CA987111A - Apparatus for handling workpieces to be polished - Google Patents
Apparatus for handling workpieces to be polishedInfo
- Publication number
- CA987111A CA987111A CA178,676A CA178676A CA987111A CA 987111 A CA987111 A CA 987111A CA 178676 A CA178676 A CA 178676A CA 987111 A CA987111 A CA 987111A
- Authority
- CA
- Canada
- Prior art keywords
- polished
- handling workpieces
- workpieces
- handling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
- B24B37/345—Feeding, loading or unloading work specially adapted to lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US00283582A US3841028A (en) | 1972-08-24 | 1972-08-24 | Apparatus for handling workpieces to be polished |
Publications (1)
Publication Number | Publication Date |
---|---|
CA987111A true CA987111A (en) | 1976-04-13 |
Family
ID=23086716
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA178,676A Expired CA987111A (en) | 1972-08-24 | 1973-08-13 | Apparatus for handling workpieces to be polished |
Country Status (4)
Country | Link |
---|---|
US (1) | US3841028A (en) |
CA (1) | CA987111A (en) |
FR (1) | FR2197333A5 (en) |
GB (1) | GB1409776A (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4009539A (en) * | 1975-06-16 | 1977-03-01 | Spitfire Tool & Machine Co., Inc. | Lapping machine with vacuum workholder |
US4141180A (en) * | 1977-09-21 | 1979-02-27 | Kayex Corporation | Polishing apparatus |
US4193226A (en) * | 1977-09-21 | 1980-03-18 | Kayex Corporation | Polishing apparatus |
FR2505712A1 (en) * | 1981-05-18 | 1982-11-19 | Procedes Equip Sciences Ind Sa | Automatic polishing machine for semiconductor wafers - has stack of cassettes carrying wafers with pistons to push cassettes into and out of polishing position |
US4663890A (en) * | 1982-05-18 | 1987-05-12 | Gmn Georg Muller Nurnberg Gmbh | Method for machining workpieces of brittle hard material into wafers |
DE3339942C1 (en) * | 1983-11-04 | 1985-01-31 | GMN Georg Müller Nürnberg GmbH, 8500 Nürnberg | Processing of disc-shaped workpieces made of broken brittle materials |
US4587768A (en) * | 1983-11-28 | 1986-05-13 | Buehler Ltd. | Apparatus and method for polishing ends of fiber optics |
EP0307477A4 (en) * | 1987-03-10 | 1991-04-10 | Gruzinsky Politekhnichesky Institut Imeni V.I. Lenina | Machine tool for abrasive machining |
US5398459A (en) * | 1992-11-27 | 1995-03-21 | Kabushiki Kaisha Toshiba | Method and apparatus for polishing a workpiece |
DE69732157T2 (en) * | 1996-02-28 | 2005-12-29 | Ebara Corp. | Transport robot with drip water protection |
US5957764A (en) * | 1997-11-05 | 1999-09-28 | Aplex, Inc. | Modular wafer polishing apparatus and method |
US6062961A (en) * | 1997-11-05 | 2000-05-16 | Aplex, Inc. | Wafer polishing head drive |
US6231428B1 (en) | 1999-03-03 | 2001-05-15 | Mitsubishi Materials Corporation | Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring |
US6368189B1 (en) * | 1999-03-03 | 2002-04-09 | Mitsubishi Materials Corporation | Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure |
US20060180486A1 (en) * | 2003-04-21 | 2006-08-17 | Bennett David W | Modular panel and storage system for flat items such as media discs and holders therefor |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US765105A (en) * | 1902-02-21 | 1904-07-12 | American Electric Telephone Company | Grinding or polishing machine. |
US1275447A (en) * | 1916-12-07 | 1918-08-13 | Standard Mirror Co | Machine for beveling mirrors and for analogous purposes. |
US2963830A (en) * | 1958-06-04 | 1960-12-13 | Norton Co | Lapping machine |
US3128580A (en) * | 1963-01-30 | 1964-04-14 | Super Cut | Composite lap for grinding and polishing machines |
US3437543A (en) * | 1965-03-09 | 1969-04-08 | Western Electric Co | Apparatus for polishing |
US3579916A (en) * | 1968-11-15 | 1971-05-25 | Speedfam Corp | Polishing machine |
-
1972
- 1972-08-24 US US00283582A patent/US3841028A/en not_active Expired - Lifetime
-
1973
- 1973-08-07 GB GB3742273A patent/GB1409776A/en not_active Expired
- 1973-08-13 CA CA178,676A patent/CA987111A/en not_active Expired
- 1973-08-24 FR FR7330775A patent/FR2197333A5/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
FR2197333A5 (en) | 1974-03-22 |
DE2342900B2 (en) | 1977-02-03 |
US3841028A (en) | 1974-10-15 |
DE2342900A1 (en) | 1974-03-07 |
GB1409776A (en) | 1975-10-15 |
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