CH514189A - Einrichtung und Verfahren zum Einstellen der Relativstellung zwischen einem Gegenstand und einem Referenzpunkt - Google Patents
Einrichtung und Verfahren zum Einstellen der Relativstellung zwischen einem Gegenstand und einem ReferenzpunktInfo
- Publication number
- CH514189A CH514189A CH1266269A CH1266269A CH514189A CH 514189 A CH514189 A CH 514189A CH 1266269 A CH1266269 A CH 1266269A CH 1266269 A CH1266269 A CH 1266269A CH 514189 A CH514189 A CH 514189A
- Authority
- CH
- Switzerland
- Prior art keywords
- setting
- relative position
- reference point
- point
- relative
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/188—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by special applications and not provided for in the relevant subclasses, (e.g. making dies, filament winding)
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
- G05D3/14—Control of position or direction using feedback using an analogue comparing device
- G05D3/18—Control of position or direction using feedback using an analogue comparing device delivering a series of pulses
- G05D3/183—Control of position or direction using feedback using an analogue comparing device delivering a series of pulses using stepping motor
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Human Computer Interaction (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Control Of Position Or Direction (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US75422868A | 1968-08-21 | 1968-08-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH514189A true CH514189A (de) | 1971-10-15 |
Family
ID=25033946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1266269A CH514189A (de) | 1968-08-21 | 1969-08-20 | Einrichtung und Verfahren zum Einstellen der Relativstellung zwischen einem Gegenstand und einem Referenzpunkt |
Country Status (6)
Country | Link |
---|---|
US (1) | US3598978A (de) |
CA (1) | CA922796A (de) |
CH (1) | CH514189A (de) |
DE (1) | DE1941057B2 (de) |
FR (1) | FR2016991A1 (de) |
GB (1) | GB1282105A (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH509064A (de) * | 1970-05-26 | 1971-06-30 | Steeb Laesser Klara | Bettbezug für Matratze |
US3670153A (en) * | 1970-10-08 | 1972-06-13 | Rca Corp | Machine implemented method for positioning and inspecting an object |
US3780298A (en) * | 1971-07-15 | 1973-12-18 | Z Agadzhanian | Scanning method and a scan microscope for its realization |
US3754123A (en) * | 1972-02-28 | 1973-08-21 | Emhart Corp | Apparatus for electronically squaring and summing projections of a vector for inspecting articles on a conveyor |
US3900738A (en) * | 1973-05-23 | 1975-08-19 | Lockheed Missiles Space | Non-contact measuring gauge |
US4052603A (en) * | 1974-12-23 | 1977-10-04 | International Business Machines Corporation | Object positioning process and apparatus |
US4328553A (en) * | 1976-12-07 | 1982-05-04 | Computervision Corporation | Method and apparatus for targetless wafer alignment |
DE2726173C2 (de) * | 1977-06-08 | 1982-05-27 | Siemens AG, 1000 Berlin und 8000 München | Verfahren und Schaltung zur automatischen Positionierung eines Werkstückes relativ zu einem Abtastfeld bzw. zu einer Maske, sowie Verwendung des Verfahrens |
US4158229A (en) * | 1977-06-24 | 1979-06-12 | Lien Yeong Chung E | Electronic rule for precise distance measurement and distance setting |
JPS5816983B2 (ja) * | 1977-08-26 | 1983-04-04 | 豊田工機株式会社 | 自動芯出装置 |
US4687980A (en) * | 1980-10-20 | 1987-08-18 | Eaton Corporation | X-Y addressable workpiece positioner and mask aligner using same |
US4977361A (en) * | 1978-06-26 | 1990-12-11 | Eaton Corporation | X-Y addressable workpiece positioner and mask aligner using same |
JPS6022721B2 (ja) * | 1978-07-06 | 1985-06-04 | 豊田工機株式会社 | 接触検出用ヘツドを用いた芯出し測定装置 |
US4262402A (en) * | 1978-10-18 | 1981-04-21 | Westinghouse Electric Corp. | Method for servicing a steam generator |
EP0036026B1 (de) * | 1980-03-10 | 1986-11-12 | Eaton-Optimetrix Inc. | Adressierbare Positioniervorrichtung |
US4549087A (en) * | 1982-12-27 | 1985-10-22 | Usm Corporation | Lead sensing system |
JPS59119204A (ja) * | 1982-12-27 | 1984-07-10 | Toshiba Corp | マ−ク位置検出方法 |
JPS60119407A (ja) * | 1983-11-30 | 1985-06-26 | Nippon Kogaku Kk <Nikon> | 比較検査装置 |
JPS6362241A (ja) * | 1986-09-02 | 1988-03-18 | Toshiba Corp | ワイヤボンデイング方法 |
JP2014077660A (ja) * | 2012-10-09 | 2014-05-01 | Fuji Xerox Co Ltd | 検出装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3063311A (en) * | 1957-12-16 | 1962-11-13 | Gen Electric | Control system |
US3335281A (en) * | 1963-09-24 | 1967-08-08 | Spartanics | Symmetrically saturated position servo control with dual amplitude optical offset scanning |
US3401589A (en) * | 1964-12-23 | 1968-09-17 | Ibm | Method of controlling a testing apparatus through the use of a photograph of the object being tested |
US3404250A (en) * | 1966-07-01 | 1968-10-01 | Unitek Corp | Welding apparatus |
US3448280A (en) * | 1966-11-02 | 1969-06-03 | Western Electric Co | Apparatus for positioning workpiece to aline a cavity therein with a light beam |
US3502882A (en) * | 1968-01-17 | 1970-03-24 | Geza Von Voros | Opto-graphical memory and digitalized control system for precision machining |
US3497705A (en) * | 1968-02-12 | 1970-02-24 | Itek Corp | Mask alignment system using radial patterns and flying spot scanning |
-
1968
- 1968-08-21 US US754228A patent/US3598978A/en not_active Expired - Lifetime
-
1969
- 1969-07-05 CA CA056269A patent/CA922796A/en not_active Expired
- 1969-08-12 DE DE1941057A patent/DE1941057B2/de active Granted
- 1969-08-14 GB GB40726/69A patent/GB1282105A/en not_active Expired
- 1969-08-20 CH CH1266269A patent/CH514189A/de not_active IP Right Cessation
- 1969-08-21 FR FR6928772A patent/FR2016991A1/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
DE1941057B2 (de) | 1973-11-15 |
FR2016991A1 (de) | 1970-05-15 |
DE1941057A1 (de) | 1970-11-05 |
DE1941057C3 (de) | 1974-06-12 |
GB1282105A (en) | 1972-07-19 |
US3598978A (en) | 1971-08-10 |
CA922796A (en) | 1973-03-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |