnetic bearing rotor rings 24b are installed in the rotor shaft, which is designed as a hollow shaft. The magnetic bearing stator rings 24a sit on supports fixed to the housing, concentrically in the rotor rings. The axial stabilization takes place, as described in German Patent 2,825,551, by means of journal bearings on displaceable bearings
2 2nd
5 5
10 10th
15 15
20 20th
25 25th
30 30th
35 35
40 40
45 45
50 50
55 55
60 60
65 65
3 3rd
663066 663066
Anschlägen 25 und 26, wobei die Anschläge durch Servomotoren so verstellt werden, dass der Rotor im labilen Punkt der Magnetlager gehalten wird und somit die Andruckkraft der Zapfenlager auf die Unterlage einen bestimmten Wert nicht überschreitet. Stops 25 and 26, the stops being adjusted by servomotors in such a way that the rotor is held in the unstable point of the magnetic bearings and thus the pressing force of the journal bearings on the base does not exceed a certain value.
Als Notlager 27,28 werden Kugellager verwendet, die im jeweiligen Träger der Magnetlagerstatoren eingebaut sind. Zwischen den Innenringen der Lager und der Rotorwelle ist ein Spalt 29, der eine gewisse Schwingung des Rotors erlaubt. Der Motor ist in der Welle eingebaut. Ein Sensor 11 misst die Schwingungsamplitude des Rotors. Eine elektronische Schwingungsüberwachung 12 schaltet bei Überschreiten der zulässigen Schwingungsamplitude das Relais 13 ab und verbindet die Bremswiderstände 14 mit den Motorspulen. Bei Stromausfall fällt das Relais 13 ebenfalls ab und der Rotor wird gebremst. Ball bearings which are installed in the respective support of the magnetic bearing stators are used as emergency bearings 27, 28. There is a gap 29 between the inner rings of the bearings and the rotor shaft, which allows a certain vibration of the rotor. The motor is built into the shaft. A sensor 11 measures the vibration amplitude of the rotor. An electronic vibration monitor 12 switches off the relay 13 when the permissible vibration amplitude is exceeded and connects the braking resistors 14 to the motor coils. In the event of a power failure, relay 13 also drops out and the rotor is braked.
5 Die Antriebseinheit ist im unteren Teil der Abbildung dargestellt. Dabei ist die Rotorwelle als Hohlwelle 1 ausgebildet. In dieser ist ein radial, sektorweise mit wechselnder Polarität magnetisierter Ringmagnet 3 innerhalb einer in die Hohlwelle 1 eingebauten Stahlglocke 2 angeordnet. Dieser Ring- 5 The drive unit is shown in the lower part of the figure. The rotor shaft is designed as a hollow shaft 1. A ring magnet 3 magnetized radially, in sectors with changing polarity, is arranged in this within a steel bell 2 built into the hollow shaft 1. This ring
lo magnet bildet mit einer in der Stahlglocke 2 befestigten Stahlwelle 5 einen Luftspalt, in den die eisenlosen Antriebsspulen 4 des Motorstators hineinragen. lo magnet forms an air gap with a steel shaft 5 fastened in the steel bell 2, into which the ironless drive coils 4 of the motor stator protrude.
B B
1 Blatt Zeichnungen 1 sheet of drawings
Claims (4)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19833302839 DE3302839A1 (en) | 1983-01-28 | 1983-01-28 | TURBOMOLECULAR PUMP WITH LOW-INDUCTIVE DC MOTOR, BRAKE DEVICE AND METHOD FOR OPERATING THE SAME |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH663066A5 true CH663066A5 (en) | 1987-11-13 |
Family
ID=6189439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH5781/83A CH663066A5 (en) | 1983-01-28 | 1983-10-24 | TURBOMOLECULAR PUMP WITH LOW-INDUCTIVE DC MOTOR, BRAKE DEVICE AND METHOD FOR OPERATING THE SAME. |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS59144333A (en) |
| CH (1) | CH663066A5 (en) |
| DE (1) | DE3302839A1 (en) |
| FR (1) | FR2540191B1 (en) |
| GB (1) | GB2134326B (en) |
| IT (1) | IT1172962B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0414127A1 (en) * | 1989-08-25 | 1991-02-27 | Leybold Aktiengesellschaft | Vacuum pump with magnetic bearing |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3432946C2 (en) * | 1984-09-07 | 1994-08-04 | Pfeiffer Vakuumtechnik | Collectorless DC motor with ironless stator winding |
| JPS6248173U (en) * | 1985-09-13 | 1987-03-25 | ||
| JPS62218692A (en) * | 1986-03-18 | 1987-09-26 | Mitsubishi Electric Corp | Turbo-molecular pump device |
| JPS62261696A (en) * | 1986-05-08 | 1987-11-13 | Mitsubishi Electric Corp | Turbo-molecular pumping plant |
| JPS63242153A (en) * | 1987-03-27 | 1988-10-07 | Nippon Seiko Kk | Magnetic bearing motor |
