CH472117A - Support for disc-shaped objects and method for its manufacture - Google Patents

Support for disc-shaped objects and method for its manufacture

Info

Publication number
CH472117A
CH472117A CH723268A CH723268A CH472117A CH 472117 A CH472117 A CH 472117A CH 723268 A CH723268 A CH 723268A CH 723268 A CH723268 A CH 723268A CH 472117 A CH472117 A CH 472117A
Authority
CH
Switzerland
Prior art keywords
disc
manufacture
support
shaped objects
objects
Prior art date
Application number
CH723268A
Other languages
French (fr)
Inventor
Achener Claude
Original Assignee
Quartz & Silice Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quartz & Silice Sa filed Critical Quartz & Silice Sa
Publication of CH472117A publication Critical patent/CH472117A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L9/00—Supporting devices; Holding devices
    • B01L9/52—Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0803—Disc shape

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CH723268A 1967-05-29 1968-05-16 Support for disc-shaped objects and method for its manufacture CH472117A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR108216A FR1532497A (en) 1967-05-29 1967-05-29 Support for objects in the form of discs, such as in particular semiconductor pellets and method of manufacture thereof

Publications (1)

Publication Number Publication Date
CH472117A true CH472117A (en) 1969-04-30

Family

ID=8631819

Family Applications (1)

Application Number Title Priority Date Filing Date
CH723268A CH472117A (en) 1967-05-29 1968-05-16 Support for disc-shaped objects and method for its manufacture

Country Status (4)

Country Link
CH (1) CH472117A (en)
DE (1) DE1758411A1 (en)
FR (1) FR1532497A (en)
NL (1) NL6807586A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2133876A1 (en) * 1971-07-07 1973-01-18 Siemens Ag ARRANGEMENT FOR DIFFUSING DOPPANTS
DE2133843A1 (en) * 1971-07-07 1973-01-18 Siemens Ag ARRANGEMENT FOR DIFFUSING DOCTANTS INTO SEMICONDUCTOR DISCS

Also Published As

Publication number Publication date
NL6807586A (en) 1968-12-02
FR1532497A (en) 1968-07-12
DE1758411A1 (en) 1971-01-28

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Legal Events

Date Code Title Description
PL Patent ceased