CH240064A - Corpuscular beam apparatus with a magnetic pole piece lens. - Google Patents

Corpuscular beam apparatus with a magnetic pole piece lens.

Info

Publication number
CH240064A
CH240064A CH240064DA CH240064A CH 240064 A CH240064 A CH 240064A CH 240064D A CH240064D A CH 240064DA CH 240064 A CH240064 A CH 240064A
Authority
CH
Switzerland
Prior art keywords
magnetic pole
pole piece
beam apparatus
piece lens
corpuscular beam
Prior art date
Application number
Other languages
German (de)
Inventor
Fides Gesellschaft Beschraenk
Original Assignee
Fides Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fides Gmbh filed Critical Fides Gmbh
Publication of CH240064A publication Critical patent/CH240064A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
CH240064D 1943-03-06 1944-02-29 Corpuscular beam apparatus with a magnetic pole piece lens. CH240064A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE240064X 1943-03-06

Publications (1)

Publication Number Publication Date
CH240064A true CH240064A (en) 1945-11-30

Family

ID=5904302

Family Applications (1)

Application Number Title Priority Date Filing Date
CH240064D CH240064A (en) 1943-03-06 1944-02-29 Corpuscular beam apparatus with a magnetic pole piece lens.

Country Status (2)

Country Link
CH (1) CH240064A (en)
FR (1) FR904573A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1077803B (en) * 1954-02-18 1960-03-17 Siemens Ag Electron microscope equipped with several, in particular magnetic, imaging lenses

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1077803B (en) * 1954-02-18 1960-03-17 Siemens Ag Electron microscope equipped with several, in particular magnetic, imaging lenses

Also Published As

Publication number Publication date
FR904573A (en) 1945-11-09

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