CH535494A - Method for producing a doped embedded layer - Google Patents

Method for producing a doped embedded layer

Info

Publication number
CH535494A
CH535494A CH756172A CH756172A CH535494A CH 535494 A CH535494 A CH 535494A CH 756172 A CH756172 A CH 756172A CH 756172 A CH756172 A CH 756172A CH 535494 A CH535494 A CH 535494A
Authority
CH
Switzerland
Prior art keywords
producing
embedded layer
doped embedded
doped
layer
Prior art date
Application number
CH756172A
Other languages
German (de)
Inventor
Urquhart Mac Rae Alfred
Miller Paul
Alan Moline Robert
Simpson John
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of CH535494A publication Critical patent/CH535494A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
    • H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
    • H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
    • H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/02255—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by thermal treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Bipolar Transistors (AREA)
CH756172A 1971-05-24 1972-05-23 Method for producing a doped embedded layer CH535494A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14625271A 1971-05-24 1971-05-24

Publications (1)

Publication Number Publication Date
CH535494A true CH535494A (en) 1973-03-31

Family

ID=22516512

Family Applications (1)

Application Number Title Priority Date Filing Date
CH756172A CH535494A (en) 1971-05-24 1972-05-23 Method for producing a doped embedded layer

Country Status (11)

Country Link
JP (1) JPS5138582B1 (en)
BE (1) BE783709A (en)
CA (1) CA921620A (en)
CH (1) CH535494A (en)
DE (1) DE2224467B2 (en)
FR (1) FR2138932B1 (en)
GB (1) GB1397338A (en)
HK (1) HK36076A (en)
IT (1) IT959298B (en)
NL (1) NL159531B (en)
SE (1) SE372137B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2206994A (en) * 1987-06-08 1989-01-18 Philips Electronic Associated Semiconductor device

Also Published As

Publication number Publication date
FR2138932A1 (en) 1973-01-05
DE2224467B2 (en) 1974-03-07
DE2224467A1 (en) 1972-12-07
GB1397338A (en) 1975-06-11
NL7206913A (en) 1972-11-28
FR2138932B1 (en) 1975-08-29
JPS5138582B1 (en) 1976-10-22
HK36076A (en) 1976-06-18
IT959298B (en) 1973-11-10
CA921620A (en) 1973-02-20
SE372137B (en) 1974-12-09
BE783709A (en) 1972-09-18
NL159531B (en) 1979-02-15

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Legal Events

Date Code Title Description
PL Patent ceased