| DE3740295A1 (en) * | 1987-11-27 | 1989-06-08 | Asea Brown Boveri | AXIAL MAGNETIC BEARING |
| US5110264A (en) * | 1989-12-20 | 1992-05-05 | Allied-Signal Inc. | Variable speed turbo vacuum pump |
| DE4318214A1 (en) * | 1993-06-01 | 1994-12-08 | Leybold Ag | Process for operating a friction vacuum pump and a friction vacuum pump suitable for this operating process |
| FR2747431B1 (en) * | 1996-04-15 | 1998-07-03 | Soc D Mecanique Magnetique | TURBOMOLECULAR PUMP WITH ACTIVE MAGNETIC BEARINGS |
| DE19806077A1 (en) * | 1997-11-27 | 1999-06-02 | Itt Mfg Enterprises Inc | Rotor bearing for a motor pump unit |
| ITTO980453A1 (en) * | 1998-05-27 | 1999-11-29 | Varian Spa | COMPACT VACUUM PUMP |
| DE102006041183A1 (en) * | 2006-09-01 | 2008-03-06 | Oerlikon Leybold Vacuum Gmbh | Turbo-molecular vacuum pump, has motor coils connected with brake resistor by change-over contact of brake relay e.g. mechanical relay, and with inverter module by another change-over contact of brake relay |
| DE102007044690A1 (en) * | 2007-09-19 | 2009-04-02 | Oerlikon Leybold Vacuum Gmbh | vacuum pump |
| CN106704366B (en) * | 2016-12-08 | 2019-02-15 | 广东工业大学 | One kind is based on adaptively adjusting dynamically balanced electromagnetic spindles |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2039428C3 (en) * | 1970-08-07 | 1975-10-02 | Standard Elektrik Lorenz Ag, 7000 Stuttgart | Low-speed DC motor in flat design |
| FR2159753A6 (en) * | 1971-11-10 | 1973-06-22 | Socrem | |
| DE2349033C3 (en) * | 1973-09-29 | 1984-08-30 | Leybold-Heraeus Gmbh, 5000 Koeln | Turbo molecular pump |
| IT1034733B (en) * | 1974-04-11 | 1979-10-10 | Teldix Gmbh | ELECTRIC MACHINE |
| DE2417818C2 (en) * | 1974-04-11 | 1983-03-31 | Teldix Gmbh, 6900 Heidelberg | Electric machine |
| CH583856A5 (en) * | 1974-09-27 | 1977-01-14 | Balzers Patent Beteilig Ag | |
| DE2457783C2 (en) * | 1974-12-06 | 1986-10-09 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar | Magnetic storage |
| LU71477A1 (en) * | 1974-12-13 | 1975-06-17 | ||
| US4086503A (en) * | 1976-06-21 | 1978-04-25 | Westinghouse Electric Corporation | Control circuit initiating conduction of an opto-isolator unit |
| JPS6127257Y2 (en) * | 1976-07-07 | 1986-08-14 | ||
| FR2377549A1 (en) * | 1977-01-12 | 1978-08-11 | Europ Propulsion | LARGE DIAMETER SHORT ROTOR MOUNTING |
| US4164691A (en) * | 1977-03-03 | 1979-08-14 | Victor Company Of Japan, Limited | Multiphase brushless DC motor using two Hall-effect generators |
| DE2727534A1 (en) * | 1977-06-18 | 1979-01-04 | Papst Motoren Kg | Control circuit for electronically commutated DC motor - has two input differential amplifier in mirror connection to detector voltage outputs of Mall generators |
| JPS5444707A (en) * | 1977-09-14 | 1979-04-09 | Sony Corp | Dc brushless motor |
| JPS5565261A (en) * | 1978-11-10 | 1980-05-16 | Houtoku Kogyo Kk | Preparation of carbon black utilizing waste tire |
| DE2935013A1 (en) * | 1979-08-30 | 1981-04-02 | Teldix Gmbh, 6900 Heidelberg | Brushless DC motor with rapid braking - brakes rotor by closing transistor switches normally used for commutating stator windings |
| US4365187A (en) * | 1980-05-15 | 1982-12-21 | Rotron Incorporated | Brushless D.C. motor |
| DE8034883U1 (en) * | 1980-12-31 | 1981-08-13 | Papst-Motoren Kg, 7742 St Georgen | ELECTRONICALLY COMMUTED DC MOTOR |
| DE3113532A1 (en) * | 1981-04-01 | 1982-11-04 | Jai-Chun Dipl.-Ing. 1000 Berlin Chang | Electrical machine |
-
1983
- 1983-01-28 DE DE19833302839 patent/DE3302839A1/en not_active Withdrawn
- 1983-10-24 CH CH5781/83A patent/CH663066A5/en not_active IP Right Cessation
-
1984
- 1984-01-05 IT IT19024/84A patent/IT1172962B/en active
- 1984-01-10 FR FR8400299A patent/FR2540191B1/en not_active Expired
- 1984-01-14 GB GB08401043A patent/GB2134326B/en not_active Expired
- 1984-01-27 JP JP59013224A patent/JPS59144333A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0414127A1 (en) * | 1989-08-25 | 1991-02-27 | Leybold Aktiengesellschaft | Vacuum pump with magnetic bearing |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2540191A1 (en) | 1984-08-03 |
| IT8419024A0 (en) | 1984-01-05 |
| FR2540191B1 (en) | 1986-05-02 |
| IT1172962B (en) | 1987-06-18 |
| GB2134326B (en) | 1986-10-15 |
| GB8401043D0 (en) | 1984-02-15 |
| DE3302839A1 (en) | 1984-08-02 |
| JPS59144333A (en) | 1984-08-18 |
| GB2134326A (en) | 1984-08-08 |
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