CH485317A - Electromagnetic lens for beams of fast electrons - Google Patents

Electromagnetic lens for beams of fast electrons

Info

Publication number
CH485317A
CH485317A CH963668A CH963668A CH485317A CH 485317 A CH485317 A CH 485317A CH 963668 A CH963668 A CH 963668A CH 963668 A CH963668 A CH 963668A CH 485317 A CH485317 A CH 485317A
Authority
CH
Switzerland
Prior art keywords
beams
electromagnetic lens
fast electrons
electrons
fast
Prior art date
Application number
CH963668A
Other languages
German (de)
Inventor
Wideroee Rolf Dr Prof
Original Assignee
Bbc Brown Boveri & Cie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bbc Brown Boveri & Cie filed Critical Bbc Brown Boveri & Cie
Priority to CH963668A priority Critical patent/CH485317A/en
Priority to NL6810820A priority patent/NL6810820A/xx
Priority to DE19691918822 priority patent/DE1918822A1/en
Priority to US836040A priority patent/US3689796A/en
Priority to GB32112/69A priority patent/GB1268714A/en
Priority to FR6921253A priority patent/FR2014285A1/fr
Publication of CH485317A publication Critical patent/CH485317A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/58—Arrangements for focusing or reflecting ray or beam
    • H01J29/64—Magnetic lenses
    • H01J29/66—Magnetic lenses using electromagnetic means only
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electromagnetism (AREA)
  • Electron Beam Exposure (AREA)
  • Particle Accelerators (AREA)
CH963668A 1968-06-27 1968-06-27 Electromagnetic lens for beams of fast electrons CH485317A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CH963668A CH485317A (en) 1968-06-27 1968-06-27 Electromagnetic lens for beams of fast electrons
NL6810820A NL6810820A (en) 1968-06-27 1968-07-31
DE19691918822 DE1918822A1 (en) 1968-06-27 1969-04-14 Electromagnetic lens for beams of fast electrons
US836040A US3689796A (en) 1968-06-27 1969-06-24 Electromagnetic lens for high speed electron beams
GB32112/69A GB1268714A (en) 1968-06-27 1969-06-25 Magnetic lens
FR6921253A FR2014285A1 (en) 1968-06-27 1969-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH963668A CH485317A (en) 1968-06-27 1968-06-27 Electromagnetic lens for beams of fast electrons

Publications (1)

Publication Number Publication Date
CH485317A true CH485317A (en) 1970-01-31

Family

ID=4354056

Family Applications (1)

Application Number Title Priority Date Filing Date
CH963668A CH485317A (en) 1968-06-27 1968-06-27 Electromagnetic lens for beams of fast electrons

Country Status (6)

Country Link
US (1) US3689796A (en)
CH (1) CH485317A (en)
DE (1) DE1918822A1 (en)
FR (1) FR2014285A1 (en)
GB (1) GB1268714A (en)
NL (1) NL6810820A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111261314B (en) * 2020-01-17 2020-10-09 桂林狮达技术股份有限公司 Calibration method for focusing system of charged particle beam processing equipment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2005330A (en) * 1930-08-19 1935-06-18 Thomas W Sukumlyn Electron emission device
DE973258C (en) * 1938-03-08 1959-12-31 Siemens Ag Magnetic pole shoe lens with a small focal length for electron-optical enlargements in electron microscopes
DE734995C (en) * 1940-08-08 1943-05-04 Aeg Run-time tubes with cavity resonators
US2295403A (en) * 1940-11-15 1942-09-08 Rca Corp Apertured electron lens and method of alignment

Also Published As

Publication number Publication date
NL6810820A (en) 1969-12-30
DE1918822A1 (en) 1970-03-05
GB1268714A (en) 1972-03-29
US3689796A (en) 1972-09-05
FR2014285A1 (en) 1970-04-17

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Legal Events

Date Code Title Description
PL Patent ceased