CH447408A - Method for program-controlled processing of thin-film components in electrical engineering by means of a device that generates a charge carrier beam - Google Patents

Method for program-controlled processing of thin-film components in electrical engineering by means of a device that generates a charge carrier beam

Info

Publication number
CH447408A
CH447408A CH258566A CH258566A CH447408A CH 447408 A CH447408 A CH 447408A CH 258566 A CH258566 A CH 258566A CH 258566 A CH258566 A CH 258566A CH 447408 A CH447408 A CH 447408A
Authority
CH
Switzerland
Prior art keywords
thin
generates
program
charge carrier
electrical engineering
Prior art date
Application number
CH258566A
Other languages
German (de)
Inventor
Von Ardenne Manfred Prof Dr C
Doehler Heinz
Bahr Gottfried
Original Assignee
Hermsdorf Keramik Veb
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hermsdorf Keramik Veb filed Critical Hermsdorf Keramik Veb
Publication of CH447408A publication Critical patent/CH447408A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/02—Control circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
    • H01J37/3023—Programme control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/304—Controlling tubes
    • H01J2237/30472—Controlling the beam
    • H01J2237/30483—Scanning

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
CH258566A 1965-02-23 1966-02-23 Method for program-controlled processing of thin-film components in electrical engineering by means of a device that generates a charge carrier beam CH447408A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD10934165 1965-02-23

Publications (1)

Publication Number Publication Date
CH447408A true CH447408A (en) 1967-11-30

Family

ID=5478435

Family Applications (1)

Application Number Title Priority Date Filing Date
CH258566A CH447408A (en) 1965-02-23 1966-02-23 Method for program-controlled processing of thin-film components in electrical engineering by means of a device that generates a charge carrier beam

Country Status (1)

Country Link
CH (1) CH447408A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2425721A1 (en) * 1978-05-12 1979-12-07 Philips Nv METHOD AND DEVICE FOR IMPLANTING IONS IN A TARGET

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2425721A1 (en) * 1978-05-12 1979-12-07 Philips Nv METHOD AND DEVICE FOR IMPLANTING IONS IN A TARGET

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