CA959004A - Low temperature metal carbonitride coatings - Google Patents

Low temperature metal carbonitride coatings

Info

Publication number
CA959004A
CA959004A CA124,775A CA124775A CA959004A CA 959004 A CA959004 A CA 959004A CA 124775 A CA124775 A CA 124775A CA 959004 A CA959004 A CA 959004A
Authority
CA
Canada
Prior art keywords
low temperature
temperature metal
metal carbonitride
carbonitride coatings
coatings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA124,775A
Other versions
CA124775S (en
Inventor
Gene F. Wakefield
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of CA959004A publication Critical patent/CA959004A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Physical Vapour Deposition (AREA)
CA124,775A 1970-11-02 1971-10-08 Low temperature metal carbonitride coatings Expired CA959004A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US8584670A 1970-11-02 1970-11-02

Publications (1)

Publication Number Publication Date
CA959004A true CA959004A (en) 1974-12-10

Family

ID=22194340

Family Applications (1)

Application Number Title Priority Date Filing Date
CA124,775A Expired CA959004A (en) 1970-11-02 1971-10-08 Low temperature metal carbonitride coatings

Country Status (2)

Country Link
CA (1) CA959004A (en)
DE (1) DE2153861A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1570380A (en) * 1978-05-30 1980-07-02 Standard Telephones Cables Ltd Electroless plating
DE3620901A1 (en) * 1986-06-21 1988-01-14 Krupp Gmbh CUTTING TOOL
DK619887A (en) * 1986-12-01 1988-06-02 Torgau Flachglas HARDWARE COMPOSITION LAYER ON SILICATIVE SUBSTRATES AND PROCEDURE FOR THEIR PREPARATION
DE4418906B4 (en) * 1994-05-31 2004-03-25 Unaxis Deutschland Holding Gmbh Process for coating a substrate and coating system for carrying it out
DE19947381B4 (en) * 1999-10-01 2011-06-22 METAPLAS IONON Oberflächenveredelungstechnik GmbH, 51427 Apparatus for the heat treatment of workpieces, in particular for gas nitriding, nitrocarburizing and oxidizing

Also Published As

Publication number Publication date
DE2153861A1 (en) 1972-05-10

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