CH349855A - Carrier device for objects that are to be covered with thin layers in a vacuum - Google Patents
Carrier device for objects that are to be covered with thin layers in a vacuumInfo
- Publication number
- CH349855A CH349855A CH349855DA CH349855A CH 349855 A CH349855 A CH 349855A CH 349855D A CH349855D A CH 349855DA CH 349855 A CH349855 A CH 349855A
- Authority
- CH
- Switzerland
- Prior art keywords
- vacuum
- covered
- objects
- thin layers
- carrier device
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DEB40045A DE1023652B (en) | 1956-04-28 | 1956-04-28 | Holding device with reversible carrier for objects that are to be covered with thin layers in a vacuum |
Publications (1)
Publication Number | Publication Date |
---|---|
CH349855A true CH349855A (en) | 1960-10-31 |
Family
ID=6965973
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH349855D CH349855A (en) | 1956-04-28 | 1957-03-18 | Carrier device for objects that are to be covered with thin layers in a vacuum |
Country Status (2)
Country | Link |
---|---|
CH (1) | CH349855A (en) |
DE (1) | DE1023652B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0018641A1 (en) * | 1979-05-02 | 1980-11-12 | Optical Coating Laboratory, Inc. | Coating apparatus |
FR2662448A1 (en) * | 1990-05-22 | 1991-11-29 | Satis Vacuum Ag | VACUUM COVERING SYSTEM FOR OPTICAL SUBSTRATES. |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10324928A1 (en) * | 2003-06-03 | 2005-07-14 | Leybold Optics Gmbh | Vacuum coating system |
DE102013106788B4 (en) * | 2013-06-28 | 2019-07-11 | VON ARDENNE Asset GmbH & Co. KG | Vacuum treatment plant with vacuum chamber feedthrough |
-
1956
- 1956-04-28 DE DEB40045A patent/DE1023652B/en active Pending
-
1957
- 1957-03-18 CH CH349855D patent/CH349855A/en unknown
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0018641A1 (en) * | 1979-05-02 | 1980-11-12 | Optical Coating Laboratory, Inc. | Coating apparatus |
FR2662448A1 (en) * | 1990-05-22 | 1991-11-29 | Satis Vacuum Ag | VACUUM COVERING SYSTEM FOR OPTICAL SUBSTRATES. |
Also Published As
Publication number | Publication date |
---|---|
DE1023652B (en) | 1958-01-30 |
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