CA939543A - Micro-objective reduction lens system - Google Patents

Micro-objective reduction lens system

Info

Publication number
CA939543A
CA939543A CA109,043A CA109043A CA939543A CA 939543 A CA939543 A CA 939543A CA 109043 A CA109043 A CA 109043A CA 939543 A CA939543 A CA 939543A
Authority
CA
Canada
Prior art keywords
micro
lens system
reduction lens
objective reduction
objective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA109,043A
Other languages
English (en)
Inventor
Raymond E. Tibbetts
Janusz S. Wilczynski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA939543A publication Critical patent/CA939543A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
CA109,043A 1970-04-02 1971-03-30 Micro-objective reduction lens system Expired CA939543A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US2512770A 1970-04-02 1970-04-02

Publications (1)

Publication Number Publication Date
CA939543A true CA939543A (en) 1974-01-08

Family

ID=21824193

Family Applications (1)

Application Number Title Priority Date Filing Date
CA109,043A Expired CA939543A (en) 1970-04-02 1971-03-30 Micro-objective reduction lens system

Country Status (5)

Country Link
US (1) US3602578A (OSRAM)
CA (1) CA939543A (OSRAM)
DE (1) DE2115684A1 (OSRAM)
FR (1) FR2085780B1 (OSRAM)
GB (1) GB1289250A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4779966A (en) * 1984-12-21 1988-10-25 The Perkin-Elmer Corporation Single mirror projection optical system
US5642441A (en) * 1995-10-24 1997-06-24 Neopath, Inc. Separation apparatus and method for measuring focal plane

Also Published As

Publication number Publication date
DE2115684A1 (de) 1971-10-21
GB1289250A (OSRAM) 1972-09-13
US3602578A (en) 1971-08-31
FR2085780A1 (OSRAM) 1971-12-31
FR2085780B1 (OSRAM) 1974-02-15

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