CA987111A - Apparatus for handling workpieces to be polished - Google Patents

Apparatus for handling workpieces to be polished

Info

Publication number
CA987111A
CA987111A CA178,676A CA178676A CA987111A CA 987111 A CA987111 A CA 987111A CA 178676 A CA178676 A CA 178676A CA 987111 A CA987111 A CA 987111A
Authority
CA
Canada
Prior art keywords
polished
handling workpieces
workpieces
handling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA178,676A
Other versions
CA178676S (en
Inventor
Ernest F. Katzke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Crane Packing Co
Original Assignee
Crane Packing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Crane Packing Co filed Critical Crane Packing Co
Application granted granted Critical
Publication of CA987111A publication Critical patent/CA987111A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B24B37/345—Feeding, loading or unloading work specially adapted to lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
CA178,676A 1972-08-24 1973-08-13 Apparatus for handling workpieces to be polished Expired CA987111A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00283582A US3841028A (en) 1972-08-24 1972-08-24 Apparatus for handling workpieces to be polished

Publications (1)

Publication Number Publication Date
CA987111A true CA987111A (en) 1976-04-13

Family

ID=23086716

Family Applications (1)

Application Number Title Priority Date Filing Date
CA178,676A Expired CA987111A (en) 1972-08-24 1973-08-13 Apparatus for handling workpieces to be polished

Country Status (4)

Country Link
US (1) US3841028A (en)
CA (1) CA987111A (en)
FR (1) FR2197333A5 (en)
GB (1) GB1409776A (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4009539A (en) * 1975-06-16 1977-03-01 Spitfire Tool & Machine Co., Inc. Lapping machine with vacuum workholder
US4141180A (en) * 1977-09-21 1979-02-27 Kayex Corporation Polishing apparatus
US4193226A (en) * 1977-09-21 1980-03-18 Kayex Corporation Polishing apparatus
FR2505712A1 (en) * 1981-05-18 1982-11-19 Procedes Equip Sciences Ind Sa Automatic polishing machine for semiconductor wafers - has stack of cassettes carrying wafers with pistons to push cassettes into and out of polishing position
US4663890A (en) * 1982-05-18 1987-05-12 Gmn Georg Muller Nurnberg Gmbh Method for machining workpieces of brittle hard material into wafers
DE3339942C1 (en) * 1983-11-04 1985-01-31 GMN Georg Müller Nürnberg GmbH, 8500 Nürnberg Processing of disc-shaped workpieces made of broken brittle materials
US4587768A (en) * 1983-11-28 1986-05-13 Buehler Ltd. Apparatus and method for polishing ends of fiber optics
EP0307477A4 (en) * 1987-03-10 1991-04-10 Gruzinsky Politekhnichesky Institut Imeni V.I. Lenina Machine tool for abrasive machining
US5398459A (en) * 1992-11-27 1995-03-21 Kabushiki Kaisha Toshiba Method and apparatus for polishing a workpiece
DE69732157T2 (en) * 1996-02-28 2005-12-29 Ebara Corp. Transport robot with drip water protection
US5957764A (en) * 1997-11-05 1999-09-28 Aplex, Inc. Modular wafer polishing apparatus and method
US6062961A (en) * 1997-11-05 2000-05-16 Aplex, Inc. Wafer polishing head drive
US6231428B1 (en) 1999-03-03 2001-05-15 Mitsubishi Materials Corporation Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring
US6368189B1 (en) * 1999-03-03 2002-04-09 Mitsubishi Materials Corporation Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure
US20060180486A1 (en) * 2003-04-21 2006-08-17 Bennett David W Modular panel and storage system for flat items such as media discs and holders therefor

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US765105A (en) * 1902-02-21 1904-07-12 American Electric Telephone Company Grinding or polishing machine.
US1275447A (en) * 1916-12-07 1918-08-13 Standard Mirror Co Machine for beveling mirrors and for analogous purposes.
US2963830A (en) * 1958-06-04 1960-12-13 Norton Co Lapping machine
US3128580A (en) * 1963-01-30 1964-04-14 Super Cut Composite lap for grinding and polishing machines
US3437543A (en) * 1965-03-09 1969-04-08 Western Electric Co Apparatus for polishing
US3579916A (en) * 1968-11-15 1971-05-25 Speedfam Corp Polishing machine

Also Published As

Publication number Publication date
FR2197333A5 (en) 1974-03-22
DE2342900B2 (en) 1977-02-03
US3841028A (en) 1974-10-15
DE2342900A1 (en) 1974-03-07
GB1409776A (en) 1975-10-15

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