CH349855A - Carrier device for objects that are to be covered with thin layers in a vacuum - Google Patents

Carrier device for objects that are to be covered with thin layers in a vacuum

Info

Publication number
CH349855A
CH349855A CH349855DA CH349855A CH 349855 A CH349855 A CH 349855A CH 349855D A CH349855D A CH 349855DA CH 349855 A CH349855 A CH 349855A
Authority
CH
Switzerland
Prior art keywords
vacuum
covered
objects
thin layers
carrier device
Prior art date
Application number
Other languages
German (de)
Inventor
Ross Dr Albert
Original Assignee
Balzers Hochvakuum
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Hochvakuum filed Critical Balzers Hochvakuum
Publication of CH349855A publication Critical patent/CH349855A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH349855D 1956-04-28 1957-03-18 Carrier device for objects that are to be covered with thin layers in a vacuum CH349855A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEB40045A DE1023652B (en) 1956-04-28 1956-04-28 Holding device with reversible carrier for objects that are to be covered with thin layers in a vacuum

Publications (1)

Publication Number Publication Date
CH349855A true CH349855A (en) 1960-10-31

Family

ID=6965973

Family Applications (1)

Application Number Title Priority Date Filing Date
CH349855D CH349855A (en) 1956-04-28 1957-03-18 Carrier device for objects that are to be covered with thin layers in a vacuum

Country Status (2)

Country Link
CH (1) CH349855A (en)
DE (1) DE1023652B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0018641A1 (en) * 1979-05-02 1980-11-12 Optical Coating Laboratory, Inc. Coating apparatus
FR2662448A1 (en) * 1990-05-22 1991-11-29 Satis Vacuum Ag VACUUM COVERING SYSTEM FOR OPTICAL SUBSTRATES.

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10324928A1 (en) * 2003-06-03 2005-07-14 Leybold Optics Gmbh Vacuum coating system
DE102013106788B4 (en) * 2013-06-28 2019-07-11 VON ARDENNE Asset GmbH & Co. KG Vacuum treatment plant with vacuum chamber feedthrough

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0018641A1 (en) * 1979-05-02 1980-11-12 Optical Coating Laboratory, Inc. Coating apparatus
FR2662448A1 (en) * 1990-05-22 1991-11-29 Satis Vacuum Ag VACUUM COVERING SYSTEM FOR OPTICAL SUBSTRATES.

Also Published As

Publication number Publication date
DE1023652B (en) 1958-01-30

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