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H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
H01J37/32018—Glow discharge
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Physics & Mathematics
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Engineering & Computer Science
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Plasma & Fusion
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Chemical & Material Sciences
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Analytical Chemistry
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Discharge Heating
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CH208074D1938-01-251938-10-28Verfahren zum Erhitzen von festen, flüssigen oder gasförmigen Körpern.
CH208074A
(de)