CH404339A - Process for simultaneous and uniform doping - Google Patents

Process for simultaneous and uniform doping

Info

Publication number
CH404339A
CH404339A CH360161A CH360161A CH404339A CH 404339 A CH404339 A CH 404339A CH 360161 A CH360161 A CH 360161A CH 360161 A CH360161 A CH 360161A CH 404339 A CH404339 A CH 404339A
Authority
CH
Switzerland
Prior art keywords
simultaneous
uniform doping
doping
uniform
Prior art date
Application number
CH360161A
Other languages
German (de)
Inventor
Eduard Dr Enk
Teich Horst
Julius Dr Nickl
Original Assignee
Wacker Chemie Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemie Gmbh filed Critical Wacker Chemie Gmbh
Publication of CH404339A publication Critical patent/CH404339A/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/08Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone
    • C30B13/10Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone with addition of doping materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CH360161A 1960-03-31 1961-03-27 Process for simultaneous and uniform doping CH404339A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEW27569A DE1162661B (en) 1960-03-31 1960-03-31 Process for simultaneous and uniform doping

Publications (1)

Publication Number Publication Date
CH404339A true CH404339A (en) 1965-12-15

Family

ID=7598677

Family Applications (1)

Application Number Title Priority Date Filing Date
CH360161A CH404339A (en) 1960-03-31 1961-03-27 Process for simultaneous and uniform doping

Country Status (3)

Country Link
BE (1) BE602019A (en)
CH (1) CH404339A (en)
DE (1) DE1162661B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0630339B2 (en) * 1984-07-16 1994-04-20 新技術事業団 Method for producing GaAs single crystal

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE509317A (en) * 1951-03-07 1900-01-01

Also Published As

Publication number Publication date
DE1162661B (en) 1964-02-06
BE602019A (en) 1961-10-02

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