CA921620A - Method of forming buried layers by ion implantation - Google Patents

Method of forming buried layers by ion implantation

Info

Publication number
CA921620A
CA921620A CA129402A CA129402A CA921620A CA 921620 A CA921620 A CA 921620A CA 129402 A CA129402 A CA 129402A CA 129402 A CA129402 A CA 129402A CA 921620 A CA921620 A CA 921620A
Authority
CA
Canada
Prior art keywords
ion implantation
buried layers
forming buried
forming
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA129402A
Other languages
English (en)
Other versions
CA129402S (en
Inventor
Simpson John
U. Macrae Alfred
Miller Paul
A. Moline Robert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of CA921620A publication Critical patent/CA921620A/en
Expired legal-status Critical Current

Links

Classifications

    • H10W15/00
    • H10P14/6309
    • H10P14/6322
    • H10P95/00
    • H10W15/01
CA129402A 1971-05-24 1971-12-06 Method of forming buried layers by ion implantation Expired CA921620A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14625271A 1971-05-24 1971-05-24

Publications (1)

Publication Number Publication Date
CA921620A true CA921620A (en) 1973-02-20

Family

ID=22516512

Family Applications (1)

Application Number Title Priority Date Filing Date
CA129402A Expired CA921620A (en) 1971-05-24 1971-12-06 Method of forming buried layers by ion implantation

Country Status (11)

Country Link
JP (1) JPS5138582B1 (show.php)
BE (1) BE783709A (show.php)
CA (1) CA921620A (show.php)
CH (1) CH535494A (show.php)
DE (1) DE2224467B2 (show.php)
FR (1) FR2138932B1 (show.php)
GB (1) GB1397338A (show.php)
HK (1) HK36076A (show.php)
IT (1) IT959298B (show.php)
NL (1) NL159531B (show.php)
SE (1) SE372137B (show.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2206994A (en) * 1987-06-08 1989-01-18 Philips Electronic Associated Semiconductor device

Also Published As

Publication number Publication date
GB1397338A (en) 1975-06-11
CH535494A (de) 1973-03-31
DE2224467B2 (de) 1974-03-07
DE2224467A1 (de) 1972-12-07
NL7206913A (show.php) 1972-11-28
FR2138932B1 (show.php) 1975-08-29
SE372137B (show.php) 1974-12-09
BE783709A (fr) 1972-09-18
IT959298B (it) 1973-11-10
JPS5138582B1 (show.php) 1976-10-22
HK36076A (en) 1976-06-18
FR2138932A1 (show.php) 1973-01-05
NL159531B (nl) 1979-02-15

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