CH526249A - Device for electrodeless plasma generation using high frequency energy - Google Patents

Device for electrodeless plasma generation using high frequency energy

Info

Publication number
CH526249A
CH526249A CH1889470A CH1889470A CH526249A CH 526249 A CH526249 A CH 526249A CH 1889470 A CH1889470 A CH 1889470A CH 1889470 A CH1889470 A CH 1889470A CH 526249 A CH526249 A CH 526249A
Authority
CH
Switzerland
Prior art keywords
high frequency
plasma generation
frequency energy
electrodeless plasma
electrodeless
Prior art date
Application number
CH1889470A
Other languages
German (de)
Inventor
Galliker Josef
Original Assignee
Bbc Brown Boveri & Cie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bbc Brown Boveri & Cie filed Critical Bbc Brown Boveri & Cie
Priority to CH1889470A priority Critical patent/CH526249A/en
Priority to DE19712101098 priority patent/DE2101098A1/en
Priority to DE19717100851U priority patent/DE7100851U/en
Priority to AT654071A priority patent/AT309615B/en
Publication of CH526249A publication Critical patent/CH526249A/en

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/10—Adhesives in the form of films or foils without carriers
CH1889470A 1970-12-21 1970-12-21 Device for electrodeless plasma generation using high frequency energy CH526249A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CH1889470A CH526249A (en) 1970-12-21 1970-12-21 Device for electrodeless plasma generation using high frequency energy
DE19712101098 DE2101098A1 (en) 1970-12-21 1971-01-12 High frequency plasma generator - without electrodes using capacitive coupling rings outside the gas-tube
DE19717100851U DE7100851U (en) 1970-12-21 1971-01-12 DEVICE FOR ELECTRODE-LESS PLASMA GENERATION USING HIGH FREQUENCY ENERGY
AT654071A AT309615B (en) 1970-12-21 1971-07-27 Device for electrodeless plasma generation using high frequency energy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1889470A CH526249A (en) 1970-12-21 1970-12-21 Device for electrodeless plasma generation using high frequency energy

Publications (1)

Publication Number Publication Date
CH526249A true CH526249A (en) 1972-07-31

Family

ID=4435966

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1889470A CH526249A (en) 1970-12-21 1970-12-21 Device for electrodeless plasma generation using high frequency energy

Country Status (3)

Country Link
AT (1) AT309615B (en)
CH (1) CH526249A (en)
DE (2) DE2101098A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0726593A1 (en) * 1995-02-13 1996-08-14 Applied Materials, Inc. A high power, plasma-based, reactive species generator
US5895548A (en) * 1996-03-29 1999-04-20 Applied Komatsu Technology, Inc. High power microwave plasma applicator

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004029081A1 (en) * 2004-06-16 2006-01-05 Je Plasmaconsult Gmbh Device for processing a substrate by means of at least one plasma jet
DE102010029212B4 (en) * 2010-05-21 2013-06-27 Von Ardenne Anlagentechnik Gmbh Isolating agent for current-carrying coolant lines of magnetrons

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0726593A1 (en) * 1995-02-13 1996-08-14 Applied Materials, Inc. A high power, plasma-based, reactive species generator
US5895548A (en) * 1996-03-29 1999-04-20 Applied Komatsu Technology, Inc. High power microwave plasma applicator

Also Published As

Publication number Publication date
DE2101098A1 (en) 1972-07-13
AT309615B (en) 1973-08-27
DE7100851U (en) 1972-12-07

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Legal Events

Date Code Title Description
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