CH563887A5CH603373ACH603373ACH563887A5CH 563887 A5CH563887 A5CH 563887A5CH 603373 ACH603373 ACH 603373ACH 603373 ACH603373 ACH 603373ACH 563887 A5CH563887 A5CH 563887A5
Authority
CH
Switzerland
Application number
CH603373A
Original Assignee
Meier Kurt & Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meier Kurt & CofiledCriticalMeier Kurt & Co
Priority to CH603373ApriorityCriticalpatent/CH563887A5/xx
Priority to DE19732326820prioritypatent/DE2326820A1/de
Publication of CH563887A5publicationCriticalpatent/CH563887A5/xx
G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
B—PERFORMING OPERATIONS; TRANSPORTING
B43—WRITING OR DRAWING IMPLEMENTS; BUREAU ACCESSORIES
B43L—ARTICLES FOR WRITING OR DRAWING UPON; WRITING OR DRAWING AIDS; ACCESSORIES FOR WRITING OR DRAWING
B43L13/00—Drawing instruments, or writing or drawing appliances or accessories not otherwise provided for