CA957787A - Electron beam apparatus comprising a cathode to be heated by an energy beam - Google Patents

Electron beam apparatus comprising a cathode to be heated by an energy beam

Info

Publication number
CA957787A
CA957787A CA130,503A CA130503A CA957787A CA 957787 A CA957787 A CA 957787A CA 130503 A CA130503 A CA 130503A CA 957787 A CA957787 A CA 957787A
Authority
CA
Canada
Prior art keywords
cathode
heated
electron beam
energy beam
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA130,503A
Other languages
English (en)
Inventor
Jan B. Lepoole
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of CA957787A publication Critical patent/CA957787A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00—Apparatus for electrographic processes using a charge pattern
    • G03G15/06—Apparatus for electrographic processes using a charge pattern for developing
    • G03G15/08—Apparatus for electrographic processes using a charge pattern for developing using a solid developer, e.g. powder developer
    • G03G15/09—Apparatus for electrographic processes using a charge pattern for developing using a solid developer, e.g. powder developer using magnetic brush
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electron Sources, Ion Sources (AREA)
CA130,503A 1970-12-23 1971-12-20 Electron beam apparatus comprising a cathode to be heated by an energy beam Expired CA957787A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7018701A NL7018701A (de) 1970-12-23 1970-12-23

Publications (1)

Publication Number Publication Date
CA957787A true CA957787A (en) 1974-11-12

Family

ID=19811873

Family Applications (1)

Application Number Title Priority Date Filing Date
CA130,503A Expired CA957787A (en) 1970-12-23 1971-12-20 Electron beam apparatus comprising a cathode to be heated by an energy beam

Country Status (7)

Country Link
US (1) US3745342A (de)
JP (1) JPS568140Y2 (de)
CA (1) CA957787A (de)
DE (1) DE2161027C3 (de)
FR (1) FR2119692A5 (de)
GB (1) GB1375995A (de)
NL (1) NL7018701A (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4115720A (en) * 1977-03-31 1978-09-19 Rca Corporation Device having thermionic cathode heated by field-emitted electrons
NL7906958A (nl) * 1979-09-19 1981-03-23 Philips Nv Metaaldraadkathode voor elektronenstraalapparaat.
US4388560A (en) * 1981-05-26 1983-06-14 Hughes Aircraft Company Filament dispenser cathode
US4560897A (en) * 1983-06-06 1985-12-24 The United States Of America As Represented By The Department Of Energy Rigid indented cylindrical cathode for X-ray tube
NL8302275A (nl) * 1983-06-28 1985-01-16 Philips Nv Electronenstraalapparaat met metaaldraadbron.
JPH0810637B2 (ja) * 1990-08-04 1996-01-31 三菱電機株式会社 高周波電子銃装置
US6091187A (en) * 1998-04-08 2000-07-18 International Business Machines Corporation High emittance electron source having high illumination uniformity

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1028244B (de) * 1954-09-18 1958-04-17 Zeiss Carl Fa Verfahren und Einrichtung zur Erzeugung einer Elektronen-gluehemission bei Elektronenstrahlgeraeten

Also Published As

Publication number Publication date
DE2161027A1 (de) 1972-07-13
NL7018701A (de) 1972-06-27
FR2119692A5 (de) 1972-08-04
DE2161027B2 (de) 1979-03-08
DE2161027C3 (de) 1979-11-15
US3745342A (en) 1973-07-10
GB1375995A (en) 1974-12-04
JPS568140Y2 (de) 1981-02-23
JPS5380361U (de) 1978-07-04

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