CA960307A - Sensor for fluid components - Google Patents

Sensor for fluid components

Info

Publication number
CA960307A
CA960307A CA149,068A CA149068A CA960307A CA 960307 A CA960307 A CA 960307A CA 149068 A CA149068 A CA 149068A CA 960307 A CA960307 A CA 960307A
Authority
CA
Canada
Prior art keywords
sensor
fluid components
fluid
components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA149,068A
Other versions
CA149068S (en
Inventor
Leo E. Topol
Keith B. Oldham
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boeing North American Inc
Original Assignee
North American Rockwell Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by North American Rockwell Corp filed Critical North American Rockwell Corp
Application granted granted Critical
Publication of CA960307A publication Critical patent/CA960307A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4073—Composition or fabrication of the solid electrolyte
    • G01N27/4074—Composition or fabrication of the solid electrolyte for detection of gases other than oxygen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
CA149,068A 1971-12-28 1972-08-09 Sensor for fluid components Expired CA960307A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US21303871A 1971-12-28 1971-12-28

Publications (1)

Publication Number Publication Date
CA960307A true CA960307A (en) 1974-12-31

Family

ID=22793486

Family Applications (1)

Application Number Title Priority Date Filing Date
CA149,068A Expired CA960307A (en) 1971-12-28 1972-08-09 Sensor for fluid components

Country Status (3)

Country Link
US (1) US3764269A (en)
CA (1) CA960307A (en)
IT (1) IT969413B (en)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1438107A (en) * 1972-09-21 1976-06-03 British Gas Corp Gas pollution monitor
US3847547A (en) * 1972-11-24 1974-11-12 France Etat Process and apparatus for detecting of the presence of a liquid
US3950980A (en) * 1974-03-27 1976-04-20 Minnesota Mining And Manufacturing Company Vapor sampling device
FR2273276B1 (en) * 1974-05-27 1978-08-04 Radiotechnique Compelec
GB1501108A (en) * 1974-06-07 1978-02-15 Atomic Energy Authority Uk Electrolytic analytical methods
SE388042B (en) * 1974-08-21 1976-09-20 Atomenergi Ab PROCEDURE FOR ANALYSIS OF LAYER CONTENTS IN A SOLUTION AND APPARATUS FOR PERFORMING THE PROCEDURE
US4040805A (en) * 1976-10-22 1977-08-09 Board Of Supervisors Louisiana State University Agricultural And Mechanical College Personal monitoring device, or dosimeter, for measuring exposure of personnel to organic vapors
US4118194A (en) * 1977-04-08 1978-10-03 Rockwell International Corporation Sensor for fluid components
JPS5746155A (en) * 1980-09-05 1982-03-16 Nippon Kokan Kk <Nkk> Measuring sensor for oxygen concentration for molten metal
FR2531222A1 (en) * 1982-08-02 1984-02-03 Elf Aquitaine ELECTROCHEMICAL DEVICE FOR MEASURING THE PARTIAL OXYGEN PRESSURE IN A GAS OR LIQUID ATMOSPHERE
US4460448A (en) * 1982-09-30 1984-07-17 The Dow Chemical Company Calibration unit for gases
US5217900A (en) * 1984-08-18 1993-06-08 Basf Aktiengesellschaft Biological reactor
US4707224A (en) * 1986-10-30 1987-11-17 The Dow Chemical Company Device and method for fluorinating compounds
CA1279896C (en) * 1987-05-26 1991-02-05 Joseph R. Stetter Eletrochemical micro sensor
US4865717A (en) * 1987-05-26 1989-09-12 Transducer Research, Inc. Electrochemical micro sensor
GB8913867D0 (en) * 1989-06-16 1989-08-02 Vincent Colin A Electrochemical method of sensing fluids
JP2938514B2 (en) * 1990-04-25 1999-08-23 三菱電機株式会社 Gas sensor
GB9101643D0 (en) * 1991-01-25 1991-03-06 City Tech Gas sensor
US5322611A (en) * 1991-01-31 1994-06-21 Solomon Zaromb Humidity-resistant ambient-temperature solid-electrolyte amperometric sensing apparatus
DE19517907C1 (en) * 1995-05-16 1996-10-24 Auergesellschaft Gmbh Electrochemical solid electrolyte sensor for measuring chlorine
JP3340028B2 (en) * 1996-07-12 2002-10-28 三菱電機株式会社 Gas sensor
GB2348006B (en) * 1999-03-19 2003-07-23 Alphasense Ltd Gas sensor
US7080545B2 (en) 2002-10-17 2006-07-25 Advanced Technology Materials, Inc. Apparatus and process for sensing fluoro species in semiconductor processing systems
US7296458B2 (en) 2002-10-17 2007-11-20 Advanced Technology Materials, Inc Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same
US20060211253A1 (en) * 2005-03-16 2006-09-21 Ing-Shin Chen Method and apparatus for monitoring plasma conditions in an etching plasma processing facility

Also Published As

Publication number Publication date
US3764269A (en) 1973-10-09
IT969413B (en) 1974-03-30

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