CH568119A5 - - Google Patents
Info
- Publication number
- CH568119A5 CH568119A5 CH965374A CH965374A CH568119A5 CH 568119 A5 CH568119 A5 CH 568119A5 CH 965374 A CH965374 A CH 965374A CH 965374 A CH965374 A CH 965374A CH 568119 A5 CH568119 A5 CH 568119A5
- Authority
- CH
- Switzerland
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K15/00—Electron-beam welding or cutting
- B23K15/02—Control circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/241—High voltage power supply or regulation circuits
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2962774A GB1454196A (en) | 1974-07-04 | 1974-07-04 | Electron beam apparatus |
| NLAANVRAGE7409364,A NL171210C (nl) | 1974-07-04 | 1974-07-11 | Elektronenbundelinrichting voor de thermische behandeling van voorwerpen door elektronenbombardement. |
| CH965374A CH568119A5 (cg-RX-API-DMAC7.html) | 1974-07-04 | 1974-07-12 | |
| FR7424854A FR2279221A1 (fr) | 1974-07-04 | 1974-07-17 | Installation a faisceau d'electrons pour le traitement thermique par bombardement electronique |
| DE2434830A DE2434830B2 (de) | 1974-07-04 | 1974-07-19 | Elektronenstrahlanlage zur thermischen Bearbeitung von Metallwerkstttcken |
| US05/491,556 US4095083A (en) | 1974-07-04 | 1974-07-24 | Electron-beam apparatus for thermal treatment by electron bombardment |
| US05/825,167 US4147915A (en) | 1974-07-04 | 1977-08-12 | Electron-beam apparatus for thermal treatment by electron bombardment |
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2962774A GB1454196A (en) | 1974-07-04 | 1974-07-04 | Electron beam apparatus |
| NLAANVRAGE7409364,A NL171210C (nl) | 1974-07-04 | 1974-07-11 | Elektronenbundelinrichting voor de thermische behandeling van voorwerpen door elektronenbombardement. |
| CH965374A CH568119A5 (cg-RX-API-DMAC7.html) | 1974-07-04 | 1974-07-12 | |
| FR7424854A FR2279221A1 (fr) | 1974-07-04 | 1974-07-17 | Installation a faisceau d'electrons pour le traitement thermique par bombardement electronique |
| DE2434830A DE2434830B2 (de) | 1974-07-04 | 1974-07-19 | Elektronenstrahlanlage zur thermischen Bearbeitung von Metallwerkstttcken |
| US05/491,556 US4095083A (en) | 1974-07-04 | 1974-07-24 | Electron-beam apparatus for thermal treatment by electron bombardment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH568119A5 true CH568119A5 (cg-RX-API-DMAC7.html) | 1975-10-31 |
Family
ID=27543833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH965374A CH568119A5 (cg-RX-API-DMAC7.html) | 1974-07-04 | 1974-07-12 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US4095083A (cg-RX-API-DMAC7.html) |
| CH (1) | CH568119A5 (cg-RX-API-DMAC7.html) |
| DE (1) | DE2434830B2 (cg-RX-API-DMAC7.html) |
| FR (1) | FR2279221A1 (cg-RX-API-DMAC7.html) |
| GB (1) | GB1454196A (cg-RX-API-DMAC7.html) |
| NL (1) | NL171210C (cg-RX-API-DMAC7.html) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2492708A1 (fr) * | 1980-10-28 | 1982-04-30 | Inst Vysokikh Temperatur Akade | Procede de soudage avec fusion dans l'atmosphere et produits soudes par ledit procede |
| US4371774A (en) * | 1980-11-26 | 1983-02-01 | The United States Of America As Represented By The United States Department Of Energy | High power linear pulsed beam annealer |
| FR2611983A1 (fr) * | 1987-04-29 | 1988-09-09 | Vtu Angel Kantchev | Circuit d'alimentation electrique pour un evaporateur a faisceau d'electrons |
| DE4000573A1 (de) * | 1990-01-10 | 1991-07-11 | Balzers Hochvakuum | Elektronenstrahlerzeuger und emissionskathode |
| CH687111A5 (de) * | 1992-05-26 | 1996-09-13 | Balzers Hochvakuum | Verfahren zum Erzeugen einer Niederspannungsentladung, Vakuumbehandlungsanlage hierfuer sowie Anwendung des Verfahrens. |
| US6455990B1 (en) * | 1998-12-11 | 2002-09-24 | United Technologies Corporation | Apparatus for an electron gun employing a thermionic electron source |
| CN111769029B (zh) * | 2020-07-31 | 2023-08-08 | 江苏亚威艾欧斯激光科技有限公司 | 一种电子束退火设备及多晶硅薄膜的制造方法 |
| CN116230472B (zh) * | 2023-02-06 | 2026-06-12 | 中国科学院上海硅酸盐研究所 | 一种小型可切换式电子-离子枪 |
| WO2026052986A1 (en) * | 2024-09-05 | 2026-03-12 | Applied Materials, Inc. | Evaporation source, deposition system and method for depositing a material |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2860251A (en) * | 1953-10-15 | 1958-11-11 | Rauland Corp | Apparatus for manufacturing semi-conductor devices |
| LU37902A1 (cg-RX-API-DMAC7.html) * | 1958-11-25 | |||
| US3174026A (en) * | 1962-06-20 | 1965-03-16 | Budd Co | Method and means of circumventing cathode maintenance in electron beam devices |
| US3347701A (en) * | 1963-02-05 | 1967-10-17 | Fujitsu Ltd | Method and apparatus for vapor deposition employing an electron beam |
| US3327090A (en) * | 1964-05-11 | 1967-06-20 | Air Reduction | Dichromatic electron beam device |
| GB1287262A (en) * | 1968-09-05 | 1972-08-31 | Atomic Energy Authority Uk | Improvements in or relating to non-thermionic glow discharge devices |
| US3609288A (en) * | 1968-12-18 | 1971-09-28 | Welding Research Inc | Electron beam seam-finding method and apparatus |
| US3634645A (en) * | 1970-04-21 | 1972-01-11 | Westinghouse Electric Corp | Work treating with electron beam |
-
1974
- 1974-07-04 GB GB2962774A patent/GB1454196A/en not_active Expired
- 1974-07-11 NL NLAANVRAGE7409364,A patent/NL171210C/xx not_active IP Right Cessation
- 1974-07-12 CH CH965374A patent/CH568119A5/xx not_active IP Right Cessation
- 1974-07-17 FR FR7424854A patent/FR2279221A1/fr active Granted
- 1974-07-19 DE DE2434830A patent/DE2434830B2/de not_active Withdrawn
- 1974-07-24 US US05/491,556 patent/US4095083A/en not_active Expired - Lifetime
-
1977
- 1977-08-12 US US05/825,167 patent/US4147915A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US4095083A (en) | 1978-06-13 |
| NL171210B (nl) | 1982-09-16 |
| DE2434830B2 (de) | 1981-01-08 |
| NL7409364A (nl) | 1976-01-13 |
| NL171210C (nl) | 1983-02-16 |
| US4147915A (en) | 1979-04-03 |
| GB1454196A (en) | 1976-10-27 |
| FR2279221B1 (cg-RX-API-DMAC7.html) | 1978-07-07 |
| DE2434830A1 (de) | 1976-02-05 |
| FR2279221A1 (fr) | 1976-02-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased | ||
| PL | Patent ceased |