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Publication date
Application filed by Bbc Brown Boveri & CiefiledCriticalBbc Brown Boveri & Cie
Publication of CH265972ApublicationCriticalpatent/CH265972A/de
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
H01J37/06—Electron sources; Electron guns
H01J37/063—Geometrical arrangement of electrodes for beam-forming
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Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Electron Beam Exposure
(AREA)
CH265972D1948-05-101948-05-10Vorrichtung zur Erzeugung von Strahlen geringer Divergenz aus elektrisch geladenen Teilchen.
CH265972A
(de)