CH319761A - Device for compensating the astigmatism of an electron-optical lens system - Google Patents

Device for compensating the astigmatism of an electron-optical lens system

Info

Publication number
CH319761A
CH319761A CH319761DA CH319761A CH 319761 A CH319761 A CH 319761A CH 319761D A CH319761D A CH 319761DA CH 319761 A CH319761 A CH 319761A
Authority
CH
Switzerland
Prior art keywords
astigmatism
compensating
electron
lens system
optical lens
Prior art date
Application number
Other languages
German (de)
Inventor
Recknagel Alfred Dr Prof
Guenter Dipl Phys Haufe
Original Assignee
Zeiss Jena Veb Carl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Jena Veb Carl filed Critical Zeiss Jena Veb Carl
Publication of CH319761A publication Critical patent/CH319761A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
CH319761D 1953-09-16 1954-06-08 Device for compensating the astigmatism of an electron-optical lens system CH319761A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEV6279A DE1002094B (en) 1953-09-16 1953-09-16 Device for compensating the astigmatism of an electron-optical lens system

Publications (1)

Publication Number Publication Date
CH319761A true CH319761A (en) 1957-02-28

Family

ID=7571536

Family Applications (1)

Application Number Title Priority Date Filing Date
CH319761D CH319761A (en) 1953-09-16 1954-06-08 Device for compensating the astigmatism of an electron-optical lens system

Country Status (3)

Country Link
CH (1) CH319761A (en)
DE (1) DE1002094B (en)
FR (1) FR1104223A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL96667C (en) * 1957-01-03

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE879877C (en) * 1951-01-25 1953-06-15 Sueddeutsche Lab G M B H Single electrostatic lens

Also Published As

Publication number Publication date
FR1104223A (en) 1955-11-17
DE1002094B (en) 1957-02-07

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