CH441539A - Verfahren und Ofen zum Erhitzen von Material durch Elektronenbeschiessung - Google Patents
Verfahren und Ofen zum Erhitzen von Material durch ElektronenbeschiessungInfo
- Publication number
- CH441539A CH441539A CH739864A CH739864A CH441539A CH 441539 A CH441539 A CH 441539A CH 739864 A CH739864 A CH 739864A CH 739864 A CH739864 A CH 739864A CH 441539 A CH441539 A CH 441539A
- Authority
- CH
- Switzerland
- Prior art keywords
- furnace
- heating material
- electron bombardment
- bombardment
- electron
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
- C22B9/04—Refining by applying a vacuum
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
- C22B9/16—Remelting metals
- C22B9/22—Remelting metals with heating by wave energy or particle radiation
- C22B9/228—Remelting metals with heating by wave energy or particle radiation by particle radiation, e.g. electron beams
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US286063A US3235647A (en) | 1963-06-06 | 1963-06-06 | Electron bombardment heating with adjustable impact pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
CH441539A true CH441539A (de) | 1967-08-15 |
Family
ID=23096903
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH739864A CH441539A (de) | 1963-06-06 | 1964-06-06 | Verfahren und Ofen zum Erhitzen von Material durch Elektronenbeschiessung |
Country Status (11)
Country | Link |
---|---|
US (1) | US3235647A (de) |
BE (1) | BE648897A (de) |
BR (1) | BR6459794D0 (de) |
CH (1) | CH441539A (de) |
DE (1) | DE1185820B (de) |
DK (1) | DK122700B (de) |
GB (1) | GB1039135A (de) |
LU (1) | LU46219A1 (de) |
NL (1) | NL6406393A (de) |
NO (1) | NO117490B (de) |
SE (1) | SE317454B (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3390222A (en) * | 1965-08-17 | 1968-06-25 | Air Reduction | Electron beam apparatus with variable orientation of transverse deflecting field |
US3397672A (en) * | 1965-11-10 | 1968-08-20 | United States Steel Corp | Control system for vapor-deposition coating apparatus |
US3474218A (en) * | 1966-01-10 | 1969-10-21 | Air Reduction | Electron beam conditioning ingot and slab surfaces |
US3497602A (en) * | 1966-12-16 | 1970-02-24 | Air Reduction | Apparatus for producing and directing an electron beam in an electron beam furnace |
US3483417A (en) * | 1967-07-26 | 1969-12-09 | Air Reduction | Electron beam deflecting means |
US3475542A (en) * | 1967-09-13 | 1969-10-28 | Air Reduction | Apparatus for heating a target in an electron beam furnace |
US3446934A (en) * | 1968-01-30 | 1969-05-27 | Air Reduction | Electron beam heating apparatus |
US3554512A (en) * | 1969-03-24 | 1971-01-12 | George H Elliott | Crucible for holding molten semiconductor materials |
US3710072A (en) * | 1971-05-10 | 1973-01-09 | Airco Inc | Vapor source assembly |
DE3276333D1 (en) * | 1982-10-28 | 1987-06-19 | Ibm | Method and apparatus for vacuum evaporation coating using an electron gun |
US4488902A (en) * | 1983-06-10 | 1984-12-18 | Duval Corporation | Horizontal, multistage electron beam refinement of metals with recycle |
US4518418A (en) * | 1983-06-10 | 1985-05-21 | Duval Corporation | Electron beam refinement of metals, particularly copper |
US5111022A (en) * | 1989-08-23 | 1992-05-05 | Tfi Telemark | Cooling system for electron beam gun and method |
US4983806A (en) * | 1990-03-01 | 1991-01-08 | Harper James L | Method and device for cooling electron beam gun |
GB9521517D0 (en) * | 1995-10-20 | 1995-12-20 | P A Dyson Limited | Gas burning device |
TW490714B (en) | 1999-12-27 | 2002-06-11 | Semiconductor Energy Lab | Film formation apparatus and method for forming a film |
US20020011205A1 (en) | 2000-05-02 | 2002-01-31 | Shunpei Yamazaki | Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US571463A (en) * | 1896-11-17 | Controlling electric arcs | ||
US2719924A (en) * | 1945-12-28 | 1955-10-04 | Oppenheimer J Robert | Magnetic shims |
US2572600A (en) * | 1947-01-17 | 1951-10-23 | Arthur J Dempster | Mass spectrograph |
US3046936A (en) * | 1958-06-04 | 1962-07-31 | Nat Res Corp | Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof |
US2941077A (en) * | 1958-07-07 | 1960-06-14 | Applied Radiation Corp | Method of enlarging and shaping charged particle beams |
US3068309A (en) * | 1960-06-22 | 1962-12-11 | Stauffer Chemical Co | Electron beam furnace with multiple field guidance of electrons |
-
1963
- 1963-06-06 US US286063A patent/US3235647A/en not_active Expired - Lifetime
-
1964
- 1964-06-01 LU LU46219D patent/LU46219A1/xx unknown
- 1964-06-03 GB GB23048/64A patent/GB1039135A/en not_active Expired
- 1964-06-03 NO NO153507A patent/NO117490B/no unknown
- 1964-06-05 DE DET26314A patent/DE1185820B/de active Pending
- 1964-06-05 BE BE648897A patent/BE648897A/xx unknown
- 1964-06-05 NL NL6406393A patent/NL6406393A/xx unknown
- 1964-06-05 BR BR159794/64A patent/BR6459794D0/pt unknown
- 1964-06-05 SE SE6903/64A patent/SE317454B/xx unknown
- 1964-06-06 CH CH739864A patent/CH441539A/de unknown
- 1964-06-06 DK DK284164AA patent/DK122700B/da unknown
Also Published As
Publication number | Publication date |
---|---|
NO117490B (de) | 1969-08-18 |
DE1185820B (de) | 1965-01-21 |
US3235647A (en) | 1966-02-15 |
DK122700B (da) | 1972-03-27 |
LU46219A1 (de) | 1964-08-01 |
SE317454B (de) | 1969-11-17 |
NL6406393A (de) | 1964-12-07 |
BE648897A (de) | 1964-10-01 |
BR6459794D0 (pt) | 1973-12-26 |
GB1039135A (en) | 1966-08-17 |
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