CH409430A - Einrichtung zum lichtelektrischen Bestimmen der Verschiebung eines Massstabes mit Teilstrichen relativ zu einer Projektionsoptik - Google Patents

Einrichtung zum lichtelektrischen Bestimmen der Verschiebung eines Massstabes mit Teilstrichen relativ zu einer Projektionsoptik

Info

Publication number
CH409430A
CH409430A CH566861A CH566861A CH409430A CH 409430 A CH409430 A CH 409430A CH 566861 A CH566861 A CH 566861A CH 566861 A CH566861 A CH 566861A CH 409430 A CH409430 A CH 409430A
Authority
CH
Switzerland
Prior art keywords
displacement
scale
projection optics
graduation marks
marks relative
Prior art date
Application number
CH566861A
Other languages
English (en)
Inventor
Laszlo Dipl Ing Rabian
Grendelmeier Georg
Guenter Dipl Ing Kleimenhagen
Madone Bruno
Salje Ernst Ing Dr
Original Assignee
Oerlikon Buehrle Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Buehrle Holding Ag filed Critical Oerlikon Buehrle Holding Ag
Priority to CH566861A priority Critical patent/CH409430A/de
Priority to GB1435862A priority patent/GB955045A/en
Publication of CH409430A publication Critical patent/CH409430A/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Optical Transform (AREA)
CH566861A 1961-05-16 1961-05-16 Einrichtung zum lichtelektrischen Bestimmen der Verschiebung eines Massstabes mit Teilstrichen relativ zu einer Projektionsoptik CH409430A (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CH566861A CH409430A (de) 1961-05-16 1961-05-16 Einrichtung zum lichtelektrischen Bestimmen der Verschiebung eines Massstabes mit Teilstrichen relativ zu einer Projektionsoptik
GB1435862A GB955045A (en) 1961-05-16 1962-04-13 Improvements relating to optical indicating devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH566861A CH409430A (de) 1961-05-16 1961-05-16 Einrichtung zum lichtelektrischen Bestimmen der Verschiebung eines Massstabes mit Teilstrichen relativ zu einer Projektionsoptik

Publications (1)

Publication Number Publication Date
CH409430A true CH409430A (de) 1966-03-15

Family

ID=4297422

Family Applications (1)

Application Number Title Priority Date Filing Date
CH566861A CH409430A (de) 1961-05-16 1961-05-16 Einrichtung zum lichtelektrischen Bestimmen der Verschiebung eines Massstabes mit Teilstrichen relativ zu einer Projektionsoptik

Country Status (2)

Country Link
CH (1) CH409430A (de)
GB (1) GB955045A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4977361A (en) * 1978-06-26 1990-12-11 Eaton Corporation X-Y addressable workpiece positioner and mask aligner using same
US4687980A (en) * 1980-10-20 1987-08-18 Eaton Corporation X-Y addressable workpiece positioner and mask aligner using same
GB8921338D0 (en) * 1989-09-21 1989-11-08 Smiths Industries Plc Optical encoders
AT394111B (de) * 1989-09-12 1992-02-10 Rieder Heinz Inkrementales messsystem

Also Published As

Publication number Publication date
GB955045A (en) 1964-04-08

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