CA954068A - Method and apparatus for controlling the electrical properties of sputtered films - Google Patents

Method and apparatus for controlling the electrical properties of sputtered films

Info

Publication number
CA954068A
CA954068A CA138,186A CA138186A CA954068A CA 954068 A CA954068 A CA 954068A CA 138186 A CA138186 A CA 138186A CA 954068 A CA954068 A CA 954068A
Authority
CA
Canada
Prior art keywords
controlling
electrical properties
sputtered films
sputtered
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA138,186A
Other versions
CA138186S (en
Inventor
Robert J. Boynton
William D. Westwood
Original Assignee
Bell Canada Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bell Canada Inc filed Critical Bell Canada Inc
Priority to CA138,186A priority Critical patent/CA954068A/en
Application granted granted Critical
Publication of CA954068A publication Critical patent/CA954068A/en
Expired legal-status Critical Current

Links

CA138,186A 1972-03-27 1972-03-27 Method and apparatus for controlling the electrical properties of sputtered films Expired CA954068A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA138,186A CA954068A (en) 1972-03-27 1972-03-27 Method and apparatus for controlling the electrical properties of sputtered films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA138,186A CA954068A (en) 1972-03-27 1972-03-27 Method and apparatus for controlling the electrical properties of sputtered films

Publications (1)

Publication Number Publication Date
CA954068A true CA954068A (en) 1974-09-03

Family

ID=4092777

Family Applications (1)

Application Number Title Priority Date Filing Date
CA138,186A Expired CA954068A (en) 1972-03-27 1972-03-27 Method and apparatus for controlling the electrical properties of sputtered films

Country Status (1)

Country Link
CA (1) CA954068A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5597467A (en) * 1979-01-18 1980-07-24 Citizen Watch Co Ltd Ion plating equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5597467A (en) * 1979-01-18 1980-07-24 Citizen Watch Co Ltd Ion plating equipment

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