CH544289A - Device for determining geometric data on test objects - Google Patents

Device for determining geometric data on test objects

Info

Publication number
CH544289A
CH544289A CH1113272A CH1113272A CH544289A CH 544289 A CH544289 A CH 544289A CH 1113272 A CH1113272 A CH 1113272A CH 1113272 A CH1113272 A CH 1113272A CH 544289 A CH544289 A CH 544289A
Authority
CH
Switzerland
Prior art keywords
geometric data
test objects
determining geometric
determining
objects
Prior art date
Application number
CH1113272A
Other languages
German (de)
Inventor
Erben Alois
Original Assignee
Zeiss Jena Veb Carl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Jena Veb Carl filed Critical Zeiss Jena Veb Carl
Publication of CH544289A publication Critical patent/CH544289A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
CH1113272A 1971-12-15 1972-07-26 Device for determining geometric data on test objects CH544289A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD15959271 1971-12-15

Publications (1)

Publication Number Publication Date
CH544289A true CH544289A (en) 1973-11-15

Family

ID=5484799

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1113272A CH544289A (en) 1971-12-15 1972-07-26 Device for determining geometric data on test objects

Country Status (2)

Country Link
CH (1) CH544289A (en)
DE (1) DE2237041C3 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2494836A1 (en) * 1980-11-27 1982-05-28 Europ Agence Spatiale Position control system for objects in space vehicle - uses holographic plate with holes on axes to form point sources for laser to generate interference fringes
MD4220C1 (en) * 2012-02-16 2013-11-30 Государственный Университет Молд0 Method for measuring the dimensions of opaque micro-objects

Also Published As

Publication number Publication date
DE2237041B2 (en) 1979-05-23
DE2237041A1 (en) 1973-06-20
DE2237041C3 (en) 1980-01-31

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Legal Events

Date Code Title Description
PL Patent ceased