CA968821A - Vacuum processing machine - Google Patents

Vacuum processing machine

Info

Publication number
CA968821A
CA968821A CA147,256A CA147256A CA968821A CA 968821 A CA968821 A CA 968821A CA 147256 A CA147256 A CA 147256A CA 968821 A CA968821 A CA 968821A
Authority
CA
Canada
Prior art keywords
processing machine
vacuum processing
vacuum
machine
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA147,256A
Other versions
CA147256S (en
Inventor
Eugene C. Helm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motors Liquidation Co
Original Assignee
Motors Liquidation Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motors Liquidation Co filed Critical Motors Liquidation Co
Application granted granted Critical
Publication of CA968821A publication Critical patent/CA968821A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/99—Conveyor systems not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Physical Vapour Deposition (AREA)
CA147,256A 1971-07-30 1972-07-17 Vacuum processing machine Expired CA968821A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US16756671A 1971-07-30 1971-07-30

Publications (1)

Publication Number Publication Date
CA968821A true CA968821A (en) 1975-06-03

Family

ID=22607882

Family Applications (1)

Application Number Title Priority Date Filing Date
CA147,256A Expired CA968821A (en) 1971-07-30 1972-07-17 Vacuum processing machine

Country Status (2)

Country Link
US (1) US3714925A (en)
CA (1) CA968821A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3901183A (en) * 1973-06-12 1975-08-26 Extrion Corp Wafer treatment apparatus
US4008683A (en) * 1973-07-16 1977-02-22 Varian Associates Machine for treating wafer-form items
DE2813180C2 (en) * 1978-03-25 1985-12-19 Leybold-Heraeus GmbH, 5000 Köln Vacuum coating system for the all-round coating of substrates by rotating the substrates in the material flow
US4313815A (en) * 1978-04-07 1982-02-02 Varian Associates, Inc. Sputter-coating system, and vaccuum valve, transport, and sputter source array arrangements therefor
DE3421538A1 (en) * 1984-06-08 1985-12-12 ATOMIKA Technische Physik GmbH, 8000 München VACUUM EVAPORATION DEVICE
US4776299A (en) * 1986-05-15 1988-10-11 The United States Of America As Represented By The United States Department Of Energy Source replenishment device for vacuum deposition

Also Published As

Publication number Publication date
US3714925A (en) 1973-02-06

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