CH260428A - Korpuskularstrahlapparat mit einem in der Anschlussleitung der Vakuumpumpe angeordneten Absperrhahn. - Google Patents

Korpuskularstrahlapparat mit einem in der Anschlussleitung der Vakuumpumpe angeordneten Absperrhahn.

Info

Publication number
CH260428A
CH260428A CH260428DA CH260428A CH 260428 A CH260428 A CH 260428A CH 260428D A CH260428D A CH 260428DA CH 260428 A CH260428 A CH 260428A
Authority
CH
Switzerland
Prior art keywords
corpuscular
shut
vacuum pump
connection line
valve arranged
Prior art date
Application number
Other languages
German (de)
English (en)
Inventor
Fides Gesellschaft Beschraenk
Original Assignee
Fides Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fides Gmbh filed Critical Fides Gmbh
Publication of CH260428A publication Critical patent/CH260428A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
CH260428D 1942-12-24 1944-01-11 Korpuskularstrahlapparat mit einem in der Anschlussleitung der Vakuumpumpe angeordneten Absperrhahn. CH260428A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE260428X 1942-12-24

Publications (1)

Publication Number Publication Date
CH260428A true CH260428A (de) 1949-03-15

Family

ID=5969022

Family Applications (1)

Application Number Title Priority Date Filing Date
CH260428D CH260428A (de) 1942-12-24 1944-01-11 Korpuskularstrahlapparat mit einem in der Anschlussleitung der Vakuumpumpe angeordneten Absperrhahn.

Country Status (3)

Country Link
CH (1) CH260428A (xx)
FR (1) FR964502A (xx)
NL (1) NL115916C (xx)

Also Published As

Publication number Publication date
FR964502A (xx) 1950-08-18
NL115916C (xx)

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