CH441539A - Verfahren und Ofen zum Erhitzen von Material durch Elektronenbeschiessung - Google Patents

Verfahren und Ofen zum Erhitzen von Material durch Elektronenbeschiessung

Info

Publication number
CH441539A
CH441539A CH739864A CH739864A CH441539A CH 441539 A CH441539 A CH 441539A CH 739864 A CH739864 A CH 739864A CH 739864 A CH739864 A CH 739864A CH 441539 A CH441539 A CH 441539A
Authority
CH
Switzerland
Prior art keywords
furnace
heating material
electron bombardment
bombardment
electron
Prior art date
Application number
CH739864A
Other languages
English (en)
Inventor
Wendell Hanks Charles
Original Assignee
Temescal Metallurgical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Temescal Metallurgical Corp filed Critical Temescal Metallurgical Corp
Publication of CH441539A publication Critical patent/CH441539A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/04—Refining by applying a vacuum
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/16—Remelting metals
    • C22B9/22—Remelting metals with heating by wave energy or particle radiation
    • C22B9/228—Remelting metals with heating by wave energy or particle radiation by particle radiation, e.g. electron beams

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
CH739864A 1963-06-06 1964-06-06 Verfahren und Ofen zum Erhitzen von Material durch Elektronenbeschiessung CH441539A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US286063A US3235647A (en) 1963-06-06 1963-06-06 Electron bombardment heating with adjustable impact pattern

Publications (1)

Publication Number Publication Date
CH441539A true CH441539A (de) 1967-08-15

Family

ID=23096903

Family Applications (1)

Application Number Title Priority Date Filing Date
CH739864A CH441539A (de) 1963-06-06 1964-06-06 Verfahren und Ofen zum Erhitzen von Material durch Elektronenbeschiessung

Country Status (11)

Country Link
US (1) US3235647A (de)
BE (1) BE648897A (de)
BR (1) BR6459794D0 (de)
CH (1) CH441539A (de)
DE (1) DE1185820B (de)
DK (1) DK122700B (de)
GB (1) GB1039135A (de)
LU (1) LU46219A1 (de)
NL (1) NL6406393A (de)
NO (1) NO117490B (de)
SE (1) SE317454B (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3390222A (en) * 1965-08-17 1968-06-25 Air Reduction Electron beam apparatus with variable orientation of transverse deflecting field
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus
US3474218A (en) * 1966-01-10 1969-10-21 Air Reduction Electron beam conditioning ingot and slab surfaces
US3497602A (en) * 1966-12-16 1970-02-24 Air Reduction Apparatus for producing and directing an electron beam in an electron beam furnace
US3483417A (en) * 1967-07-26 1969-12-09 Air Reduction Electron beam deflecting means
US3475542A (en) * 1967-09-13 1969-10-28 Air Reduction Apparatus for heating a target in an electron beam furnace
US3446934A (en) * 1968-01-30 1969-05-27 Air Reduction Electron beam heating apparatus
US3554512A (en) * 1969-03-24 1971-01-12 George H Elliott Crucible for holding molten semiconductor materials
US3710072A (en) * 1971-05-10 1973-01-09 Airco Inc Vapor source assembly
DE3276333D1 (en) * 1982-10-28 1987-06-19 Ibm Method and apparatus for vacuum evaporation coating using an electron gun
US4488902A (en) * 1983-06-10 1984-12-18 Duval Corporation Horizontal, multistage electron beam refinement of metals with recycle
US4518418A (en) * 1983-06-10 1985-05-21 Duval Corporation Electron beam refinement of metals, particularly copper
US5111022A (en) * 1989-08-23 1992-05-05 Tfi Telemark Cooling system for electron beam gun and method
US4983806A (en) * 1990-03-01 1991-01-08 Harper James L Method and device for cooling electron beam gun
GB9521517D0 (en) * 1995-10-20 1995-12-20 P A Dyson Limited Gas burning device
TW490714B (en) 1999-12-27 2002-06-11 Semiconductor Energy Lab Film formation apparatus and method for forming a film
US20020011205A1 (en) 2000-05-02 2002-01-31 Shunpei Yamazaki Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US571463A (en) * 1896-11-17 Controlling electric arcs
US2719924A (en) * 1945-12-28 1955-10-04 Oppenheimer J Robert Magnetic shims
US2572600A (en) * 1947-01-17 1951-10-23 Arthur J Dempster Mass spectrograph
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US2941077A (en) * 1958-07-07 1960-06-14 Applied Radiation Corp Method of enlarging and shaping charged particle beams
US3068309A (en) * 1960-06-22 1962-12-11 Stauffer Chemical Co Electron beam furnace with multiple field guidance of electrons

Also Published As

Publication number Publication date
DE1185820B (de) 1965-01-21
BE648897A (de) 1964-10-01
GB1039135A (en) 1966-08-17
DK122700B (da) 1972-03-27
LU46219A1 (de) 1964-08-01
SE317454B (de) 1969-11-17
NL6406393A (de) 1964-12-07
NO117490B (de) 1969-08-18
BR6459794D0 (pt) 1973-12-26
US3235647A (en) 1966-02-15

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